3D-MEMS Probe for Fine Pitch Probing - Semiconductor Wafer Test ...
3D-MEMS Probe for Fine Pitch Probing - Semiconductor Wafer Test ...
3D-MEMS Probe for Fine Pitch Probing - Semiconductor Wafer Test ...
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<strong>3D</strong>-<strong>MEMS</strong> <strong>Probe</strong> Process<br />
Sacrificial layer<br />
on substrate<br />
Sacrificial layer<br />
Substrate<br />
<strong>Probe</strong><br />
on sacrificial layer<br />
Remove<br />
sacrificial layer<br />
Contact tip<br />
<strong>Probe</strong><br />
Substrate<br />
Substrate<br />
June 3-6, 3<br />
2007 IEEE SW <strong>Test</strong> Workshop 11
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