CRYSTALSIX - Schoonover, Inc.
CRYSTALSIX - Schoonover, Inc. CRYSTALSIX - Schoonover, Inc.
CrystalSix Sensor Operating Manual Figure 3-4 2 3/4” Dual Coaxial Feedthrough & Valve Assembly IPN 074-155G 3 - 6
CrystalSix Sensor Operating Manual Chapter 4 Maintenance 4.1 General precautions 4.1.1 Maintain the Temperature of the Crystal Periodically measure the water flow rate through the crystal sensor to verify that it meets or exceeds the value specified in chapter one. Depending upon the condition of the cooling water used, the addition of an in-line water filtering cartridge system may be necessary to prevent flow obstructions. Many system coaters use parallel water supply taps that provide high total flows. An obstruction or closed valve in the pipe that supplies water to the sensor head would not result in a noticeable reduction of total flow. The best test is to directly monitor the flow leaving the sensor. The crystal requires sufficient water cooling to sustain proper operational and temperature stability. Ideally, a constant heat load is balanced by a constant flow of water at a constant temperature. Inficon's quartz crystals are designed to provide the best possible stability under normal operating conditions. No crystal can completely eliminate the effects of varying heat loads. Sources of heat variation include radiated energy emanating from the evaporant source and from substrate heaters. 4.1.2 Use the Optimum Crystal Type IPN 074-155G Certain materials, especially dielectrics, may not adhere strongly to the crystal surface and may cause erratic readings. For many dielectrics, adhesion is improved by using crystals with silver coated electrodes. Gold is preferred for other applications. 4.1.3 Crystal Concerns when Opening the Chamber Thick deposits of some materials, such as SiO, Si and Ni will normally peel off the crystal when it is exposed to air, due to changes in film stress caused by gas absorption. When peeling material is observed, replace the crystal. 4 - 1
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CrystalSix Sensor Operating Manual<br />
Figure 3-4 2 3/4” Dual Coaxial Feedthrough & Valve Assembly<br />
IPN 074-155G<br />
3 - 6
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