3D-MEMS Probe for Fine Pitch Probing - Semiconductor Wafer Test ...
3D-MEMS Probe for Fine Pitch Probing - Semiconductor Wafer Test ...
3D-MEMS Probe for Fine Pitch Probing - Semiconductor Wafer Test ...
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XY Alignment (Initial)<br />
10<br />
8<br />
6<br />
4<br />
Target<br />
2<br />
⊿Y [μm ]<br />
0<br />
-10 -8 -6 -4 -2 -2<br />
0 2 4 6 8 10<br />
-4<br />
-6<br />
-8<br />
-10<br />
⊿X [μm ]<br />
June 3-6, 3<br />
2007 IEEE SW <strong>Test</strong> Workshop 20