CRYSTALSIX - Schoonover, Inc.
CRYSTALSIX - Schoonover, Inc. CRYSTALSIX - Schoonover, Inc.
O P E R A T I N G M A N U A L CRYSTALSIX Sensor IPN 074-155
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O P E R A T I N G M A N U A L<br />
<strong>CRYSTALSIX</strong><br />
Sensor<br />
IPN 074-155
O P E R A T I N G M A N U A L<br />
<strong>CRYSTALSIX</strong><br />
Sensor<br />
IPN 074-155G<br />
TWO TECHNOLOGY PLACE<br />
EAST SYRACUSE, NY 13057-9714 USA<br />
Phone: +315.434.1100<br />
Fax: +315.437.3803<br />
Email: reachus@inficon.com<br />
P.O. BOX 1000<br />
FL-9496 BALZERS, LIECHTENSTEIN<br />
Phone: +423.388.50.36<br />
Fax: +423.388.47.51<br />
Email: reachfl@inficon.com<br />
BONNER STRASSE 498<br />
D-50968 COLOGNE, GERMANY<br />
Phone: +49.0.221.347.1999<br />
Fax: +49.0.221.347.1478<br />
Email: reachld@inficon.com<br />
VISIT US ON THE WEB AT www.inficon.com<br />
©2001 INFICON
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The trademarks of the products mentioned in this Operating Manual are held by the companies that<br />
produce them.<br />
INFICON® and Composer® are trademarks of INFICON <strong>Inc</strong>.<br />
ConFlat® is a registered trademark of Varian Associates.<br />
Teflon® is a registered trademark of Dupont.<br />
Scotch-Brite is a trademark of 3M.<br />
SWAGELOK® and CAJON® are registered trademarks of Swagelok, Co.<br />
<strong>Inc</strong>onel® is a registered trademark of International Nickel Co.<br />
Microdot® is a registered trademark of Microdot Corp.<br />
All other brand and product names are trademarks or registered trademarks of their respective companies.<br />
The information contained in this Operating Manual is believed to be accurate and reliable. However, INFICON<br />
assumes no responsibility for its use and shall not be liable for any special, incidental, or consequential<br />
damages related to the use of this product.<br />
All rights reserved. Reproduction or adaptation of any part of this document without permission is unlawful.<br />
© 2001 INFICON <strong>Inc</strong>.
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TWO TECHNOLOGY PLACE<br />
EAST SYRACUSE, NY 13057-9714 USA<br />
Phone: +315.434.1100<br />
Fax: +315.437.3803<br />
Email: reachus@inficon.com<br />
P.O. BOX 1000<br />
FL-9496 BALZERS, LIECHTENSTEIN<br />
Phone: +423.388.50.36<br />
Fax: +423.388.47.51<br />
Email: reachfl@inficon.com<br />
BONNER STRASSE 498<br />
D-50968 COLOGNE, GERMANY<br />
Phone: +49.0.221.347.1999<br />
Fax: +49.0.221.347.1478<br />
Email: reachld@inficon.com<br />
VISIT US ON THE WEB AT www.inficon.com
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POSTAGE WILL BE PAID BY ADDRESSEE<br />
INFICON INC.<br />
Two Technology Place<br />
East Syracuse, New York 13057-9714
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WARRANTY AND LIABILITY - LIMITATION: Seller warrants the products<br />
manufactured by it, or by an affiliated company and sold by it, and described on<br />
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from defects of materials or workmanship under normal proper use and service.<br />
The period of warranty coverage is specified for the respective products in the<br />
respective Seller instruction manuals for those products but shall in no event<br />
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under this warranty is limited to such of the above products or parts thereof as are<br />
returned, transportation prepaid, to Seller's plant, not later than thirty (30) days<br />
after the expiration of the period of warranty coverage in respect thereof and are<br />
found by Seller's examination to have failed to function properly because of<br />
defective workmanship or materials and not because of improper installation or<br />
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product or part thereof, or (b) furnishing a replacement product or part thereof,<br />
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transportation charges prepaid.<br />
No warranty is made by Seller of any Seller product which has been installed,<br />
used or operated contrary to Seller's written instruction manual or which has been<br />
subjected to misuse, negligence or accident or has been repaired or altered by<br />
anyone other than Seller or which has been used in a manner or for a purpose for<br />
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NOTE: These instructions do not provide for every contingency that may arise in<br />
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Should you require further assistance, please contact INFICON.<br />
TWO TECHNOLOGY PLACE<br />
EAST SYRACUSE, NY 13057-9714 USA<br />
Phone: +315.434.1100<br />
Fax: +315.437.3803<br />
Email: reachus@inficon.com<br />
P.O. BOX 1000<br />
FL-9496 BALZERS, LIECHTENSTEIN<br />
Phone: +423.388.50.36<br />
Fax: +423.388.47.51<br />
Email: reachfl@inficon.com<br />
BONNER STRASSE 498<br />
D-50968 COLOGNE, GERMANY<br />
Phone: +49.0.221.347.1999<br />
Fax: +49.0.221.347.1478<br />
Email: reachld@inficon.com<br />
VISIT US ON THE WEB AT www.inficon.com
CrystalSix Sensor Operating Manual<br />
Table Of Contents<br />
Chapter 1<br />
Sensor Specifications<br />
1.1 Specifications for CrystalSix Sensor 750-446-G1 . . . . . . . . . . . . . . . . .1-1<br />
1.1.1 Installation Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-2<br />
1.1.1.1 Feedthrough . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-2<br />
1.1.1.2 Other. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-2<br />
1.1.1.3 Utilities . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-2<br />
1.1.2 Materials . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-3<br />
1.1.3 Unpacking Instructions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-3<br />
1.1.4 Inventory . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-4<br />
IPN 074-155G<br />
Chapter 2<br />
Sensor Installation<br />
2.1 Crystals in the CyrstalSix Sensor . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-1<br />
2.1.1 Handle the Crystal with Care . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-1<br />
2.1.2 Care of the Ceramic Retainer . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-2<br />
2.2 Pre-installation Sensor Check . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-4<br />
2.2.1 IC/5 Deposition Controller . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-4<br />
2.2.2 XTC/2 or XTC/C Deposition Controller . . . . . . . . . . . . . . . . . . . . . . . . .2-5<br />
2.2.3 IC/4 or IC/4 PLUS Deposition Controller . . . . . . . . . . . . . . . . . . . . . . . .2-6<br />
2.2.4 IC-6000 or XTC Deposition Controller . . . . . . . . . . . . . . . . . . . . . . . . . .2-7<br />
2.3 General Guidelines for CrystalSix Sensor . . . . . . . . . . . . . . . . . . . . . . .2-7<br />
2.3.1 Crystal Sensor Installation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-11<br />
2.4 CrystalSix Sensor Installation when used with an IC/5 . . . . . . . . . . . . 2-13<br />
2.4.1 Programming the Relay Outputs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-13<br />
2.4.2 Wiring the Relay Outputs with Relay I/O boards 760-162-G1 or<br />
760-162-G1/G2 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-13<br />
2.5 CrystalSix Sensor Installation when used with an XTC/2 or XTC/C . . . 2-14<br />
2.6 CrystalSix Sensor Installation when used with an IC/4 or IC/4 PLUS . .2-14<br />
2.6.1 Programming the Relay Outputs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-14<br />
2.6.2 Wiring the Relay Outputs with Relay I/O boards 755-122-G1 or<br />
755-122-G1/G2 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-15<br />
2.7 CrystalSix Sensor Requirement When Not Installed With<br />
An IC/5, XTC/2, XTC/C, IC/4, or IC/4 PLUS . . . . . . . . . . . . . . . . . . . . 2-17<br />
TOC - 1
CrystalSix Sensor Operating Manual<br />
Chapter 3<br />
Installation of the Shutter Control Valve Assembly<br />
3.1 Installation with 1” Bolts . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1<br />
3.2 Installation with 2 3/4” Feedthrough . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-2<br />
3.3 Electrical and Pneumatic Connections . . . . . . . . . . . . . . . . . . . . . . . . . 3-3<br />
3.3.1 Electrical . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3<br />
Chapter 4<br />
Maintenance<br />
4.1 General precautions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1<br />
4.1.1 Maintain the Temperature of the Crystal. . . . . . . . . . . . . . . . . . . . . . . . 4-1<br />
4.1.2 Use the Optimum Crystal Type. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1<br />
4.1.3 Crystal Concerns when Opening the Chamber . . . . . . . . . . . . . . . . . . . 4-1<br />
4.2 Crystal Holder Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-2<br />
4.3 Retainer Spring Adjustment Instructions. . . . . . . . . . . . . . . . . . . . . . . . 4-2<br />
4.4 Alignment instruction for INFICON CrystalSix sensor (IPN 750-446) . . 4-3<br />
4.4.1 Alignment Instructions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-4<br />
4.4.2 Disassembly Instructions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-6<br />
4.4.3 Assembly Instructions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-7<br />
4.5 Troubleshooting the CrystalSix Sensor. . . . . . . . . . . . . . . . . . . . . . . . . 4-9<br />
4.6 Replacing the Bellows Assembly [lPN 750286-P2] . . . . . . . . . . . . . . . 4-13<br />
Chapter 5<br />
Feedthrough Outline Drawings<br />
IPN 074-155G<br />
TOC - 2
1.1 Specifications for CrystalSix Sensor<br />
750-446-G1<br />
CAUTION<br />
CrystalSix Sensor Operating Manual<br />
Chapter 1<br />
Sensor Specifications<br />
<strong>Inc</strong>orrect rotation direction with the stops disabled will<br />
cause permanent damage rendering transducer inoperative.<br />
See Figure 1-2 on page 1-5 for proper direction of rotation.<br />
The CrystalSix sensor is a (six crystal) quar*tz crystal deposition monitor<br />
transducer. When the monitor crystal being used fails a new crystal is advanced<br />
into position, fully replacing that crystal’s function. The mechanism used for<br />
providing this motion is pneumatically powered. The logic for automatic<br />
operation of this transducer is conveniently provided on most current INFICON<br />
Deposition Controllers. It is manufactured under US Patent #5,025,644, with<br />
foreign patents pending.<br />
Figure 1-1 CrystalSix Sensor<br />
IPN 074-155G<br />
Table 1-1 Sensor specification<br />
Maximum bakeout temp with no water 130 °C<br />
Maximum operating isothermal<br />
environment temperature with<br />
minimum water flow<br />
Size (maximum envelope)<br />
Water, air and coax length<br />
Crystal exchange<br />
Mounting<br />
400 °C<br />
3.8" (9.7 cm) DIA x 2.0" (5.1 cm) high<br />
Standard 30" (76 cm)<br />
Front-loading, extraction tool required<br />
(supplied with unit)<br />
Six #4-40 tapped holes on the back of<br />
the sensor body<br />
1 - 1
CrystalSix Sensor Operating Manual<br />
1.1.1 Installation Requirements<br />
1.1.1.1 Feedthrough<br />
M<br />
M<br />
Qty (1) 2-3/4" ConFlat® with two Microdots, two pass water, one air IPN<br />
002-080, See Figure 5-2 on page 5-2 or,<br />
Qty (1) 1" bolt with 1 Microdot, two pass water, one air IPN 750-030-G1, see<br />
Figure 5-1 on page 5-1.<br />
1.1.1.2 Other<br />
M<br />
M<br />
M<br />
M<br />
User to provide vacuum-tight braze joints or connectors for the water and<br />
air tubes.<br />
Valve assembly for air, IPN 007-199 (not provided), with a 0.022" restrictor<br />
orifice installed by the user. (Orifice included with CrystalSix accessory kit.)<br />
See Table 1-3 on page 1-4.<br />
XIU or Oscillator designed to interface with the deposition controller.<br />
Deposition controller must have been designed for this specific crystal<br />
sensor (INFICON® XTC/2, XTC/C, IC/4, IC/4 PLUS, IC/5).<br />
1.1.1.3 Utilities<br />
M<br />
M<br />
M<br />
Minimum water flow 150-200 cc/min, 30 °C max (Do not allow water to<br />
freeze). Coolant should not contain chlorides as stress corrosion cracking<br />
may occur.<br />
Regulated air supply 80-90 psi. (550-618 KPa)<br />
2 meter maximum length of 1/8" tubing between bellows assembly and the<br />
control valve.<br />
CAUTION<br />
Do not allow watertubes to freeze. This may happen if<br />
the tubes pass through a cryogenic shroud and the<br />
fluid’s flow is interrupted.<br />
IPN 074-155G<br />
1 - 2
CrystalSix Sensor Operating Manual<br />
1.1.2 Materials<br />
Table 1-2 Materials<br />
Plate, Holders, Material Shield,<br />
Mechanical Parts<br />
Springs, Electrical Contacts<br />
304 type stainless steel<br />
Au plated Be-Cu, Au Plate <strong>Inc</strong>onel®,<br />
303 stainless steel<br />
Water and air tubes S-304, 0.125" (0.32 cm) O.D. x .016"<br />
(.04 cm) Wall Thickness 30" Long (76<br />
cm) Seamless Stainless Steel Tubing<br />
Connector (Microdot)<br />
Stainless steel<br />
Insulators >99% A1 2 O 3<br />
Cable<br />
Crystal<br />
Body and Carousel<br />
Teflon® insulated copper<br />
0.550" Diameter<br />
2024 T351 Aluminum<br />
1.1.3 Unpacking Instructions<br />
The CrystalSix sensor and accessories are packaged in a single cardboard<br />
carton with rigid foam inserts.<br />
Carefully remove the packaged accessories before removing the sensor, then<br />
remove the red shipping plug from the sensor carousel.<br />
IPN 074-155G<br />
1 - 3
CrystalSix Sensor Operating Manual<br />
1.1.4 Inventory<br />
In addition to the basic transducer, the complete shipping package includes an<br />
accessory kit (IPN 750-268-G1) which consists of the following:<br />
Table 1-3 Contents of accessory kit<br />
Qty IPN<br />
Description<br />
X 750-268-G1 Accessory Kit, CrystalSix Sensor<br />
1 750-254-G1 Assembly, Alignment Tool<br />
1 750-279-P1 Crystal Puller<br />
1 074-155 Manual, CrystalSix<br />
1 008-010-G10 Assembly, Sensor Crystal 6MHz<br />
1 059-189 CC-1010-0225 Orifice 0.0225" diameter<br />
2 070-201 #4 Split Lock Washer, Stainless Steel<br />
2 084-032 #4-40x0.375" Long Socket Head Cap Screw, Stainless Steel<br />
2 084-039 #4-40x0.500" Long Socket Head Cap Screw, Stainless Steel<br />
2 084-084 #4-40x0.688" Long Socket Head Cap Screw, Stainless Steel<br />
1 070-828 Hex Wrench 1/16" SC9-3<br />
1 070-829 Hex Wrench 3/32" SC9-5<br />
1 750-037 Spring Tube Bender Kit<br />
1 008-007 Crystal Snatcher<br />
1 750-191-G1 Molybdenum disulfide in Alcohol<br />
IPN 074-155G<br />
1 - 4
CrystalSix Sensor Operating Manual<br />
IPN 074-155G<br />
Figure 1-2 Outline multi crystal sensor<br />
Rotation<br />
Direction<br />
1 - 5
1 - 6<br />
ASSY, CRYSTAL<br />
HOLDER, 6 MHZ<br />
C750-262-G1<br />
QTY 6 (G1)<br />
6<br />
21<br />
PH FL HD SCR, SS<br />
#4-40 X .187 LG<br />
084-069-P1, QTY 4<br />
(SEE NOTE 6)<br />
DET,, TUBE<br />
CLAMPING PLATE<br />
C750-277-P1<br />
9<br />
8<br />
ASSY, HEAT SHIELD<br />
C750-250-G1<br />
(SEE NOTE 5)<br />
11 REF<br />
45<br />
SCREW, SLOT PAN HD S.S.<br />
#0-80 x 3/16 LG<br />
A080-012-P1<br />
SEE DETAIL 'F'<br />
3.500<br />
REF<br />
DRAWING NUMBER:<br />
B 750-446<br />
SH:<br />
OF<br />
DET, CORRUGATED<br />
CONTACT SPRING 31<br />
REF<br />
WELD ASSY,<br />
TOP PLATE 10<br />
D750-265-G1<br />
BALL BEARING S.S.<br />
.25<br />
7Y55-P2512 SDP<br />
REF<br />
25<br />
070-779 QTY 2<br />
BEARING SPACER<br />
46<br />
070-867<br />
RETAINING RING<br />
26<br />
5103-12-H TRUARC<br />
070-398, QTY 2<br />
DET, STOP<br />
RATCHET<br />
38<br />
B750-294-P2<br />
SOC SET SCREW 33<br />
2<br />
EXTENSION SPRING<br />
REF<br />
SEE NOTE #3<br />
#4-40 X.375 LG<br />
14<br />
SOC HD SCR, SS<br />
084-032, QTY 3<br />
#4 SPLIT LW, SS<br />
17<br />
070-201, QTY 7<br />
B<br />
REF<br />
X X X X<br />
SECTION B-B<br />
A<br />
22<br />
15<br />
5<br />
11<br />
DET, RATCHET<br />
B750-293-P2<br />
DET, ACTUATOR COVER<br />
C750-276-P2<br />
SOC HD SCR, SS<br />
16 #4-40 x .187 LG<br />
084-044, QTY 2<br />
ASSY, MULTI XTAL<br />
SENSOR BODY<br />
C750-248-G1<br />
ASSY, CAROUSEL<br />
D750-261-G1<br />
STEEL, NICKEL PLATED<br />
33 #6-32 x .125 LG<br />
A086-084-P2 QTY 3<br />
(SEE NOTE 1)<br />
17 #4 SPLIT LOCKWASHER, SS<br />
2 REF<br />
B<br />
ALIGNMENT<br />
TEFLON WASHER<br />
39 070-870<br />
SOC SET SCREW, HARDENED<br />
ASSY, SENSOR<br />
HEAD CABLE,<br />
C321-039-G4<br />
IPN 007-044<br />
36<br />
DIRECTION OF<br />
ROTATION OF<br />
CAROUSEL ASSY<br />
(ITEM 5)<br />
DETAIL 'F'<br />
2.00<br />
REF<br />
31<br />
SPRING MUST LIE<br />
IN BODY IN DIRECTION<br />
OF ROTATION AS<br />
SHOWN<br />
1.00<br />
REF<br />
C<br />
DET, CORRUGATED<br />
SPRING<br />
B750-257-P3<br />
3.127<br />
REF<br />
*<br />
*<br />
*<br />
*<br />
3<br />
4<br />
*<br />
*<br />
*<br />
*<br />
2<br />
5<br />
*<br />
*<br />
SECTION C-C<br />
OPERATING<br />
PRESSURE TAG 37<br />
B750-299-P1<br />
1<br />
6<br />
*<br />
*<br />
CrystalSix Sensor Operating Manual<br />
REF<br />
.034<br />
HOLE REF<br />
27<br />
.126 DIA BALL S.S.<br />
070-778 QTY 1<br />
(SEE NOTE 1)<br />
ASSY, PAWL AND<br />
ACTUATOR STEM<br />
B750-295-G1<br />
SPEC, BELLOWS ASSY<br />
C750-286-P2<br />
24<br />
19<br />
42<br />
DET, DETENT<br />
41 B750-291-P1<br />
SCREW, SOC HD S.S.<br />
#2-56 x 1/4 LG<br />
082-024<br />
28<br />
COMPRESSION<br />
SPRING<br />
LC-026E-1-SS<br />
070-777<br />
SOC HD SCREW<br />
#4-40 x 1.125 LG SS 20<br />
084-093, QTY 2<br />
#4 SPL LW, SS 17<br />
2 REF<br />
NOTES:<br />
1- APPLY MOLYBDENUM DISULFIDE SPARINGLY ON<br />
C'SINKS OF ITEMS 5 AND 11 AND ON<br />
THREADS OF ITEMS 22 & 38.<br />
2- SEE D750-259 FOR OUTLINE DWG<br />
.31 REF<br />
DET, DETENT<br />
A<br />
40<br />
SPACER<br />
B750-292-P2<br />
3- STAMP (4) 3/32 HIGH CHARACTERS FOR LOT IDENTIFICATION<br />
CODE (SERIAL NO'S) ON TOP PLATE ASSY (ITEM #10)<br />
IN AREA INDICATED.<br />
4- KIT 750-268-G1 SUPPLIED WITH G1 (ITEM #34)<br />
#2 LOCK WASHER S.S.<br />
43<br />
070-170<br />
44 #2 FLAT WASHER S.S.<br />
082-022<br />
5- MINIMUM OF 3/4 LB OF FORCE<br />
REQD TO REMOVE ITEM 8 FROM<br />
ITEM 9.<br />
6- TIGHTEN IN PATTERN AND<br />
RETIGHTEN IN PATTERN.<br />
G1<br />
C<br />
SECTION A-A<br />
ASSY, MULTI XTAL SENSOR, 6 MHZ<br />
DET, WATER LINE<br />
29<br />
C750-278-P2<br />
PROPRIETARY<br />
NOT FOR REPRODUCTION<br />
NOR DISTRIBUTION<br />
ASSY, CRYSTAL 6 SENSOR<br />
FIRST CALLED FOR:<br />
SEE SEPARATE PL<br />
INFICON<br />
LEYBOLD INFICON INC.<br />
TWO TECHNOLOGY PLACE<br />
EAST SYRACUSE, NY 13057<br />
SCALE:<br />
FULL<br />
APPROVED BY:<br />
DRAWN BY: W BEEBE<br />
DATE: 6/6/95 CARL GOGOL 10/3/95 ISSUED: AH 10/3/95<br />
REV A<br />
DRAWING NUMBER:<br />
B750-446<br />
SH:<br />
OF<br />
Figure 1-3 Assembly CrystalSix sensor<br />
IPN 074-155G
CrystalSix Sensor Operating Manual<br />
Chapter 2<br />
Sensor Installation<br />
Successful operation of any crystal sensor depends on proper placement,<br />
compatibility of its construction with its operating environment and connection<br />
to proper utilities.<br />
NOTE: The sensor head, water tube, cable, etc. should be clean and grease<br />
free when installed in the vacuum chamber. These parts should be<br />
handled while wearing clean nylon gloves. If parts do become<br />
contaminated, clean them thoroughly using a suitable solvent to avoid<br />
outgassing and excessive peeling of deposition material from the<br />
sensor’s surfaces.<br />
CAUTION<br />
<strong>Inc</strong>orrect rotation direction will cause permanent damage<br />
rendering transducer inoperative. Refer to Figure 1-2 on page<br />
1-5 for proper direction of rotation.<br />
2.1 Crystals in the CyrstalSix Sensor<br />
2.1.1 Handle the Crystal with Care<br />
IPN 074-155G<br />
Always use clean nylon lab gloves and clean plastic tweezers when handling<br />
the crystal. Handle the crystals only by their edges. Anything that comes in<br />
contact with the crystal surfaces may leave contamination, which may lead to<br />
poor film adhesion. Poor film adhesion will result in high rate noise and<br />
premature crystal failure.<br />
CAUTION<br />
Do not use metal tweezers to handle crystals. Metal<br />
tweezers may chip the edge of the crystal.<br />
2 - 1
CrystalSix Sensor Operating Manual<br />
2.1.2 Care of the Ceramic Retainer<br />
CAUTION<br />
Do not use excessive force when handling the Ceramic<br />
Retainer Assembly since breakage may occur. Always<br />
use the crystal snatcher.<br />
To prevent scratching the crystal electrode, do not<br />
rotate the ceramic retainer after installation.<br />
Always use clean nylon lab gloves and plastic<br />
tweezers for handling the crystal. This avoids<br />
contamination which may lead to poor adhesion of<br />
deposited material to the electrode.<br />
Follow the procedure below to install or replace the crystals in the CrystalSix<br />
sensor. (Reference Figure 1-3 on page 1-6).<br />
CAUTION<br />
Rotating the unit in the wrong direction with the stops<br />
disabled will cause severe damage! Do not rotate the<br />
unit by hand to install the crystals or to check indexing.<br />
1 Remove the heat shield (item #8) by gently pulling on the outside<br />
circumference of the shield. The shield should snap off.<br />
2 Since the crystal holders are packaged separately, skip the remainder of<br />
this step for first-time installations. Using the crystal puller (IPN 750-279-P1,<br />
provided in ship kit 750-268), remove the crystal holder by pushing the tips<br />
of the crystal puller over the outside circumference of the crystal holder (see<br />
Figure 2-2 on page 2-4). Gently pull the crystal holder from its receptacle. A<br />
slight amount of pressure applied to collapse the tips of the crystal puller<br />
may be required to extract the crystal holder.<br />
IPN 074-155G<br />
3 Insert the tapered end of the crystal snatcher (part number 008-007) into the<br />
ceramic retainer (A) and apply a small amount of pressure. This locks the<br />
retainer to the snatcher and allows the retainer to be pulled straight out (B).<br />
See Figure 2-1.<br />
2 - 2
CrystalSix Sensor Operating Manual<br />
Figure 2-1 Using the Crystal Snatcher<br />
4 Invert the crystal holder and the crystal will drop out. (Skip this step for<br />
first-time installations.)<br />
5 Install the new crystal per section 2.1.1 on page 2-1 and section 2.1.2 on page<br />
2-2.<br />
6 Using clean nylon gloves, grasp the edge of the new crystal with a clean pair<br />
of plastic tweezers. Orient the crystal so the patterned electrode is facing<br />
up. Gently insert the edge of the crystal beneath one of the wire segments<br />
that protrude into the crystal cavity. Release the crystal.<br />
7 Replace the ceramic retainer. Initially orient it at an angle to displace the<br />
spring wire segments in the crystal holder.<br />
8 Release the crystal snatcher with a slight side-to-side rocking motion. Using<br />
the backside of the crystal snatcher, push on the ceramic retainer to ensure<br />
it is completely seated.<br />
IPN 074-155G<br />
9 Position the crystal holder between the tips of the crystal puller as illustrated<br />
in Figure 2-2.<br />
10 Push the crystal holder into the receptacle of the CrystalSix sensor until<br />
completely seated. “Snap” the crystal puller to one side to release the<br />
crystal holder from the crystal puller. Using the non-slotted end of the crystal<br />
puller, apply pressure to the crystal holder until it is completely seated.<br />
Verify that the crystal fail signal on the controller display disappears. If the<br />
crystal fail signal does not disappear, consult section 4.5 on page 4-9.<br />
11 Press the crystal switch button on the hand held controller or the controller<br />
front panel. The sensor will advance to the next crystal position. Repeat<br />
procedure from Step 2 until all six new crystals have been installed.<br />
12 Install the heat shield (item #8) by first orienting the slot in the heat shield<br />
to accommodate the water tubes, then secure the heat shield by applying<br />
pressure near the center of the shield. The shield should snap in place.<br />
2 - 3
CrystalSix Sensor Operating Manual<br />
Figure 2-2 Using the Crystal Puller<br />
2.2 Pre-installation Sensor Check<br />
Prior to installing the sensor in the vacuum system, you should make certain<br />
that it is in proper working condition by following the procedure outlined below.<br />
2.2.1 IC/5 Deposition Controller<br />
1 Connect the in-vacuum sensor head cable to the feedthrough or a coax<br />
adapter (microdot/BNC).<br />
2 Connect one end of the 6" XIU cable (IPN 755-257-G6) to the BNC<br />
connector or the feedthrough.<br />
3 Connect the other end of the 6" XIU cable to the connector of the XIU/5 (IPN<br />
760-600-G1).<br />
4 Connect one end of the XIU/5 cable (IPN 600-1039-Gxx) to the mating<br />
connector of the XIU/5.<br />
5 Connect the other end of the XIU/5 cable to a sensor channel at the rear of<br />
the controller.<br />
6 Connect power to the controller and set power switch to ON. Set density at<br />
1.00 gm/cc, and zero thickness. The display should indicate 0/ or +/-.001<br />
KÅ. Crystal life should read from 0 to 5%.<br />
7 Breathe heavily on the crystal. A thickness indication of 1.000 to 2.000 KÅ<br />
should appear on the display. When the moisture evaporates, the thickness<br />
indication should return to approximately zero.<br />
If the above conditions are observed, you can assume the sensor is in proper<br />
working order and may be installed.<br />
IPN 074-155G<br />
2 - 4
CrystalSix Sensor Operating Manual<br />
2.2.2 XTC/2 or XTC/C Deposition Controller<br />
1 Connect the in-vacuum sensor head cable to the feedthrough or a coax<br />
adapter (microdot/BNC).<br />
2 Connect one end of the 6" XIU cable (IPN 755-257-G6) to the BNC<br />
connector or the feedthrough.<br />
3 Connect the other end of the 6" XIU cable to the connector of the XIU (IPN<br />
757-302-G1).<br />
4 Connect one end of the XX' long XIU cable (IPN 757-303-GXX) to the<br />
mating connector of the XIU.<br />
5 Connect the other end of the XIU cable to a sensor channel at the rear of<br />
the controller.<br />
6 Connect power to the controller and set power switch to ON. Set density at<br />
1.00 gm/cc, and zero thickness. The display should indicate 0/ or +/-.001<br />
KÅ. Crystal life should read from 0 to 5%.<br />
7 Breathe heavily on the crystal. A thickness indication of 1.000 to 2.000 KÅ<br />
should appear on the display. When the moisture evaporates, the thickness<br />
indication should return to approximately zero.<br />
If the above conditions are observed, you can assume the sensor is in proper<br />
working order and may be installed.<br />
IPN 074-155G<br />
2 - 5
CrystalSix Sensor Operating Manual<br />
2.2.3 IC/4 or IC/4 PLUS Deposition Controller<br />
1 Connect the in-vacuum sensor head cable to the feedthrough or a coax<br />
adapter (microdot/BNC).<br />
2 Connect one end of the 6" XIU cable (IPN 755-257-G6) to the BNC<br />
connector or the feedthrough.<br />
3 Connect the other end of the 6" XIU cable to the connector of the XIU (IPN<br />
755-252-G1).<br />
4 Connect one end of the 15' long XIU cable (IPN 755-258-G15) to the mating<br />
connector of the XIU.<br />
5 Connect the other end of the XIU cable to a sensor channel at the rear of<br />
the controller.<br />
6 Connect power to the controller and set power switch to ON. Set density at<br />
1.00 gm/cc, and zero thickness. The display should indicate 0/ or +/-.001<br />
KÅ. Crystal life should read from 0 to 5%.<br />
7 Breathe heavily on the crystal. A thickness indication of 1.000 to 2.000 KÅ<br />
should appear on the display. When the moisture evaporates, the thickness<br />
indication should return to approximately zero.<br />
If the above conditions are observed, you can assume the sensor is in proper<br />
working order and may be installed.<br />
IPN 074-155G<br />
2 - 6
CrystalSix Sensor Operating Manual<br />
2.2.4 IC-6000 or XTC Deposition Controller<br />
NOTE: See section 2.7.<br />
1 Connect the in-vacuum sensor head cable to the feedthrough or a coax<br />
adapter (Microdot/BNC).<br />
2 Connect one end of the 6" OSC cable (IPN 013-070) to the receptacle on<br />
the feedthrough.<br />
3 Connect the other end of the 6" OSC cable to the receptacle marked XTAL<br />
on the oscillator (IPN 013-001).<br />
4 Connect the end of the oscillator source/sensor cable (IPN 013-067) to the<br />
remaining BNC receptacle on the oscillator.<br />
5 Connect the other end of the OSC source/sensor cable to the receptacle<br />
marked OSC on the rear panel of the controller.<br />
6 Connect power to the controller and set power switch to ON. Set density at<br />
1.00 gm/cc, and zero the thickness. The display should indicate 0/ or<br />
+/-0.001 KÅ. Crystal life should read from 0 to 5%.<br />
7 Breathe heavily on the crystal. A thickness indication of 1.000 to 2.000 KÅ<br />
should appear on the display. When the moisture evaporates, the thickness<br />
indication should return to approximately zero.<br />
If the above conditions are observed, you can assume the sensor is in proper<br />
working order and may be installed.<br />
2.3 General Guidelines for CrystalSix Sensor<br />
IPN 074-155G<br />
Figure 2-3, Figure 2-4, and Figure 2-5 show the typical installation of an<br />
INFICON water-cooled crystal sensor in the vacuum process chamber. Use the<br />
illustration and the following guidelines to install your sensors for optimum<br />
performance and convenience.<br />
2 - 7
CrystalSix Sensor Operating Manual<br />
Figure 2-3 Typical CystalSix Installation for IC/5<br />
IPN 074-155G<br />
2 - 8
CrystalSix Sensor Operating Manual<br />
Figure 2-4 Typical CrystalSix Installation for XTC/2 and XTC/C<br />
IPN 074-155G<br />
2 - 9
CrystalSix Sensor Operating Manual<br />
Figure 2-5 Typical CrystalSix Installation for IC/4 PLUS<br />
IPN 074-155G<br />
2 - 10
CrystalSix Sensor Operating Manual<br />
2.3.1 Crystal Sensor Installation<br />
Generally, install the sensor as far as possible from the evaporation source (a<br />
minimum of 10" or 25.4 cm) while still being in a position to accumulate<br />
thickness at a rate proportional to accumulation on the substrate. Figure 2-6<br />
shows proper and improper methods of installing sensors.<br />
Figure 2-6 Sensor Installation Guidelines<br />
SENSORS<br />
CORRECT<br />
INCORRECT<br />
OBSTRUCTION<br />
INCORRECT<br />
CORRECT<br />
INCORRECT<br />
SOURCE<br />
IPN 074-155G<br />
To guard against spattering, use a source shutter to shield the sensor during<br />
the initial soak periods. If the crystal is hit with even a minute particle of molten<br />
material, it may be damaged and stop oscillating. Even in cases when it does<br />
not completely stop oscillating, it may immediately become unstable, or shortly<br />
after deposition begins instability may occur.<br />
Plan the installation to insure that there are no obstructions blocking a direct<br />
path between the sensor and the source.<br />
Install sensors in such a manner that the center axis of the crystal is aimed<br />
directly at the source to be monitored. Verify that the angle of the sensor<br />
location (with reference to the source) is well within the evaporant stream.<br />
Attach the sensor with a mounting bracket anchored to the deposition chamber.<br />
With the bracket in place, temporarily position and attach the sensor head as<br />
outlined in the general guidelines above. Next, temporarily install the<br />
feedthrough. You may now form, measure, and mark the sensor tubes (use the<br />
bending tool (IPN 750-036) to form tubes in the system).<br />
2 - 11
CrystalSix Sensor Operating Manual<br />
Build the Sensor/Feedthrough Assembly. Remove the sensor and the<br />
feedthrough, cut the water cooling tubes and air tubes to the proper length and<br />
connect them directly to the feedthrough or use vacuum rated couplings.<br />
CAUTION<br />
To prevent damage to the feedthrough or sensor during<br />
welding or brazing, insure that at least one inch of<br />
water tube is left between the sensor and the flame.<br />
After cutting the water and air tubes, verify that they are clear of metal particles<br />
by forcing compressed air through the tubing. Heliarc welding is recommended<br />
(torch brazing may also be acceptable) for connecting the sensor to the<br />
feedthrough water tube.<br />
Vacuum rated connectors such as CAJON® are recommended for use between<br />
the sensor and the feedthrough to speed maintenance. If brazing adapters are<br />
to be used, attach them to the sensor water-cooling tubes prior to connection<br />
to the feedthrough. Make connections as follows:<br />
1 Clean the water tube and adapter surfaces with solvent if necessary.<br />
2 Apply brazing flux to surfaces being joined.<br />
3 Braze the connections using a flame temperature appropriate for the<br />
brazing material being used.<br />
CAUTION<br />
Excessive application of brazing material, or excessive<br />
heat due to brazing, may result in blockage of the water<br />
tube.<br />
4 Verify that each joint is not blocked by blowing compressed air through the<br />
cooling tubes.<br />
5 Thoroughly clean the braze joint and helium leak test before installing the<br />
sensor and feedthrough into the process chamber.<br />
Once all water and air tube connections are fabricated, install the sensor and<br />
feedthrough assembly into the process system and secure all retaining<br />
hardware. Shield the coax cable from heat radiating from the evaporant source<br />
or the substrate heater. You can do this very simply, if your process allows, by<br />
wrapping aluminum foil around the cable and water tubes. Connect the external<br />
water tubes from the feedthrough to your water supply system and flow<br />
IPN 074-155G<br />
2 - 12
CrystalSix Sensor Operating Manual<br />
controller. We recommend using detachable couples (Swagelok® or<br />
equivalent) for external water tube connections. Apply water pressure to verify<br />
flow and tightness.<br />
Because of geometric factors, variations in surface temperature, and<br />
differences in electrical potential, the crystal and substrates often do not<br />
receive the same amount of material. If you want the thickness indication on the<br />
unit to represent the thickness on the substrates, calibration is required to<br />
determine the tooling. Consult your controller’s manual for the proper<br />
procedure for obtaining the tooling factor.<br />
CAUTION<br />
Use of more than 80" (2 meters) of 1/8" tubing between<br />
the valve and the bellows may cause switcher failure<br />
because of the time required to bleed out sufficient air<br />
during de-pressurization. If tubing greater than 1/8" is<br />
used, the maximum length must be reduced<br />
proportional to the additional volume.<br />
2.4 CrystalSix Sensor Installation when used<br />
with an IC/5<br />
2.4.1 Programming the Relay Outputs<br />
1 From the program menu select Source/Sensor Directory (F4).<br />
2 Select Sensor board 1, 2, 3 or 4 (depending upon unit configuration).<br />
3 Enter the edit mode. (F5)<br />
IPN 074-155G<br />
4 Select Sensor type six (6) for the CrystalSix Sensor. This will enable the<br />
Crystal Switch output (Switch Out (0, 1-38).<br />
5 Select a CrystalSwitch output depending upon which I/O board is used.<br />
2.4.2 Wiring the Relay Outputs with Relay I/O boards<br />
760-162-G1 or 760-162-G1/G2<br />
On the relay connector, connect the leads of the solenoid valve across the one<br />
side of a 24 volt supply (see Table 11.4 of IC/5 Operating Manual) and one side<br />
of a relay (1-8, 1-16, or 1-24 whichever was programmed). Refer to Table 11.2<br />
of the IC/5 Operating Manual. Connect a jumper between the second side of<br />
the 24 volt supply and the second side of the selected relay.<br />
2 - 13
CrystalSix Sensor Operating Manual<br />
2.5 CrystalSix Sensor Installation when used<br />
with an XTC/2 or XTC/C<br />
Follow the instructions of Section 3.5.2 of the XTC/2 - XTC/C Operating Manual<br />
(074-183).<br />
2.6 CrystalSix Sensor Installation when used<br />
with an IC/4 or IC/4 PLUS<br />
2.6.1 Programming the Relay Outputs<br />
1 From the program menu select Source/Sensor (F4).<br />
2 Select Sensor board 1 or Sensor board 2.<br />
3 Enter the edit mode. (F5)<br />
4 Select Sensor type six (6) for the CrystalSix Sensor. This will enable the<br />
CrystalSwitch output.<br />
5 Select a CrystalSwitch output (Relay 1-8 or 1-16) depending upon which I/O<br />
board is used.<br />
6 Turn the instrument’s power “OFF”, then “ON”, to ensure that the change<br />
takes place permanently.<br />
IPN 074-155G<br />
2 - 14
CrystalSix Sensor Operating Manual<br />
2.6.2 Wiring the Relay Outputs with Relay I/O boards<br />
755-122-G1 or 755-122-G1/G2<br />
1 On the relay connector, see Figure 2-7 on page 2-16, connect the leads of<br />
the solenoid valve across the one side of a 24 volt supply (see listing) and<br />
one side of a relay (1-16 whichever was programmed). Connect a jumper<br />
between the second side of the 24 volt supply and the second side of the<br />
selected relay. Refer to Figure 2-5 on page 2-10 for a typical installation<br />
utilizing relay 1 to perform the crystal advance function for the relay I/O<br />
board.<br />
Table 2-1 Wiring Connectors<br />
(P4)<br />
Top Relay Connector<br />
(P5)<br />
Input Lines<br />
Relay Pins Input Pins<br />
1 24, 28 1 1, 20<br />
2 23, 27 2 2, 21<br />
3 22, 26 3 3, 22<br />
4 13, 19 4 4, 23<br />
5 12, 18 5 5, 24<br />
6 11, 17 6 6, 25<br />
7 10, 16 7 7, 26<br />
8 3, 7 8 8, 27<br />
IPN 074-155G<br />
(P3)<br />
(available on G2 only)<br />
Bottom Relay Connector<br />
Relay Pins<br />
9 47, 50 9 13, 32<br />
10 14, 17 10 14, 33<br />
11 59, 63 11 15, 34<br />
12 53, 60 12 16, 35<br />
13 34, 36 13 12, 31<br />
14 28, 30 14 11, 30<br />
15 4, 11 15 10, 29<br />
16 1, 5 16 9, 28<br />
Isolated 24 V(dc) source is available with a maximum of 0.4 amps total on<br />
connector P4 at Pins 4, 9, 15 and 21 with Pins 8, 14, 20 and 25 used as returns.<br />
2 - 15
CrystalSix Sensor Operating Manual<br />
2 In similar fashion, connect the Pneumatic Actuator for the source shutter if<br />
required.<br />
3 Connect the oscillator cable to the appropriate channel of the sensor board<br />
programmed.<br />
4 Connect the source one or source two cable (whichever has been<br />
programmed) to the source controller.<br />
Figure 2-7 Relay outputs: typical connector configuration utilizing relay #1<br />
NOTE: Contact arrangements shown are of pin mating face (plug or<br />
receptacle). The socket mating face is a mirror image of Figure 2-7.<br />
IPN 074-155G<br />
2 - 16
CrystalSix Sensor Operating Manual<br />
2.7 CrystalSix Sensor Requirement When Not<br />
Installed With An IC/5, XTC/2, XTC/C, IC/4,<br />
or IC/4 PLUS<br />
The CrystalSix can be manually operated with other Deposition Controllers.<br />
The user must, however, be aware of the functional requirements for operation.<br />
These include, but are not limited to:<br />
1 The solenoid assembly must be energized and de-energized twice per<br />
crystal position. Twelve pulses complete one revolution.<br />
2 The electrical pulse applied to the solenoid valve must be at least one<br />
second in duration during both the pressurization and de-pressurization<br />
phase.<br />
3 A 24 volt AC or DC supply is required to energize the solenoid assembly.<br />
Consult Figure 3-1 on page 3-3 for wiring assignments.<br />
4 The user should provide some means of determining the quantity of “good”<br />
crystals when initially loaded, and quantity of good crystals remaining at any<br />
time.<br />
5 Follow the guidelines shown in section 2.3 on page 2-7 for installation.<br />
6 You will need to keep track of the total thickness as a manually generated<br />
sum of the deposit accumulated on each crystal.<br />
IPN 074-155G<br />
2 - 17
CrystalSix Sensor Operating Manual<br />
This page is intentionally blank.<br />
IPN 074-155G<br />
2 - 18
CrystalSix Sensor Operating Manual<br />
Chapter 3<br />
Installation of the Shutter Control Valve Assembly<br />
The shutter control valve assembly (IPN 007-199) and the feedthrough should<br />
be installed at the same time. The same valve assembly is used for both the 1"<br />
and the (recommended) 2 3/4" feedthroughs. However, if the assembly is to be<br />
used with the 2 3/4" feedthrough, you will need to modify the valve bracket as<br />
follows.<br />
For the following steps, see Figure 3-3 on page 3-5. (DWG. 206-854)<br />
1 Align the score line on the valve assembly bracket over the edge of a table<br />
or other square edge.<br />
2 Using pliers, grasp the part of the bracket extending over the edge and push<br />
down. The assembly will break along the score line. Use a file to smooth any<br />
rough edges which occur along the break.<br />
NOTE: In order for the multiple crystal sensor to operate properly, a .022"<br />
diameter orifice (IPN 059-189 provided in Kit 750-268) must be installed<br />
in line between the air supply and the solenoid valve assembly. This is<br />
accomplished by the following procedure. See Figure 3-2 on page 3-4.<br />
1 Unthread the compression fitting attached to the normally closed (N.C.) port<br />
of the miniature solenoid valve (Item #5).<br />
2 Install the orifice by threading it into the normally closed (N.C.) port of the<br />
miniature solenoid valve.<br />
3 Thread the compression fitting previously removed into the orifice.<br />
IPN 074-155G<br />
NOTE: Do not install the orifice into the normally open port. This will require a<br />
longer time interval for depressurization of the bellows assembly and<br />
leads to apparent sensor failure.<br />
3.1 Installation with 1” Bolts<br />
Installation of the shutter control valve assembly for the CrystalSix sensor<br />
requires one 1" bolt feedthrough (IPN 750-030-G1, See Figure 5-1 on page 5-1).<br />
Follow these steps:<br />
1 Ensure that the o-ring is in place on the bolt. Insert the 1" bolt such that the<br />
hexagonal shaped end of the bolt is on the vacuum side of the chamber.<br />
2 Add the Bracket.<br />
3 Add the Washer.<br />
4 Add the Nut.<br />
3 - 1
CrystalSix Sensor Operating Manual<br />
5 Tighten the feedthrough nut.<br />
6 Add the air fitting to the tube which has the female thread adapter installed.<br />
7 Connect the 1/8" Teflon air tube from the valve to the just installed fitting.<br />
CAUTION<br />
Use of more than 80" (2 meters) of 1/8" tubing between<br />
the valve and the bellows may cause switcher failure<br />
because of the time required to bleed out sufficient air<br />
during de-pressurization. If tubing greater than 1/8" is<br />
used, the maximum length must be reduced<br />
proportional to the additional volume.<br />
8 Attach the valve’s intake (normally closed (NC) port) to the 80-90 psi source<br />
of air. Verifiy that the orifice (IPN 059-189) has been installed into this NC<br />
valve port. (See Figure 2 of Figure 3-2 on page 3-4.)<br />
3.2 Installation with 2 3/4” Feedthrough<br />
Installation of the shutter control valve requires a 2 3/4" feedthrough inclusive<br />
of two coaxial feedthroughs (IPN 002-080, see Figure 5-2 on page 5-2). The<br />
second coaxial feedthrough is not used, and should be protected from damage<br />
as a result of process material. Follow the steps below:<br />
1 Install the Feedthrough.<br />
2 Add the valve bracket (modified) to the desired location as illustrated in<br />
Figure 3-3 on page 3-5.<br />
3 Tighten the feedthrough bolts.<br />
4 Install the air fitting to the female thread adapter.<br />
5 Connect the 1/8" Teflon air tube from the valve outlet to the feedthrough<br />
fitting. See the CAUTION in section 3.1 above.<br />
6 Attach the valve’s intake (normally closed (NC) port) to the 80-90 psi source<br />
of air. Verify that the orifice (IPN 059-189) has been installed into this NC<br />
valve port. (See Figure 2 of Figure 3-2 on page 3-4.)<br />
NOTE: Maximum temperature for the shutter control valve assembly is 105 °C<br />
for bakeout and operation.<br />
IPN 074-155G<br />
3 - 2
3.3 Electrical and Pneumatic Connections<br />
3.3.1 Electrical<br />
CrystalSix Sensor Operating Manual<br />
To complete installation of the assembly, make electrical connections to Pins A<br />
and C for either 25 V(ac) or V(dc). (See Figure 3-1.) Current required is<br />
approximately 70 mA.<br />
Figure 3-1 Pin Connections<br />
Miniature hexagon plug<br />
provided in the Shutter<br />
Control Valve Ship Kit<br />
(007-196) or the Control<br />
Valve Assembly (007-199)<br />
IPN 074-155G<br />
3 - 3
CrystalSix Sensor Operating Manual<br />
Figure 3-2 Minature Pneumatic Solenoid Tube Connections<br />
IPN 074-155G<br />
3 - 4
CrystalSix Sensor Operating Manual<br />
IPN 074-155G<br />
Figure 3-3 Shutter Control Valve<br />
3 - 5
CrystalSix Sensor Operating Manual<br />
Figure 3-4 2 3/4” Dual Coaxial Feedthrough & Valve Assembly<br />
IPN 074-155G<br />
3 - 6
CrystalSix Sensor Operating Manual<br />
Chapter 4<br />
Maintenance<br />
4.1 General precautions<br />
4.1.1 Maintain the Temperature of the Crystal<br />
Periodically measure the water flow rate through the crystal sensor to verify that<br />
it meets or exceeds the value specified in chapter one. Depending upon the<br />
condition of the cooling water used, the addition of an in-line water filtering<br />
cartridge system may be necessary to prevent flow obstructions. Many system<br />
coaters use parallel water supply taps that provide high total flows. An<br />
obstruction or closed valve in the pipe that supplies water to the sensor head<br />
would not result in a noticeable reduction of total flow. The best test is to directly<br />
monitor the flow leaving the sensor.<br />
The crystal requires sufficient water cooling to sustain proper operational and<br />
temperature stability. Ideally, a constant heat load is balanced by a constant<br />
flow of water at a constant temperature. Inficon's quartz crystals are designed<br />
to provide the best possible stability under normal operating conditions. No<br />
crystal can completely eliminate the effects of varying heat loads. Sources of<br />
heat variation include radiated energy emanating from the evaporant source<br />
and from substrate heaters.<br />
4.1.2 Use the Optimum Crystal Type<br />
IPN 074-155G<br />
Certain materials, especially dielectrics, may not adhere strongly to the crystal<br />
surface and may cause erratic readings. For many dielectrics, adhesion is<br />
improved by using crystals with silver coated electrodes. Gold is preferred for<br />
other applications.<br />
4.1.3 Crystal Concerns when Opening the Chamber<br />
Thick deposits of some materials, such as SiO, Si and Ni will normally peel off<br />
the crystal when it is exposed to air, due to changes in film stress caused by<br />
gas absorption. When peeling material is observed, replace the crystal.<br />
4 - 1
CrystalSix Sensor Operating Manual<br />
4.2 Crystal Holder Maintenance<br />
In dielectric coating applications, the surface where the crystal contacts the<br />
crystal holder may require periodic cleaning. Since most dielectrics are<br />
insulators, any build-up due to blow-by will eventually cause erratic or poor<br />
electrical contact between the crystal and the sensor body. This build-up will<br />
also cause a reduction in thermal transfer from the crystal to the sensor body.<br />
Both of these will result in noisy operation and early crystal failure.<br />
Cleaning may be accomplished by gently buffing the crystal holder to crystal<br />
seating surface with a white Scotch-Brite pad followed by an ultrasonic bath<br />
in soap solution followed by thorough rinsing in deionized water and drying or<br />
by ultrasonic cleaning and rinsing only.<br />
NOTE: The crystal holder seating surface is machined to a very fine finish (16<br />
micro inches rms). This high quality finish is essential to provide good<br />
electrical and thermal contact with the crystal. Applying excessive force<br />
during cleaning or using overly abrasive cleaning materials may<br />
damage this finish and reduce sensor performance.<br />
4.3 Retainer Spring Adjustment Instructions<br />
Occasionally you may become dissatisfied with the way the ceramic retainer is<br />
secured in the crystal holder. To alter the magnitude of the retaining force, use<br />
the following procedure.<br />
Tools required:<br />
M<br />
M<br />
Scribe or other pointed tool.<br />
Needle nose pliers (two required).<br />
1 Position the crystal holder with the crystal aperture oriented downward.<br />
2 Insert the point of the scribe between the inside edge of the crystal holder<br />
cavity and one of the two wire segments that protrude into the crystal cavity<br />
(Figure 4-1-a).<br />
3 Using the scribe, gently remove the spring from its groove in the crystal<br />
holder cavity.<br />
4 Consult Figure 4-1-b to determine the direction in which the 'transition point'<br />
must be relocated, to attain the desired retention forces. Moving this<br />
transition point approximately 1/8" is generally sufficient.<br />
5 Grasp the spring, with the pliers, just below the transition point. Using the<br />
second set of pliers, bend the spring as illustrated by the dashed line in<br />
Figure 4-1-c to remove the existing transition point.<br />
IPN 074-155G<br />
4 - 2
CrystalSix Sensor Operating Manual<br />
Figure 4-1 Location of the Transition Point<br />
6 Use both pliers to form a new transition point according to Figure 4-1-b, thus<br />
returning the spring to a shape similar to the solid line delineation of Figure<br />
4-1-c.<br />
7 Reinstall the spring into the groove provided in the crystal cavity.<br />
8 Determine if the retention force is acceptable and that the wire does not<br />
impede crystal insertion. Repeat these instructions if unacceptable<br />
retention forces persist.<br />
IPN 074-155G<br />
4.4 Alignment instruction for INFICON<br />
CrystalSix sensor (IPN 750-446)<br />
During shipment, units may vibrate slightly out of position. This does not mean<br />
alignment is required. The unit will return to the centered position the first time<br />
it is pneumatically activated.<br />
The unit in the shipped condition has been aligned at the factory, no further<br />
alignment is required.<br />
NOTE: Realignment is only required if the unit has been disassembled for any<br />
reason, such as evaporant material removal, or any electrical problem<br />
that may occur, or if the ratchet (item #22 DWG 750-446 shown on<br />
Figure 1-3 on page 1-6) is loosened, or removed. This procedure is<br />
critical and must be carefully undertaken.<br />
4 - 3
CrystalSix Sensor Operating Manual<br />
CAUTION<br />
<strong>Inc</strong>orrect rotation direction with the stops disabled will<br />
cause permanent damage rendering transducer<br />
inoperative. Refer to Figure 1-2 on page 1-5 for proper<br />
direction of rotation.<br />
The unit, when properly aligned, will index the crystal to a position that is<br />
centered within the aperture provided in the heat shield. The unit must be<br />
aligned if this condition does not exist.<br />
Reference Figure 1-3 on page 1-6.<br />
Equipment Required:<br />
M<br />
M<br />
M<br />
M<br />
M<br />
5/64" allen wrench (<strong>Inc</strong>luded in 750-268 Kit)<br />
1/16" allen wrench (<strong>Inc</strong>luded in 750-268 Kit)<br />
3/32" allen wrench (<strong>Inc</strong>luded in 750-268 Kit)<br />
Alignment tool assembly 750-254-G1 (<strong>Inc</strong>luded in 750-268 kit)<br />
Regulated air supply 80-90 psi (75 psi for alignment purposes only)<br />
4.4.1 Alignment Instructions<br />
With the required equipment at hand, proceed as follows:<br />
1 Temporarily connect an air supply to the bellows assembly supply tube.<br />
Regulate the air pressure to 75 psi.<br />
2 Insert the 0.125" diameter alignment pin (of the 750-254-G1 assembly) in<br />
the alignment hole (if not already installed) as shown in Figure 4-2 on page<br />
4-6. The carousel may need to be rotated to achieve the alignment condition<br />
shown in Figure 4-2.<br />
Loosen the set screws (two set screws per item) of the ratchet (item #22) and<br />
the stop ratchet (item #38).<br />
Loosen the #2 fastener (item #42) that attaches the detent (item #41) to the<br />
bellows assembly item #19). Do NOT remove detent.<br />
3 Actuate the bellows assembly by applying 24 volts to the leads of the<br />
solenoid valve of the solenoid valve assembly. Consult Figure 3-1 on page<br />
3-3 for wiring assignments. The air pressure must be sustained.<br />
4 Rotate the ratchet (item #22) counter-clockwise until one tooth contacts the<br />
pin of the pawl and actuator stem assembly (item #24). Secure the ratchet<br />
to the 0.25" diameter shaft of the carousel assembly (item #5) utilizing the<br />
#6-32 x .125" long socket set screw (item #33).<br />
IPN 074-155G<br />
4 - 4
CrystalSix Sensor Operating Manual<br />
5 Rotate the stop ratchet (Item #38) CW (clockwise) until it contacts the stem<br />
of the pawl and actuator stem assembly (Item #24) as shown in Figure 4-3<br />
on page 4-14.<br />
6 Rest the detent spacing tool on the top of the alignment pin as shown in<br />
Figure 4-4 on page 4-15. Position the detent spacing tool (of the 750-254-G1<br />
assembly) between the detent (Item #41) and ratchet (Item #22) as shown<br />
in Figure 4-4. Pull the detent against the detent spacing tool and<br />
subsequently against the tooth of the ratchet. Tighten the #2 fastener (Item<br />
#42) to secure the detent to the bellow assembly.<br />
7 Remove the detent spacing tool.<br />
8 Release air pressure from the bellows assembly (item #19).<br />
9 Remove the 0.125 diameter alignment pin of the 750-254-G1 alignment tool<br />
assembly from the hole.<br />
10 Prior to installation of the crystal holder assembly, check the continuity<br />
between the center contact of the connector and the electrical contacts<br />
associated with the carousel assembly (item #5). Install the crystal holder<br />
assembly when electrical continuity is verified. If electrical continuity is not<br />
verified, the unit should be disassembled (see section 4.4.2 on page 4-6).<br />
The electric contact associated with the carousel will have to be adjusted to<br />
ensure electrical contact when assembled.<br />
11 Press the crystal switch button on the hand-held controller or the instrument<br />
front panel. The sensor will advance to the next crystal position. Each<br />
crystal should be centered in the aperture. Repeat step #10 for each crystal<br />
position. Make certain the detent drops in to engage each tooth of the<br />
ratchet (item #22) on each pulse.<br />
12 Secure the actuator cover (item #15) to the top plate (item #10) using two<br />
#4-40 x 0.187" long socket head cap screws (items #16 and #17).<br />
IPN 074-155G<br />
13 Install the heat shield (item #8) by first orienting the slot in the heat shield<br />
to accommodate the water lines, then secure the heat shield by applying<br />
pressure near the center of the shield. The shield should snap in place.<br />
14 Regulate the air supply to 80-90 psi (550-618 KPa) for operation.<br />
Unit is now ready for operation.<br />
4 - 5
CrystalSix Sensor Operating Manual<br />
Figure 4-2 Alignment Pin Installation<br />
4.4.2 Disassembly Instructions<br />
In the following steps, reference Figure 1-3 on page 1-6 and Figure 4-2 on page<br />
4-6.<br />
1 Remove the two #4 fasteners that secure the actuator cover (item #15) to<br />
the top plate (item #10).<br />
2 Remove the actuator cover. Remove the heat shield (item #8) by gently<br />
pulling on the outside of the shield, the shield should snap off.<br />
3 Remove the extension spring from the pawl and actuator stem assembly<br />
(item #24).<br />
4 Remove the two #4 fasteners (item #20) that secure the bellows assembly<br />
(item #19) to the top plate (item #10).<br />
5 Carefully remove the bellows assembly. The pawl and actuator stem<br />
assembly (item #24) and the detent (item #41) will be removed with the<br />
bellows assembly.<br />
6 Using the 1/16" allen wrench, loosen the set screws (item #33) that secures<br />
the ratchet (item #22) and the stop ratchet (item #38) to the carousel<br />
assembly (item #5). Remove the ratchet (item #22) and the stop ratchet<br />
(item #38).<br />
7 Remove the three #4 fasteners (item #14) that secure the top plate (item<br />
#10) to the sensor body (item #11).<br />
8 Remove the top plate (item #10).<br />
9 Remove the Teflon washer (item #39).<br />
IPN 074-155G<br />
4 - 6
CrystalSix Sensor Operating Manual<br />
CAUTION<br />
When removing the top plate make certain the<br />
connector terminal does not become damaged.<br />
10 Remove the compression spring (item #28).<br />
11 Remove the carousel assembly (item #5)<br />
CAUTION<br />
When removing the carousel make certain the 0.126"<br />
diameter ball (item #27) does not become lost.<br />
4.4.3 Assembly Instructions<br />
In the following steps, reference Figure 1-3 on page 1-6 and Figure 4-2 on page<br />
4-6.<br />
1 Place the 0.126" diameter ball (item #27) in the countersunk hole of the<br />
sensor body (item #11).<br />
2 Attach the corrugated springs (item #31) if not already attached to the<br />
sensor body (item #11), as illustrated in detail "F" of Figure 1-3 on page 1-6,<br />
utilizing the 0-80 pan head screws (item #45).<br />
CAUTION<br />
IPN 074-155G<br />
Be extremely careful when handling the corrugated<br />
springs to avoid distortion. The successful operation<br />
of this apparatus is dependent on this component's<br />
integrity.<br />
3 With the free end of each corrugated spring outside the sensor body, install<br />
the carousel assembly (item #5) so that it rests on the .126" diameter ball.<br />
Insert the corrugated springs into the space between the carousel (item #5)<br />
and the body (item #11). Make certain that the corrugated springs are not<br />
damaged upon installation.<br />
4 Rotate the carousel clockwise until the alignment hole in the carousel lines<br />
up with the alignment hold of the body. Insert the 0.125" diameter alignment<br />
pin of the alignment tool assembly (750-254) provided. Refer to Figure 4-2<br />
on page 4-6.<br />
4 - 7
CrystalSix Sensor Operating Manual<br />
5 Place the compression spring (item #28) in the cavity surrounding the 0.25"<br />
diameter shaft of the carousel assembly. Install the Teflon washer (item #39)<br />
onto the.25" diameter shaft.<br />
6 With the connector facing outward, pass the top plate (item #10) over the<br />
0.25" diameter shaft of the carousel assembly (item #5) and the .125"<br />
diameter alignment pin.<br />
7 Secure the top plate to the sensor body utilizing the three #4-40 screws<br />
(items #14 and 17).<br />
8 Install the pawl and actuator stem assembly (item #24) into the bellows<br />
assembly (item #19) by threading the actuator stem into the mating hole<br />
located in the bore of the bellows assembly. Continue to thread the actuator<br />
stem until the shoulder of the actuator stem is approximately .035" away<br />
from the bellows assembly. This .035" distance specification is for reference<br />
only; the actuator stem position may have to be adjusted to obtain the<br />
desired condition, as illustrated in Figure 1-3 on page 1-6.<br />
9 Fasten the bellows assembly to the top plate utilizing the two #4-40 x 1.125"<br />
long screws (item #20). Do not tighten the screws. Position the bellows<br />
assembly in such a fashion as to allow the actuator stem to come in contact<br />
with the ball bearings (item #25) as illustrated in Figure 1-3 on page 1-6.<br />
Tighten the screws. Loosen the #2 screw (item #42) which secures the<br />
detent to the bellow assembly (item #19).<br />
10 Slide the ratchet (item #22) and the stop ratchet (item #38) onto the 0.25"<br />
diameter shaft of the carousel assembly (item #5) as illustrated. Do not<br />
tighten the #6-32 set screws (item #33).<br />
11 Attach the loop of the extension spring in the hole provided in the pawl of<br />
the pawl and actuator stem assembly (item #24).<br />
12 Position the ratchet (item #22) such that it engages the pin of the pawl and<br />
actuator stem assembly (item #24).<br />
13 Position the detent (item #41) so it engages the ratchet (item #22).<br />
Unit is now ready to be aligned, refer to section 4.4.1 on page 4-4.<br />
IPN 074-155G<br />
4 - 8
CrystalSix Sensor Operating Manual<br />
4.5 Troubleshooting the CrystalSix Sensor<br />
Table 4-1 Troubleshooting<br />
Symptom Cause Remedy<br />
Crystal fail signal on front<br />
panel of unit will not<br />
disappear even though<br />
crystal can be seen<br />
through heat shield<br />
aperture.<br />
Damaged Crystal.<br />
Loss of electrical signal.<br />
Replace crystal.<br />
Check for electrical<br />
continuity betwen<br />
feedthrough and leaf<br />
srpings that make<br />
contact with the crystal<br />
holder in the sensor.* If<br />
electrical problem<br />
originates in the sensor,<br />
consult Chapter Chapter<br />
4 for disassembly<br />
instructions, if necessary.<br />
IPN 074-155G<br />
Unit will not advance<br />
when crystal switch key<br />
is pressed.<br />
Crystal not centered in<br />
aperture.<br />
Loss of pneumatic<br />
supply, or pressure is<br />
insufficient for proper<br />
operation.<br />
Operation has been<br />
impaired as a result of<br />
peeling of the material<br />
accumulated on the face<br />
of the cover.<br />
Improper alignment.<br />
0.025” diameter orifice<br />
not installed inline to the<br />
supply side of the<br />
solenoid valve assembly.<br />
Large jumps of thickness Mode hopping due to<br />
reading during deposition damaged crystal.<br />
* Make certain the leaf<br />
springs in the carousel<br />
assembly are bent up far<br />
enough to contact the<br />
crystal holder when<br />
installed.<br />
Establish air supply and<br />
regulate to 80-90 psi for<br />
operation.<br />
Consult Chapter Chapter<br />
4 for disassembly<br />
instructions to remove<br />
material or to correct<br />
mechanical failure.<br />
Realign per alignment<br />
instructions in Chapter<br />
Chapter 4.<br />
Install orifice where<br />
shown on Figure 2-3 on<br />
page 2-8.<br />
Replace crystal.<br />
4 - 9
CrystalSix Sensor Operating Manual<br />
Table 4-1 Troubleshooting (continued)<br />
Symptom Cause Remedy<br />
Crystal ceases to<br />
oscillate during<br />
deposition before it<br />
reaches its “normal life.<br />
Crystal does not oscillate<br />
or oscillates<br />
intermittently (both in<br />
vacuum and in air).<br />
Crystal oscillates in<br />
vacuum but stops<br />
oscillation after open to<br />
air.<br />
Crystal near the end of its<br />
life.<br />
Scratches or foreign<br />
particles on the crystal<br />
holder seating surface.<br />
Crystal is being hit by<br />
small droplets of molten<br />
material from the<br />
evaporation source.<br />
Damaged crystal.<br />
Deposition material<br />
built-up on edge of the<br />
crystal holder and<br />
touching the crystal.<br />
Material on crystal holder<br />
partially masking full<br />
crystal area.<br />
Defective or damaged<br />
crystal.<br />
Existence of electrical<br />
short or poor electrical<br />
contacts.<br />
Crystal was near the end<br />
of its life; opening to air<br />
causes film oxidation,<br />
which increases film<br />
stress.<br />
Excessive moisture<br />
accumulation on the<br />
crystal.<br />
Replace crystal.<br />
Replace the crystal<br />
holder (IPN<br />
750-262-G1). Clean,<br />
polish the crystal seating<br />
surface of the crystal<br />
holder.<br />
Move the sensor further<br />
away from the evaporant<br />
source.<br />
Change crystal.<br />
Clean the crystal holder.<br />
Clean crystal holder.<br />
Replace crystal.<br />
Check for electrical<br />
continuity and short in<br />
sensor cable, connector,<br />
contact springs,<br />
feedthroughs.<br />
Replace crystal<br />
Turn off cooling water to<br />
sensor before opening it<br />
to air; flow hot water<br />
through the sensor when<br />
the chamber is open.<br />
IPN 074-155G<br />
4 - 10
CrystalSix Sensor Operating Manual<br />
Table 4-1 Troubleshooting (continued)<br />
IPN 074-155G<br />
Symptom Cause Remedy<br />
Thermal instability: large<br />
changes in thickness<br />
reading during source<br />
warm-up (usually causes<br />
thickness reading to<br />
decrease) and after the<br />
termination of deposition<br />
(usually causes<br />
thickness reading to<br />
increase)<br />
Poor thickness<br />
reproducibility<br />
Crystal not properly<br />
seated.<br />
Excessive heat input to<br />
the crystal.<br />
No cooling water.<br />
Poor thermal transfer<br />
from water tube to body.<br />
Erratic source emission<br />
characteristics.<br />
Check and clean crystal<br />
seating surface of the<br />
crystal holder.<br />
If heat is due to radiation<br />
from the evaporation<br />
source, move sensor<br />
further away from source<br />
and use sputtering<br />
crystals for better thermal<br />
stablity.<br />
Check cooling water flow<br />
rate. Flow rate should be<br />
minimum of 150-200<br />
c/min @ 30 °C max.<br />
Use a new water tube<br />
whenever the clamping<br />
assembly has been<br />
removed from the body. If<br />
a new water tube is not<br />
available, use a single<br />
layer of common<br />
aluminum foil between<br />
the cooling tube and the<br />
sensor body, if your<br />
process allows.<br />
Move sensor to a<br />
different location; check<br />
the evaporation source<br />
for proper operating<br />
conditions; insure<br />
relatively constant pool<br />
height and avoid<br />
tunneling into the melt.<br />
4 - 11
CrystalSix Sensor Operating Manual<br />
Table 4-1 Troubleshooting (continued)<br />
Symptom Cause Remedy<br />
Sensor jamming<br />
Material does not adhere<br />
to the crystal.<br />
Crystal holders come<br />
loose and jam sensor<br />
during rotation. May be<br />
caused by absence of<br />
orifice in airline.<br />
Electrical contacts on<br />
carousel may be<br />
damaged if unit was<br />
counter rotated.<br />
Check the cleanliness of<br />
the crystal surface;<br />
evaporate an<br />
intermediate layer of<br />
proper material on the<br />
crystal to improve<br />
adhesion.<br />
Check for orifice, see<br />
Chapter Chapter 3.<br />
Replace contacts.<br />
IPN 074-155G<br />
4 - 12
4.6 Replacing the Bellows Assembly<br />
[lPN 750286-P2]<br />
Reference Figure 1-3 on page 1-6.<br />
Equipment required:<br />
CrystalSix Sensor Operating Manual<br />
IPN 074-155G<br />
M<br />
M<br />
M<br />
M<br />
1 /16" allen wrench<br />
3/32" allen wrench<br />
Alignment tool assembly 750-254-G1<br />
Regulated air supply 80-90 psi<br />
1 Remove the two #4-40 fasteners that secure the actuator cover (item #15)<br />
to the top plate (item #10). Remove the heat shield (item #8) by gently<br />
pulling on the outside circumference of the shield. The shield should snap<br />
off.<br />
2 Advance the carousel (item #5) using the crystal switch button on the<br />
hand-held controller or on the controller front panel as many times as<br />
necessary until the alignment holes in the sensor body (item #11), carousel<br />
assembly (item #5) and the top plate (item #10) coincide.<br />
3 Insert the .125" diameter alignment pin into the alignment hole, as shown in<br />
Figure 4-2 on page 4-6.<br />
The bellows assembly will be removed at this time. Proceed as follows:<br />
4 Remove the extension spring from the pawl and actuator stem assembly<br />
(item #24).<br />
5 Remove the two #4 fasteners (item #20) that secure the bellows assembly<br />
(item #19) to the top plate (item #10).<br />
6 Carefully remove the bellows assembly. The pawl and actuator stem<br />
assembly (item #24) and the detent (item #41) will be removed with the<br />
bellows assembly.<br />
7 Using the 1/16" allen wrench, loosen the 6-32 set screws (item #33) that<br />
secures the ratchet (item #22) and the stop ratchet (item #38) to the<br />
carousel assembly (item #5). Remove the stop ratchet (item #38) and the<br />
ratchet (item #22).<br />
8 Thread the pawl and actuator stem assembly (item #24) out of the bore of<br />
the bellows assembly by rotating the pawl and actuator stem assembly in a<br />
counter-clockwise direction. Detach the detent (item #41) and related<br />
hardware (items 40, 42-44) from the bellows assembly (item #19) by<br />
removing the #2 fastener (item #42).<br />
9 Discard the bellows assembly.<br />
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CrystalSix Sensor Operating Manual<br />
10 Install the pawl and actuator stem assembly (item #24) into the new bellows<br />
assembly by threading the actuator stem into the mating hold located in the<br />
bore of the bellows assembly. Continue to thread the actuator stem until the<br />
shoulder of the actuator stem is approximately .035" away from the bellows<br />
assembly. This.035" distance specification is for reference only; the<br />
actuator stem position may have to be adjusted to obtain the desired<br />
condition as illustrated in Figure 1-3 on page 1-6.<br />
11 Fasten the bellows assembly to the top plate utilizing the two #4-40 x 1.125"<br />
long screws. Do not tighten the screws. Position the bellows assembly in<br />
such a fashion as to allow the actuator stem to come in contact with the ball<br />
bearings (item #25) as illustrated. Tighten the screws.<br />
12 Slide the rachet (item #22) onto the 0.25" diameter shaft of the carousel<br />
assembly (item #5). Do not tighten the #6-32 set screw (item #33). Slide the<br />
ratchet (item #22) onto the .25" diameter of the carousel assembly. Do not<br />
tighten the #6-32 set screws.<br />
13 Attach the extension spring in the hole provided in the pawl of the pawl and<br />
actuator stem assembly (item #24).<br />
14 Position the ratchet (item #22) such that it engages the pin of the pawl and<br />
actuator stem assembly (item #24).<br />
15 Attach the detent and related hardware (items 40, 42-44) to the new bellows<br />
assembly. Do not tighten. Position the detent (item #41) so that it engages<br />
the ratchet (item #22).<br />
Unit is now ready to be aligned. Refer to section 4.4.1 on page 4-4 for alignment<br />
instructions.<br />
Figure 4-3 Setting the stop ratchet<br />
IPN 074-155G<br />
4 - 14
CrystalSix Sensor Operating Manual<br />
Figure 4-4 Setting the detent<br />
Ratchet<br />
Detent Spacer<br />
Alignment Pin<br />
Detent<br />
Alignment Pin<br />
Top Plate Assembly<br />
IPN 074-155G<br />
4 - 15
CrystalSix Sensor Operating Manual<br />
This page is intentionally blank.<br />
IPN 074-155G<br />
4 - 16
CrystalSix Sensor Operating Manual<br />
Chapter 5<br />
Feedthrough Outline Drawings<br />
The following Feedthrough Outline Drawings provide dimensions and other<br />
pertinent data necessary for planning equipment configurations.<br />
Figure 5-1 1" Crystal feedthrough w/airtube (lPN 750-030-GI)<br />
(contains one coaxial, two water tubes and one air tube)<br />
1" CRYSTAL FEEDTHROUGH W/AIR TUBE<br />
MICRODOT CONNECTOR<br />
BNC CONN.<br />
SEAMLESS TUBE<br />
0.188 O.D., 0.131 I.D.<br />
# 10-32 INTERNAL<br />
THREAD<br />
0.75<br />
0.312 HEX<br />
0.38<br />
5.00 2.00<br />
1.00<br />
13.00<br />
C L<br />
0.188<br />
IPN 074-155G<br />
0.50 C L<br />
0.25<br />
1.50<br />
0.125<br />
0.28<br />
5 - 1
CrystalSix Sensor Operating Manual<br />
Figure 5-2 Standard 2 3/4" CONFLAT® flange (002-080)<br />
(contains two coaxials, two water tubes and one air tube)<br />
IPN 074-155G<br />
5 - 2