CRYSTALSIX - Schoonover, Inc.

O P E R A T I N G M A N U A L 

CRYSTALSIX 

Sensor 

IPN 074-155

O P E R A T I N G M A N U A L 

CRYSTALSIX 

Sensor 

IPN 074-155G 

TWO TECHNOLOGY PLACE 

EAST SYRACUSE, NY 13057-9714 USA 

Phone: +315.434.1100 

Fax: +315.437.3803 

Email: reachus@inficon.com 

P.O. BOX 1000 

FL-9496 BALZERS, LIECHTENSTEIN 

Phone: +423.388.50.36 

Fax: +423.388.47.51 

Email: reachfl@inficon.com 

BONNER STRASSE 498 

D-50968 COLOGNE, GERMANY 

Phone: +49.0.221.347.1999 

Fax: +49.0.221.347.1478 

Email: reachld@inficon.com 

VISIT US ON THE WEB AT www.inficon.com 

©2001 INFICON

Trademarks 

The trademarks of the products mentioned in this Operating Manual are held by the companies that 

produce them. 

INFICON® and Composer® are trademarks of INFICON Inc. 

ConFlat® is a registered trademark of Varian Associates. 

Teflon® is a registered trademark of Dupont. 

Scotch-Brite is a trademark of 3M. 

SWAGELOK® and CAJON® are registered trademarks of Swagelok, Co. 

Inconel® is a registered trademark of International Nickel Co. 

Microdot® is a registered trademark of Microdot Corp. 

All other brand and product names are trademarks or registered trademarks of their respective companies. 

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assumes no responsibility for its use and shall not be liable for any special, incidental, or consequential 

damages related to the use of this product. 

All rights reserved. Reproduction or adaptation of any part of this document without permission is unlawful. 

© 2001 INFICON Inc.

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Phone: +315.434.1100 

Fax: +315.437.3803 


P.O. BOX 1000 


Phone: +423.388.50.36 

Fax: +423.388.47.51 




Phone: +49.0.221.347.1999 

Fax: +49.0.221.347.1478 


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FIRST CLASS PERMIT NO. 49 EAST SYRACUSE, NEW YORK 

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INFICON INC. 

Two Technology Place 

East Syracuse, New York 13057-9714

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Phone: +315.434.1100 

Fax: +315.437.3803 


P.O. BOX 1000 


Phone: +423.388.50.36 

Fax: +423.388.47.51 




Phone: +49.0.221.347.1999 

Fax: +49.0.221.347.1478 


VISIT US ON THE WEB AT www.inficon.com

CrystalSix Sensor Operating Manual 

Table Of Contents 

Chapter 1 

Sensor Specifications 

1.1 Specifications for CrystalSix Sensor 750-446-G1 . . . . . . . . . . . . . . . . .1-1 

1.1.1 Installation Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-2 

1.1.1.1 Feedthrough . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-2 

1.1.1.2 Other. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-2 

1.1.1.3 Utilities . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-2 

1.1.2 Materials . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-3 

1.1.3 Unpacking Instructions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-3 

1.1.4 Inventory . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-4 

IPN 074-155G 

Chapter 2 

Sensor Installation 

2.1 Crystals in the CyrstalSix Sensor . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-1 

2.1.1 Handle the Crystal with Care . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-1 

2.1.2 Care of the Ceramic Retainer . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-2 

2.2 Pre-installation Sensor Check . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-4 

2.2.1 IC/5 Deposition Controller . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-4 

2.2.2 XTC/2 or XTC/C Deposition Controller . . . . . . . . . . . . . . . . . . . . . . . . .2-5 

2.2.3 IC/4 or IC/4 PLUS Deposition Controller . . . . . . . . . . . . . . . . . . . . . . . .2-6 

2.2.4 IC-6000 or XTC Deposition Controller . . . . . . . . . . . . . . . . . . . . . . . . . .2-7 

2.3 General Guidelines for CrystalSix Sensor . . . . . . . . . . . . . . . . . . . . . . .2-7 

2.3.1 Crystal Sensor Installation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-11 

2.4 CrystalSix Sensor Installation when used with an IC/5 . . . . . . . . . . . . 2-13 

2.4.1 Programming the Relay Outputs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-13 

2.4.2 Wiring the Relay Outputs with Relay I/O boards 760-162-G1 or 

760-162-G1/G2 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-13 

2.5 CrystalSix Sensor Installation when used with an XTC/2 or XTC/C . . . 2-14 

2.6 CrystalSix Sensor Installation when used with an IC/4 or IC/4 PLUS . .2-14 

2.6.1 Programming the Relay Outputs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-14 

2.6.2 Wiring the Relay Outputs with Relay I/O boards 755-122-G1 or 

755-122-G1/G2 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-15 

2.7 CrystalSix Sensor Requirement When Not Installed With 

An IC/5, XTC/2, XTC/C, IC/4, or IC/4 PLUS . . . . . . . . . . . . . . . . . . . . 2-17 

TOC - 1


Chapter 3 

Installation of the Shutter Control Valve Assembly 

3.1 Installation with 1” Bolts . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1 

3.2 Installation with 2 3/4” Feedthrough . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-2 

3.3 Electrical and Pneumatic Connections . . . . . . . . . . . . . . . . . . . . . . . . . 3-3 

3.3.1 Electrical . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3 

Chapter 4 

Maintenance 

4.1 General precautions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1 

4.1.1 Maintain the Temperature of the Crystal. . . . . . . . . . . . . . . . . . . . . . . . 4-1 

4.1.2 Use the Optimum Crystal Type. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1 

4.1.3 Crystal Concerns when Opening the Chamber . . . . . . . . . . . . . . . . . . . 4-1 

4.2 Crystal Holder Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-2 

4.3 Retainer Spring Adjustment Instructions. . . . . . . . . . . . . . . . . . . . . . . . 4-2 

4.4 Alignment instruction for INFICON CrystalSix sensor (IPN 750-446) . . 4-3 

4.4.1 Alignment Instructions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-4 

4.4.2 Disassembly Instructions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-6 

4.4.3 Assembly Instructions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-7 

4.5 Troubleshooting the CrystalSix Sensor. . . . . . . . . . . . . . . . . . . . . . . . . 4-9 

4.6 Replacing the Bellows Assembly [lPN 750286-P2] . . . . . . . . . . . . . . . 4-13 

Chapter 5 

Feedthrough Outline Drawings 

IPN 074-155G 

TOC - 2

1.1 Specifications for CrystalSix Sensor 

750-446-G1 

CAUTION 


Chapter 1 

Sensor Specifications 

Incorrect rotation direction with the stops disabled will 

cause permanent damage rendering transducer inoperative. 

See Figure 1-2 on page 1-5 for proper direction of rotation. 

The CrystalSix sensor is a (six crystal) quar*tz crystal deposition monitor 

transducer. When the monitor crystal being used fails a new crystal is advanced 

into position, fully replacing that crystal’s function. The mechanism used for 

providing this motion is pneumatically powered. The logic for automatic 

operation of this transducer is conveniently provided on most current INFICON 

Deposition Controllers. It is manufactured under US Patent #5,025,644, with 

foreign patents pending. 

Figure 1-1 CrystalSix Sensor 

IPN 074-155G 

Table 1-1 Sensor specification 

Maximum bakeout temp with no water 130 °C 

Maximum operating isothermal 

environment temperature with 

minimum water flow 

Size (maximum envelope) 

Water, air and coax length 

Crystal exchange 

Mounting 

400 °C 

3.8" (9.7 cm) DIA x 2.0" (5.1 cm) high 

Standard 30" (76 cm) 

Front-loading, extraction tool required 

(supplied with unit) 

Six #4-40 tapped holes on the back of 

the sensor body 

1 - 1


1.1.1 Installation Requirements 

1.1.1.1 Feedthrough 

M 

M 

Qty (1) 2-3/4" ConFlat® with two Microdots, two pass water, one air IPN 

002-080, See Figure 5-2 on page 5-2 or, 

Qty (1) 1" bolt with 1 Microdot, two pass water, one air IPN 750-030-G1, see 

Figure 5-1 on page 5-1. 

1.1.1.2 Other 

M 

M 

M 

M 

User to provide vacuum-tight braze joints or connectors for the water and 

air tubes. 

Valve assembly for air, IPN 007-199 (not provided), with a 0.022" restrictor 

orifice installed by the user. (Orifice included with CrystalSix accessory kit.) 

See Table 1-3 on page 1-4. 

XIU or Oscillator designed to interface with the deposition controller. 

Deposition controller must have been designed for this specific crystal 

sensor (INFICON® XTC/2, XTC/C, IC/4, IC/4 PLUS, IC/5). 

1.1.1.3 Utilities 

M 

M 

M 

Minimum water flow 150-200 cc/min, 30 °C max (Do not allow water to 

freeze). Coolant should not contain chlorides as stress corrosion cracking 

may occur. 

Regulated air supply 80-90 psi. (550-618 KPa) 

2 meter maximum length of 1/8" tubing between bellows assembly and the 

control valve. 

CAUTION 

Do not allow watertubes to freeze. This may happen if 

the tubes pass through a cryogenic shroud and the 

fluid’s flow is interrupted. 

IPN 074-155G 

1 - 2


1.1.2 Materials 

Table 1-2 Materials 

Plate, Holders, Material Shield, 

Mechanical Parts 

Springs, Electrical Contacts 

304 type stainless steel 

Au plated Be-Cu, Au Plate Inconel®, 

303 stainless steel 

Water and air tubes S-304, 0.125" (0.32 cm) O.D. x .016" 

(.04 cm) Wall Thickness 30" Long (76 

cm) Seamless Stainless Steel Tubing 

Connector (Microdot) 

Stainless steel 

Insulators >99% A1 2 O 3 

Cable 

Crystal 

Body and Carousel 

Teflon® insulated copper 

0.550" Diameter 

2024 T351 Aluminum 

1.1.3 Unpacking Instructions 

The CrystalSix sensor and accessories are packaged in a single cardboard 

carton with rigid foam inserts. 

Carefully remove the packaged accessories before removing the sensor, then 

remove the red shipping plug from the sensor carousel. 

IPN 074-155G 

1 - 3


1.1.4 Inventory 

In addition to the basic transducer, the complete shipping package includes an 

accessory kit (IPN 750-268-G1) which consists of the following: 

Table 1-3 Contents of accessory kit 

Qty IPN 

Description 

X 750-268-G1 Accessory Kit, CrystalSix Sensor 

1 750-254-G1 Assembly, Alignment Tool 

1 750-279-P1 Crystal Puller 

1 074-155 Manual, CrystalSix 

1 008-010-G10 Assembly, Sensor Crystal 6MHz 

1 059-189 CC-1010-0225 Orifice 0.0225" diameter 

2 070-201 #4 Split Lock Washer, Stainless Steel 

2 084-032 #4-40x0.375" Long Socket Head Cap Screw, Stainless Steel 



1 070-828 Hex Wrench 1/16" SC9-3 

1 070-829 Hex Wrench 3/32" SC9-5 

1 750-037 Spring Tube Bender Kit 

1 008-007 Crystal Snatcher 

1 750-191-G1 Molybdenum disulfide in Alcohol 

IPN 074-155G 

1 - 4


IPN 074-155G 

Figure 1-2 Outline multi crystal sensor 

Rotation 

Direction 

1 - 5

1 - 6 

ASSY, CRYSTAL 

HOLDER, 6 MHZ 

C750-262-G1 

QTY 6 (G1) 

6 

21 

PH FL HD SCR, SS 

#4-40 X .187 LG 

084-069-P1, QTY 4 

(SEE NOTE 6) 

DET,, TUBE 

CLAMPING PLATE 

C750-277-P1 

9 

8 

ASSY, HEAT SHIELD 

C750-250-G1 

(SEE NOTE 5) 

11 REF 

45 

SCREW, SLOT PAN HD S.S. 

#0-80 x 3/16 LG 

A080-012-P1 

SEE DETAIL 'F' 

3.500 

REF 

DRAWING NUMBER: 

B 750-446 

SH: 

OF 

DET, CORRUGATED 

CONTACT SPRING 31 

REF 

WELD ASSY, 

TOP PLATE 10 

D750-265-G1 

BALL BEARING S.S. 

.25 

7Y55-P2512 SDP 

REF 

25 

070-779 QTY 2 

BEARING SPACER 

46 

070-867 

RETAINING RING 

26 

5103-12-H TRUARC 

070-398, QTY 2 

DET, STOP 

RATCHET 

38 

B750-294-P2 

SOC SET SCREW 33 

2 

EXTENSION SPRING 

REF 

SEE NOTE #3 

#4-40 X.375 LG 

14 

SOC HD SCR, SS 

084-032, QTY 3 

#4 SPLIT LW, SS 

17 

070-201, QTY 7 

B 

REF 

X X X X 

SECTION B-B 

A 

22 

15 

5 

11 

DET, RATCHET 

B750-293-P2 

DET, ACTUATOR COVER 

C750-276-P2 

SOC HD SCR, SS 

16 #4-40 x .187 LG 

084-044, QTY 2 

ASSY, MULTI XTAL 

SENSOR BODY 

C750-248-G1 

ASSY, CAROUSEL 

D750-261-G1 

STEEL, NICKEL PLATED 

33 #6-32 x .125 LG 

A086-084-P2 QTY 3 

(SEE NOTE 1) 

17 #4 SPLIT LOCKWASHER, SS 

2 REF 

B 

ALIGNMENT 

TEFLON WASHER 

39 070-870 

SOC SET SCREW, HARDENED 

ASSY, SENSOR 

HEAD CABLE, 

C321-039-G4 

IPN 007-044 

36 

DIRECTION OF 

ROTATION OF 

CAROUSEL ASSY 

(ITEM 5) 

DETAIL 'F' 

2.00 

REF 

31 

SPRING MUST LIE 

IN BODY IN DIRECTION 

OF ROTATION AS 

SHOWN 

1.00 

REF 

C 

DET, CORRUGATED 

SPRING 

B750-257-P3 

3.127 

REF 

* 

* 

* 

* 

3 

4 

* 

* 

* 

* 

2 

5 

* 

* 

SECTION C-C 

OPERATING 

PRESSURE TAG 37 

B750-299-P1 

1 

6 

* 

* 


REF 

.034 

HOLE REF 

27 

.126 DIA BALL S.S. 

070-778 QTY 1 

(SEE NOTE 1) 

ASSY, PAWL AND 

ACTUATOR STEM 

B750-295-G1 

SPEC, BELLOWS ASSY 

C750-286-P2 

24 

19 

42 

DET, DETENT 

41 B750-291-P1 

SCREW, SOC HD S.S. 

#2-56 x 1/4 LG 

082-024 

28 

COMPRESSION 

SPRING 

LC-026E-1-SS 

070-777 

SOC HD SCREW 

#4-40 x 1.125 LG SS 20 

084-093, QTY 2 

#4 SPL LW, SS 17 

2 REF 

NOTES: 

1- APPLY MOLYBDENUM DISULFIDE SPARINGLY ON 

C'SINKS OF ITEMS 5 AND 11 AND ON 

THREADS OF ITEMS 22 & 38. 

2- SEE D750-259 FOR OUTLINE DWG 

.31 REF 

DET, DETENT 

A 

40 

SPACER 

B750-292-P2 

3- STAMP (4) 3/32 HIGH CHARACTERS FOR LOT IDENTIFICATION 

CODE (SERIAL NO'S) ON TOP PLATE ASSY (ITEM #10) 

IN AREA INDICATED. 

4- KIT 750-268-G1 SUPPLIED WITH G1 (ITEM #34) 

#2 LOCK WASHER S.S. 

43 

070-170 

44 #2 FLAT WASHER S.S. 

082-022 

5- MINIMUM OF 3/4 LB OF FORCE 

REQD TO REMOVE ITEM 8 FROM 

ITEM 9. 

6- TIGHTEN IN PATTERN AND 

RETIGHTEN IN PATTERN. 

G1 

C 

SECTION A-A 

ASSY, MULTI XTAL SENSOR, 6 MHZ 

DET, WATER LINE 

29 

C750-278-P2 

PROPRIETARY 

NOT FOR REPRODUCTION 

NOR DISTRIBUTION 

ASSY, CRYSTAL 6 SENSOR 

FIRST CALLED FOR: 

SEE SEPARATE PL 

INFICON 

LEYBOLD INFICON INC. 


EAST SYRACUSE, NY 13057 

SCALE: 

FULL 

APPROVED BY: 

DRAWN BY: W BEEBE 

DATE: 6/6/95 CARL GOGOL 10/3/95 ISSUED: AH 10/3/95 

REV A 

DRAWING NUMBER: 

B750-446 

SH: 

OF 

Figure 1-3 Assembly CrystalSix sensor 

IPN 074-155G


Chapter 2 

Sensor Installation 

Successful operation of any crystal sensor depends on proper placement, 

compatibility of its construction with its operating environment and connection 

to proper utilities. 

NOTE: The sensor head, water tube, cable, etc. should be clean and grease 

free when installed in the vacuum chamber. These parts should be 

handled while wearing clean nylon gloves. If parts do become 

contaminated, clean them thoroughly using a suitable solvent to avoid 

outgassing and excessive peeling of deposition material from the 

sensor’s surfaces. 

CAUTION 

Incorrect rotation direction will cause permanent damage 

rendering transducer inoperative. Refer to Figure 1-2 on page 

1-5 for proper direction of rotation. 

2.1 Crystals in the CyrstalSix Sensor 

2.1.1 Handle the Crystal with Care 

IPN 074-155G 

Always use clean nylon lab gloves and clean plastic tweezers when handling 

the crystal. Handle the crystals only by their edges. Anything that comes in 

contact with the crystal surfaces may leave contamination, which may lead to 

poor film adhesion. Poor film adhesion will result in high rate noise and 

premature crystal failure. 

CAUTION 

Do not use metal tweezers to handle crystals. Metal 

tweezers may chip the edge of the crystal. 

2 - 1


2.1.2 Care of the Ceramic Retainer 

CAUTION 

Do not use excessive force when handling the Ceramic 

Retainer Assembly since breakage may occur. Always 

use the crystal snatcher. 

To prevent scratching the crystal electrode, do not 

rotate the ceramic retainer after installation. 

Always use clean nylon lab gloves and plastic 

tweezers for handling the crystal. This avoids 

contamination which may lead to poor adhesion of 

deposited material to the electrode. 

Follow the procedure below to install or replace the crystals in the CrystalSix 

sensor. (Reference Figure 1-3 on page 1-6). 

CAUTION 

Rotating the unit in the wrong direction with the stops 

disabled will cause severe damage! Do not rotate the 

unit by hand to install the crystals or to check indexing. 

1 Remove the heat shield (item #8) by gently pulling on the outside 

circumference of the shield. The shield should snap off. 

2 Since the crystal holders are packaged separately, skip the remainder of 

this step for first-time installations. Using the crystal puller (IPN 750-279-P1, 

provided in ship kit 750-268), remove the crystal holder by pushing the tips 

of the crystal puller over the outside circumference of the crystal holder (see 

Figure 2-2 on page 2-4). Gently pull the crystal holder from its receptacle. A 

slight amount of pressure applied to collapse the tips of the crystal puller 

may be required to extract the crystal holder. 

IPN 074-155G 

3 Insert the tapered end of the crystal snatcher (part number 008-007) into the 

ceramic retainer (A) and apply a small amount of pressure. This locks the 

retainer to the snatcher and allows the retainer to be pulled straight out (B). 

See Figure 2-1. 

2 - 2


Figure 2-1 Using the Crystal Snatcher 

4 Invert the crystal holder and the crystal will drop out. (Skip this step for 

first-time installations.) 

5 Install the new crystal per section 2.1.1 on page 2-1 and section 2.1.2 on page 

2-2. 

6 Using clean nylon gloves, grasp the edge of the new crystal with a clean pair 

of plastic tweezers. Orient the crystal so the patterned electrode is facing 

up. Gently insert the edge of the crystal beneath one of the wire segments 

that protrude into the crystal cavity. Release the crystal. 

7 Replace the ceramic retainer. Initially orient it at an angle to displace the 

spring wire segments in the crystal holder. 

8 Release the crystal snatcher with a slight side-to-side rocking motion. Using 

the backside of the crystal snatcher, push on the ceramic retainer to ensure 

it is completely seated. 

IPN 074-155G 

9 Position the crystal holder between the tips of the crystal puller as illustrated 

in Figure 2-2. 

10 Push the crystal holder into the receptacle of the CrystalSix sensor until 

completely seated. “Snap” the crystal puller to one side to release the 

crystal holder from the crystal puller. Using the non-slotted end of the crystal 

puller, apply pressure to the crystal holder until it is completely seated. 

Verify that the crystal fail signal on the controller display disappears. If the 

crystal fail signal does not disappear, consult section 4.5 on page 4-9. 

11 Press the crystal switch button on the hand held controller or the controller 

front panel. The sensor will advance to the next crystal position. Repeat 

procedure from Step 2 until all six new crystals have been installed. 

12 Install the heat shield (item #8) by first orienting the slot in the heat shield 

to accommodate the water tubes, then secure the heat shield by applying 

pressure near the center of the shield. The shield should snap in place. 

2 - 3


Figure 2-2 Using the Crystal Puller 

2.2 Pre-installation Sensor Check 

Prior to installing the sensor in the vacuum system, you should make certain 

that it is in proper working condition by following the procedure outlined below. 

2.2.1 IC/5 Deposition Controller 

1 Connect the in-vacuum sensor head cable to the feedthrough or a coax 

adapter (microdot/BNC). 

2 Connect one end of the 6" XIU cable (IPN 755-257-G6) to the BNC 

connector or the feedthrough. 

3 Connect the other end of the 6" XIU cable to the connector of the XIU/5 (IPN 

760-600-G1). 

4 Connect one end of the XIU/5 cable (IPN 600-1039-Gxx) to the mating 

connector of the XIU/5. 

5 Connect the other end of the XIU/5 cable to a sensor channel at the rear of 

the controller. 

6 Connect power to the controller and set power switch to ON. Set density at 

1.00 gm/cc, and zero thickness. The display should indicate 0/ or +/-.001 

KÅ. Crystal life should read from 0 to 5%. 

7 Breathe heavily on the crystal. A thickness indication of 1.000 to 2.000 KÅ 

should appear on the display. When the moisture evaporates, the thickness 

indication should return to approximately zero. 

If the above conditions are observed, you can assume the sensor is in proper 

working order and may be installed. 

IPN 074-155G 

2 - 4


2.2.2 XTC/2 or XTC/C Deposition Controller 





3 Connect the other end of the 6" XIU cable to the connector of the XIU (IPN 

757-302-G1). 

4 Connect one end of the XX' long XIU cable (IPN 757-303-GXX) to the 

mating connector of the XIU. 

5 Connect the other end of the XIU cable to a sensor channel at the rear of 










IPN 074-155G 

2 - 5


2.2.3 IC/4 or IC/4 PLUS Deposition Controller 





3 Connect the other end of the 6" XIU cable to the connector of the XIU (IPN 

755-252-G1). 

4 Connect one end of the 15' long XIU cable (IPN 755-258-G15) to the mating 

connector of the XIU. 

5 Connect the other end of the XIU cable to a sensor channel at the rear of 










IPN 074-155G 

2 - 6


2.2.4 IC-6000 or XTC Deposition Controller 

NOTE: See section 2.7. 


adapter (Microdot/BNC). 

2 Connect one end of the 6" OSC cable (IPN 013-070) to the receptacle on 

the feedthrough. 

3 Connect the other end of the 6" OSC cable to the receptacle marked XTAL 

on the oscillator (IPN 013-001). 

4 Connect the end of the oscillator source/sensor cable (IPN 013-067) to the 

remaining BNC receptacle on the oscillator. 

5 Connect the other end of the OSC source/sensor cable to the receptacle 

marked OSC on the rear panel of the controller. 


1.00 gm/cc, and zero the thickness. The display should indicate 0/ or 

+/-0.001 KÅ. Crystal life should read from 0 to 5%. 






2.3 General Guidelines for CrystalSix Sensor 

IPN 074-155G 

Figure 2-3, Figure 2-4, and Figure 2-5 show the typical installation of an 

INFICON water-cooled crystal sensor in the vacuum process chamber. Use the 

illustration and the following guidelines to install your sensors for optimum 

performance and convenience. 

2 - 7


Figure 2-3 Typical CystalSix Installation for IC/5 

IPN 074-155G 

2 - 8


Figure 2-4 Typical CrystalSix Installation for XTC/2 and XTC/C 

IPN 074-155G 

2 - 9


Figure 2-5 Typical CrystalSix Installation for IC/4 PLUS 

IPN 074-155G 

2 - 10


2.3.1 Crystal Sensor Installation 

Generally, install the sensor as far as possible from the evaporation source (a 

minimum of 10" or 25.4 cm) while still being in a position to accumulate 

thickness at a rate proportional to accumulation on the substrate. Figure 2-6 

shows proper and improper methods of installing sensors. 

Figure 2-6 Sensor Installation Guidelines 

SENSORS 

CORRECT 

INCORRECT 

OBSTRUCTION 

INCORRECT 

CORRECT 

INCORRECT 

SOURCE 

IPN 074-155G 

To guard against spattering, use a source shutter to shield the sensor during 

the initial soak periods. If the crystal is hit with even a minute particle of molten 

material, it may be damaged and stop oscillating. Even in cases when it does 

not completely stop oscillating, it may immediately become unstable, or shortly 

after deposition begins instability may occur. 

Plan the installation to insure that there are no obstructions blocking a direct 

path between the sensor and the source. 

Install sensors in such a manner that the center axis of the crystal is aimed 

directly at the source to be monitored. Verify that the angle of the sensor 

location (with reference to the source) is well within the evaporant stream. 

Attach the sensor with a mounting bracket anchored to the deposition chamber. 

With the bracket in place, temporarily position and attach the sensor head as 

outlined in the general guidelines above. Next, temporarily install the 

feedthrough. You may now form, measure, and mark the sensor tubes (use the 

bending tool (IPN 750-036) to form tubes in the system). 

2 - 11


Build the Sensor/Feedthrough Assembly. Remove the sensor and the 

feedthrough, cut the water cooling tubes and air tubes to the proper length and 

connect them directly to the feedthrough or use vacuum rated couplings. 

CAUTION 

To prevent damage to the feedthrough or sensor during 

welding or brazing, insure that at least one inch of 

water tube is left between the sensor and the flame. 

After cutting the water and air tubes, verify that they are clear of metal particles 

by forcing compressed air through the tubing. Heliarc welding is recommended 

(torch brazing may also be acceptable) for connecting the sensor to the 

feedthrough water tube. 

Vacuum rated connectors such as CAJON® are recommended for use between 

the sensor and the feedthrough to speed maintenance. If brazing adapters are 

to be used, attach them to the sensor water-cooling tubes prior to connection 

to the feedthrough. Make connections as follows: 

1 Clean the water tube and adapter surfaces with solvent if necessary. 

2 Apply brazing flux to surfaces being joined. 

3 Braze the connections using a flame temperature appropriate for the 

brazing material being used. 

CAUTION 

Excessive application of brazing material, or excessive 

heat due to brazing, may result in blockage of the water 

tube. 

4 Verify that each joint is not blocked by blowing compressed air through the 

cooling tubes. 

5 Thoroughly clean the braze joint and helium leak test before installing the 

sensor and feedthrough into the process chamber. 

Once all water and air tube connections are fabricated, install the sensor and 

feedthrough assembly into the process system and secure all retaining 

hardware. Shield the coax cable from heat radiating from the evaporant source 

or the substrate heater. You can do this very simply, if your process allows, by 

wrapping aluminum foil around the cable and water tubes. Connect the external 

water tubes from the feedthrough to your water supply system and flow 

IPN 074-155G 

2 - 12


controller. We recommend using detachable couples (Swagelok® or 

equivalent) for external water tube connections. Apply water pressure to verify 

flow and tightness. 

Because of geometric factors, variations in surface temperature, and 

differences in electrical potential, the crystal and substrates often do not 

receive the same amount of material. If you want the thickness indication on the 

unit to represent the thickness on the substrates, calibration is required to 

determine the tooling. Consult your controller’s manual for the proper 

procedure for obtaining the tooling factor. 

CAUTION 

Use of more than 80" (2 meters) of 1/8" tubing between 

the valve and the bellows may cause switcher failure 

because of the time required to bleed out sufficient air 

during de-pressurization. If tubing greater than 1/8" is 

used, the maximum length must be reduced 

proportional to the additional volume. 

2.4 CrystalSix Sensor Installation when used 

with an IC/5 

2.4.1 Programming the Relay Outputs 

1 From the program menu select Source/Sensor Directory (F4). 

2 Select Sensor board 1, 2, 3 or 4 (depending upon unit configuration). 

3 Enter the edit mode. (F5) 

IPN 074-155G 

4 Select Sensor type six (6) for the CrystalSix Sensor. This will enable the 

Crystal Switch output (Switch Out (0, 1-38). 

5 Select a CrystalSwitch output depending upon which I/O board is used. 

2.4.2 Wiring the Relay Outputs with Relay I/O boards 

760-162-G1 or 760-162-G1/G2 

On the relay connector, connect the leads of the solenoid valve across the one 

side of a 24 volt supply (see Table 11.4 of IC/5 Operating Manual) and one side 

of a relay (1-8, 1-16, or 1-24 whichever was programmed). Refer to Table 11.2 

of the IC/5 Operating Manual. Connect a jumper between the second side of 

the 24 volt supply and the second side of the selected relay. 

2 - 13



with an XTC/2 or XTC/C 

Follow the instructions of Section 3.5.2 of the XTC/2 - XTC/C Operating Manual 

(074-183). 


with an IC/4 or IC/4 PLUS 

2.6.1 Programming the Relay Outputs 

1 From the program menu select Source/Sensor (F4). 

2 Select Sensor board 1 or Sensor board 2. 

3 Enter the edit mode. (F5) 

4 Select Sensor type six (6) for the CrystalSix Sensor. This will enable the 

CrystalSwitch output. 

5 Select a CrystalSwitch output (Relay 1-8 or 1-16) depending upon which I/O 

board is used. 

6 Turn the instrument’s power “OFF”, then “ON”, to ensure that the change 

takes place permanently. 

IPN 074-155G 

2 - 14


2.6.2 Wiring the Relay Outputs with Relay I/O boards 

755-122-G1 or 755-122-G1/G2 

1 On the relay connector, see Figure 2-7 on page 2-16, connect the leads of 

the solenoid valve across the one side of a 24 volt supply (see listing) and 

one side of a relay (1-16 whichever was programmed). Connect a jumper 

between the second side of the 24 volt supply and the second side of the 

selected relay. Refer to Figure 2-5 on page 2-10 for a typical installation 

utilizing relay 1 to perform the crystal advance function for the relay I/O 

board. 

Table 2-1 Wiring Connectors 

(P4) 

Top Relay Connector 

(P5) 

Input Lines 

Relay Pins Input Pins 

1 24, 28 1 1, 20 

2 23, 27 2 2, 21 

3 22, 26 3 3, 22 

4 13, 19 4 4, 23 

5 12, 18 5 5, 24 

6 11, 17 6 6, 25 

7 10, 16 7 7, 26 

8 3, 7 8 8, 27 

IPN 074-155G 

(P3) 

(available on G2 only) 

Bottom Relay Connector 

Relay Pins 

9 47, 50 9 13, 32 

10 14, 17 10 14, 33 

11 59, 63 11 15, 34 

12 53, 60 12 16, 35 

13 34, 36 13 12, 31 

14 28, 30 14 11, 30 

15 4, 11 15 10, 29 

16 1, 5 16 9, 28 

Isolated 24 V(dc) source is available with a maximum of 0.4 amps total on 

connector P4 at Pins 4, 9, 15 and 21 with Pins 8, 14, 20 and 25 used as returns. 

2 - 15


2 In similar fashion, connect the Pneumatic Actuator for the source shutter if 

required. 

3 Connect the oscillator cable to the appropriate channel of the sensor board 

programmed. 

4 Connect the source one or source two cable (whichever has been 

programmed) to the source controller. 

Figure 2-7 Relay outputs: typical connector configuration utilizing relay #1 

NOTE: Contact arrangements shown are of pin mating face (plug or 

receptacle). The socket mating face is a mirror image of Figure 2-7. 

IPN 074-155G 

2 - 16


2.7 CrystalSix Sensor Requirement When Not 

Installed With An IC/5, XTC/2, XTC/C, IC/4, 

or IC/4 PLUS 

The CrystalSix can be manually operated with other Deposition Controllers. 

The user must, however, be aware of the functional requirements for operation. 

These include, but are not limited to: 

1 The solenoid assembly must be energized and de-energized twice per 

crystal position. Twelve pulses complete one revolution. 

2 The electrical pulse applied to the solenoid valve must be at least one 

second in duration during both the pressurization and de-pressurization 

phase. 

3 A 24 volt AC or DC supply is required to energize the solenoid assembly. 

Consult Figure 3-1 on page 3-3 for wiring assignments. 

4 The user should provide some means of determining the quantity of “good” 

crystals when initially loaded, and quantity of good crystals remaining at any 

time. 

5 Follow the guidelines shown in section 2.3 on page 2-7 for installation. 

6 You will need to keep track of the total thickness as a manually generated 

sum of the deposit accumulated on each crystal. 

IPN 074-155G 

2 - 17


This page is intentionally blank. 

IPN 074-155G 

2 - 18


Chapter 3 

Installation of the Shutter Control Valve Assembly 

The shutter control valve assembly (IPN 007-199) and the feedthrough should 

be installed at the same time. The same valve assembly is used for both the 1" 

and the (recommended) 2 3/4" feedthroughs. However, if the assembly is to be 

used with the 2 3/4" feedthrough, you will need to modify the valve bracket as 

follows. 

For the following steps, see Figure 3-3 on page 3-5. (DWG. 206-854) 

1 Align the score line on the valve assembly bracket over the edge of a table 

or other square edge. 

2 Using pliers, grasp the part of the bracket extending over the edge and push 

down. The assembly will break along the score line. Use a file to smooth any 

rough edges which occur along the break. 

NOTE: In order for the multiple crystal sensor to operate properly, a .022" 

diameter orifice (IPN 059-189 provided in Kit 750-268) must be installed 

in line between the air supply and the solenoid valve assembly. This is 

accomplished by the following procedure. See Figure 3-2 on page 3-4. 

1 Unthread the compression fitting attached to the normally closed (N.C.) port 

of the miniature solenoid valve (Item #5). 

2 Install the orifice by threading it into the normally closed (N.C.) port of the 

miniature solenoid valve. 

3 Thread the compression fitting previously removed into the orifice. 

IPN 074-155G 

NOTE: Do not install the orifice into the normally open port. This will require a 

longer time interval for depressurization of the bellows assembly and 

leads to apparent sensor failure. 

3.1 Installation with 1” Bolts 

Installation of the shutter control valve assembly for the CrystalSix sensor 

requires one 1" bolt feedthrough (IPN 750-030-G1, See Figure 5-1 on page 5-1). 

Follow these steps: 

1 Ensure that the o-ring is in place on the bolt. Insert the 1" bolt such that the 

hexagonal shaped end of the bolt is on the vacuum side of the chamber. 

2 Add the Bracket. 

3 Add the Washer. 

4 Add the Nut. 

3 - 1


5 Tighten the feedthrough nut. 

6 Add the air fitting to the tube which has the female thread adapter installed. 

7 Connect the 1/8" Teflon air tube from the valve to the just installed fitting. 

CAUTION 

Use of more than 80" (2 meters) of 1/8" tubing between 

the valve and the bellows may cause switcher failure 

because of the time required to bleed out sufficient air 

during de-pressurization. If tubing greater than 1/8" is 

used, the maximum length must be reduced 

proportional to the additional volume. 

8 Attach the valve’s intake (normally closed (NC) port) to the 80-90 psi source 

of air. Verifiy that the orifice (IPN 059-189) has been installed into this NC 

valve port. (See Figure 2 of Figure 3-2 on page 3-4.) 

3.2 Installation with 2 3/4” Feedthrough 

Installation of the shutter control valve requires a 2 3/4" feedthrough inclusive 

of two coaxial feedthroughs (IPN 002-080, see Figure 5-2 on page 5-2). The 

second coaxial feedthrough is not used, and should be protected from damage 

as a result of process material. Follow the steps below: 

1 Install the Feedthrough. 

2 Add the valve bracket (modified) to the desired location as illustrated in 


3 Tighten the feedthrough bolts. 

4 Install the air fitting to the female thread adapter. 

5 Connect the 1/8" Teflon air tube from the valve outlet to the feedthrough 

fitting. See the CAUTION in section 3.1 above. 

6 Attach the valve’s intake (normally closed (NC) port) to the 80-90 psi source 

of air. Verify that the orifice (IPN 059-189) has been installed into this NC 

valve port. (See Figure 2 of Figure 3-2 on page 3-4.) 

NOTE: Maximum temperature for the shutter control valve assembly is 105 °C 

for bakeout and operation. 

IPN 074-155G 

3 - 2

3.3 Electrical and Pneumatic Connections 

3.3.1 Electrical 


To complete installation of the assembly, make electrical connections to Pins A 

and C for either 25 V(ac) or V(dc). (See Figure 3-1.) Current required is 

approximately 70 mA. 

Figure 3-1 Pin Connections 

Miniature hexagon plug 

provided in the Shutter 

Control Valve Ship Kit 

(007-196) or the Control 

Valve Assembly (007-199) 

IPN 074-155G 

3 - 3


Figure 3-2 Minature Pneumatic Solenoid Tube Connections 

IPN 074-155G 

3 - 4


IPN 074-155G 

Figure 3-3 Shutter Control Valve 

3 - 5


Figure 3-4 2 3/4” Dual Coaxial Feedthrough & Valve Assembly 

IPN 074-155G 

3 - 6


Chapter 4 

Maintenance 

4.1 General precautions 

4.1.1 Maintain the Temperature of the Crystal 

Periodically measure the water flow rate through the crystal sensor to verify that 

it meets or exceeds the value specified in chapter one. Depending upon the 

condition of the cooling water used, the addition of an in-line water filtering 

cartridge system may be necessary to prevent flow obstructions. Many system 

coaters use parallel water supply taps that provide high total flows. An 

obstruction or closed valve in the pipe that supplies water to the sensor head 

would not result in a noticeable reduction of total flow. The best test is to directly 

monitor the flow leaving the sensor. 

The crystal requires sufficient water cooling to sustain proper operational and 

temperature stability. Ideally, a constant heat load is balanced by a constant 

flow of water at a constant temperature. Inficon's quartz crystals are designed 

to provide the best possible stability under normal operating conditions. No 

crystal can completely eliminate the effects of varying heat loads. Sources of 

heat variation include radiated energy emanating from the evaporant source 

and from substrate heaters. 

4.1.2 Use the Optimum Crystal Type 

IPN 074-155G 

Certain materials, especially dielectrics, may not adhere strongly to the crystal 

surface and may cause erratic readings. For many dielectrics, adhesion is 

improved by using crystals with silver coated electrodes. Gold is preferred for 

other applications. 

4.1.3 Crystal Concerns when Opening the Chamber 

Thick deposits of some materials, such as SiO, Si and Ni will normally peel off 

the crystal when it is exposed to air, due to changes in film stress caused by 

gas absorption. When peeling material is observed, replace the crystal. 

4 - 1


4.2 Crystal Holder Maintenance 

In dielectric coating applications, the surface where the crystal contacts the 

crystal holder may require periodic cleaning. Since most dielectrics are 

insulators, any build-up due to blow-by will eventually cause erratic or poor 

electrical contact between the crystal and the sensor body. This build-up will 

also cause a reduction in thermal transfer from the crystal to the sensor body. 

Both of these will result in noisy operation and early crystal failure. 

Cleaning may be accomplished by gently buffing the crystal holder to crystal 

seating surface with a white Scotch-Brite pad followed by an ultrasonic bath 

in soap solution followed by thorough rinsing in deionized water and drying or 

by ultrasonic cleaning and rinsing only. 

NOTE: The crystal holder seating surface is machined to a very fine finish (16 

micro inches rms). This high quality finish is essential to provide good 

electrical and thermal contact with the crystal. Applying excessive force 

during cleaning or using overly abrasive cleaning materials may 

damage this finish and reduce sensor performance. 

4.3 Retainer Spring Adjustment Instructions 

Occasionally you may become dissatisfied with the way the ceramic retainer is 

secured in the crystal holder. To alter the magnitude of the retaining force, use 

the following procedure. 

Tools required: 

M 

M 

Scribe or other pointed tool. 

Needle nose pliers (two required). 

1 Position the crystal holder with the crystal aperture oriented downward. 

2 Insert the point of the scribe between the inside edge of the crystal holder 

cavity and one of the two wire segments that protrude into the crystal cavity 

(Figure 4-1-a). 

3 Using the scribe, gently remove the spring from its groove in the crystal 

holder cavity. 

4 Consult Figure 4-1-b to determine the direction in which the 'transition point' 

must be relocated, to attain the desired retention forces. Moving this 

transition point approximately 1/8" is generally sufficient. 

5 Grasp the spring, with the pliers, just below the transition point. Using the 

second set of pliers, bend the spring as illustrated by the dashed line in 

Figure 4-1-c to remove the existing transition point. 

IPN 074-155G 

4 - 2


Figure 4-1 Location of the Transition Point 

6 Use both pliers to form a new transition point according to Figure 4-1-b, thus 

returning the spring to a shape similar to the solid line delineation of Figure 

4-1-c. 

7 Reinstall the spring into the groove provided in the crystal cavity. 

8 Determine if the retention force is acceptable and that the wire does not 

impede crystal insertion. Repeat these instructions if unacceptable 

retention forces persist. 

IPN 074-155G 

4.4 Alignment instruction for INFICON 

CrystalSix sensor (IPN 750-446) 

During shipment, units may vibrate slightly out of position. This does not mean 

alignment is required. The unit will return to the centered position the first time 

it is pneumatically activated. 

The unit in the shipped condition has been aligned at the factory, no further 

alignment is required. 

NOTE: Realignment is only required if the unit has been disassembled for any 

reason, such as evaporant material removal, or any electrical problem 

that may occur, or if the ratchet (item #22 DWG 750-446 shown on 

Figure 1-3 on page 1-6) is loosened, or removed. This procedure is 

critical and must be carefully undertaken. 

4 - 3


CAUTION 

Incorrect rotation direction with the stops disabled will 

cause permanent damage rendering transducer 

inoperative. Refer to Figure 1-2 on page 1-5 for proper 

direction of rotation. 

The unit, when properly aligned, will index the crystal to a position that is 

centered within the aperture provided in the heat shield. The unit must be 

aligned if this condition does not exist. 

Reference Figure 1-3 on page 1-6. 

Equipment Required: 

M 

M 

M 

M 

M 

5/64" allen wrench (Included in 750-268 Kit) 



Alignment tool assembly 750-254-G1 (Included in 750-268 kit) 

Regulated air supply 80-90 psi (75 psi for alignment purposes only) 

4.4.1 Alignment Instructions 

With the required equipment at hand, proceed as follows: 

1 Temporarily connect an air supply to the bellows assembly supply tube. 

Regulate the air pressure to 75 psi. 

2 Insert the 0.125" diameter alignment pin (of the 750-254-G1 assembly) in 

the alignment hole (if not already installed) as shown in Figure 4-2 on page 

4-6. The carousel may need to be rotated to achieve the alignment condition 

shown in Figure 4-2. 

Loosen the set screws (two set screws per item) of the ratchet (item #22) and 

the stop ratchet (item #38). 

Loosen the #2 fastener (item #42) that attaches the detent (item #41) to the 

bellows assembly item #19). Do NOT remove detent. 

3 Actuate the bellows assembly by applying 24 volts to the leads of the 

solenoid valve of the solenoid valve assembly. Consult Figure 3-1 on page 

3-3 for wiring assignments. The air pressure must be sustained. 

4 Rotate the ratchet (item #22) counter-clockwise until one tooth contacts the 

pin of the pawl and actuator stem assembly (item #24). Secure the ratchet 

to the 0.25" diameter shaft of the carousel assembly (item #5) utilizing the 

#6-32 x .125" long socket set screw (item #33). 

IPN 074-155G 

4 - 4


5 Rotate the stop ratchet (Item #38) CW (clockwise) until it contacts the stem 

of the pawl and actuator stem assembly (Item #24) as shown in Figure 4-3 

on page 4-14. 

6 Rest the detent spacing tool on the top of the alignment pin as shown in 

Figure 4-4 on page 4-15. Position the detent spacing tool (of the 750-254-G1 

assembly) between the detent (Item #41) and ratchet (Item #22) as shown 

in Figure 4-4. Pull the detent against the detent spacing tool and 

subsequently against the tooth of the ratchet. Tighten the #2 fastener (Item 

#42) to secure the detent to the bellow assembly. 

7 Remove the detent spacing tool. 

8 Release air pressure from the bellows assembly (item #19). 

9 Remove the 0.125 diameter alignment pin of the 750-254-G1 alignment tool 

assembly from the hole. 

10 Prior to installation of the crystal holder assembly, check the continuity 

between the center contact of the connector and the electrical contacts 

associated with the carousel assembly (item #5). Install the crystal holder 

assembly when electrical continuity is verified. If electrical continuity is not 

verified, the unit should be disassembled (see section 4.4.2 on page 4-6). 

The electric contact associated with the carousel will have to be adjusted to 

ensure electrical contact when assembled. 

11 Press the crystal switch button on the hand-held controller or the instrument 

front panel. The sensor will advance to the next crystal position. Each 

crystal should be centered in the aperture. Repeat step #10 for each crystal 

position. Make certain the detent drops in to engage each tooth of the 

ratchet (item #22) on each pulse. 

12 Secure the actuator cover (item #15) to the top plate (item #10) using two 

#4-40 x 0.187" long socket head cap screws (items #16 and #17). 

IPN 074-155G 

13 Install the heat shield (item #8) by first orienting the slot in the heat shield 

to accommodate the water lines, then secure the heat shield by applying 

pressure near the center of the shield. The shield should snap in place. 

14 Regulate the air supply to 80-90 psi (550-618 KPa) for operation. 

Unit is now ready for operation. 

4 - 5


Figure 4-2 Alignment Pin Installation 

4.4.2 Disassembly Instructions 

In the following steps, reference Figure 1-3 on page 1-6 and Figure 4-2 on page 

4-6. 

1 Remove the two #4 fasteners that secure the actuator cover (item #15) to 

the top plate (item #10). 

2 Remove the actuator cover. Remove the heat shield (item #8) by gently 

pulling on the outside of the shield, the shield should snap off. 

3 Remove the extension spring from the pawl and actuator stem assembly 

(item #24). 

4 Remove the two #4 fasteners (item #20) that secure the bellows assembly 

(item #19) to the top plate (item #10). 

5 Carefully remove the bellows assembly. The pawl and actuator stem 

assembly (item #24) and the detent (item #41) will be removed with the 

bellows assembly. 

6 Using the 1/16" allen wrench, loosen the set screws (item #33) that secures 

the ratchet (item #22) and the stop ratchet (item #38) to the carousel 

assembly (item #5). Remove the ratchet (item #22) and the stop ratchet 

(item #38). 

7 Remove the three #4 fasteners (item #14) that secure the top plate (item 

#10) to the sensor body (item #11). 

8 Remove the top plate (item #10). 

9 Remove the Teflon washer (item #39). 

IPN 074-155G 

4 - 6


CAUTION 

When removing the top plate make certain the 

connector terminal does not become damaged. 

10 Remove the compression spring (item #28). 

11 Remove the carousel assembly (item #5) 

CAUTION 

When removing the carousel make certain the 0.126" 

diameter ball (item #27) does not become lost. 

4.4.3 Assembly Instructions 

In the following steps, reference Figure 1-3 on page 1-6 and Figure 4-2 on page 

4-6. 

1 Place the 0.126" diameter ball (item #27) in the countersunk hole of the 

sensor body (item #11). 

2 Attach the corrugated springs (item #31) if not already attached to the 

sensor body (item #11), as illustrated in detail "F" of Figure 1-3 on page 1-6, 

utilizing the 0-80 pan head screws (item #45). 

CAUTION 

IPN 074-155G 

Be extremely careful when handling the corrugated 

springs to avoid distortion. The successful operation 

of this apparatus is dependent on this component's 

integrity. 

3 With the free end of each corrugated spring outside the sensor body, install 

the carousel assembly (item #5) so that it rests on the .126" diameter ball. 

Insert the corrugated springs into the space between the carousel (item #5) 

and the body (item #11). Make certain that the corrugated springs are not 

damaged upon installation. 

4 Rotate the carousel clockwise until the alignment hole in the carousel lines 

up with the alignment hold of the body. Insert the 0.125" diameter alignment 

pin of the alignment tool assembly (750-254) provided. Refer to Figure 4-2 

on page 4-6. 

4 - 7


5 Place the compression spring (item #28) in the cavity surrounding the 0.25" 

diameter shaft of the carousel assembly. Install the Teflon washer (item #39) 

onto the.25" diameter shaft. 

6 With the connector facing outward, pass the top plate (item #10) over the 

0.25" diameter shaft of the carousel assembly (item #5) and the .125" 

diameter alignment pin. 

7 Secure the top plate to the sensor body utilizing the three #4-40 screws 

(items #14 and 17). 

8 Install the pawl and actuator stem assembly (item #24) into the bellows 

assembly (item #19) by threading the actuator stem into the mating hole 

located in the bore of the bellows assembly. Continue to thread the actuator 

stem until the shoulder of the actuator stem is approximately .035" away 

from the bellows assembly. This .035" distance specification is for reference 

only; the actuator stem position may have to be adjusted to obtain the 

desired condition, as illustrated in Figure 1-3 on page 1-6. 

9 Fasten the bellows assembly to the top plate utilizing the two #4-40 x 1.125" 

long screws (item #20). Do not tighten the screws. Position the bellows 

assembly in such a fashion as to allow the actuator stem to come in contact 

with the ball bearings (item #25) as illustrated in Figure 1-3 on page 1-6. 

Tighten the screws. Loosen the #2 screw (item #42) which secures the 

detent to the bellow assembly (item #19). 

10 Slide the ratchet (item #22) and the stop ratchet (item #38) onto the 0.25" 

diameter shaft of the carousel assembly (item #5) as illustrated. Do not 

tighten the #6-32 set screws (item #33). 

11 Attach the loop of the extension spring in the hole provided in the pawl of 

the pawl and actuator stem assembly (item #24). 

12 Position the ratchet (item #22) such that it engages the pin of the pawl and 

actuator stem assembly (item #24). 

13 Position the detent (item #41) so it engages the ratchet (item #22). 

Unit is now ready to be aligned, refer to section 4.4.1 on page 4-4. 

IPN 074-155G 

4 - 8


4.5 Troubleshooting the CrystalSix Sensor 

Table 4-1 Troubleshooting 

Symptom Cause Remedy 

Crystal fail signal on front 

panel of unit will not 

disappear even though 

crystal can be seen 

through heat shield 

aperture. 

Damaged Crystal. 

Loss of electrical signal. 

Replace crystal. 

Check for electrical 

continuity betwen 

feedthrough and leaf 

srpings that make 

contact with the crystal 

holder in the sensor.* If 

electrical problem 

originates in the sensor, 

consult Chapter Chapter 

4 for disassembly 

instructions, if necessary. 

IPN 074-155G 

Unit will not advance 

when crystal switch key 

is pressed. 

Crystal not centered in 

aperture. 

Loss of pneumatic 

supply, or pressure is 

insufficient for proper 

operation. 

Operation has been 

impaired as a result of 

peeling of the material 

accumulated on the face 

of the cover. 

Improper alignment. 

0.025” diameter orifice 

not installed inline to the 

supply side of the 

solenoid valve assembly. 

Large jumps of thickness Mode hopping due to 

reading during deposition damaged crystal. 

* Make certain the leaf 

springs in the carousel 

assembly are bent up far 

enough to contact the 

crystal holder when 

installed. 

Establish air supply and 

regulate to 80-90 psi for 

operation. 

Consult Chapter Chapter 

4 for disassembly 

instructions to remove 

material or to correct 

mechanical failure. 

Realign per alignment 

instructions in Chapter 

Chapter 4. 

Install orifice where 

shown on Figure 2-3 on 

page 2-8. 


4 - 9


Table 4-1 Troubleshooting (continued) 


Crystal ceases to 

oscillate during 

deposition before it 

reaches its “normal life. 

Crystal does not oscillate 

or oscillates 

intermittently (both in 

vacuum and in air). 

Crystal oscillates in 

vacuum but stops 

oscillation after open to 

air. 

Crystal near the end of its 

life. 

Scratches or foreign 

particles on the crystal 

holder seating surface. 

Crystal is being hit by 

small droplets of molten 

material from the 

evaporation source. 

Damaged crystal. 

Deposition material 

built-up on edge of the 

crystal holder and 

touching the crystal. 

Material on crystal holder 

partially masking full 

crystal area. 

Defective or damaged 

crystal. 

Existence of electrical 

short or poor electrical 

contacts. 

Crystal was near the end 

of its life; opening to air 

causes film oxidation, 

which increases film 

stress. 

Excessive moisture 

accumulation on the 

crystal. 


Replace the crystal 

holder (IPN 

750-262-G1). Clean, 

polish the crystal seating 

surface of the crystal 

holder. 

Move the sensor further 

away from the evaporant 

source. 

Change crystal. 

Clean the crystal holder. 

Clean crystal holder. 


Check for electrical 

continuity and short in 

sensor cable, connector, 

contact springs, 

feedthroughs. 

Replace crystal 

Turn off cooling water to 

sensor before opening it 

to air; flow hot water 

through the sensor when 

the chamber is open. 

IPN 074-155G 

4 - 10



IPN 074-155G 


Thermal instability: large 

changes in thickness 

reading during source 

warm-up (usually causes 

thickness reading to 

decrease) and after the 

termination of deposition 

(usually causes 

thickness reading to 

increase) 

Poor thickness 

reproducibility 

Crystal not properly 

seated. 

Excessive heat input to 

the crystal. 

No cooling water. 

Poor thermal transfer 

from water tube to body. 

Erratic source emission 

characteristics. 

Check and clean crystal 

seating surface of the 

crystal holder. 

If heat is due to radiation 

from the evaporation 

source, move sensor 

further away from source 

and use sputtering 

crystals for better thermal 

stablity. 

Check cooling water flow 

rate. Flow rate should be 

minimum of 150-200 

c/min @ 30 °C max. 

Use a new water tube 

whenever the clamping 

assembly has been 

removed from the body. If 

a new water tube is not 

available, use a single 

layer of common 

aluminum foil between 

the cooling tube and the 

sensor body, if your 

process allows. 

Move sensor to a 

different location; check 

the evaporation source 

for proper operating 

conditions; insure 

relatively constant pool 

height and avoid 

tunneling into the melt. 

4 - 11




Sensor jamming 

Material does not adhere 

to the crystal. 

Crystal holders come 

loose and jam sensor 

during rotation. May be 

caused by absence of 

orifice in airline. 

Electrical contacts on 

carousel may be 

damaged if unit was 

counter rotated. 

Check the cleanliness of 

the crystal surface; 

evaporate an 

intermediate layer of 

proper material on the 

crystal to improve 

adhesion. 

Check for orifice, see 

Chapter Chapter 3. 

Replace contacts. 

IPN 074-155G 

4 - 12

4.6 Replacing the Bellows Assembly 

[lPN 750286-P2] 

Reference Figure 1-3 on page 1-6. 

Equipment required: 


IPN 074-155G 

M 

M 

M 

M 

1 /16" allen wrench 

3/32" allen wrench 

Alignment tool assembly 750-254-G1 

Regulated air supply 80-90 psi 

1 Remove the two #4-40 fasteners that secure the actuator cover (item #15) 

to the top plate (item #10). Remove the heat shield (item #8) by gently 

pulling on the outside circumference of the shield. The shield should snap 

off. 

2 Advance the carousel (item #5) using the crystal switch button on the 

hand-held controller or on the controller front panel as many times as 

necessary until the alignment holes in the sensor body (item #11), carousel 

assembly (item #5) and the top plate (item #10) coincide. 

3 Insert the .125" diameter alignment pin into the alignment hole, as shown in 


The bellows assembly will be removed at this time. Proceed as follows: 

4 Remove the extension spring from the pawl and actuator stem assembly 

(item #24). 

5 Remove the two #4 fasteners (item #20) that secure the bellows assembly 

(item #19) to the top plate (item #10). 

6 Carefully remove the bellows assembly. The pawl and actuator stem 

assembly (item #24) and the detent (item #41) will be removed with the 

bellows assembly. 

7 Using the 1/16" allen wrench, loosen the 6-32 set screws (item #33) that 

secures the ratchet (item #22) and the stop ratchet (item #38) to the 

carousel assembly (item #5). Remove the stop ratchet (item #38) and the 

ratchet (item #22). 

8 Thread the pawl and actuator stem assembly (item #24) out of the bore of 

the bellows assembly by rotating the pawl and actuator stem assembly in a 

counter-clockwise direction. Detach the detent (item #41) and related 

hardware (items 40, 42-44) from the bellows assembly (item #19) by 

removing the #2 fastener (item #42). 

9 Discard the bellows assembly. 

4 - 13


10 Install the pawl and actuator stem assembly (item #24) into the new bellows 

assembly by threading the actuator stem into the mating hold located in the 

bore of the bellows assembly. Continue to thread the actuator stem until the 

shoulder of the actuator stem is approximately .035" away from the bellows 

assembly. This.035" distance specification is for reference only; the 

actuator stem position may have to be adjusted to obtain the desired 

condition as illustrated in Figure 1-3 on page 1-6. 

11 Fasten the bellows assembly to the top plate utilizing the two #4-40 x 1.125" 

long screws. Do not tighten the screws. Position the bellows assembly in 

such a fashion as to allow the actuator stem to come in contact with the ball 

bearings (item #25) as illustrated. Tighten the screws. 

12 Slide the rachet (item #22) onto the 0.25" diameter shaft of the carousel 

assembly (item #5). Do not tighten the #6-32 set screw (item #33). Slide the 

ratchet (item #22) onto the .25" diameter of the carousel assembly. Do not 

tighten the #6-32 set screws. 

13 Attach the extension spring in the hole provided in the pawl of the pawl and 


14 Position the ratchet (item #22) such that it engages the pin of the pawl and 


15 Attach the detent and related hardware (items 40, 42-44) to the new bellows 

assembly. Do not tighten. Position the detent (item #41) so that it engages 

the ratchet (item #22). 

Unit is now ready to be aligned. Refer to section 4.4.1 on page 4-4 for alignment 

instructions. 

Figure 4-3 Setting the stop ratchet 

IPN 074-155G 

4 - 14


Figure 4-4 Setting the detent 

Ratchet 

Detent Spacer 

Alignment Pin 

Detent 

Alignment Pin 

Top Plate Assembly 

IPN 074-155G 

4 - 15


This page is intentionally blank. 

IPN 074-155G 

4 - 16


Chapter 5 

Feedthrough Outline Drawings 

The following Feedthrough Outline Drawings provide dimensions and other 

pertinent data necessary for planning equipment configurations. 

Figure 5-1 1" Crystal feedthrough w/airtube (lPN 750-030-GI) 

(contains one coaxial, two water tubes and one air tube) 

1" CRYSTAL FEEDTHROUGH W/AIR TUBE 

MICRODOT CONNECTOR 

BNC CONN. 

SEAMLESS TUBE 

0.188 O.D., 0.131 I.D. 

# 10-32 INTERNAL 

THREAD 

0.75 

0.312 HEX 

0.38 

5.00 2.00 

1.00 

13.00 

C L 

0.188 

IPN 074-155G 

0.50 C L 

0.25 

1.50 

0.125 

0.28 

5 - 1


Figure 5-2 Standard 2 3/4" CONFLAT® flange (002-080) 

(contains two coaxials, two water tubes and one air tube) 

IPN 074-155G 

5 - 2

CRYSTALSIX - Schoonover, Inc.

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