CRYSTALSIX - Schoonover, Inc.

CrystalSix Sensor Operating Manual
Table 4-1 Troubleshooting (continued)
Symptom Cause Remedy
Crystal ceases to
oscillate during
deposition before it
reaches its “normal life.
Crystal does not oscillate
or oscillates
intermittently (both in
vacuum and in air).
Crystal oscillates in
vacuum but stops
oscillation after open to
air.
Crystal near the end of its
life.
Scratches or foreign
particles on the crystal
holder seating surface.
Crystal is being hit by
small droplets of molten
material from the
evaporation source.
Damaged crystal.
Deposition material
built-up on edge of the
crystal holder and
touching the crystal.
Material on crystal holder
partially masking full
crystal area.
Defective or damaged
crystal.
Existence of electrical
short or poor electrical
contacts.
Crystal was near the end
of its life; opening to air
causes film oxidation,
which increases film
stress.
Excessive moisture
accumulation on the
crystal.
Replace crystal.
Replace the crystal
holder (IPN
750-262-G1). Clean,
polish the crystal seating
surface of the crystal
holder.
Move the sensor further
away from the evaporant
source.
Change crystal.
Clean the crystal holder.
Clean crystal holder.
Replace crystal.
Check for electrical
continuity and short in
sensor cable, connector,
contact springs,
feedthroughs.
Replace crystal
Turn off cooling water to
sensor before opening it
to air; flow hot water
through the sensor when
the chamber is open.
IPN 074-155G
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