Jeffrey Williams - Semiconductor Safety Association

Overview of the Semiconductor
Emergency Response Forum
(SERF) Manual
Duane Caldwell
Corp. Safety Program Manager, Seagate Technology
Jeffrey Williams
Sr. Environmental Engineer, Department of Defense
SSA2000 Arlington, VA

Introduction
• Presentation will not distribute copies of
manual or provide details of all sections of
manual
• Presentation will:
– inform attendees of SERF activities,
opportunities & products (e.g., the manual &
benchmarking results)
– highlight ERT Best Practices from the manual
– solicit additional active participants

Part One Agenda
• SERF History
• Participating Companies
• ERT Program Structure
– Scope of Operations
– Program Requirements
– Program Incentives
• ERT Program Basics
– Incident Command
– Emergency Operations Centers

SERF History
• 1995 - SEMATECH hosted a meeting for
members to discuss issues/concerns with
emergency response operations
• AMD (Greg Linenfelser) led follow-up
meetings and distribution of a survey in
1996. SERF named. Participation
expanded beyond SEMATECH while
remaining a sponsored working group.

SERF History (cont.)
• At SEMATECH under Steve Burnett,
additional surveys of best practices
occurred. Latest survey occurred in 1997.
• SERF manual developed by group
consensus. At SSA 1998, multi-company
teams were formed to write text for agreed
upon chapter headings. Teams were
balanced with respect to size and skills of
participants ERT teams.

SERF History (cont.)
• Editing at SEMATECH continued through
1998 into 1999.
• SERF Manual published in 1999 through
efforts of 35 companies and 45 participants
• SERF begins exploration of transition from
SEMATECH to SSA sponsorship.

Participating Companies
• AMD
• Allegro Microsystems
• Analog Devices
• Atmel
• Cherry Semiconductor
• Cypress Semiconductor
• Fairchild Semiconductor
• Harris Semiconductor
• Hewlett-Packard
• Honeywell
• IBM
• Intel
• Integrated Device Technologies
• Lucent Technologies
• M/A COM
• Mitsubishi
• Motorola
• National Semiconductor
• NEC
• Nortel
• Philips Semiconductor
• Ramtron
• RF Microdevices
• Rockwell
• Samsung
• SEMATECH
• Silicon Systems
• Symbios
• Texas Instruments
• TSMC
• Unitrode
• UMC
• US Department of Defense
• VLSI Technologies

Scope of ERT Operations
• SERF identified industry scope of
operations with respect to:
– Chemical spills/gas releases
– Fire
– Medical
– Natural disaster
– Security
– Odors
– Evacuations

ERT Charters of Operation
• SERF discussed charters of operation
– Ensure evacuation of all personnel
– Information dissemination
– Notifications
– Response to event
– Alarm Response

ERT Program Requirements
• SERF developed guidance for ERT member
requirements
– Physical
– Medical surveillance
– Language
– Skills retention
– Availability/shift coverage
– Union Issues

ERT Program Incentives
• SERF identified industry wide status of
ERT program incentives
– Voluntary participation v. job description
– Financial compensation range
– Non-financial compensation items

Incident Command System
• SERF established guidance for use of the
Incident Command System (ICS)
– Developed and used by fire departments
– Provides for unified command of response
– Addresses operations, administration, support
– Ensures proper lines of communication
– Ensure proper span of control
– Applicable on large and small scale responses

Incident Command System
Incident Commander
Safety O fficer
Medical Officer
Inform ation Officer
Operations Officer
Logistics Officer
Entry Team Leader Back-up Team Leader Decon Team Leader

Emergency Operations Centers
• SERF identified typical varieties of
operations centers during response
– Incident Command Post
– Central Control Room
– Staging Area
– Response Site

Part Two Agenda
• ERT Response Triggers
– Defining Emergencies
– Setting Goals for Response
– Developing Action Plans
• ERT Response & Mitigation
– Various Scenarios
• Program Resources
• Case Study & Conclusion

ERT Response Triggers
• Quick, effective, and efficient emergency
responses start with:
– Early detection of problems,
– Quick definition of the situation and its hazards,
– Implementation of comprehensive action plans.

Defining Emergencies:
Investigation of Problem Reports
• SERF provides guidance for investigating
problem reports and defining responses.
– Odors, unidentified
– Medical incidents
– Gas alarms and odors
– Chemical spills
– Fire and Smoke incidents

Defining Emergencies:
Gathering Data
• SERF provides guidance for gathering data
essential to defining events and identifying
hazards.
– Nature of the event
– Types of hazards
– Contributing conditions (e.g., perforated floors,
air flow patterns, sensitive populations, etc.)
– Missing or injured employees

Setting Response Goals:
Essential Activities
• SERF provides guidance for setting goals
and objectives for responses.
– Rescue
– Quantification of Hazards (e.g., air
concentrations of contaminants)
– Observation of Conditions (e.g., open drains,
ignition sources, damaged equipment)
– Corrective Action
– Protect (People, Environment, Property)

Developing Action Plans:
Assembling Response Resources
• SERF provides guidance for determining
resources required for successful entries and
responses.
– Personnel and Teams
– PPE
– Monitoring Equipment
– Tools and Supplies
– Decontamination Stations

Developing Action Plans:
Model Scenario Flow Charts
• SERF provides example flow charts from
operating fab sites for various scenarios.
– Chemical Release
• Non-specific
• Hazardous liquid or solid
– Smoke and Fire/Explosion
– Tornado/Severe Weather
– Bomb Threat
– Building Evacuation

Developing Action Plans:
Disaster Planning
• Planning Process & Guidance
– Analyze Hazards
– Survey Organization
– Develop Emergency Management Organization
– Identify Emergency Functions
– Develop Response Tools (e.g., checklists)
– Develop Capability
– Maintain & Evaluate Readiness
– Revise

Developing Action Plans:
Business Resumption Planning
• Recovery Planning Process & Guidelines
– Identify Critical Business Functions
– Perform a Risk Analysis
– Document the Recovery Procedures
– Training & Validation

ERT Response & Mitigation:
Techniques & Guidelines
• SERF lists techniques and guidance for
responding to and mitigating various
hazardous conditions.
– Gas Releases/Fires (e.g, SiH 4 and ClF 3 )
– Chemical Spills (by hazard class)
– Injuries/Illnesses (universal precautions)
– Natural & Technological Disasters (e.g.,
earthquakes, severe weather, power failure)
– Bomb Threats

ERT Response & Mitigation:
Techniques & Guidelines
• SERF describes examples of
decontamination techniques and procedures.
– Equipment
– Personnel
• SERF discusses training techniques and
curriculum, and provides some examples of
drill scenarios and evaluations.

Program Resources:
References
• Glossary
• Guidance for Developing ERT Documents
– site & system maps
– contact lists
– equipment lists & manuals
• List of Recommended Books
• List of Recommended Internet Sites
• SERF Member Company Contacts

Program Resources:
Hazardous Materials Inventory
ample HMIS Form.xls
Double-click Icon to view document

Program Resources:
ERT Equipment Inventory
Sample ERT
Equipment Inventory
Double-click Icon to view document

Program Resources:
Emergency Contact Matrix
Emergency Contact
Matrix
Double-click Icon to view document

Case Study:
Chemical Release Flow Charts
nidentified Chemical
Release.jpg
Release
Classification.jpg
Double-click Icons to view documents
Hazardous Material
Release.jpg

Conclusion
• SERF depends on active participation from
a wide range of companies and geographic
regions.
• The SERF Manual is a first draft of
consensus practices and sample documents
that should be expanded and refined, using
an even larger group of contributors.

SERF Contacts
• Interested parties should contact:
– Peter Monti, Department of Defense
301.688.0120
– Lori Strong, SSA
703.790.1745