3D-MEMS Probe for Fine Pitch Probing - Semiconductor Wafer Test ...
3D-MEMS Probe for Fine Pitch Probing - Semiconductor Wafer Test ...
3D-MEMS Probe for Fine Pitch Probing - Semiconductor Wafer Test ...
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Next Steps<br />
1. Proceed the MA card into a volume<br />
production<br />
2. Apply <strong>for</strong> SoC devices<br />
Optimize probe design, probe <strong>for</strong>ce,<br />
probe material, probe layout<br />
3. Improve the assembly technology <strong>for</strong><br />
multi-DUT probing<br />
4. Next target <strong>for</strong> LCD-driver<br />
15μm staggered, 20μm inline<br />
June 3-6, 3<br />
2007 IEEE SW <strong>Test</strong> Workshop 28
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