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Advanced Servo Control Research at Philips CFT ... - DCSC - TU Delft

Advanced Servo Control Research at Philips CFT ... - DCSC - TU Delft

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<strong>Servo</strong> <strong>Control</strong>: basic setting (motion systems)<br />

Reference<br />

gener<strong>at</strong>or<br />

error<br />

-<br />

<strong>Philips</strong> <strong>CFT</strong>, Gregor van Baars, 2004-06-08, <strong>DCSC</strong> present<strong>at</strong>ion<br />

Feedforward<br />

disturbances<br />

Feedback Plant<br />

• Plant: stage mechanics, actu<strong>at</strong>ors, sensors<br />

• Feedback control: disturbance suppression, closed-loop<br />

stability and robustness<br />

• Feedforward control: reference following, settling<br />

39

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