INFICON CATALOG 2000-2001 - Schoonover, Inc.

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Vacuum Gauges SKY TM Capacitance Diaphragm Gauge Technical Data Measurement range F.S. Torr 1) Lowest suggested control pressure Lowest suggested reading Lowest reading Accuracy 2) Torr Torr Torr Resolution % F.S. Temperature effects Zero coefficient % F.S./¡C Span coefficient % of reading/¡C Temperature Operation (ambient) ¡C Bakeout at flange ¡C Pressure, max. absolute Output signal (analog) Supply Voltage Operating 3) / heating current Response time Electrical connector Materials exposed to process media Torr VDC VDC mA ms Internal volume cm 3 (inch 3 ) Weight Protection type kg CDG025 CDG045 Temperature Compensated Temperature Controlled 45 °C 1000 100 10 1 1000 100 10 1 0.1 5 5 x 10 -1 5 x 10 -2 5 x 10 -3 5 5 x 10 -1 5 x 10 -2 5 x 10 -3 5 x 10 -4 5 x 10 -1 5 x 10 -2 5 x 10 -3 5 x 10 -4 5 x 10 -1 5 x 10 -2 5 x 10 -3 5 x 10 -4 5 x 10 -5 1 x 10 -1 1 x 10 -2 1 x 10 -3 1 x 10 -4 1 x 10 -1 1 x 10 -2 1 x 10 -3 1 x 10 -4 1 x 10 -5 0.2 0.15 0.0015 0.0015 0.0015 0.0025 0.0015 0.0015 0.0015 0.0025 0.0025 0.005 0.005 0.005 0.015 0.0025 0.0025 0.0025 0.0025 0.005 0.01 0.01 +5 É +50 +15 É +40 +110 +90 3000 2000 2000 2000 3000 2000 2000 2000 1000 0 É +10 0 É +10 +15 (±5%) or +24 (±10%) +15 (±5%) or +24 (±10%) 60/- 60/- 220/440 220/670 < 30 < 30 < 30 < 100 < 30 < 30 < 30 < 100 < 100 D sub, 15 pin aluminum oxide ceramic (Al 2 O 3 ), stainless steel (AISI316L) 4) , Vacon 70 5) 6 (0.36) 7 (0.43) 0.26 0.49 IP 30 Ordering Information 1000 100 10 1 1000 100 10 1 0.1 Vacuum connector 1/2Ó tube DN 16 ISO-KF DN 16 CF-R Swagelok¨ 8 VCR¨, female Terminal strip connector 1) SKYª Capacitance Diaphragm Gauges are also available calibrated in mbar and Pa 2) Non-linearity, hysteresis, repeatability at 25 ¡C ambient operating temperature without temperature effects 360-000 361-000 362-000 364-000 360-010 361-010 362-010 364-010 365-010 360-001 361-001 362-001 364-001 360-011 361-011 362-011 364-011 365-011 360-002 361-002 362-002 364-002 360-012 361-012 362-012 364-012 365-012 360-003 361-003 362-003 364-003 360-013 361-013 362-013 364-013 365-013 374-990 3) Typical value at 25 ¡C ambient temperature after reaching operating temperature 4) 18% Cr, 10% Ni, 3% Mo, 69% Fe 5) 28% Ni, 23% Co, 49% Fe mm (inches) mm (inches) B6.8
SKY TM Capacitance Diaphragm Gauge Vacuum Gauges SKY Capacitance Diaphragm Gauge CDG045-SD The SKY CDG045-SD provides the most powerful technology of network communications and advanced sensor technology available in the market. The SKY CDG045-SD combines the advantages of DeviceNet network communications with the innovative technology of aluminum oxide ceramic CDGs. DeviceNet improves system quality, lowers cost and increases efficiency. It allows communication of exact digital information, independent control, maintenance and diagnostic routines for each connected instrument and simplifies the connection diagram. The SKY CDG045-SD conforms to the ODVA Specifications defined by the Semiconductor Special Interest Group. Patent pending on sensor and diaphragm Advantages ♦ Marginal zero drift ♦ Virtually corrosion proof Ð long sensor life results in reduced downtime thus reducing cost of ownership ♦ Superior accuracy and repeatability over long period of operation ♦ Better long-term and temperature stability ♦ Less sensitive to frequent pressure cycles to atmosphere ♦ Eliminates isolation valve (depending on operation mode) ♦ Less susceptible to particles and process by-products through protective chamber ♦ Fastest warm up time ♦ Lower cost of investment ♦ Supply with 11 to 25 V DC ♦ Drop-in replacement of existing CDGs due to interface compatibility Typical Applications ♦ Etch, CVD, PVD, and other semiconductor production methods ♦ Chemical process engineering ♦ Reference sensor for monitoring of test instruments in accordance with DIN/ISO 9000 Using the SKY CDG045-SD with Fieldbus interface, processes can be controlled from one central position. The measures of control include: monitoring of measurement values, the automatic zero point adjustment of gauges, reminding the operator of scheduled maintenance work, warning signals in case of instrument failure and more. DeviceNet is a Fieldbus protocol with trunkline-dropline configuration which makes it possible to connect industrial instruments such as sensors, switches, valves, actuators etc. in a master/slave or peer-to-peer network. Such networks can connect up to 64 individual knots or instruments per network segment with one host (such as a PLC or PC). Integrated instruments can receive orders and requests from the host, execute them and then send information back as a result. DeviceNet offers the simplicity of running the signal as well as the power supply through the same Fieldbus cable. Knots can also be removed from the network without having to turn them off and without having to disconnect the network. DeviceNet uses the CAN (Controller Area Network) communications protocol for data transfer. CAN was originally developed for the automobile industry for applications such as control of ABS breaking systems and air bags Ð applications requiring fast response times and high reliability. The same speed and reliability in data transfer is utilized in the INFICON sensors with DeviceNet. DeviceNet is an open networking standard that follows the DeviceNet specifications Ð this means that it is manufacturer independent. INFICON sensors adhere to these documented standards and guarantee real plug and play functionality. B6 B6.9
Page 1 and 2: B6 Vacuum Gauges Vacuum Gauges and
Page 3 and 4: Basic Terms of Vacuum Metrology Vac
Page 5 and 6: Transmitter Technology Vacuum Gauge
Page 7: SKY TM Capacitance Diaphragm Gauge
Page 11 and 12: SKY TM Capacitance Diaphragm Gauge
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INFICON CATALOG 2000-2001 - Schoonover, Inc.

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