INFICON CATALOG 2000-2001 - Schoonover, Inc.
INFICON CATALOG 2000-2001 - Schoonover, Inc. INFICON CATALOG 2000-2001 - Schoonover, Inc.
Vacuum Gauges SKY TM Capacitance Diaphragm Gauge Protocol Technical Data Data rate switch Cable length 125 Kbps m (ft) 250 Kbps m (ft) 500 Kbps m (ft) MAC ID Network size Digital functions Analog functions Visual communication indicators Electrical connector Specifications (ODVA Semiconductor Special Interest Group DeviceNet ODVA Specifications CDG045-SD DeviceNetª, group 2 slave only 25 k, 250 k, 500 kBaud and programmable over network 500 (1650) 250 (825) 100 (330) 2 switches (address 00-63) or programmable over network up to 64 nodes per segment Read pressure, set 2 interlock relays A + B, select units: Torr, mbar, Pa, set zero over network (digital only) analog zero must be set with zero potentiometer, monitor: heater, gauge status, trip point high and low hysteresis, save state allows definition of behavior in case of error, detailed alarm and warning information Pressure monitor analog output 0 Ð 10 V LED network status (green/red) LED module status (green/red) 2 LED interlock relays A + B (green/off) Micro style connector (with power and signal line), 5 pin DeviceNetª ÒVacuum Gauge Device ProfileÓ Interface Guidelines for DeviceNetª Devices on Semiconductor Manufacturing Tools Interface Guidelines Conformance Test Procedures Device type DeviceNet Explicit peer to peer messaging I/O peer to peer messaging Configuration consistency value Faulted node recovery Baud rates k Baud Master/Scanner I/O slave messaging Bit Strobe Polling Cyclic Change of State (COS) Interlock relays Range Relay contact Hysteresis Contact rating V / A DC Relay status Connector Supply for DeviceNetª and sensor together V DC Connectors for DeviceNetª for CDG, analog output and Interlock relay DeviceNet CDG045-SD generic no no no no 125 250 500 no no yes yes yes 2 1 x 10 -4 x F.S. É F.S. n.o., potential free adjustable over complete range 60 / 0.5 LED green D sub, 15 pin 11 É 25 Microstyle, 5 pin D sub, 15 pin B6.10
SKY TM Capacitance Diaphragm Gauge Vacuum Gauges Technical Data Measurement range F.S. Torr 1) Lowest suggested control pressure Torr Lowest suggested reading Torr Lowest reading Torr Accuracy 2) Resolution % F.S. Temperature effects Zero coefficient % F.S./¡C Span coefficient % of reading/¡C Temperature Operation (ambient) ¡C Bakeout at flange ¡C Pressure, max. absolute Torr Output signal (analog) V Supply Voltage V DC Operating 3) / heating current mA Response time ms Electrical connector Materials exposed to process media Internal volume cm 3 (inch 3 ) Weight kg Protection type CDG045-SD Temperature Controlled 45 °C 1000 100 10 1 0.1 5 5 x 10 -1 5 x 10 -2 5 x 10 -3 5 x 10 -4 5 x 10 -1 5 x 10 -2 5 x 10 -3 5 x 10 -4 5 x 10 -5 1 x 10 -1 1 x 10 -2 1 x 10 -3 1 x 10 -4 1 x 10 -5 0.15 0.0015 0.0015 0.0015 0.0025 0.0025 0.0025 0.0025 0.0025 0.0025 0.005 0.01 +15 É +40 +90 3000 2000 2000 2000 1000 0 É +10 11 - 25 220/450 < 30 < 30 < 30 < 100 < 100 D sub, 15 pin aluminum oxide ceramic (Al 2 O 3 ), stainless steel (AISI316L) 4) , Vacon 70 5) 7 (0.43) 0.49 IP30 With DeviceNetª Swagelok¨ 8 VCR¨, female other flanges available on request Ordering Information 1) SKYª Capacitance Diaphragm Gauges are also available calibrated in mbar and Pa 2) Non-linearity, hysteresis, repeatability at 25 ¡C ambient operating temperature without temperature effects 3) Typical value at 25 ¡C ambient temperature after reaching operating temperature at 24 V DC supply 4) 18% Cr, 10% Ni, 3% Mo, 69% Fe 5) 28% Ni, 23% Co, 49% Fe 1000 100 10 1 0.1 360-303 361-303 362-303 364-303 365-303 B6 mm (inches) B6.11
- Page 1 and 2: B6 Vacuum Gauges Vacuum Gauges and
- Page 3 and 4: Basic Terms of Vacuum Metrology Vac
- Page 5 and 6: Transmitter Technology Vacuum Gauge
- Page 7 and 8: SKY TM Capacitance Diaphragm Gauge
- Page 9: SKY TM Capacitance Diaphragm Gauge
- Page 13 and 14: Bayard-Alpert Pirani Gauge BPG400 V
- Page 15 and 16: Pirani Standard Gauge Vacuum Gauges
- Page 17 and 18: Pirani Standard Gauge Vacuum Gauges
- Page 19 and 20: Bayard-Alpert Gauge Vacuum Gauges B
- Page 21 and 22: Bayard-Alpert Gauge Vacuum Gauges T
- Page 23 and 24: Penning Gauge PEG100 Vacuum Gauges
- Page 25 and 26: Vacuum Gauge Controller VGC103 Vacu
- Page 27 and 28: Vacuum Switch VSA100 Vacuum Gauges
Vacuum Gauges<br />
SKY TM Capacitance Diaphragm Gauge<br />
Protocol<br />
Technical Data<br />
Data rate switch<br />
Cable length<br />
125 Kbps m (ft)<br />
250 Kbps m (ft)<br />
500 Kbps m (ft)<br />
MAC ID<br />
Network size<br />
Digital functions<br />
Analog functions<br />
Visual communication indicators<br />
Electrical connector<br />
Specifications<br />
(ODVA Semiconductor Special Interest Group<br />
DeviceNet ODVA Specifications<br />
CDG045-SD<br />
DeviceNetª, group 2 slave only<br />
25 k, 250 k, 500 kBaud and programmable over network<br />
500 (1650)<br />
250 (825)<br />
100 (330)<br />
2 switches (address 00-63) or programmable over network<br />
up to 64 nodes per segment<br />
Read pressure, set 2 interlock relays A + B,<br />
select units: Torr, mbar, Pa, set zero over network (digital only)<br />
analog zero must be set with zero potentiometer,<br />
monitor: heater, gauge status, trip point high and low hysteresis,<br />
save state allows definition of behavior in case of error, detailed alarm and warning information<br />
Pressure monitor analog output 0 Ð 10 V<br />
LED network status (green/red)<br />
LED module status (green/red)<br />
2 LED interlock relays A + B (green/off)<br />
Micro style connector (with power and signal line), 5 pin<br />
DeviceNetª ÒVacuum Gauge Device ProfileÓ<br />
Interface Guidelines for DeviceNetª Devices on Semiconductor Manufacturing Tools<br />
Interface Guidelines Conformance Test Procedures<br />
Device type<br />
DeviceNet<br />
Explicit peer to peer messaging<br />
I/O peer to peer messaging<br />
Configuration consistency value<br />
Faulted node recovery<br />
Baud rates<br />
k Baud<br />
Master/Scanner<br />
I/O slave messaging<br />
Bit Strobe<br />
Polling<br />
Cyclic<br />
Change of State (COS)<br />
Interlock relays<br />
Range<br />
Relay contact<br />
Hysteresis<br />
Contact rating<br />
V / A DC<br />
Relay status<br />
Connector<br />
Supply for DeviceNetª and sensor together V DC<br />
Connectors for DeviceNetª<br />
for CDG, analog output and Interlock relay<br />
DeviceNet<br />
CDG045-SD<br />
generic<br />
no<br />
no<br />
no<br />
no<br />
125<br />
250<br />
500<br />
no<br />
no<br />
yes<br />
yes<br />
yes<br />
2<br />
1 x 10 -4 x F.S. É F.S.<br />
n.o., potential free<br />
adjustable over complete range<br />
60 / 0.5<br />
LED green<br />
D sub, 15 pin<br />
11 É 25<br />
Microstyle, 5 pin<br />
D sub, 15 pin<br />
B6.10
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