INFICON CATALOG 2000-2001 - Schoonover, Inc.

SKY TM Capacitance Diaphragm Gauge
Vacuum Gauges
Technical Data
Measurement range F.S. Torr 1)
Lowest suggested control pressure
Torr
Lowest suggested reading
Torr
Lowest reading
Torr
Accuracy 2)
Resolution
% F.S.
Temperature effects
Zero coefficient
% F.S./¡C
Span coefficient
% of reading/¡C
Temperature
Operation (ambient) ¡C
Bakeout at flange ¡C
Pressure, max. absolute
Torr
Output signal (analog)
V
Supply
Voltage
V DC
Operating 3) / heating current
mA
Response time
ms
Electrical connector
Materials exposed to process media
Internal volume cm 3 (inch 3 )
Weight
kg
Protection type
CDG045-SD
Temperature Controlled 45 °C
1000 100 10 1 0.1
5 5 x 10 -1 5 x 10 -2 5 x 10 -3 5 x 10 -4
5 x 10 -1 5 x 10 -2 5 x 10 -3 5 x 10 -4 5 x 10 -5
1 x 10 -1 1 x 10 -2 1 x 10 -3 1 x 10 -4 1 x 10 -5
0.15
0.0015 0.0015 0.0015 0.0025 0.0025
0.0025 0.0025 0.0025 0.0025 0.005
0.01
+15 É +40
+90
3000 2000 2000 2000 1000
0 É +10
11 - 25
220/450
< 30 < 30 < 30 < 100 < 100
D sub, 15 pin
aluminum oxide ceramic (Al 2 O 3 ), stainless steel (AISI316L) 4) , Vacon 70 5)
7 (0.43)
0.49
IP30
With DeviceNetª
Swagelok¨ 8 VCR¨, female
other flanges available on request
Ordering Information
1) SKYª Capacitance Diaphragm Gauges are also available calibrated in mbar and Pa
2) Non-linearity, hysteresis, repeatability at 25 ¡C ambient operating temperature without
temperature effects
3) Typical value at 25 ¡C ambient temperature after reaching operating temperature at
24 V DC supply
4) 18% Cr, 10% Ni, 3% Mo, 69% Fe
5) 28% Ni, 23% Co, 49% Fe
1000 100 10 1 0.1
360-303 361-303 362-303 364-303 365-303
B6
mm (inches)
B6.11