Multihearth Electron Beam Evaporators - Ferrotec

298,5 (11.7) 136,5 (5.4)
EV M-8
10 kW
4-10 kV
50 A @10 VAC
270° by permanent magnet
STD (150° C)
± 3 A (150 Hz)
± 3 A (150 Hz)
1 /8’’
25 000 Å/min
optical positioning
–
> 10 000
10 -8 Torr
2 gpm; 45 psi
- / 2 x Ø 8/10 mm PE hose
32 mm base plate hole
33 lb
1-61 10 003 144 (5.7)
106 (4.8)
121 (4.8)
79,5 (3.1)
DN 32 base plate
40,5 (1.6)
182 (7.2)
287 (11.3)
Standard
EV S-6 EV S-8
6 kW 10 kW
4-10 kV 4-10 kV
50 A @10 VAC 50 A @10 VAC
270° by permanent magnet
STD (150 °C) STD (150 °C)
± 3 A (150 Hz) ± 3 A (150 Hz)
± 3 A (150 Hz) ± 3 A (150 Hz)
1 /8’’
138,5 (5.5)
106 (4.2)
126 (5.0)
1 /8’’
12 000 Å/min 25 000 Å/min
integrated in-vacuum stepper motor
HV grade (150°C) HV grade (150°C)
3 000 3 000
10 -7 Torr 10 -7 Torr
2 gpm; 45 psi 2 gpm; 45 psi
2 x VCO / - 2 x VCO / -
– –
26 lb 31 lb
1-61 20 003 1-61 40 003 25 (1.0)
256 (10.1)
base plate
147,5 (5.9)
Low Pressure Design
EV S-6 LP EV S-8 LP
6 kW 10 kW
4-10 kV 4-10 kV
50 A @10 VAC 50 A @10 VAC
270° by permanent magnet
KAPTON (250 °C) KAPTON (250 °C)
± 3 A (150 Hz) ± 3 A (150 Hz)
± 3 A (150 Hz) ± 3 A (150 Hz)
1 /8’’
138,5 (5.5)
144 (5.7)
126 (5.0)
106 (4.2)
1 /8’’
12 000 Å/min 25 000 Å/min
integrated in-vacuum UHV stepper motor
UHV grade (250°C) UHV grade (250°C)
1 000 1 000
10 -9 Torr 10 -9 Torr
2 gpm; 45 psi 2 gpm; 45 psi
2 x VCR / - 2 x VCR / -
– –
26 lb 31 lb
1-61 30 003 1-61 50 003 base plate
40,5 (1.6)
182 (7.2)
287 (11.3)