Rebuild Retrofit Sealing - Ferrotec
Rebuild Retrofit Sealing - Ferrotec
Rebuild Retrofit Sealing - Ferrotec
You also want an ePaper? Increase the reach of your titles
YUMPU automatically turns print PDFs into web optimized ePapers that Google loves.
VARIAN 3000<br />
SERIES<br />
3180<br />
3190<br />
3280<br />
3290<br />
for Varian 3000 Sputtering Systems<br />
seals extend the productive life of your<br />
Varian 3000 Series sputtering systems.<br />
Ferrofluidic ®<br />
Smooth Mechanical Operation - eliminate binding and drag<br />
Improved Product Quality – reduce particles and contaminants<br />
Longer Life – extremely durable non-contacting Ferrofluidic seals<br />
Ferrofluidic Replacement Seals<br />
<strong>Ferrotec</strong>’s coaxial Ferrofluidic sealing packages are direct replacements for<br />
the maintenance-prone sealing configurations originally installed in the<br />
Varian 3000 Series sputtering systems. The unique benefits of Ferrofluidic<br />
sealing are combined with robust edge welded bellows seals to produce a<br />
coaxial rotary/linear sealing system that far exceeds OEM performance<br />
levels of the original non-Ferrofluidic seal. The inherent ability of the magnetic<br />
liquid seal to maintain vacuum integrity during rotary motion prevents<br />
vacuum contaminants from affecting the process and degrading product<br />
quality. The pre-loaded angular contact ball bearings and the durable linear<br />
bearings support the weight of the transfer and pressure plates while permitting<br />
smooth non-binding actuation. The non-contacting, non-wearing Ferrofluidic seal<br />
ensures long, maintenance free life and freedom from unscheduled downtime<br />
due to seal related failure.<br />
RETROFIT SEALING PACKAGES<br />
www.ferrotec.com<br />
www.ferrotec.com
Repair and Exchange Program<br />
Even Ferrofluidic seals need proper maintenance and repair and you should always return your Ferrofluidic seals to<br />
<strong>Ferrotec</strong> for expert repair or exchange services. Only <strong>Ferrotec</strong> guarantees that your seal will be rebuilt to the same<br />
specifications and quality as when it was first manufactured and only direct replacement or the latest improved<br />
components are ever used. Most importantly, only <strong>Ferrotec</strong> manufactures the ferrofluid selected specifically for this<br />
magnetic seal design and product application.<br />
With 30 years’ experience in the semiconductor industry, we understand the importance of maximum uptime and<br />
eliminating unscheduled downtime. That is why we have further developed our exchange program. Rather than<br />
simply repairing your seal, which takes days or even weeks depending on the replacement part requirements, we<br />
keep a stock of exchange seals in house and can dispatch one within a day after we receive your order. This means<br />
that you maximize uptime and know that your feedthrough is either new or fully remanufactured and supplied as<br />
new. Remanufactured products are completely disassembled, every part cleaned, all worn and consumable parts<br />
replaced and the fluid replenished. Finally, once reassembled, they are required to pass exactly the same stringent<br />
dynamic vacuum, leak and QC tests and inspection as new products. Any feedthrough from our exchange program<br />
is returned to you with the same warranty that it had when new – a full 12 months. Ordering is simple – just ask your<br />
local customer service representative for part number 116533X.<br />
USA<br />
Tel: (603) 883 9800<br />
Email: info@ferrotec.com<br />
www.ferrotec.com<br />
HOUSING<br />
POLE PIECE<br />
FERROFLUID<br />
FLUX PATH<br />
SHAFT<br />
MAGNET<br />
® Ferrofluidic is a registered trademark of <strong>Ferrotec</strong> Corporation<br />
Principle of Magnetic Liquid <strong>Sealing</strong><br />
Ferrofluidic sealing technology takes advantage of the response of a<br />
magnetic fluid to an applied magnetic field. It uses a magnet with magnetically<br />
permeable north and south pole pieces and a magnetically<br />
permeable shaft to create a permanent magnetic circuit. The magnetic<br />
flux is concentrated in the gap under each pole and when ferrofluid is<br />
applied to this gap it assumes the shape of a liquid o-ring and produces<br />
a hermetic seal.<br />
Ferrofluidic feedthroughs offer many benefits including hermetic sealing,<br />
long life, virtually 100% torque transmission and smooth<br />
operation. They are non-contaminating, highly reliable and can<br />
operate at high speeds.<br />
Varian<br />
system<br />
3000<br />
<strong>Ferrotec</strong><br />
Part No.<br />
Smooth Shaft, p/n 105903<br />
Splined Shaft, p/n 109628<br />
Series 116533 Coaxial Feedthrough<br />
113182 Mounting Hardware for Coaxial Feedthrough, 3180 / 3190<br />
3180 105903 Shutter Actuator Feedthrough for 3180 and 3280, Smooth Shaft<br />
and 109628 Shutter Actuator Feedthrough for 3180 and 3280, Splined Shaft<br />
3190 114192 Feedthrough Package: (1) 116533 + (1) 113182 + (3) 105903 (smooth shaft)<br />
114191 Feedthrough Package: (1) 116533 + (1) 113182 + (3) 105903 (splined shaft)<br />
115576 Mounting Hardware for Coaxial Feedthrough, 3280<br />
3280 103191 Shutter Actuator Feedthrough for 3280 and 3290<br />
115575 Feedthrough Package: (1) 116533 + (1) 115576 + (3) 103191<br />
115534 Mounting Hardware for Coaxial Feedthrough, 3290<br />
3290 103191 Shutter Actuator Feedthrough for 3280 and 3290<br />
115521 Feedthrough Package: (1) 116533 + (1) 1115534 + (3) 103191<br />
Germany and Mainland Europe<br />
Tel: +49 7022 9270 0<br />
Email: gmbh@ferrotec.com<br />
www.ferrotec.com<br />
UK and Ireland<br />
Tel: +44 1869 363200<br />
Email: info@ferrotec.co.uk<br />
www.ferrotec.com<br />
FTA121703
Change language