CRYSTALSIX - Schoonover, Inc.
CRYSTALSIX - Schoonover, Inc.
CRYSTALSIX - Schoonover, Inc.
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1.1 Specifications for CrystalSix Sensor<br />
750-446-G1<br />
CAUTION<br />
CrystalSix Sensor Operating Manual<br />
Chapter 1<br />
Sensor Specifications<br />
<strong>Inc</strong>orrect rotation direction with the stops disabled will<br />
cause permanent damage rendering transducer inoperative.<br />
See Figure 1-2 on page 1-5 for proper direction of rotation.<br />
The CrystalSix sensor is a (six crystal) quar*tz crystal deposition monitor<br />
transducer. When the monitor crystal being used fails a new crystal is advanced<br />
into position, fully replacing that crystal’s function. The mechanism used for<br />
providing this motion is pneumatically powered. The logic for automatic<br />
operation of this transducer is conveniently provided on most current INFICON<br />
Deposition Controllers. It is manufactured under US Patent #5,025,644, with<br />
foreign patents pending.<br />
Figure 1-1 CrystalSix Sensor<br />
IPN 074-155G<br />
Table 1-1 Sensor specification<br />
Maximum bakeout temp with no water 130 °C<br />
Maximum operating isothermal<br />
environment temperature with<br />
minimum water flow<br />
Size (maximum envelope)<br />
Water, air and coax length<br />
Crystal exchange<br />
Mounting<br />
400 °C<br />
3.8" (9.7 cm) DIA x 2.0" (5.1 cm) high<br />
Standard 30" (76 cm)<br />
Front-loading, extraction tool required<br />
(supplied with unit)<br />
Six #4-40 tapped holes on the back of<br />
the sensor body<br />
1 - 1
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