Impact of Vibration on Contact Resistance

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The <strong>Impact</strong> <strong>of</strong> <strong>Vibration</strong> to CRes
Performance
Al Wegleitner and D. Clark
Texas Instruments, Dallas, TX
June 6 th 2005

Outline
•Background – the journey
•Problem Statement
•Measurement/Methodology
•Key Findings
•Solution's
•Acknowledgments
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Objective
•Review vibration measurement
methodologies
•Show the effects <strong>of</strong> vibration on CRes
•Review the potential sources <strong>of</strong> vibration
that effect CRes
•Review factory design procedures needed
to manage vibration
•Share key learning's – the journey
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Background
•Factory Expansion Phase 1 – just
completed
•Phase 1 factory was experiencing
significant CRes yield loss issues between
testers and devices
•Phase 2 to begin ~ 100 new systems to
install/qualify over 4 months
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Problem Statement
•Phase 1 factory was experiencing
significant CRes yield loss issues between
testers and devices
•CRes fails were causing significant delays
in new equipment quals/releases with
potential output ramp concerns
•Traditional CRes solutions were ineffective
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CRes Sources
Probe
Bond Pad Surface
Test Program
Diode Structure
PC Planarity
Cleaning Frequency
Debris Field
Test Head Level
Z-Axis Travel
Chuck Speed
Muffin Fans
Air Handlers
Raised Floor
Equipment Density
Conditions
that effect
CRes
500
450
400
M
a
x
C
R
E
S
i
n
O
h
m
s
350
300
250
200
150
100
50
0
Typical CRES performance
curve in SCT and EBT.
VLB105
~ 7 ohms
~ 7 minutes
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Equipment Density
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<strong>Vibration</strong> Site Survey
10
1
DMOS5 VIBRATIONSURVEY
DM5ST 3flr N-S Avg.
DM5ST 4flr N-S Avg.
SC1st N-S Avg.
SC3rd N-S Avg.
VC-C
VC-D
VC-E
10
1
DMOS5 VIBRATIONSURVEY
TKB65 RF Vert. Avg.
TKS10 Base Vert. Avg.
SC1st Vert. Avg.
SC3rd Vert. Avg.
VC-C
VC-D
VC-E
Displacement (microns pk-pk)
0.1
0.01
Displacement (microns pk-pk)
0.1
0.01
0.001
0.001
0.0001
1 10 100
Frequency (Hz)
0.0001
1 10 100
Frequency (Hz)
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Raised Floor vs Concrete
100
SCTest VIBRATIONSURVEY
VLB77
Positon 2 - Raised floor in front <strong>of</strong> vlb77
100
SCTest VIBRATIONSURVEY
VLB77
Positon 1 - cement floor in front <strong>of</strong> vlb77
10
10
Displacement (microns peak-peak)
1
0.1
0.01
Vertical Average
Vertical Peak Hold
East-West Average
East-West Peak Hold
North-South Average
North-South Peak Hold
Displacement (microns peak-peak)
1
0.1
0.01
Vertical Average
Vertical Peak Hold
East-West Average
East-West Peak Hold
North-South Average
North-South Peak Hold
0.001
0.001
0.0001
1 10 100 1000
Frequency (Hz)
0.0001
1 10 100 1000
Frequency (Hz)
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Phase 1 vs Phase 2 Floor Design
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Concrete vs Raised Floor Design
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CRes Raised Floor vs Concrete
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Concrete Floor Isolation Control
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Test Head Fans Powered On/Off
100
SCTest VIBRATIONSURVEY
VLB111
Positon 8 - On top <strong>of</strong> vlb111 head with head locked down with fans on
100
SC Test VIBRATION SURVEY
2/17/2003 - VLB111
Positon 7 - On top <strong>of</strong> vlb111 head with head locked down with fans <strong>of</strong>f
10
10
Displacement (microns peak-peak)
1
0.1
0.01
Vertical Average
Vertical Peak Hold
East-West Average
East-West Peak Hold
North-South Average
North-South Peak Hold
Displacement (microns peak-peak)
1
0.1
0.01
Vertical Average
Vertical Peak Hold
East-West Average
East-West Peak Hold
North-South Average
North-South Peak Hold
0.001
0.001
0.0001
1 10 100 1000
Frequency (Hz)
0.0001
1 10 100 1000
Frequency (Hz)
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Acoustic <strong>Vibration</strong> Sources
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Test Head Cooling Fans
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Test Head Cooling Fan Isolation
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Steel Base Plate
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Fan/Air Handler/Pedestal Change
100.0u
TKS10 7th pass, 23 um after autoz
50
Max <strong>of</strong> Cres
80.0u
45
40
Magnitude, m/srms
60.0u
40.0u
Cres (Ohms)
35
30
25
20
15
20.0u
10
~ 30 minutes
5
0
20.0 40.0 60.0 80.0 100.0 120.0
Hz
0
Measurement #
MeasCnt
100.0u
100.0u
Magnitude, m/srms
80.0u
60.0u
40.0u
20.0u
Magnitude, m/srms
80.0u
60.0u
40.0u
20.0u
0
20.0 40.0 60.0 80.0 100.0 120.0
Hz
0
20.0 40.0 60.0 80.0 100.0 120.0
Hz
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Instrumentation Placement X,Y,Z
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<strong>Vibration</strong> Floor Survey
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Key Learning's
•<strong>Vibration</strong> Sources Influence CRes
◦Air Handlers Balance - VFD
◦Test Head Cooling Fans – Balance/Replace
◦Adjacent Equipment – Spacing/Zones
◦Raised Floor Construction – Steel
Plates/Pedestals
◦Indexing Speed - Reduced
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Acknowledgements
• Doug Clark
• Frank Mesa
• David Meyers
• Kelly Daughtery
• Joseph Perry
• Troy Esrey
• Robert Davis
• Maverick Brown
• Fakradin Abdushukur
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Thanks For Listening –
Enjoy the Conference
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