3180 3190 3280 3290 for Varian 3000 Sputtering Systems - Ferrotec

VARIAN 3000
SERIES
3180
3190
3280
3290
for Varian 3000 Sputtering Systems
seals extend the productive life of your
Varian 3000 Series sputtering systems.
Ferrofluidic ®
• Smooth Mechanical Operation - eliminate binding and drag
• Improved Product Quality – reduce particles and contaminants
• Longer Life – extremely durable non-contacting Ferrofluidic seals
Ferrofluidic Replacement Seals
Ferrotec’s co-axial Ferrofluidic sealing packages are direct replacements
for the maintenance-prone sealing configurations originally installed in
the Varian 3000 Series sputtering systems. The unique benefits of
Ferrofluidic sealing are combined with robust edge welded bellows seals
to produce a co-axial rotary/linear sealing system that far exceeds OEM
performance levels of the original non-Ferrofluidic seal installed. The
inherent ability of the magnetic liquid seal to maintain vacuum integrity
during rotary motion prevents vacuum contaminants from affecting the
process and degrading product quality. The preloaded angular contact ball
bearings and the durable linear bearings support the weight of the transfer and
pressure plates while permitting smooth non-binding actuation. The noncontacting,
non-wearing Ferrofluidic seal ensures long, maintenance free life
and freedom from unscheduled downtime due to seal related failure.
RETROFIT SEALING PACKAGES
www.ferrotec.com

USA
Tel: (603) 883 9800
Email: info@ferrotec.com
www.ferrotec.com
® Ferrofluidic is a registered trademark of Ferrotec Corporation
Principle of Magnetic Liquid Sealing
Ferrofluidic sealing technology takes advantage of the response of a
magnetic fluid to an applied magnetic field. It uses a magnet with magnetically
permeable north and south pole pieces and a magnetically
permeable shaft to create a permanent magnetic circuit. The magnetic
flux is concentrated in the gap under each pole and when ferrofluid is
applied to this gap it assumes the shape of a liquid o-ring and produces
a hermetic seal.
Ferrofluidic feedthroughs offer many benefits including hermetic sealing,
long life, virtually 100% torque transmission and smooth
operation. They are non-contaminating, highly reliable and can
operate at high speeds.
Repair and Exchange Program
Even Ferrofluidic seals need proper maintenance and repair and you should
always return your Ferrofluidic seals to Ferrotec for expert repair or exchange
services. Only Ferrotec guarantees that your seal will be re-built to the same
specifications and quality as when it was first manufactured and only direct
replacement or the latest improved components are ever used. Most importantly,
only Ferrotec manufactures the ferrofluid selected specifically for this
magnetic seal design and product application.
With 30 years’ experience in the semiconductor industry, we understand the
importance of maximum uptime and eliminating unscheduled downtime. That
is why we have further developed our exchange program. Rather than simply
repairing your seal, which takes days or even weeks depending on the replacement
part requirements, we keep a stock of exchange seals in house and can
dispatch one the same day or the next working day from receipt of your order.
This means that you maximize uptime and know that your feedthrough is either
new or fully remanufactured and supplied as new. Remanufactured products
are completely disassembled, every part cleaned, all worn and consumable
parts replaced and the fluid replenished. Finally, once re-assembled, they are
required to pass exactly the same stringent dynamic vacuum, leak and QC
tests and inspection as new products. Any feedthrough from our exchange program
is returned to you with the same warranty that it had when new – a full 12
months.
Ordering is simple – just contact your local customer
service representative and ask for part number 116533X.
Germany and Mainland Europe
Tel: +49 7022 9270 0
Email: gmbh@ferrotec.com
www.ferrotec.com
UK and Ireland
Tel: +44 1869 363200
Email: info@ferrotec.co.uk
www.ferrotec.com