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ECS Transactions 3, (4), 321-337 (2006) - Dieter Schroder - Arizona ...

ECS Transactions 3, (4), 321-337 (2006) - Dieter Schroder - Arizona ...

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<strong>ECS</strong> <strong>Transactions</strong> 3, (4), <strong>321</strong>-<strong>337</strong> (<strong>2006</strong>)<br />

For a p-type semiconductor with steady state or transient light incident on the sample,<br />

the effective lifetime τ eff is<br />

∆n(<br />

t)<br />

τ<br />

eff<br />

( ∆n)<br />

=<br />

[3]<br />

G(<br />

t)<br />

− d∆n(<br />

t) / dt<br />

where ∆n(t) is the time-dependent excess minority carrier density and G the ehp generation<br />

rate. The effective lifetime is given by 12<br />

1 1 2 ⎛ βd<br />

⎞ sr<br />

= + Dβ<br />

tan ⎜ ⎟ =<br />

[4]<br />

τ<br />

eff<br />

τ<br />

B ; ⎝ 2 ⎠ βD<br />

where τ B is the bulk recombination lifetime, D the minority carrier diffusion constant under<br />

low injection level and the ambipolar diffusion constant under high injection, s r the<br />

surface recombination velocity, and d the sample thickness. τ eff is plotted in Fig. 3(a) versus<br />

d as a function of sr. For thin samples, τ eff no longer bears any resemblance to τ B , the<br />

bulk lifetime, and is entirely dominated by surface recombination. The surface recombination<br />

velocity must be known to determine τ B unambiguously unless the sample is sufficiently<br />

thick. For low to moderate s r , Eq. [4] becomes<br />

1 1 1<br />

= +<br />

[5]<br />

τ<br />

eff<br />

τ<br />

B<br />

τ<br />

S<br />

where τ S is the surface lifetime.<br />

τ eff<br />

(s)<br />

10 -4<br />

10 -5<br />

s r =10 cm/s<br />

10 -6<br />

10 3<br />

10 -7<br />

τ<br />

10 -8<br />

B<br />

= 9x10 -5 s<br />

10 5<br />

10 -9<br />

10 7 D n<br />

= 30 cm 2 /s<br />

10 -5 10 -4 10 -3 10 -2 10 -1 10 0<br />

d (cm)<br />

10 2 600<br />

10 4 400<br />

200<br />

0<br />

325<br />

τ eff<br />

(µs)<br />

1200<br />

1000<br />

800<br />

SRH<br />

Recomb.<br />

Auger<br />

Recomb.<br />

10 12 10 13 10 14 10 15 10 16 10 17<br />

Injection Level (cm -3 )<br />

(a)<br />

(b)<br />

Figure 3. (a) Effective lifetime versus wafer thickness as a function of surface recombination<br />

velocity; (b) effective lifetime versus excess carrier density. 13<br />

The QSSPC lifetime is shown in Fig. 3(b) as a function of injection level. As the injection<br />

level increases, the lifetime increases due to high-level injection and eventually<br />

decreases due to Auger recombination. The important point is that this measurement is<br />

done during one flash lamp decay and it yields information about the injection level dependence<br />

of the lifetime.<br />

Free carrier absorption An interesting lifetime characterization approach uses infrared<br />

(IR) radiation from a black body transmitted through the sample and detected by an infrared<br />

light detecting array as the detector. 14 The black body source can be as simple as a<br />

hot plate. A laser with photon energy hν > E G creates electron-hole pairs in the sample.<br />

By taking the difference of the IR radiation through the sample with and without the laser<br />

irradiation, one measures the free carrier absorption due to the excess carriers. Taking<br />

two-dimensional images of the IR radiation over the entire wafer simultaneously, allows<br />

for rapid measurements.

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