3D-MEMS Probe for Fine Pitch Probing - Semiconductor Wafer Test ...
3D-MEMS Probe for Fine Pitch Probing - Semiconductor Wafer Test ...
3D-MEMS Probe for Fine Pitch Probing - Semiconductor Wafer Test ...
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Planarity (Initial)<br />
20<br />
15<br />
Planarity [μm ]<br />
10<br />
5<br />
0<br />
-10 -5 -5<br />
0 5<br />
Target<br />
10<br />
-10<br />
-15<br />
-20<br />
<strong>Probe</strong> X position [mm]<br />
June 3-6, 3<br />
2007 IEEE SW <strong>Test</strong> Workshop 22
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