Advanced Servo Control Research at Philips CFT ... - DCSC - TU Delft
Advanced Servo Control Research at Philips CFT ... - DCSC - TU Delft
Advanced Servo Control Research at Philips CFT ... - DCSC - TU Delft
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Scanning trajectory: performance<br />
requirement and typical servo error<br />
Acceler<strong>at</strong>ion<br />
<strong>Philips</strong> <strong>CFT</strong>, Gregor van Baars, 2004-06-08, <strong>DCSC</strong> present<strong>at</strong>ion<br />
Scan (v constant)<br />
Settling<br />
Exposure<br />
interval<br />
Deceler<strong>at</strong>ion<br />
Stand still<br />
Error bound<br />
specific<strong>at</strong>ion<br />
40