INFICON CATALOG 2000-2001 - Schoonover, Inc.
INFICON CATALOG 2000-2001 - Schoonover, Inc.
INFICON CATALOG 2000-2001 - Schoonover, Inc.
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SKY TM Capacitance Diaphragm Gauge<br />
Vacuum Gauges<br />
SKY Capacitance Diaphragm Gauge<br />
CDG045-SD<br />
The SKY CDG045-SD provides the most powerful technology of<br />
network communications and advanced sensor technology available<br />
in the market.<br />
The SKY CDG045-SD combines the advantages of DeviceNet<br />
network communications with the innovative technology of aluminum<br />
oxide ceramic CDGs. DeviceNet improves system quality, lowers cost<br />
and increases efficiency. It allows communication of exact digital<br />
information, independent control, maintenance and diagnostic routines<br />
for each connected instrument and simplifies the connection diagram.<br />
The SKY CDG045-SD conforms to the ODVA Specifications defined<br />
by the Semiconductor Special Interest Group.<br />
Patent pending on sensor and diaphragm<br />
Advantages<br />
♦ Marginal zero drift<br />
♦ Virtually corrosion proof Ð long sensor life results in reduced downtime<br />
thus reducing cost of ownership<br />
♦ Superior accuracy and repeatability over long period of operation<br />
♦ Better long-term and temperature stability<br />
♦ Less sensitive to frequent pressure cycles to atmosphere<br />
♦ Eliminates isolation valve (depending on operation mode)<br />
♦ Less susceptible to particles and process by-products through<br />
protective chamber<br />
♦ Fastest warm up time<br />
♦ Lower cost of investment<br />
♦ Supply with 11 to 25 V DC<br />
♦ Drop-in replacement of existing CDGs due to interface compatibility<br />
Typical Applications<br />
♦ Etch, CVD, PVD, and other semiconductor production methods<br />
♦ Chemical process engineering<br />
♦ Reference sensor for monitoring of test instruments in accordance<br />
with DIN/ISO 9000<br />
Using the SKY CDG045-SD with Fieldbus interface, processes can be<br />
controlled from one central position. The measures of control include:<br />
monitoring of measurement values, the automatic zero point adjustment<br />
of gauges, reminding the operator of scheduled maintenance work,<br />
warning signals in case of instrument failure and more.<br />
DeviceNet is a Fieldbus protocol with trunkline-dropline configuration<br />
which makes it possible to connect industrial instruments such as sensors,<br />
switches, valves, actuators etc. in a master/slave or peer-to-peer network.<br />
Such networks can connect up to 64 individual knots or instruments per<br />
network segment with one host (such as a PLC or PC). Integrated<br />
instruments can receive orders and requests from the host, execute them<br />
and then send information back as a result. DeviceNet offers the simplicity<br />
of running the signal as well as the power supply through the same<br />
Fieldbus cable. Knots can also be removed from the network without<br />
having to turn them off and without having to disconnect the network.<br />
DeviceNet uses the CAN (Controller Area Network) communications<br />
protocol for data transfer. CAN was originally developed for the automobile<br />
industry for applications such as control of ABS breaking systems and air<br />
bags Ð applications requiring fast response times and high reliability.<br />
The same speed and reliability in data transfer is utilized in the <strong>INFICON</strong><br />
sensors with DeviceNet.<br />
DeviceNet is an open networking standard that follows the DeviceNet<br />
specifications Ð this means that it is manufacturer independent.<br />
<strong>INFICON</strong> sensors adhere to these documented standards and guarantee<br />
real plug and play functionality.<br />
B6<br />
B6.9