3D-MEMS Probe for Fine Pitch Probing - Semiconductor Wafer Test ...
3D-MEMS Probe for Fine Pitch Probing - Semiconductor Wafer Test ...
3D-MEMS Probe for Fine Pitch Probing - Semiconductor Wafer Test ...
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Development of <strong>3D</strong>-<strong>MEMS</strong> <strong>Probe</strong><br />
• Develop fine pitch cantilever<br />
with mechanical endurance<br />
• Achieve lower contact <strong>for</strong>ce<br />
with good contact resistance<br />
• Achieve precise xyz alignment<br />
in actual probe layout<br />
June 3-6, 3<br />
2007 IEEE SW <strong>Test</strong> Workshop 9