Fire Safety Compliance and associated SEMI S2 Guidelines - sesha

Fire Safety Compliance and associated SEMI S2 Guidelines - sesha Fire Safety Compliance and associated SEMI S2 Guidelines - sesha

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Fire Safety Compliance Why Are My CO2 Systems Not S2 Compliant? For 2010 SESHA AZ Mini Conference By Matt Wyman, Managing Director KFPI Inc. November 9, 2010 Copyright © 2010 KFPI Inc., All Rights Reserved SESHA 2010 USA TAIWAN JAPAN CHINA

Fire Safety Compliance

Why Are My CO2 Systems Not S2 Compliant?

For

2010 SESHA AZ Mini Conference

By

Matt Wyman, Managing Director

KFPI Inc.

November 9, 2010

USA

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Overview

1. SEMI S2

2. Fire Safety Requirements

1. SEMI S2 Chapter 14

3. Non Compliance Findings

4. Cause

5. Solution

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KFPI Services

• Equipment Fire Protection Systems

• Carbon Dioxide (CO2)

• Fine Water Spray (FWS)

• Aspirating Smoke Detection (ASD)

• Flame Detection (Multi IR)

• Consulting

• Risk Engineering Analysis & Consulting

• Equipment Safety Compliance

• Compliance Audits & Testing

• Training

• IR Thermography

• Thermal Scans

• Reports

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KFPI Leadership

• SEMI© Standards Fire Protection Task Force

• Chairman (Past & Present)

• NFPA 318 Clean Room Fire Protection Committee

• Chairman (Past)

• Factory Mutual (FM Global) Semiconductor Specialist

• (Past)

• Factory Mutual Research Board (FMRC)

• Advisory Board Member (Past)

• Expert Witness on International Fire Loss Litigations

• Published Numerous Papers in Industry Magazines

• Presented Numerous Papers in Industry Venues

• Global Training Seminars

• Fabricators, Insurance, & 3 rd Party Consultants

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SEMI S2 Compliance

• Environmental, Health, & Safety Guideline for

Semiconductor Manufacturing Equipment

• Required by Fabricators Worldwide

• Categories Include:

Hazard Warning Labels

Safety Interlock Systems

Emergency Shutdown

Electrical Design

Fire Protection

Heated Chemical Baths

Ergonomics and Human Factors

Hazardous Energy Isolation

Mechanical Design

Seismic Protection

Automated Material Handlers

Environmental Considerations

Exhaust Ventilation

Chemicals

Ionizing Radiation

Non-Ionizing Radiation and Fields

Lasers

Sound Pressure Level

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Safety Labels

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Electrical Safety

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Chemical Safety

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Hazardous Energy

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Ergonomics

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Radiation

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Laser

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Environmental Safety

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Emergency Shutdown

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Fire Protection

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Fire Codes

• International Fire Code (IFC)

• Combustibles or Flammables >4ft. Wide

• Sprinkler Head Inside or Gaseous Fire Suppression

• FM DS 7-7 “Semiconductor Fabrication Facilities”

• Equipment Protection Design Criteria

• CO2 & FWS

• 13kW Fire Detection

• NFPA 12 “Carbon Dioxide” (FM4-11N)

• NFPA 750 “Fine Water Spray”

• NFPA 318 “Protection of Semiconductor Fabrication Facilities”

• SEMI S14 “Safety Guidelines for Fire Risk Assessment &

Mitigation for Semiconductor Manufacturing Equipment”

• SEMI S2 “Environmental, Health, & Safety Guideline for

Semiconductor Manufacturing Equipment”

• Chapter 14 “Fire Protection”

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S2 Compliance

• Section 14.4.4 Fire Detection, Alarm , & Controls

• 14.4.4.1&2 All detectors, alarms, and controls be accepted and listed by an

accredited laboratory (example UL or FM) and installed in accordance with

the terms of that acceptance and appropriate national or international

standards (example NFPA 72).

• 14.4.4.3 Capable of interfacing with facility’s alarm system

• 14.4.4.4 Activate alarms audibly and visually at equipment

• Note 58 Should be identifiable & distinguishable from other alarms

• 14.4.4.5 Manual activation should be considered

• 14.4.4.6 A supervisory/trouble condition should notify operator, allow

completion of existing processing, but prevent additional processing until

condition is cleared.

• 14.4.4.7&8 Capable of operation at all times with 24hr backup batteries

• 14.4.4.11 Shut down the equipment upon alarm condition (EMO)

• 14.4.4.12 Capable of being certified by licensed parties

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S2 Compliance

• Section 14.4.5 Fire Suppression

• 14.4.5.1 The fire suppression system, which includes nozzles, actuators, and their

associated controls, should be certified by an accredited testing laboratory (e.g., UL or

FM) and suitable for the application and for the environment in which it to be used.

• 14.4.5.2&3 The fire suppression agent and delivery system should be designed and

installed in accordance with the appropriate international or national standard (e.g.,

NFPA 12).

• 14.4.5.5 Activate alarms audibly and visually at equipment

• Note 64 Should be identifiable & distinguishable from other alarms

• 14.4.5.10 Allowance can be made to disable system when in maintenance mode if

supervised.

• 14.4.5.11 Capable of operation at all times with 24hr backup batteries

• 14.4.5.12 Capable of interfacing with facility’s alarm system

• 14.4.5.13 Shut down the equipment upon alarm condition (EMO)

• 14.4.5.14 Manual activation should be provided

• 14.4.5.15 Should be discharge tested on represented sample of equipment

• 14.4.5.16 Control access to the suppression agent source.

• 14.4.5.17 Capable of being certified by licensed parties

• 15.4.5.19 Piping should be designed, installed, and tested to ensure it is capable of

withstanding discharge pressures.

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CO2 Hazard Design

• Total Flood (TF) Design

• Fully Enclosed Compartments

• Criteria = 50% CO2 Concentration

• Time Limit = 60 Seconds

• Compensate for

• Exhaust Ventilation

• Uncloseable Openings

• Local Application (LA) Design

• Open Compartments

• Example = Working Surface

• Criteria = Minimum Flow Rate

• Time Limit = Minimum 30 Second

• Compensate for

• Missing Walls

• Not for Exhaust

• Combination Design

• Both TF & LA

60

50

40

30

20

10

0

CO2 Concentration Levels

0 15 30 45 60

Minimum

Not Protected

Protected

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Non-Compliance Findings

• All found on existing CO2 Systems

• 3 rd Party Reviews

• Site Audits

• Design Reviews

• Incident Investigations

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Inadequate Designs

• Total Flood (TF) Hazard

• Exhaust Compensation

• Not Included (or Damper)

• Exhaust Not Distributed

• Uncloseable Opening Leakage

• Wrong Flooding Factors

• Local Application (LA) Hazard

• Assumed Volume Calculations

• % Perimeter Closed

• 60-sec Discharge Duration

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Assumed Volume (LA)

None

Local

Application

Headcase

Working Surface

Headcase

Assumed

Volume

Actual

Volume

4.0ft.

Minimum

Height

Total

Flood

Plenum

Process

Tank

Total

Flood

Pumps/Heaters

Front View

Add

2.0ft.

Open

Sides

Side View

Assumed Volume (LA)

Example:

IPA DRYER

LA Design

Add 2.0ft.

To Each Side

Assumed

Volume

Actual

Volume

4.0ft.

Minimum

Height

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CO2 Nozzles

• LA Nozzles

• All have “cone” to absorb

discharge pressure

• Reflected discharge from orifice

• Less exit velocity (same flow rate)

• Nozzle absorbs most 600psi

discharge pressure

• TF Nozzles

• “V” Nozzle is “Vent” nozzle (TF)

• Straight discharge from orifice

• Full effects of ~600psi discharge

pressure on tool (especially baths)

• Much higher velocity

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Nozzle Issues

• TF Nozzles Used in LA Hazards

• Ansul & Hatsuta

• FM Approved LA Nozzles for Wet

Bench

• Stainless Steel (SS) & Halar Coated

• Kidde & Others (Fenwal, Fike)

• No FM Approval for Wet Bench

• No SS or Halar Coated Models

• Painted Steel/Brass/Chrome Not

Compatible with Wet Processing

• LA Nozzles Installed Heights

Above Coverage Chart

• All LA Nozzles Have Coverage Chart

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Hydraulic Calculations

• UL/FM Approved Calc Software

• Based Upon Liquid Discharge Time

• Increase Capacity ≠ Increase Concentration

• More Agent ≠ Adequate Design

• Extends Discharge Duration

• Inadequate Hydraulic Calculations

60

• Supply ≠ Demand

50

40

• Discharge Duration > Demand

30

• Manufacturer Specific

20

• CO2 Distribution ≠ Installation

10

0

• See Example

0 15 30 45 60

Minimum

Not Protected

Protected

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Hydraulic Calcs

• Sample Hydraulic Calc Report (Pipe & Tubing)

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Hydraulic Calculations

WET

Hazard 1

Hazard 2

Hazard 3

CO2

BENCH

LA

TF

Supply

CO2 Demand 64.8 lbs 84.2 lbs 13.2 lbs. 200 lbs.

# Nozzles 4 2 1 2 cylinders

• End of Report is Nozzle Summary

• Must Verify Supply = Demand

H1 = 20.5lbs/42.6sec x 30sec

= 14.44 x 4 nozzles

= 57.8 lbs

H2 = 51.0lbs/42.7sec x 30sec

= 35.8 x 2 nozzles

= 71.6 lbs

H3 = 16lbs/42.6sec x 30sec =

11.2 lbs x 1 nozzle

= 11.2 lbs

• This hydraulic

calc is inadequate

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CO2 Distribution

• High Pressure CO2 Cylinders

• Stored Pressure = 750psi

• Nozzle Pressure = ~350psi – 650psi

• Must have internal pressure rating of 3,000 psi

• Must have internal burst pressure rating of 5,000 psi

• SS Piping is Allowed by Fire Code (NFPA 12 – Section 4.7)

• Pipe ≤ ¾ in. = Schedule 40

• Pipe ≥ 1 in. = Schedule 80 with Extra Heavy Fittings

• Recommend SS Tubing (316) with SS Compression Fittings

• Minimum Wall Thickness

• Cleanliness & Contamination

• Questions?

• How Do You Verify Integrity?

• CO2 Discharge?

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CO2 Distribution Issues

• Compression Fittings Not

Installed Correctly

• Compression Fittings

Installed on Pipe vs. Tube

• ¾” Fitting on ½” Pipe

• Calculated with Pipe installed

with Tubing

• ½” Pipe ID > ½” Tube ID

• ½” Pipe ID ≠ 5/8” Tube ID

• Friction Coefficient Not Equal

• 1.0”+ Pipe Installed with

Schedule 40 Fittings

• Improper Tubing Thickness

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Exhaust Dampers

• Exhaust Damper Not Allowed

• NFPA 318 Section 5.3.5

• SEMI S2 Exhaust/Chemical Safety

• Solvent Fumes (LEL)

• Corrosive Fumes

• FM DS 7-7 Section 2.5.15.1.2

• Exhaust Ventilation Reduces Smoke Damage

• Exhaust Volume >> Compartment Volume

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Safety Label Issues

• No CO2 Safety Labels

• Labels must meet ANSI Z535

• Orange “Warning” Color

• “Warning” Triangle Symbol

• Aspiration Symbol

• Outside Protected Space

• At Manual Activation

• SEMI S1 Compliant

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Lockout Valves

• Lockout Valves (NFPA 12 2005)

• Required except where personnel can’t enter space (4.3.3.6)

• Where CO2 can migrate to expose personnel (4.3.3.6.1)

• System should “Lockout” during maintenance or testing

(4.3.3.6.3)

• “Lockout” Valve must be supervised

• Lockout Valve Typically Not Required

• If a Lockout Valve is Installed then….

• Pressure Switch installed between Supply and Lockout Valves

(4.5.4.11)

• A Pressure Relief Valve is Required (4.7.2.4)

• Operate 2400-3000psi

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Disable Switch

• Disable/By-Pass Switch (Required but Not Installed)

• Electrically operated systems should have service disconnect switch

(NFPA 12 – Section 4.3.3.7)

• Switch must be supervised (by panel)

• Electrical Lockout of Discharge

• Tool Maintenance or System Testing/Inspection

Key Switch – “Normal”

Key Switch – “Lockout”

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Flame (Optical) Detectors

• Semiconductor Industry

• 4 Flame Detectors FM Approved for Use on Wet

Benches

• Sierra DCR1 (UV/IR)

• Det-Tronics PM-5MPX (IR)

• Fire Sentry FS7 (IR)

• Hatsuta SX-7000 (IR)

• Field Of View (FOV)

• Coverage Affected by Physical Obstructions

• Coverage Affected by Detector Range

120º FOV

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Flame Detector Issues

• Compliance Issues:

• FOV Obstructed

• Spacing > 13kW

• 8” PP Fire

• 4” IPA Fire

• Chemical Compatibility

• UV ≠ HF

• Quartz Window

• Match Detector with Fuel

Detector

Detection

Area

Obstructed

View

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Personnel Device Issues

• Horn/Strobe

• Not ADA/NFPA Mounting Heights

• 80-96” AFF

• Adequate Notification for Personnel?

• All 4 Sides of Tool?

• Bay/Chase or Fab/Subfab

• Manual Release

• Not ADA/NFPA Mounting Heights

• 48-52” AFF

• Mounted Above Fire Hazard

• Adequate Travel Distance?

• Bay/Chase or Fab/Subfab

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Wiring Installation Issues

• All Fire Alarm Inputs & Outputs are Supervised

• EOL Resistors @ Panel (Not EOL)

• Fault Relays Not Supervised

• Flame Detectors

• Aspirating Smoke Detectors

• Cables Not Protected

• NEC / NFPA

• Wire Gauge Too Small

• NEC / NFPA

Panel

Input

Panel

Input

Device

Detector

EOL

Resistor

Alarm

EOL

Resistor

Fault

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Laser Smoke Detector

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Inadequate Battery Calcs

• Result is < 24hr. Standby & 5min Alarm

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Chemical Compatibility Issues

• CO2 Components Must Be Chemically Compatible

• Nozzles & Detectors

• Combustible Plastic Benches

• Corrosives

• Single Wafer Processing Tools

• Solvents & Corrosives

• Nozzles, Tubing, & Fittings

• Must be Coated & Sealed

• Detectors

• Must be Compatible with Corrosives

• HF & Quartz are Not Compatible

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Kidde Issues

• Kidde “V” (Vent or Velocity) Nozzle is TF Nozzle

• Kidde Only Manufactured “V” Nozzle in Brass

• June 2005 Kidde Released Stainless Steel “V” Nozzle

FM Approval

Guide

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Imitation (Copy) “V” Nozzles

• Result was Imitation Kidde “V” Nozzles Supplied to

Industry prior to 2005.

• These same Imitation Nozzles Are Still Being Used

Today

USA VERSION

REAL KIDDE

TAIWAN VERSION

No Threads

• Result is S2 Non-Compliance

• Nozzle CO2 System Tool

No Strainer

Installed

Backwards

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Cause

• Why Has This Happened?

• Fire Protection has NOT Been Reviewed as Part of SEMI S2

Report.

• Fire Protection has NOT Been Reviewed by Site Safety

Personnel (Product Safety).

• Majority of Equipment CO2 Systems are NOT Reviewed by Fire

Department or Insurance.

• 99% EHS Professionals Come from EHS, IH, Ergonmics, etc.

Background

• No Fire Protection Engineering or Fire Safety Background

• Fire Protection is a Professional Engineering Discipline

• Must have 3 rd Party Approval & Certification for Compliance

• CO2 & FWS Specialized Fire Suppression Application

• Not Used by Majority of Fire Contractors

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Solution

• What is the Solution?

• Verify SEMI S2 Reports Include Fire Protection

• Verify SEMI S2 Reports are Completed by Qualified Personnel

• Require Copies of Fire Design Package Documentation

• OEM, 3 rd Party, Fire Contractor

• Have Safety Personnel to Review Design & Reports

• Property Insurance Carrier

• Equipment Safety Personnel for Fire Safety Compliance

• Verify Insurance Agent Qualified to Review CO2/FWS Systems

• Provide Training Corporate Level or at Site Level

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Questions

• Fire Protection Is Not Needed Often…………..

But When It Is…………It Has To Work!

• It Also Must Be Reliable………..

To Prevent Damage & Downtime!

Matt Wyman, Managing Director

Advanced Technologies Division

Semiconductor, TFT-LCD, & PV

KFPI INC.

Koetter Fire Protection International Inc.

USA – TAIWAN – JAPAN - CHINA

(1) 972.333.4965 – cell

mwyman@kfpiinc.com

www.kfpiinc.com

USA

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JAPAN

CHINA

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