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40nm...40 Nanometer - UMC

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40 <strong>Nanometer</strong> - Customer-Driven Foundry Solutions<br />

<strong>UMC</strong>’s volume production 40-nanometer technology supports today’s high performance and low power requirements. Many customers<br />

have engaged with <strong>UMC</strong> for their <strong>40nm</strong> projects, with multiple designs in various stages of production. <strong>UMC</strong>'s <strong>40nm</strong> utilizes advanced<br />

processes such as immersion lithography, ultra shallow junction, mobility enhancement techniques and ultra low-k dielectrics for<br />

maximum power and performance optimization. <strong>UMC</strong>'s <strong>40nm</strong> process consists of a low power platform (LP) focusing on the low<br />

power and low leakage design requirements for mobile and consumer applications, and a generic platform (G) that is optimized for<br />

a broad range of consumer and high-speed applications. Designers also benefit from comprehensive device offerings that include<br />

features to help optimize power and performance, different I/O voltage choices and analog/RF design resources.<br />

<strong>40nm</strong> Key Features<br />

• Integrated flows for logic, Mixed-Signal/RF<br />

• Shallow trench isolation<br />

• Advanced mobility enhancement<br />

techniques (Channel orientation, SMT, DSL,<br />

eSiGe)<br />

• Retrograde twin well (Triple well option)<br />

Prtbe . Wires. Consumer• Wirless<br />

• Immersion Lithography implemented by<br />

NA=1.2<br />

• Up to 1P11M copper metal layers with ULK<br />

(k=2.5)<br />

• 6T/8T SRAM bit cell option<br />

• Mini-second anneal Portable technology . Wireless for ultra . Consumer • e-Fuse option<br />

shallow junction<br />

Portable . Wireless . Consumer • BOAC (Bonding Over Active Circuit)<br />

• Poly gate & S/D with NiSi process<br />

• Wire Bond/Flip Chip option<br />

Technology to Meet Broad Applications<br />

<strong>UMC</strong> <strong>40nm</strong> Technology<br />

Low Power (LP)<br />

Generic (G)<br />

Portable • Wireless • Consumer<br />

Graphics • Network

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