FEATURES BENEFITS - Ferrotec
FEATURES BENEFITS - Ferrotec FEATURES BENEFITS - Ferrotec
The AP&T Electron Beam Multihearth Source EV M-5 II was specifically designed for applications requiring high deposition rates and effective material utilization. Typical applica- FEATURES • • • • • • • Small beam spot regardless of position in pocket Low inductance x- and y-coils with dynamic defocusing capability No dynamic water-vacuum interface Long filament lifetime Reproducible & quick filament fixture Hearth positioning by optical encoding Plug-in connector for magnet leads tions are production coatings or laboratory-scale evaporations with a variety of different materials or with materials which require continuous pocket rotation. BENEFITS • • • • • • • The sources offer unique technical features to enhance the reliability and repeatability needed for professional evaporation. Homogeneous material depletion Stable beam sweep at high frequency beam deflection Eliminates water leakage into vacuum system Reduced maintenance and down-time Enhanced run-to-run repeatability Built-in hearth rotation non-interchangeable connections
The AP&T Electron Beam Multihearth<br />
Source EV M-5 II was<br />
specifically designed for applications<br />
requiring high deposition<br />
rates and effective material<br />
utilization. Typical applica-<br />
<strong>FEATURES</strong><br />
•<br />
•<br />
•<br />
•<br />
•<br />
•<br />
•<br />
Small beam spot regardless<br />
of position in pocket<br />
Low inductance x- and y-coils<br />
with dynamic defocusing<br />
capability<br />
No dynamic water-vacuum<br />
interface<br />
Long filament lifetime<br />
Reproducible & quick filament fixture<br />
Hearth positioning by optical<br />
encoding<br />
Plug-in connector for magnet leads<br />
tions are production coatings<br />
or laboratory-scale evaporations<br />
with a variety of different<br />
materials or with materials<br />
which require continuous<br />
pocket rotation.<br />
<strong>BENEFITS</strong><br />
•<br />
•<br />
•<br />
•<br />
•<br />
•<br />
•<br />
The sources offer unique technical<br />
features to enhance the<br />
reliability and repeatability<br />
needed for professional evaporation.<br />
Homogeneous material<br />
depletion<br />
Stable beam sweep at<br />
high frequency beam deflection<br />
Eliminates water leakage<br />
into vacuum system<br />
Reduced maintenance and down-time<br />
Enhanced run-to-run repeatability<br />
Built-in hearth rotation<br />
non-interchangeable connections
Specifications<br />
Model EV M-5 II<br />
Max. power 5 kW<br />
Acceleration voltage 4-10 kV<br />
Max. filament current 50A @10VAC<br />
Primary beam deflection 270° by permanent magnet<br />
Magnet current x-deflection ± 3A (150 Hz)<br />
Magnet current y-deflection ± 3A (150 Hz)<br />
Spot size diameter 3mm<br />
Max. bakeout temperature 150°C<br />
Max. evaporation rate * 7.000 Å/min<br />
Hearth rotation integrated servo motor with<br />
optical positioning<br />
Operating pressure 1 x 10<br />
* For aluminum with source-to-substrate distance of 250 mm<br />
-8 mbar < p < 5 x 10-3 mbar<br />
Cooling water requirement 6 l/min (1,6 gpm); 3 bar (45 psi)<br />
2x VCO fittings, 8mm hose<br />
Mounting flange 32 mm base plate hole<br />
Weight 12 kg<br />
Dimensions see drawings<br />
Directly Cooled Hearths<br />
Hearth Configuration 4 x 8cc 6 x 4cc<br />
Max. Power 5 kW 3 kW<br />
Part-No. EV M-5 II 1-63 50 00 1-63 70 00<br />
Dimensions in mm<br />
typ.<br />
competition<br />
EV M-5 II<br />
EV M-5 II<br />
MAGNET DEFLECTION<br />
primary beam positioning by permanent magnet � �<br />
270° beam deflection � �<br />
high frequency beam deflection (150 Hz) – �<br />
non-interchangeable plug-in connector – �<br />
minimized beam spot distortion – �<br />
WATER COOLING<br />
cooling for hearth and magnet housing � �<br />
no dynamic water-vacuum sealing – �<br />
HEARTH ROTATION<br />
built-in motor drive with optical positioning – �<br />
GERMANY<br />
<strong>Ferrotec</strong> GmbH<br />
Hohes Gestade 14<br />
D-72622 Nürtingen<br />
Phone: +49 7022-92 70-0<br />
Fax: +49 7022-92 70-10<br />
Email: ebgun@ferrotec.com<br />
http://www.ferrotec.com<br />
UNITED KINGDOM<br />
<strong>Ferrotec</strong> (UK) Limited<br />
Unit 11A, Talisman Business Center<br />
GB-Bicester, Oxon OX26 6H2<br />
Phone: +44 1869-363 200<br />
Fax: +44 1869-363 201<br />
USA<br />
<strong>Ferrotec</strong> (USA) Corporation<br />
40 Simon Street<br />
USA-Nashua, NH 03061<br />
Phone: +1 603 883 9800<br />
Fax: +1 603 883 2308<br />
103<br />
194 39<br />
106<br />
32mm<br />
28<br />
base plate<br />
103,4 151,5<br />
Your nearest representative:<br />
136<br />
EV M-5 II 11/00; subject to change without prior notice
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