Advanced Servo Control Research at Philips CFT ... - DCSC - TU Delft
Advanced Servo Control Research at Philips CFT ... - DCSC - TU Delft
Advanced Servo Control Research at Philips CFT ... - DCSC - TU Delft
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<strong>Servo</strong> <strong>Control</strong>: basic setting (motion systems)<br />
Reference<br />
gener<strong>at</strong>or<br />
error<br />
-<br />
<strong>Philips</strong> <strong>CFT</strong>, Gregor van Baars, 2004-06-08, <strong>DCSC</strong> present<strong>at</strong>ion<br />
Feedforward<br />
disturbances<br />
Feedback Plant<br />
• Plant: stage mechanics, actu<strong>at</strong>ors, sensors<br />
• Feedback control: disturbance suppression, closed-loop<br />
stability and robustness<br />
• Feedforward control: reference following, settling<br />
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