CRYSTALSIX - Schoonover, Inc.
CRYSTALSIX - Schoonover, Inc. CRYSTALSIX - Schoonover, Inc.
CrystalSix Sensor Operating Manual 2.2.3 IC/4 or IC/4 PLUS Deposition Controller 1 Connect the in-vacuum sensor head cable to the feedthrough or a coax adapter (microdot/BNC). 2 Connect one end of the 6" XIU cable (IPN 755-257-G6) to the BNC connector or the feedthrough. 3 Connect the other end of the 6" XIU cable to the connector of the XIU (IPN 755-252-G1). 4 Connect one end of the 15' long XIU cable (IPN 755-258-G15) to the mating connector of the XIU. 5 Connect the other end of the XIU cable to a sensor channel at the rear of the controller. 6 Connect power to the controller and set power switch to ON. Set density at 1.00 gm/cc, and zero thickness. The display should indicate 0/ or +/-.001 KÅ. Crystal life should read from 0 to 5%. 7 Breathe heavily on the crystal. A thickness indication of 1.000 to 2.000 KÅ should appear on the display. When the moisture evaporates, the thickness indication should return to approximately zero. If the above conditions are observed, you can assume the sensor is in proper working order and may be installed. IPN 074-155G 2 - 6
CrystalSix Sensor Operating Manual 2.2.4 IC-6000 or XTC Deposition Controller NOTE: See section 2.7. 1 Connect the in-vacuum sensor head cable to the feedthrough or a coax adapter (Microdot/BNC). 2 Connect one end of the 6" OSC cable (IPN 013-070) to the receptacle on the feedthrough. 3 Connect the other end of the 6" OSC cable to the receptacle marked XTAL on the oscillator (IPN 013-001). 4 Connect the end of the oscillator source/sensor cable (IPN 013-067) to the remaining BNC receptacle on the oscillator. 5 Connect the other end of the OSC source/sensor cable to the receptacle marked OSC on the rear panel of the controller. 6 Connect power to the controller and set power switch to ON. Set density at 1.00 gm/cc, and zero the thickness. The display should indicate 0/ or +/-0.001 KÅ. Crystal life should read from 0 to 5%. 7 Breathe heavily on the crystal. A thickness indication of 1.000 to 2.000 KÅ should appear on the display. When the moisture evaporates, the thickness indication should return to approximately zero. If the above conditions are observed, you can assume the sensor is in proper working order and may be installed. 2.3 General Guidelines for CrystalSix Sensor IPN 074-155G Figure 2-3, Figure 2-4, and Figure 2-5 show the typical installation of an INFICON water-cooled crystal sensor in the vacuum process chamber. Use the illustration and the following guidelines to install your sensors for optimum performance and convenience. 2 - 7
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CrystalSix Sensor Operating Manual<br />
2.2.4 IC-6000 or XTC Deposition Controller<br />
NOTE: See section 2.7.<br />
1 Connect the in-vacuum sensor head cable to the feedthrough or a coax<br />
adapter (Microdot/BNC).<br />
2 Connect one end of the 6" OSC cable (IPN 013-070) to the receptacle on<br />
the feedthrough.<br />
3 Connect the other end of the 6" OSC cable to the receptacle marked XTAL<br />
on the oscillator (IPN 013-001).<br />
4 Connect the end of the oscillator source/sensor cable (IPN 013-067) to the<br />
remaining BNC receptacle on the oscillator.<br />
5 Connect the other end of the OSC source/sensor cable to the receptacle<br />
marked OSC on the rear panel of the controller.<br />
6 Connect power to the controller and set power switch to ON. Set density at<br />
1.00 gm/cc, and zero the thickness. The display should indicate 0/ or<br />
+/-0.001 KÅ. Crystal life should read from 0 to 5%.<br />
7 Breathe heavily on the crystal. A thickness indication of 1.000 to 2.000 KÅ<br />
should appear on the display. When the moisture evaporates, the thickness<br />
indication should return to approximately zero.<br />
If the above conditions are observed, you can assume the sensor is in proper<br />
working order and may be installed.<br />
2.3 General Guidelines for CrystalSix Sensor<br />
IPN 074-155G<br />
Figure 2-3, Figure 2-4, and Figure 2-5 show the typical installation of an<br />
INFICON water-cooled crystal sensor in the vacuum process chamber. Use the<br />
illustration and the following guidelines to install your sensors for optimum<br />
performance and convenience.<br />
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