3D-MEMS Probe for Fine Pitch Probing - Semiconductor Wafer Test ...
3D-MEMS Probe for Fine Pitch Probing - Semiconductor Wafer Test ...
3D-MEMS Probe for Fine Pitch Probing - Semiconductor Wafer Test ...
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Actual <strong>Probe</strong> Layout<br />
18mm<br />
25μm pitch<br />
staggered<br />
Total 900probes<br />
June 3-6, 3<br />
2007 IEEE SW <strong>Test</strong> Workshop 18