Advanced Servo Control Research at Philips CFT ... - DCSC - TU Delft
Advanced Servo Control Research at Philips CFT ... - DCSC - TU Delft
Advanced Servo Control Research at Philips CFT ... - DCSC - TU Delft
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Introduction: myself<br />
• <strong>TU</strong> <strong>Delft</strong>, Mechanical Engineering :<br />
– Student: systems & control group (prof. Bosgra) [1984-1991]<br />
– PhD student: systems & control group (prof. Bosgra) [1991-<br />
1996]<br />
• <strong>Philips</strong>:<br />
– <strong>Research</strong>: control engineer in ASML research projects (group<br />
Sastra) [1996-1998]<br />
– <strong>CFT</strong>:<br />
• <strong>Control</strong> engineer in ASML research projects (department van<br />
Eijk) [1998-2002]<br />
• Project leader EUV alpha tool [2002-..]<br />
• Competence group leader Acoustics & <strong>Control</strong> [aug2004-..]<br />
<strong>Philips</strong> <strong>CFT</strong>, Gregor van Baars, 2004-06-08, <strong>DCSC</strong> present<strong>at</strong>ion<br />
3
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