Advanced Servo Control Research at Philips CFT ... - DCSC - TU Delft
Advanced Servo Control Research at Philips CFT ... - DCSC - TU Delft
Advanced Servo Control Research at Philips CFT ... - DCSC - TU Delft
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ASML research : SIRE-T5 300 mm stage<br />
<strong>Philips</strong> <strong>CFT</strong>, Gregor van Baars, 2004-06-08, <strong>DCSC</strong> present<strong>at</strong>ion<br />
x-y stroke 300 mm<br />
velocity 1000 mm/s<br />
acceler<strong>at</strong>ion 10 m/s 2<br />
jerk 1000 m/s 3<br />
movement
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