3D-MEMS Probe for Fine Pitch Probing - Semiconductor Wafer Test ...
3D-MEMS Probe for Fine Pitch Probing - Semiconductor Wafer Test ...
3D-MEMS Probe for Fine Pitch Probing - Semiconductor Wafer Test ...
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Evaluation on Actual Device<br />
•<strong>Probe</strong>r setup was done very well.<br />
•Alignment<br />
•Tip recognition<br />
•Planarity<br />
•Contact<br />
•Electrical function test was<br />
completed.<br />
June 3-6, 3<br />
2007 IEEE SW <strong>Test</strong> Workshop 24