Vertical Probing Experiences - Semiconductor Wafer Test Workshop
Vertical Probing Experiences - Semiconductor Wafer Test Workshop
Vertical Probing Experiences - Semiconductor Wafer Test Workshop
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<strong>Vertical</strong> <strong>Probing</strong> <strong>Experiences</strong><br />
<strong>Experiences</strong>: Maintenance<br />
• Membrane…..MEMS<br />
Metallurgy<br />
Cleaning<br />
Frequency<br />
Method<br />
Repair<br />
Lifetime<br />
PbSn<br />
150 – 500<br />
Brush,<br />
Abrasive<br />
Pad<br />
Mostly<br />
External<br />
500K - >1M<br />
Al Pad<br />
---<br />
Abrasive<br />
Pad,<br />
Chemical<br />
None Inhouse<br />
---<br />
June 3, 2003 2003 Southwest <strong>Test</strong> <strong>Workshop</strong> 18