Advanced Servo Control Research at Philips CFT ... - DCSC - TU Delft

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Scanning trajectory: performance requirement and typical servo error Acceleration Philips CFT, Gregor van Baars, 2004-06-08, DCSC presentation Scan (v constant) Settling Exposure interval Deceleration Stand still Error bound specification 40
Four control research topics: expected servo performance limits (1999/2000) • Interactions between DOF’s (limited scope of rigid body decoupling) � Explore multivariable control (MIMO H ∞ , µ synthesis) • A fixed servo controller for the whole operational range (inherent design conservatism : dynamic behaviour of the system changes with position) � Explore position-dependent control (gain scheduling, LPV control) • Settling time limits throughput (vibrations must settle to start exposure) � Explore options to achieve 0-settling (input shaping, model-based ff, ILC) • Disturbances limit performance (difficult to characterize and to find source) � Explore disturbance-based control Philips CFT, Gregor van Baars, 2004-06-08, DCSC presentation 41
Page 1 and 2: Advanced Servo Control Research at
Page 3 and 4: Introduction: myself • TU Delft,
Page 5 and 6: Royal Philips Electronics Headquart
Page 7 and 8: Philips today (2003 numbers) Sales
Page 9 and 10: Philips CFT within Philips Technolo
Page 11 and 12: Philips CFT: global sites Philips C
Page 13 and 14: Philips CFT, Gregor van Baars, 2004
Page 17 and 18: gold ball capillary Philips CFT, Gr
Page 21 and 22: ASML research : SIRE-T5 300 mm stag
Page 23 and 24: The early years : 80-ties - ‘98 B
Page 25 and 26: Send in a whole bunch of students f
Page 27 and 28: Start Philips-funded PhD program in
Page 29 and 30: Philips-funded PhD’s : CD-player
Page 31 and 32: Research group implanted @ CFT afte
Page 33 and 34: Servo control research @ CFT Philip
Page 35 and 36: Case: Lithographic stages positioni
Page 37 and 38: Expose a desired pattern in resist
Page 39: Servo Control: basic setting (motio
Page 49 and 50: Implementation of LPV control (SIRE
Page 51 and 52: Advanced control research: 0-settli
Page 53 and 54: Disturbance based control & modelin
Page 55 and 56: H2 optimal controller Philips CFT,
Page 57 and 58: Servo control research @ CFT - Chal
Page 59 and 60: Challenges: • Feasible MIMO FRF i
Page 61 and 62: Challenges: • Position-dependent
Page 63 and 64: Challenges: • Various: - Continue
Page 65 and 66: Challenges: • Connecting control
Page 67 and 68: Closing remarks • CFT is a mechat

Advanced Servo Control Research at Philips CFT ... - DCSC - TU Delft

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