Vertical Probing Experiences - Semiconductor Wafer Test Workshop
Vertical Probing Experiences - Semiconductor Wafer Test Workshop
Vertical Probing Experiences - Semiconductor Wafer Test Workshop
You also want an ePaper? Increase the reach of your titles
YUMPU automatically turns print PDFs into web optimized ePapers that Google loves.
<strong>Vertical</strong> <strong>Probing</strong> <strong>Experiences</strong><br />
<strong>Experiences</strong>: Probe Technologies<br />
• Membrane…..MEMS<br />
– Photo-lithographically Defined; Metallurgy on<br />
Polyimide Film or Silicon<br />
– Sourced From<br />
• Cascade Microtech (Pyramid Probe)<br />
• IBM (TFI)<br />
COPPER<br />
PROTECTIVE<br />
METALLURGY<br />
Courtesy of Cascade Microtech<br />
AUTO-SCULPTING POLYIMIDE<br />
• SCS Hightech (MEMS VPC)<br />
Illustration Courtesy of SWTW/IBM (ref. 2)<br />
Courtesy of SCS Hightech<br />
June 3, 2003 2003 Southwest <strong>Test</strong> <strong>Workshop</strong> 9
Change language