Advanced Servo Control Research at Philips CFT ... - DCSC - TU Delft
Advanced Servo Control Research at Philips CFT ... - DCSC - TU Delft
Advanced Servo Control Research at Philips CFT ... - DCSC - TU Delft
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Metrology for accur<strong>at</strong>e<br />
manufacturing control<br />
<strong>Philips</strong> <strong>CFT</strong>, Gregor van Baars, 2004-06-08, <strong>DCSC</strong> present<strong>at</strong>ion<br />
Zero Abbe offset’s<br />
Thermally insensitive<br />
0.1 µm accuracy target<br />
rapid sampling<br />
18
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