Advanced Servo Control Research at Philips CFT ... - DCSC - TU Delft

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Typical lithographic stage research project setting • First-of-a-kind prototype (feasibility study for next generation equipment) • On-the-edge stage motion systems – High throughput (80/140 wafers/hour, 80-200 ICs/wafer) : aggressive setpoint trajectory (few g, 0.5-1m/s) – Extremely high positioning accuracy (nm) during scan • Accuracy requirements in 6 DOF • Servo control involved from the start in multi-disciplinary team during mechatronic process: concept, design, realization, test, optimization Philips CFT, Gregor van Baars, 2004-06-08, DCSC presentation 36
Expose a desired pattern in resist Develop and etch exposed pattern Build up IC by stacking layers of patterns (repeat previous steps) Philips CFT, Gregor van Baars, 2004-06-08, DCSC presentation Lithographic scanner is exposure tool (optics/imaging + scanning stages) Fill wafer with exposures Pattern dimensions (CD) keep decreasing (Moore’s Law), i.e. faster chip, higher capacity Required stage accuracy keeps increasing (e.g. overlay) 37
Page 1 and 2: Advanced Servo Control Research at
Page 3 and 4: Introduction: myself • TU Delft,
Page 5 and 6: Royal Philips Electronics Headquart
Page 7 and 8: Philips today (2003 numbers) Sales
Page 9 and 10: Philips CFT within Philips Technolo
Page 11 and 12: Philips CFT: global sites Philips C
Page 13 and 14: Philips CFT, Gregor van Baars, 2004
Page 17 and 18: gold ball capillary Philips CFT, Gr
Page 21 and 22: ASML research : SIRE-T5 300 mm stag
Page 23 and 24: The early years : 80-ties - ‘98 B
Page 25 and 26: Send in a whole bunch of students f
Page 27 and 28: Start Philips-funded PhD program in
Page 29 and 30: Philips-funded PhD’s : CD-player
Page 31 and 32: Research group implanted @ CFT afte
Page 33 and 34: Servo control research @ CFT Philip
Page 35: Case: Lithographic stages positioni
Page 39 and 40: Servo Control: basic setting (motio
Page 41 and 42: Four control research topics: expec
Page 49 and 50: Implementation of LPV control (SIRE
Page 51 and 52: Advanced control research: 0-settli
Page 53 and 54: Disturbance based control & modelin
Page 55 and 56: H2 optimal controller Philips CFT,
Page 57 and 58: Servo control research @ CFT - Chal
Page 59 and 60: Challenges: • Feasible MIMO FRF i
Page 61 and 62: Challenges: • Position-dependent
Page 63 and 64: Challenges: • Various: - Continue
Page 65 and 66: Challenges: • Connecting control
Page 67 and 68: Closing remarks • CFT is a mechat

Advanced Servo Control Research at Philips CFT ... - DCSC - TU Delft

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