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Vertical Probing Experiences - Semiconductor Wafer Test Workshop

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<strong>Vertical</strong> <strong>Probing</strong> <strong>Experiences</strong><br />

<strong>Experiences</strong>: Spacetransformers<br />

• Wired<br />

– Buckling Beam<br />

– Provided by Probe Card Supplier<br />

• Multi-Layer Ceramic<br />

– Buckling Beam, Membrane, Spring<br />

– Most are Provided to Probe Card<br />

Supplier; Some 3 rd Party Sourcing<br />

• Multi-Layer Organic<br />

– Buckling Beam<br />

– Most are Provided to Probe Card Supplier<br />

• None<br />

– Hybrid Cantilever, Some Membrane<br />

Courtesy of NTK<br />

More Spacetransformer Info: “C4 Probe Card Space Transformer Technology<br />

Overview”; By Grace Chan & Justin Leung of Intel Corporation; 2000 SWTW<br />

June 3, 2003 2003 Southwest <strong>Test</strong> <strong>Workshop</strong> 21

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