INFICON CATALOG 2000-2001 - Schoonover, Inc.

More documents

Recommendations

Info

Vacuum Gauges SKY TM Capacitance Diaphragm Gauge SKY Capacitance Diaphragm Gauge CDG025, CDG045 The SKY CDG uses an ultrapure aluminum oxide ceramic diaphragm instead of the traditional metal diaphragms used by other manufacturers. This ultrapure ceramic diaphragm is virtually corrosion proof resulting in improved reliability, stability and extended life time, even under the harshest conditions. SKY CDGs are used by several leading semiconductor system manufacturers. Patent pending on sensor and diaphragm Advantages ♦ Marginal zero drift ♦ Virtually corrosion proof Ð long sensor life results in reduced downtime thus reducing cost of ownership ♦ Superior accuracy and repeatability over long period of operation ♦ Better long-term and temperature stability ♦ Less sensitive to frequent pressure cycles to atmosphere ♦ Eliminates isolation valve (depending on operation mode) ♦ Less susceptible to particles and process by-products through protective chamber ♦ Fastest warm up time ♦ Lower cost of investment ♦ Supply with +15 V DC or +24 V DC Ceramic Diaphragms The diaphragm is the crucial element of any capacitance diaphragm gauge. Any alteration of the diaphragmÕs deflection characteristics leads to a change in the displayed pressure. The <strong>INFICON</strong> aluminum oxide ceramic (Alumina) diaphragms are especially designed and manufactured for the purpose of measuring also very low pressures. Ceramic membranes are produced from ultra pure, fine grained alumina powder in several sintering steps to achieve a dense, stress free and tension free diaphragm for the sensors. Several firing processes above 1500 ¡C guarantee a purity of 99.5% or more than 99.9%. With this firing technique an exceptional uniformity of the material is achieved. Aluminum oxide ceramic diaphragms change less during operation than commonly used metal diaphragms. Temperature induced stretching, pressure and material induced creeping, as well as material alterations via corrosion, are greatly reduced or even eliminated in ceramic diaphragms. The pressure reading with ceramic diaphragms is more accurate and repeatable than with metal diaphragms over an extended period of time. ♦ Drop-in replacement of existing CDGs due to interface compatibility Typical Applications ♦ Etch, CVD, PVD, and other semiconductor production methods ♦ Chemical process engineering ♦ Reference sensor for monitoring of test instruments in accordance with DIN/ISO 9000 B6.6
SKY TM Capacitance Diaphragm Gauge Vacuum Gauges A) Vacuum connection Stainless Steel, AlSl316L (18% Cr, 10% Ni, 3% Mo, 69% Fe) B) Protective chamber Stainless Steel, AlSl316L (18% Cr, 10% Ni, 3% Mo, 69% Fe) C) Plasma shield Stainless Steel, AlSl316L (18% Cr, 10% Ni, 3% Mo, 69% Fe) D) Metal-ceramic connection Vacon 70 (28% Ni, 23% Co, 49% Fe) and Braze, Ti, Ag, Cu E) Measurement chamber F) Reference chamber G) Diaphragm Al 2 O 3 ³ 99.9% for 0.1 Ð 10 Torr Al 2 O 3 ³ 99.5% for 100 Ð 1000 Torr H) Electrode Gold I) Glass ceramic solder J) Sensor housings Al 2 O 3 ³ 99.5% Better Mechanical Stability The construction of the measuring cell is based on a symmetry principle. The diaphragm is bonded to the lower and upper sensor housing with the same material under the same process. Unwanted asymmetric tension of the diaphragm is avoided. Another benefit of such a relatively large bond is the good thermal contact between the housings and the diaphragm. Thanks to this construction the sensor has excellent mechanical and thermal stability. Even frequent pressure changes and overpressures cannot alter such a cell. The measuring results are consistent and remain excellent over much longer periods of operation than with metal ones. Better Temperature Stability Aluminum oxide ceramic has a significantly lower thermal expansion coefficient than the metals traditionally used. Conventional CDGs are constructed of a combination of ceramic parts and a metal diaphragm. The different thermal expansion of these materials can cause tension on the diaphragm resulting in a distorted pressure reading. The sensor of a SKYª CDG consists only of aluminum oxide ceramic. Because of this the span coefficient of a temperature compensated SKY CDG (CDG025) is improved over a conventional CDG by a factor of four. That of a temperature controlled gauge (CDG045) by a factor of two. High Corrosion Resistance Aluminum oxide ceramic is highly corrosion resistant. ThatÕs why the SKY CDGs are particularly useful under corrosive process conditions and deliver reliable measurement values much longer than conventional (metal diaphragm) CDGs. Corrosive process gases can impair or damage metal membranes to the point where accuracy and repeatability are adversely effected or the gauge ultimately fails. B6 B6.7
Page 1 and 2: B6 Vacuum Gauges Vacuum Gauges and
Page 3 and 4: Basic Terms of Vacuum Metrology Vac
Page 5: Transmitter Technology Vacuum Gauge
Page 9 and 10: SKY TM Capacitance Diaphragm Gauge
Page 11 and 12: SKY TM Capacitance Diaphragm Gauge
Page 13 and 14: Bayard-Alpert Pirani Gauge BPG400 V
Page 15 and 16: Pirani Standard Gauge Vacuum Gauges
Page 17 and 18: Pirani Standard Gauge Vacuum Gauges
Page 19 and 20: Bayard-Alpert Gauge Vacuum Gauges B
Page 21 and 22: Bayard-Alpert Gauge Vacuum Gauges T
Page 23 and 24: Penning Gauge PEG100 Vacuum Gauges
Page 25 and 26: Vacuum Gauge Controller VGC103 Vacu
Page 27 and 28: Vacuum Switch VSA100 Vacuum Gauges

INFICON CATALOG 2000-2001 - Schoonover, Inc.

You also want an ePaper? Increase the reach of your titles

Delete template?

Save as template?