CRYSTALSIX - Schoonover, Inc.
CRYSTALSIX - Schoonover, Inc.
CRYSTALSIX - Schoonover, Inc.
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CrystalSix Sensor Operating Manual<br />
4.5 Troubleshooting the CrystalSix Sensor<br />
Table 4-1 Troubleshooting<br />
Symptom Cause Remedy<br />
Crystal fail signal on front<br />
panel of unit will not<br />
disappear even though<br />
crystal can be seen<br />
through heat shield<br />
aperture.<br />
Damaged Crystal.<br />
Loss of electrical signal.<br />
Replace crystal.<br />
Check for electrical<br />
continuity betwen<br />
feedthrough and leaf<br />
srpings that make<br />
contact with the crystal<br />
holder in the sensor.* If<br />
electrical problem<br />
originates in the sensor,<br />
consult Chapter Chapter<br />
4 for disassembly<br />
instructions, if necessary.<br />
IPN 074-155G<br />
Unit will not advance<br />
when crystal switch key<br />
is pressed.<br />
Crystal not centered in<br />
aperture.<br />
Loss of pneumatic<br />
supply, or pressure is<br />
insufficient for proper<br />
operation.<br />
Operation has been<br />
impaired as a result of<br />
peeling of the material<br />
accumulated on the face<br />
of the cover.<br />
Improper alignment.<br />
0.025” diameter orifice<br />
not installed inline to the<br />
supply side of the<br />
solenoid valve assembly.<br />
Large jumps of thickness Mode hopping due to<br />
reading during deposition damaged crystal.<br />
* Make certain the leaf<br />
springs in the carousel<br />
assembly are bent up far<br />
enough to contact the<br />
crystal holder when<br />
installed.<br />
Establish air supply and<br />
regulate to 80-90 psi for<br />
operation.<br />
Consult Chapter Chapter<br />
4 for disassembly<br />
instructions to remove<br />
material or to correct<br />
mechanical failure.<br />
Realign per alignment<br />
instructions in Chapter<br />
Chapter 4.<br />
Install orifice where<br />
shown on Figure 2-3 on<br />
page 2-8.<br />
Replace crystal.<br />
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