CRYSTALSIX - Schoonover, Inc.

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CrystalSix Sensor Operating Manual 1.1.1 Installation Requirements 1.1.1.1 Feedthrough M M Qty (1) 2-3/4" ConFlat® with two Microdots, two pass water, one air IPN 002-080, See Figure 5-2 on page 5-2 or, Qty (1) 1" bolt with 1 Microdot, two pass water, one air IPN 750-030-G1, see Figure 5-1 on page 5-1. 1.1.1.2 Other M M M M User to provide vacuum-tight braze joints or connectors for the water and air tubes. Valve assembly for air, IPN 007-199 (not provided), with a 0.022" restrictor orifice installed by the user. (Orifice included with CrystalSix accessory kit.) See Table 1-3 on page 1-4. XIU or Oscillator designed to interface with the deposition controller. Deposition controller must have been designed for this specific crystal sensor (INFICON® XTC/2, XTC/C, IC/4, IC/4 PLUS, IC/5). 1.1.1.3 Utilities M M M Minimum water flow 150-200 cc/min, 30 °C max (Do not allow water to freeze). Coolant should not contain chlorides as stress corrosion cracking may occur. Regulated air supply 80-90 psi. (550-618 KPa) 2 meter maximum length of 1/8" tubing between bellows assembly and the control valve. CAUTION Do not allow watertubes to freeze. This may happen if the tubes pass through a cryogenic shroud and the fluid’s flow is interrupted. IPN 074-155G 1 - 2
CrystalSix Sensor Operating Manual 1.1.2 Materials Table 1-2 Materials Plate, Holders, Material Shield, Mechanical Parts Springs, Electrical Contacts 304 type stainless steel Au plated Be-Cu, Au Plate <strong>Inc</strong>onel®, 303 stainless steel Water and air tubes S-304, 0.125" (0.32 cm) O.D. x .016" (.04 cm) Wall Thickness 30" Long (76 cm) Seamless Stainless Steel Tubing Connector (Microdot) Stainless steel Insulators >99% A1 2 O 3 Cable Crystal Body and Carousel Teflon® insulated copper 0.550" Diameter 2024 T351 Aluminum 1.1.3 Unpacking Instructions The CrystalSix sensor and accessories are packaged in a single cardboard carton with rigid foam inserts. Carefully remove the packaged accessories before removing the sensor, then remove the red shipping plug from the sensor carousel. IPN 074-155G 1 - 3
Page 1: O P E R A T I N G M A N U A L CRYST
Page 4 and 5: Trademarks The trademarks of the pr
Page 6 and 7: BUSINESS REPLY MAIL FIRST CLASS PER
Page 9 and 10: CrystalSix Sensor Operating Manual
Page 11: 1.1 Specifications for CrystalSix S
Page 37 and 38: 3.3 Electrical and Pneumatic Connec
Page 53 and 54: 4.6 Replacing the Bellows Assembly

CRYSTALSIX - Schoonover, Inc.

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