3D-MEMS Probe for Fine Pitch Probing - Semiconductor Wafer Test ...
3D-MEMS Probe for Fine Pitch Probing - Semiconductor Wafer Test ...
3D-MEMS Probe for Fine Pitch Probing - Semiconductor Wafer Test ...
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Presentation Overview<br />
1. Introduction<br />
• JEM product overview<br />
2. Objectives<br />
• Challenges in fine pitch probing<br />
• Development of <strong>3D</strong>-<strong>MEMS</strong> probe<br />
3. Evaluation<br />
• Individual fine pitch cantilever<br />
• Actual probe layout<br />
4. Conclusions<br />
5. Next steps<br />
June 3-6, 3<br />
2007 IEEE SW <strong>Test</strong> Workshop 2