Advanced Servo Control Research at Philips CFT ... - DCSC - TU Delft
Advanced Servo Control Research at Philips CFT ... - DCSC - TU Delft
Advanced Servo Control Research at Philips CFT ... - DCSC - TU Delft
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Typical lithographic stage research<br />
project setting<br />
• First-of-a-kind prototype (feasibility study for next<br />
gener<strong>at</strong>ion equipment)<br />
• On-the-edge stage motion systems<br />
– High throughput (80/140 wafers/hour, 80-200 ICs/wafer) :<br />
aggressive setpoint trajectory (few g, 0.5-1m/s)<br />
– Extremely high positioning accuracy (nm) during scan<br />
• Accuracy requirements in 6 DOF<br />
• <strong>Servo</strong> control involved from the start in multi-disciplinary<br />
team during mech<strong>at</strong>ronic process: concept, design,<br />
realiz<strong>at</strong>ion, test, optimiz<strong>at</strong>ion<br />
<strong>Philips</strong> <strong>CFT</strong>, Gregor van Baars, 2004-06-08, <strong>DCSC</strong> present<strong>at</strong>ion<br />
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