INFICON CATALOG 2000-2001 - Schoonover, Inc.

Bayard-Alpert Gauge
Vacuum Gauges
Bayard-Alpert Gauge
BAG100-S, BAG101-S
The Bayard-Alpert Gauge BAG100S covers an extremely wide
measurement range with excellent reproducibility in the process
pressure range. The sensor employs two filaments which are made
of long-life yttrium oxide coated iridium for standard applications or
alternatively tungsten, which is more compatible with halogens
(Cl, Fl, Br) or hydrogen gas compositions. The gauge features
selectable analog as well as digital communications by RS 232 C
interface or fieldbus options like Profibus DP and DeviceNet.
The IP54 rating ensures protection against dust, water spray, and
electromagnetic interferences.
Advantages
♦ Wide measurement range of 2 x 10 -10 to 1 x 10 -1 mbar
(1.5 x 10 -10 to 7.5 x 10 -2 Torr) with a single sensor
♦ High reproducibility of ±10% of the measurement value within the
process pressure range
♦ Fully encapsulated sensor with a very stable electrode geometry
♦ Longer life through dual cathodesÐautomatic switchover in case of failure
♦ Long-life iridium cathodes with yttrium oxide coating
♦ Continuous measurement available during electron bombardment degas
♦ Easy-to-exchange sensors with automatic self-adjustment to
maintain reproducibility
♦ Relay contact switching threshold adjustable over a wide range
♦ Analog output with selectable logarithmic / linear characteristic
♦ Digital interfaces: RS 232 C / Fieldbus: Profibus DP or DeviceNetª
♦ Rugged IP 54 metal enclosure
♦ High EMI compatibility through screened enclosure, screened sensor,
and interference suppression on all inputs and outputs
Typical Applications
♦ Pressure measurement in semiconductor processes and
transfer chambers
♦ Evaporation and coating systems
♦ General pressure measurement and control in fine and high vacuum range
The innovative Bayard-Alpert Transmitters BAG100-S and BAG101-S offer
a wide measurement range spanning from 2 x 10 -10 to 1 x 10 -1 mbar.
The wide range Bayard-Alpert measuring system is mechanically protected
by the metal tube which surrounds it. The rugged arrangement of the
electrodes ensures highly repeatable measurements over the entire range.
Each sensor is individually calibrated in the factory. The calibration data
are stored in an EEPROM which is fully integrated into the sensor.
When exchanging the sensor, the electronics of the transmitter are
automatically adjusted to the currently connected sensor so that the
specified reproducibility can be guaranteed. The sensor with a CF flange
is equipped with a welded current feedthrough which enables degassing
of the sensor at a temperature of 150 ¡C with the electronics in place.
Sensor supply and processing of the measurement data is performed by
microprocessor controlled electronics which require a 24 V power supply
and draw a very low current. The microcontroller also controls the
BAG100-S and BAG101-S in that it monitors the emission, converts and
corrects the measurement data (automatic correction of the sensorÕs
sensitivity, matching of the unit etc.) and monitors the trigger thresholds
for the relay.
The selectable signal output characteristics (linear / logarithmic) as well
as the digital computer interfaces permit easy integration in existing or
future system concepts.
B6
B6.19