3D-MEMS Probe for Fine Pitch Probing - Semiconductor Wafer Test ...
3D-MEMS Probe for Fine Pitch Probing - Semiconductor Wafer Test ...
3D-MEMS Probe for Fine Pitch Probing - Semiconductor Wafer Test ...
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Contact Tip Wear<br />
Contact tip abrasion(um)<br />
wear(um)<br />
3<br />
2<br />
1<br />
0<br />
0 300 500 700 1000<br />
Touch Down down (thousands)<br />
Contact Tip<br />
Wear<br />
June 3-6, 3<br />
2007 IEEE SW <strong>Test</strong> Workshop 16