3D-MEMS Probe for Fine Pitch Probing - Semiconductor Wafer Test ...
3D-MEMS Probe for Fine Pitch Probing - Semiconductor Wafer Test ...
3D-MEMS Probe for Fine Pitch Probing - Semiconductor Wafer Test ...
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Cres (Ω)<br />
Contact Resistance(Au Plated<br />
1.00<br />
0.90<br />
0.80<br />
0.70<br />
0.60<br />
0.50<br />
0.40<br />
0.30<br />
0.20<br />
0.10<br />
0.00<br />
<strong>Wafer</strong>)<br />
0.00 0.10 0.20 0.30 0.40 0.50 0.60 0.70 0.80<br />
<strong>Probe</strong> Force(g) <strong>for</strong>ce Tip material<br />
June 3-6, 3<br />
2007 IEEE SW <strong>Test</strong> Workshop 15<br />
A<br />
B<br />
C<br />
D<br />
E<br />
F
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