INFICON CATALOG 2000-2001 - Schoonover, Inc.

B6 

Vacuum Gauges 

Vacuum Gauges and Control Instruments

Vacuum Gauges 

Contents 

General 

Basic Terms of Vacuum Metrology . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B6.3 

Transmitter Technology . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B6.4 

Measurements Units Conversion Chart . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C1.3 

Sensors 

SKYª Capacitance Diaphragm Gauge. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B6.6 

CDG025, CDG045 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B6.6 

CDG045-SD . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B6.9 

Bayard-Alpert Pirani Gauge BPG400 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B6.12 

Pirani Standard Gauge. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B6.15 

PSG400, PSG400-S . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B6.15 

PSG100-S, PSG101-S . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B6.17 

Bayard-Alpert Gauge . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B6.19 

BAG100-S, BAG101-S . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B6.17 

Penning Gauge PEG100 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B6.22 

Controller 

Vacuum Gauge Controller VGC103 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B6.24 

Cables . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B6.25 

Vacuum Switch 

Vacuum Switch VSA100. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B6.27 

Calibration 

Calibration Service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B6.28 

B6.2

Basic Terms of Vacuum Metrology 

Vacuum Gauges 

Basic Terms of Vacuum Metrology 

Today, the total range of measurable vacuum pressure extends from 

atmospheric pressure (about 1000 mbar, 750 Torr) down to 10 -12 mbar 

(Torr) Ð over 15 decades. The instruments used for measuring pressure 

within this wide range are called vacuum gauges. It is impossible to create 

a single vacuum sensor capable of performing quantitative measurements 

throughout the entire pressure range. Therefore, a variety of different 

vacuum gauges are available, each with its own characteristic 

measurement range, commonly extending over several decades. 

Note the difference between direct and indirect pressure measurements. 

With direct pressure measurements, vacuum gauge readings are 

independent of gas type. Vacuum gauges, in which pressure is 

determined directly by recording the force acting on the surface of a 

diaphragm, are common. 

With indirect pressure measurements, pressure is determined as a function 

of a pressure-dependent property of the gas (i.e. thermal conductivity or 

resulting ion current). These properties not only depend on pressure, but 

also on the molar mass of the gases. Therefore, vacuum gauge presssure 

readings relying on indirect pressure measurements are gas composition 

dependent. These readings usually relate to air or nitrogen as the 

measurement gas. Appropriate correction factors must be applied for the 

measurement of other gases or vapors. 

Vacuum Gauges with Pressure Readings 

Independent of the Type of Gas 

Capacitance Diaphragm Vacuum Gauges 

A capacitance diaphragm gauge has two chambers. One is connected to 

the vacuum to be measured; the other holds a certain reference vacuum. 

The chambers are separated through a metal coated ceramic or thin metal 

membrane. Together with a parallel electrode this membrane functions as a 

condensator. When the pressure in one chamber is different from the 

pressure in the other chamber the membrane bends and thus changes the 

capacitance. The change is registered and converted into a pressure signal, 

a voltage proportional to the pressure. This method makes gas type 

independent absolute pressure measurement possible. Absolute capacitance 

gauges can accurately measure pressures from 10 -5 mbar (Torr) to well above 

atmospheric pressure using capacitance gauges having diaphragms of 

different thickness. 1) 

INFICON improvements in materials composition provide more stable and 

reliable measurements over an extended period of operation. At the same 

time, corrosion resistance is greatly enhanced by using ceramic instead 

of metal. 

Vacuum Gauges with Pressure Readings 

Depending on the Type of Gas 

Thermal Conductivity Vacuum Gauges (Pirani) 

The energy transfer from a hot wire by a gas can be used to measure the 

pressure. The heat is transferred into the gas by molecular collisions with 

the wire, i.e. by heat conduction and the rate at which the heat is 

transferred depends on the thermal conductivity of the gas. 

The heat loss from a wire (typically 5 µm to 20 µm in diameter) can be 

determined indirectly with a Wheatstone bridge circuit which both heats the 

wire and measures its resistance and therefore its temperature. 

A thin metal wire is suspended with at least one side electrically insulated 

in the gauge head and is exposed to the gas. Tungsten, nickel, iridium or 

platinum may be used for the wire. The wire is electrically heated and the 

heat transfer is electronically measured. There are three common operating 

methods: constant temperature method, constant voltage bridge, and the 

constant current bridge. All these methods indirectly measure the 

temperature of the wire by its resistance. 

This measurement principle uses the thermal conductivity of gases for 

pressure measurements from 10 -4 mbar (Torr) to atmospheric pressure. 

INFICON improvements in temperature compensation provide stable 

pressure readings in spite of large temperature changes, especially when 

measuring low pressures. 

Ionization Gauges 

When the pressure in a vacuum system is below about 10 -4 mbar (Torr), 

direct methods of measurement of the pressure by means such as the 

deflection of a diaphragm or measurement of bulk gas properties such as 

thermal conductivity are no longer readily applicable. Hence, it is necessary 

to resort to methods which essentially count the number of gas molecules 

present i.e., it is the number density not the pressure which is measured. 

One of the most convenient methods to measure the number density is to 

use some technique to ionize the gas molecules and then collect the ions. 

The resulting ion current is directly related to pressure and a calibration can 

be performed. The probability of ionizing a gas molecule will depend on a 

variety of factors and hence, the ionization gauge will have different 

sensitivity values for different gas species. 

B6 

1) For p < 1 mbar and T Gauge T Vacuum the linearity of a gauge with a controlled temperature is 

influenced by the thermal transpiration (gas type dependent) at the maximum in the same order 

of magnitude as the zero point stability. See K. F. Poulter, et al., Vacuum 33, 331 (1983); 

W. Jitschin and P. Ršhl, J. Vac. Sci. Technol. A, Vol. 5, No. 3, 1987. 

B6.3

Vacuum Gauges 

Transmitter Technology 

Hot Cathode Ionization Vacuum Gauges 

In a hot cathode ionization gauge, the electrons emitted from the surface of 

a hot filament are attracted to a highly transparent grid made from very thin 

wire and at a positive electrical potential. With the grid so open, there is a 

very high probability that the electron will pass right through the grid and 

not strike a wire. If the grid is surrounded by a screen at a negative 

electrical potential, the electron will be repelled by this screen and be 

attracted back to the grid. This process can happen many times before the 

electron finally hits the grid and is lost. As a result, very long electron paths 

can be achieved in a small volume, increasing the probability of ionizing a 

gas molecule. The resulting ions are attracted directly to the collector. 

Most hot cathode sensors used are based on this Bayard-Alpert 

arrangement of electrodes. With this electrode arrangement it is possible 

to make measurements in the pressure range from 10 -10 to 10 -2 mbar (Torr). 

Other electrode arrangements permit access to a higher range of pressures 

from 10 -10 mbar (Torr) up to 10 -1 mbar (Torr). For measurement of pressures 

below 10 -10 mbar (Torr), extractor ionization sensors are employed. In 

extractor ionization gauges, ions are focused on a very thin and short ion 

detector. Due to the geometry of this system, interfering influences such 

as X-ray effects and ion desorption are almost completely eliminated. 

The extractor ionization gauge permits pressure measurements in the 

range from 10 -12 to 10 -4 mbar (Torr). 

INFICON improvements in electrode arrangements provide a wider 

measurement range combined with excellent repeatability. The Bayard- 

Alpert Pirani Combination Gauge further improves the measurement range 

in an easy to use package. 

Cold Cathode Ionization Vacuum Gauges (Penning) 

The cold cathode ionization gauge dispenses with the hot filament and uses 

a combination of electric and magnetic fields. If one applies a potential of 

a few kilovolts between a parallel plate capacitor in the presence of a gas 

pressure of a few mbar (Torr), a glow discharge will result. In the glow 

discharge, energetic free electrons interact with neutral molecules to 

produce ions and more free electrons. The ions are attracted to the negative 

electrode and when they strike it, secondary electrons are created, which 

are attracted to the positive electrode. The glow discharge continues as 

long as the number of electrons being created is equal to or greater than 

the number being removed at the positive electrode. 


Transmitters convert an analog input signal (pressure) measurement value 

into an analog normed electronic measurement signal, i.e. 0 Ð 10 V. 

This measurement signal is typically available as a linear or logarithmic 

output signal. The advantages of transmitters over conventional gauges 

with a separate signal processing device are: 

♦ Sensor and electronics in one compact package 

♦ Large cost savings 

♦ Direct connection to customer control units 

♦ A simple formula to convert the measurement signal into any desired 

pressure unit 

♦ Clear error messages can be transmitted because of the structured 

measurement signals 

♦ Digital interfaces (RS 232 C, Profibus, DeviceNetª) allow direct 

measurement readings in digital form 

♦ Integrated setpoint for direct process control based on 

pressure measurement 

♦ Measurement signals can be transmitted over greater distances 

The INFICON transmitter vacuum gauge line provides unparalleled 

performance for system manufacturers taking advantage of unique 

technologies combined with cost saving potential. The transmitter 

technology combines the sensor with the control and evaluation electronics 

in one compact package. Several output concepts like 0 Ð 10 V analog 

output, digital RS 232 C and fieldbus communications are available. 

INFICON transmitter technology reduces the costs for vacuum 

measurement and system integration to a minimum. 

The Penning gauge design employs a ring as the positive electrode 

(anode), which is centrally located between two electrically connected, 

negatively charged, parallel plates (cathodes). Electrons are attracted to the 

plane of the ring. Upon arrival, these electrons pass through the ring, and 

continue to oscillate between the two cathode plates. This configuration 

lowers the pressure at which a discharge can be sustained by increasing 

the electron path length. By introducing a magnetic field this electron path 

becomes a spiral, significantly increasing the path length. This further 

lowers the pressure at which the discharge can be maintained. 

INFICON design concepts permit safe and reliable operation of ÒPenningÓ 

sensors in the pressure range from 1á10 -9 mbar to 1á10 -2 mbar (Torr). 

B6.4


Vacuum Gauges 

Conventional Measurement Systems 

Conventional vacuum measurement systems consist of separate sensors 

and control units. The unconditioned sensor signal has to be transmitted to 

the control and evaluation unit which makes the system susceptible to 

interferences and therefore requires special shielded cabling. Integration 

into vacuum systems is space consuming and usually inconvenient since 

the controller outputs are not linear or described completely by one 

simple formula and therefore require look-up tables to be integrated into 

the software. 

Transmitter Based Measurement Systems 

Analog Technology 

Digital Technology 

Digital interfaces (RS 232 C, Profibus DP, DeviceNetª) allow direct 

measurement readings in digital form and further enhance the advantages 

of transmitter technology. INFICON digital transmitters provide control of 

processes from one control position. 

This allows communication of exact digital information, independent control, 

maintenance and diagnostic routines for each connected instrument and 

simplifies the connection diagram further. 

Measures of control include: monitoring of measurement values, the 

automatic zero point adjustment of gauges, reminding the operator of 

scheduled maintenance work, warning signals in case of instrument 

failure and more. 

INFICON digital transmitters offer the flexibility and control of network 

communications further enhancing system quality and efficiency. 

B6 

The combination of sensor and electronics in one package simplifies the 

connection scheme of vacuum systems and saves valuable space and costs. 

The measuring signal is converted into an analog 0 Ð 10 V output signal, 

which can be directly converted to a digital signal and evaluated by a PLC or 

other control. This eliminates the need for a separate control and display unit. 

No look-up table is required anymore since the analog output signal is 

described completely by one simple formula. INFICON analog transmitters 

are the most economic solution for advanced vacuum measurement. 

B6.5

Vacuum Gauges 

SKY TM Capacitance Diaphragm Gauge 

SKY Capacitance Diaphragm Gauge 

CDG025, CDG045 

The SKY CDG uses an ultrapure aluminum oxide ceramic 

diaphragm instead of the traditional metal diaphragms used by 

other manufacturers. This ultrapure ceramic diaphragm is virtually 

corrosion proof resulting in improved reliability, stability and 

extended life time, even under the harshest conditions. SKY CDGs 

are used by several leading semiconductor system manufacturers. 

Patent pending on sensor and diaphragm 

Advantages 

♦ Marginal zero drift 

♦ Virtually corrosion proof Ð long sensor life results in reduced downtime 

thus reducing cost of ownership 

♦ Superior accuracy and repeatability over long period of operation 

♦ Better long-term and temperature stability 

♦ Less sensitive to frequent pressure cycles to atmosphere 

♦ Eliminates isolation valve (depending on operation mode) 

♦ Less susceptible to particles and process by-products through 

protective chamber 

♦ Fastest warm up time 

♦ Lower cost of investment 

♦ Supply with +15 V DC or +24 V DC 

Ceramic Diaphragms 

The diaphragm is the crucial element of any capacitance diaphragm gauge. 

Any alteration of the diaphragmÕs deflection characteristics leads to a 

change in the displayed pressure. 

The INFICON aluminum oxide ceramic (Alumina) diaphragms are especially 

designed and manufactured for the purpose of measuring also very low 

pressures. Ceramic membranes are produced from ultra pure, fine grained 

alumina powder in several sintering steps to achieve a dense, stress free 

and tension free diaphragm for the sensors. Several firing processes above 

1500 ¡C guarantee a purity of 99.5% or more than 99.9%. With this firing 

technique an exceptional uniformity of the material is achieved. Aluminum 

oxide ceramic diaphragms change less during operation than commonly 

used metal diaphragms. Temperature induced stretching, pressure and 

material induced creeping, as well as material alterations via corrosion, are 

greatly reduced or even eliminated in ceramic diaphragms. The pressure 

reading with ceramic diaphragms is more accurate and repeatable than with 

metal diaphragms over an extended period of time. 

♦ Drop-in replacement of existing CDGs due to interface compatibility 

Typical Applications 

♦ Etch, CVD, PVD, and other semiconductor production methods 

♦ Chemical process engineering 

♦ Reference sensor for monitoring of test instruments in accordance 

with DIN/ISO 9000 

B6.6


Vacuum Gauges 

A) Vacuum connection 

Stainless Steel, AlSl316L (18% Cr, 10% Ni, 3% Mo, 69% Fe) 

B) Protective chamber 


C) Plasma shield 


D) Metal-ceramic connection 

Vacon 70 (28% Ni, 23% Co, 49% Fe) 

and Braze, Ti, Ag, Cu 

E) Measurement chamber 

F) Reference chamber 

G) Diaphragm 

Al 2 

O 3 

³ 99.9% for 0.1 Ð 10 Torr 

Al 2 

O 3 

³ 99.5% for 100 Ð 1000 Torr 

H) Electrode 

Gold 

I) Glass ceramic solder 

J) Sensor housings 

Al 2 

O 3 

³ 99.5% 

Better Mechanical Stability 

The construction of the measuring cell is based on a symmetry principle. 

The diaphragm is bonded to the lower and upper sensor housing with the 

same material under the same process. Unwanted asymmetric tension of 

the diaphragm is avoided. Another benefit of such a relatively large bond is 

the good thermal contact between the housings and the diaphragm. 

Thanks to this construction the sensor has excellent mechanical and thermal 

stability. Even frequent pressure changes and overpressures cannot alter 

such a cell. The measuring results are consistent and remain excellent over 

much longer periods of operation than with metal ones. 

Better Temperature Stability 

Aluminum oxide ceramic has a significantly lower thermal expansion 

coefficient than the metals traditionally used. Conventional CDGs are 

constructed of a combination of ceramic parts and a metal diaphragm. 

The different thermal expansion of these materials can cause tension on the 

diaphragm resulting in a distorted pressure reading. The sensor of a 

SKYª CDG consists only of aluminum oxide ceramic. Because of this the 

span coefficient of a temperature compensated SKY CDG (CDG025) is 

improved over a conventional CDG by a factor of four. That of a temperature 

controlled gauge (CDG045) by a factor of two. 

High Corrosion Resistance 

Aluminum oxide ceramic is highly corrosion resistant. ThatÕs why the 

SKY CDGs are particularly useful under corrosive process conditions 

and deliver reliable measurement values much longer than conventional 

(metal diaphragm) CDGs. Corrosive process gases can impair or 

damage metal membranes to the point where accuracy and 

repeatability are adversely effected or the gauge ultimately fails. 

B6 

B6.7

Vacuum Gauges 


Technical Data 

Measurement range F.S. Torr 1) 

Lowest suggested control pressure 

Lowest suggested reading 

Lowest reading 

Accuracy 2) 

Torr 

Torr 

Torr 

Resolution 

% F.S. 

Temperature effects 

Zero coefficient 

% F.S./¡C 

Span coefficient 

% of reading/¡C 

Temperature 

Operation (ambient) ¡C 

Bakeout at flange ¡C 

Pressure, max. absolute 

Output signal (analog) 

Supply 

Voltage 

Operating 3) / heating current 

Response time 

Electrical connector 

Materials exposed to process media 

Torr 

VDC 

VDC 

mA 

ms 

Internal volume cm 3 (inch 3 ) 

Weight 

Protection type 

kg 

CDG025 

CDG045 

Temperature Compensated Temperature Controlled 45 °C 

1000 100 10 1 1000 100 10 1 0.1 

5 5 x 10 -1 5 x 10 -2 5 x 10 -3 5 5 x 10 -1 5 x 10 -2 5 x 10 -3 5 x 10 -4 

5 x 10 -1 5 x 10 -2 5 x 10 -3 5 x 10 -4 5 x 10 -1 5 x 10 -2 5 x 10 -3 5 x 10 -4 5 x 10 -5 

1 x 10 -1 1 x 10 -2 1 x 10 -3 1 x 10 -4 1 x 10 -1 1 x 10 -2 1 x 10 -3 1 x 10 -4 1 x 10 -5 

0.2 0.15 

0.0015 0.0015 0.0015 0.0025 0.0015 0.0015 0.0015 0.0025 0.0025 

0.005 0.005 0.005 0.015 0.0025 0.0025 0.0025 0.0025 0.005 

0.01 0.01 

+5 É +50 +15 É +40 

+110 +90 

3000 2000 2000 2000 3000 2000 2000 2000 1000 

0 É +10 0 É +10 

+15 (±5%) or +24 (±10%) +15 (±5%) or +24 (±10%) 

60/- 60/- 220/440 220/670 

< 30 < 30 < 30 < 100 < 30 < 30 < 30 < 100 < 100 

D sub, 15 pin 

aluminum oxide ceramic (Al 2 O 3 ), stainless steel (AISI316L) 4) , Vacon 70 5) 

6 (0.36) 7 (0.43) 

0.26 0.49 

IP 30 

Ordering Information 

1000 100 10 1 1000 100 10 1 0.1 

Vacuum connector 

1/2Ó tube 

DN 16 ISO-KF 

DN 16 CF-R 

Swagelok¨ 8 VCR¨, female 

Terminal strip connector 

1) SKYª Capacitance Diaphragm Gauges are also available calibrated in mbar and Pa 

2) Non-linearity, hysteresis, repeatability at 25 ¡C ambient operating temperature without 

temperature effects 

360-000 361-000 362-000 364-000 360-010 361-010 362-010 364-010 365-010 

360-001 361-001 362-001 364-001 360-011 361-011 362-011 364-011 365-011 

360-002 361-002 362-002 364-002 360-012 361-012 362-012 364-012 365-012 

360-003 361-003 362-003 364-003 360-013 361-013 362-013 364-013 365-013 

374-990 

3) Typical value at 25 ¡C ambient temperature after reaching operating temperature 

4) 18% Cr, 10% Ni, 3% Mo, 69% Fe 

5) 28% Ni, 23% Co, 49% Fe 

mm (inches) 

mm (inches) 

B6.8


Vacuum Gauges 

SKY Capacitance Diaphragm Gauge 

CDG045-SD 

The SKY CDG045-SD provides the most powerful technology of 

network communications and advanced sensor technology available 

in the market. 

The SKY CDG045-SD combines the advantages of DeviceNet 

network communications with the innovative technology of aluminum 

oxide ceramic CDGs. DeviceNet improves system quality, lowers cost 

and increases efficiency. It allows communication of exact digital 

information, independent control, maintenance and diagnostic routines 

for each connected instrument and simplifies the connection diagram. 

The SKY CDG045-SD conforms to the ODVA Specifications defined 

by the Semiconductor Special Interest Group. 

Patent pending on sensor and diaphragm 

Advantages 

♦ Marginal zero drift 

♦ Virtually corrosion proof Ð long sensor life results in reduced downtime 

thus reducing cost of ownership 

♦ Superior accuracy and repeatability over long period of operation 

♦ Better long-term and temperature stability 

♦ Less sensitive to frequent pressure cycles to atmosphere 

♦ Eliminates isolation valve (depending on operation mode) 

♦ Less susceptible to particles and process by-products through 

protective chamber 

♦ Fastest warm up time 

♦ Lower cost of investment 

♦ Supply with 11 to 25 V DC 

♦ Drop-in replacement of existing CDGs due to interface compatibility 


♦ Etch, CVD, PVD, and other semiconductor production methods 

♦ Chemical process engineering 

♦ Reference sensor for monitoring of test instruments in accordance 

with DIN/ISO 9000 

Using the SKY CDG045-SD with Fieldbus interface, processes can be 

controlled from one central position. The measures of control include: 

monitoring of measurement values, the automatic zero point adjustment 

of gauges, reminding the operator of scheduled maintenance work, 

warning signals in case of instrument failure and more. 

DeviceNet is a Fieldbus protocol with trunkline-dropline configuration 

which makes it possible to connect industrial instruments such as sensors, 

switches, valves, actuators etc. in a master/slave or peer-to-peer network. 

Such networks can connect up to 64 individual knots or instruments per 

network segment with one host (such as a PLC or PC). Integrated 

instruments can receive orders and requests from the host, execute them 

and then send information back as a result. DeviceNet offers the simplicity 

of running the signal as well as the power supply through the same 

Fieldbus cable. Knots can also be removed from the network without 

having to turn them off and without having to disconnect the network. 

DeviceNet uses the CAN (Controller Area Network) communications 

protocol for data transfer. CAN was originally developed for the automobile 

industry for applications such as control of ABS breaking systems and air 

bags Ð applications requiring fast response times and high reliability. 

The same speed and reliability in data transfer is utilized in the INFICON 

sensors with DeviceNet. 

DeviceNet is an open networking standard that follows the DeviceNet 

specifications Ð this means that it is manufacturer independent. 

INFICON sensors adhere to these documented standards and guarantee 

real plug and play functionality. 

B6 

B6.9

Vacuum Gauges 


Protocol 


Data rate switch 

Cable length 

125 Kbps m (ft) 



MAC ID 

Network size 

Digital functions 

Analog functions 

Visual communication indicators 


Specifications 

(ODVA Semiconductor Special Interest Group 

DeviceNet ODVA Specifications 

CDG045-SD 

DeviceNetª, group 2 slave only 

25 k, 250 k, 500 kBaud and programmable over network 

500 (1650) 

250 (825) 

100 (330) 

2 switches (address 00-63) or programmable over network 

up to 64 nodes per segment 

Read pressure, set 2 interlock relays A + B, 

select units: Torr, mbar, Pa, set zero over network (digital only) 

analog zero must be set with zero potentiometer, 

monitor: heater, gauge status, trip point high and low hysteresis, 

save state allows definition of behavior in case of error, detailed alarm and warning information 

Pressure monitor analog output 0 Ð 10 V 

LED network status (green/red) 

LED module status (green/red) 

2 LED interlock relays A + B (green/off) 

Micro style connector (with power and signal line), 5 pin 

DeviceNetª ÒVacuum Gauge Device ProfileÓ 

Interface Guidelines for DeviceNetª Devices on Semiconductor Manufacturing Tools 

Interface Guidelines Conformance Test Procedures 

Device type 

DeviceNet 

Explicit peer to peer messaging 

I/O peer to peer messaging 

Configuration consistency value 

Faulted node recovery 

Baud rates 

k Baud 

Master/Scanner 

I/O slave messaging 

Bit Strobe 

Polling 

Cyclic 

Change of State (COS) 

Interlock relays 

Range 

Relay contact 

Hysteresis 

Contact rating 

V / A DC 

Relay status 

Connector 

Supply for DeviceNetª and sensor together V DC 

Connectors for DeviceNetª 

for CDG, analog output and Interlock relay 

DeviceNet 

CDG045-SD 

generic 

no 

no 

no 

no 

125 

250 

500 

no 

no 

yes 

yes 

yes 

2 

1 x 10 -4 x F.S. É F.S. 

n.o., potential free 

adjustable over complete range 

60 / 0.5 

LED green 

D sub, 15 pin 

11 É 25 

Microstyle, 5 pin 

D sub, 15 pin 

B6.10


Vacuum Gauges 


Measurement range F.S. Torr 1) 

Lowest suggested control pressure 

Torr 

Lowest suggested reading 

Torr 

Lowest reading 

Torr 

Accuracy 2) 

Resolution 

% F.S. 

Temperature effects 

Zero coefficient 

% F.S./¡C 

Span coefficient 

% of reading/¡C 

Temperature 




Torr 

Output signal (analog) 

V 

Supply 

Voltage 

V DC 

Operating 3) / heating current 

mA 

Response time 

ms 




Weight 

kg 


CDG045-SD 

Temperature Controlled 45 °C 

1000 100 10 1 0.1 

5 5 x 10 -1 5 x 10 -2 5 x 10 -3 5 x 10 -4 

5 x 10 -1 5 x 10 -2 5 x 10 -3 5 x 10 -4 5 x 10 -5 

1 x 10 -1 1 x 10 -2 1 x 10 -3 1 x 10 -4 1 x 10 -5 

0.15 

0.0015 0.0015 0.0015 0.0025 0.0025 

0.0025 0.0025 0.0025 0.0025 0.005 

0.01 

+15 É +40 

+90 

3000 2000 2000 2000 1000 

0 É +10 

11 - 25 

220/450 

< 30 < 30 < 30 < 100 < 100 

D sub, 15 pin 

aluminum oxide ceramic (Al 2 O 3 ), stainless steel (AISI316L) 4) , Vacon 70 5) 

7 (0.43) 

0.49 

IP30 

With DeviceNetª 


other flanges available on request 


1) SKYª Capacitance Diaphragm Gauges are also available calibrated in mbar and Pa 

2) Non-linearity, hysteresis, repeatability at 25 ¡C ambient operating temperature without 

temperature effects 

3) Typical value at 25 ¡C ambient temperature after reaching operating temperature at 

24 V DC supply 

4) 18% Cr, 10% Ni, 3% Mo, 69% Fe 

5) 28% Ni, 23% Co, 49% Fe 

1000 100 10 1 0.1 

360-303 361-303 362-303 364-303 365-303 

B6 

mm (inches) 

B6.11

Vacuum Gauges 

Bayard-Alpert Pirani Gauge BPG400 


This outstanding Bayard-Alpert Pirani Combination Gauge 

(optional: with display) provides the functions of two gauges in a 

single compact unit measuring from atmosphere to 5 x 10 -10 mbar 

(3.8 x 10 -10 Torr). This reduces the complexity of installation, setup, 

and use of vacuum measurement on the system. The integrated 

Pirani protects the hot ion filament from burning out and reduces 

the contamination by automatically switching it off at high pressures. 

The optional integrated LCD display offers pressure reading and 

status information. The BPG400 provides the best performance 

for process and base pressure measurement in the most 

economic package. 

Patent granted on electronics Ð Patent pending on sensor 

Advantages 

♦ Extremely wide measurement range from 5 x 10 -10 mbar 

(3.8 x 10 -10 Torr) to atmosphere combined with excellent repeatability 

in the process pressure range (less than ±5%) 

♦ Long-life yttrium oxide coated iridium cathode 

♦ Robust, compact construction 

♦ Easy integration: 

Ð one formula produces a logarithmic analog output over entire 

pressure range 

Ð no interlock with other gauges is necessary 

Ð RS 232 C interface 

♦ Cost savings: 

Ð single gauge instead of two 

Ð single flange connection to the system 

Ð single cable 

♦ Single flange connection reduces probability of leaks 

♦ Easy use: 

Ð automatic high vacuum adjustment of Pirani through hot ion gauge 

Ð optional integrated LCD display for pressure reading and 

information status 

Ð optional bakeout extension 


♦ Pressure measurement in semiconductor processes and 

transfer chambers 

♦ Industrial coating (PVD) 

♦ General vacuum measurement and control on systems in rough to 

high vacuum range 

Advantages of BPG400 Over 

Conventional Technology 

Conventional hot ion gauges used for high vacuum measurement can only 

be operated below atmospheric pressures typically in the range below 

10 -2 mbar (Torr). When operated at higher pressures the filament lifetime is 

dramatically reduced and may burn out almost immediately. Therefore, hot 

ion gauges must be switched on only at specified operating pressures. 

Usually, a fore vacuum gauge (Pirani) controls the switching on and off of 

the hot ion gauge. Such systems consist of two gauges with the necessary 

tubing, cabling and corresponding costly signal processing, which is done 

by PLC software or hardwiring. 

♦ High reliability: 

Ð Pirani protects filament from burn out 

(withstands air inrush > 10,000 times) 

Ð In the unlikely case of failure the sensor can be easily replaced 

B6.12


Vacuum Gauges 

Advanced BPG400 

The unique concept of the Bayard-Alpert Pirani Combination Gauge 

eliminates the disadvantages of conventional technology and provides 

unparalleled performance. The gauge consists of two sensing systems, a 

hot ion sensor and a Pirani sensor, which signals are combined in one 

single compact package. 

The enclosed sensor tube with integrated grid protects the sensor from 

external electrical fields. The optional baffle is recommended in case of 

particles or process by-products possibly contaminating the sensor or when 

freak ions, stray light or fast electrons could influence the measurement. 

 

The Pirani sensor automatically controls the switching on and off of the hot 

ion sensor at a defined switching threshold. The filament therefore is 

protected since the hot ion sensor is switched off instantaneously in case of 

an air inrush. This minimizes problems associated with operator error, 

extended signal processing time, and other system failures. 

The electron bombardment degas function provides efficient cleaning of a 

contaminated sensor. These measures as well as the yttrium oxide coated 

iridium filament extend the lifetime of the gauge to its best. When the end 

of the sensorÕs lifetime is reached, simply unplug the sensing element from 

the electronics and plug in the replacement. 

For higher bakeout temperatures the electronics can be easily removed 

when no reading is required or the bakeout extension can be attached 

between the sensor and the electronics when a reading is required. 

B6 

Withstands air inrush > 10,000 times. 

The BPG400 eases the integration into process systems and reduces cost. 

The combination gauge eliminates the need of two single gauges, which 

saves one gauge, one port, one cable, tubing, flanging and converter parts. 

The software integration is very easy and convenient since the output 

signal is described by a simple formula, which reduces cost further. 

B6.13

Vacuum Gauges 



BPG400 

Measurement range 

mbar 

Torr 

5 x 10 -10 É 1000 

3.8 x 10 -10 É 750 

Accuracy, 10 -8 É 10 -2 mbar 

% of reading 

±15% 

Repeatability, 10 -8 É 10 -2 mbar 

% of reading 

±5% 

Degas 1) (p < 7.2 x 10 -6 mbar (5.4 x 10 -6 Torr)) 

electron bombardment, 

3 min max. 


bar 

2 

Temperature 


Storage ¡C 

Bakeout ¡C 

At flange with extension ¡C 

At flange without extension ¡C 

Electronics removed ¡C 

0 É +50 

-20 É +70 

150 

80 

150 

Power supply 

Voltage 

Consumption, max. 

V DC 

W 

20 É 28 

16 

Output signal analog 

Measurement range, logarithmic 

Relation voltage/pressure 

Error signal 

Minimum load 

V 

V 

V/decade 

V 

k½ 

0 É 10 

0.774 É 10 

0.75 

< 0.4 

10 

optional: display for 

pressure and status 

information 

Interface (digital) 

RS 232 C 

Connector 

Cable length, max. 2) 

m (ft) 

D sub, 15 pin 

100 (330) 

mm (inches) 


yttrium oxide, iridium, 

stainless steel, Cu, W, 

glass, NiFe, NiCr 

Internal volume KF / CF cm 3 (inch 3 ) 

24 / 34 (1.46 / 2.1) 

Weight KF / CF 

g 

285 / 550 


IP 30 


BPG400 

Without LCD display 

DN 25 ISO-KF 

DN 40 CF-R 

353-500 

353-502 

With LCD display 

DN 25 ISO-KF 

DN 40 CF-R 

353-501 

353-503 

Replacement sensor 

DN 25 ISO-KF 

DN 40 CF-R 

354-490 

354-491 

Bakeout extension, 100 mm (3.94 inches) 

353-510 

24 V DC supply / RS 232 C line 

353-511 

Baffle 

353-512 

1) Reduced accuracy during degas 

2) RS 232 C operation < 30 m 

B6.14

Pirani Standard Gauge 

Vacuum Gauges 


PSG400, PSG400-S 

The Pirani Standard Gauge PSG400 represents the most advanced 

Pirani technology in a very compact, rugged package. The improved 

temperature compensation by the incorporated twin Pirani provides 

faster, more stable vacuum measurement and eliminates the slow 

response towards atmospheric pressures. The rugged stainless steel 

sensor cell qualifies it for use on semiconductor systems, as well as 

traditional applications such as fore vacuum lines. 

Patent granted on electronics 

Advantages 

♦ Small footprint 

♦ Mount in any orientation 

♦ Metal sealed feedthrough with stainless steel measuring cell 

♦ Optimized temperature compensation with twin Pirani principle 

♦ Logarithmic signal output for easy integration 

♦ High overpressure capability to 10 bar absolute with 

threaded connections 

♦ Bakeable version available for 250 ¡C at flange 

♦ Sensor cell easily replaced 


♦ Controlling of high vacuum ionization gauges 

♦ Fore vacuum pressure monitoring 

♦ Safety circuits in vacuum systems 

♦ General vacuum measurement and control in fine and rough 

vacuum range 

Advantages of PSG400 Over 

Conventional Technology 

In conventional Pirani gauges the filament used as measurement element is 

one arm of a self-adjusting bridge circuit. The filament temperature is in the 

range of 120 ¡C. Whenever a pressure change occurs a gain control 

amplifier automatically adjusts the bridge voltage to keep the filament 

temperature constant. This bridge excitation is the primary measurement 

used in determining the pressure. The ambient operating temperature also 

has an influence on the power necessary to keep the filament temperature 

constant. Ambient temperature changes appear as changes in pressure. 

To compensate, a temperature sensitive element is placed close to the 

sensor. The ambient temperature is thus registered and the measurement 

signal is compensated, accordingly. 

Advanced PSG400 

This sensor consists of two filaments, which are kept constant at two 

separate operating temperatures (65 ¡C and 120 ¡C). A change in pressure 

affects both filaments the same way. The power required to keep the 

filaments at the constant temperature is pressure dependent. By using the 

power difference between the two filaments one can easily eliminate 

changes in the temperature and thus isolate the changes in pressure. 

This satisfies the need for temperature compensation, but eliminates the 

delays associated with using a separate temperature sensor, resulting in 

a very fast response time. 

B6 

B6.15

Vacuum Gauges 



PSG400 PSG400-S 


Accuracy, 1 x 10 -2 É 100 mbar 

Repeatability, 1 x 10 -3 É 100 mbar 

Mounting orientation 

Setpoint 

Range 

Relay contact 

Hysteresis 


Relay status 

mbar 

Torr 

% of reading 

% of reading 

mbar 

V / A DC 


bar 

Temperature 


Storage ¡C 


Power supply 

Voltage 

VDC 


W 


V 

Measurement range, logarithmic 

V 


V/decade 

Error signal 

V 

Response time 

ms 

Connector 

Cable length, max. 


m (ft) 

Internal volume KF / CF cm 3 (inch 3 ) 

Weight KF / CF 


g 

5 x 10 -4 É 1000 

3.8 x 10 -4 É 750 

Å ±10 

Å ±2 

any 

n/a 1 

2 x 10 -3 É 500 

n.o. 

potential free 

approx. 30% 

of adjusted 

pressure 

60 / 0.5 

LED, green 

10 1) 

+ 5 É + 60 

- 20 É + 65 

80 / 250 2) 

14 É 32 

1 

0 É 10.3 

1.9 Ð 10 

1.286 

< 0.5 

10 

FCC 68, 8 pin (shielded) 

100 (330) 

tungsten, stainless steel, 

glass, Cu, NiFe, Ni 

2 / 10 (0.1 / 0.6) 

97 / 120 

IP 40 

mm (inches) 


PSG400 

PSG400-S 

DN 16 ISO-KF 

1/8Ó NPT 

DN 16 CF-R 2) 

1/2" tube 



DN 16 ISO-KF 

1/8Ó NPT 

DN 16 CF-R 2) 

1/2Ó tube 


350-000 350-010 

350-001 350-011 

350-002 350-012 

350-003 350-013 

350-004 350-014 

350-990 

350-991 

350-992 

350-993 

350-994 

1) Threaded connections only 2) Extended tube for bakeout with 250 ¡C at flange 

B6.16


Vacuum Gauges 


PSG100-S, PSG101-S 

The Pirani Standard Gauges PSG100-S and PSG101-S are 

especially designed for easy integration into vacuum systems using 

Profibus DP or DeviceNetª fieldbus protocols. The gauges are 

equipped with a set point and for corrosive applications, a platinum 

filament version is available. 

Patent pending 

Advantages 

♦ Fieldbus interface (Profibus, DeviceNet) for easy integration into vacuum 

systems using network communications 

♦ For corrosive applications or high levels of water vapors the PSG101-S 

uses a platinum filament and a Al 2 

O 3 

ceramic feedthrough 

♦ Setpoint with adjustable threshold over a wide range 

♦ Mount in any position 

♦ Logarithmic analog output signal available 

♦ Sensor cell is easily replaced 


♦ Processes with corrosive gases (PSG101-S) 

♦ Fore vacuum pressure monitoring 

♦ Controlling of high vacuum ionization gauges 

♦ Safety circuits in vacuum systems 

♦ General vacuum measurement and control in the fine and rough 

vacuum range 

Fieldbus 

Fieldbus allows processes or applications the flexibility and control of 

network communications. It permits communication of exact digital 


for each connected instrument and simplifies your connection diagram. 

The measures of control include: monitoring of measurement values, 

automatic zero point adjustment of gauges, update operator of scheduled 

maintenance work, warning signals in case of instrument failure, and more. 

Profibus DP 

The central automation systems, e.g. PLC/PC or process control systems, 

communicate through a fast serial connection with decentralized 

instruments such as I/O, motors, valves and pressure transmitters. The 

exchange of data with the decentralized instruments takes place mostly in 

cycles. The basic functions of the Profibus DP Communication Profile also 

include acyclic communication services for parameter setting, controlling, 

monitoring, and alert functions of intelligent instruments. 

DeviceNet 

The DeviceNet interface supports polling, bit strobe and change of 

state/cyclic commands. Like with other DeviceNet instruments the user 

can monitor and control all available sensor functions. 

B6 

B6.17

Vacuum Gauges 


Profibus DP 

PSG100-SP 

PSG101-SP 


PSG100-S 

PSG101-S 

Supported baud rates (for auto detection) 

Expanded user parameter data 

Configuring 

Number of input and output data 

Sync-Mode and Freeze-Mode 

Connector 

Device type 

Explicit Peer to Peer Messaging 

I/O Peer to Peer Messaging 



Baud rates 


I/O Slave Messaging 

Bit Strobe 

Polling 

Cyclic 


Supply 

Connector 

DeviceNet 

k Baud 

Bytes 

Bytes 

k Baud 

V DC 

9.6 

19.2 

93.75 

187.5 

500 

1500 

5 

2 

yes 

D sub, 9 pin 

PSG100-SD 

PSG101-SD 

generic 

no 

no 

no 

no 

125 

250 

500 

no 

yes 

yes 

yes 

yes 

11 É 25 

Phoenix Combicon, 5 pin 


Filament material 

Mounting position 

Fieldbus protocol 

Setpoint 

Range 

Relay contact 

Hysteresis 


Relay status 


mbar 

Torr 

mbar 

V / A DC 

bar 

Temperature 


Storage ¡C 


Power supply 

Voltage 

V DC 


W 


V 


V 


V/decade 

Connector 

Cable length, max. (analog) 


m (ft) 

Flange 


Weight, approx. 


kg 

5 x 10 -4 É 1000 

3.8 x 10 -4 É 750 

tungsten platinum 

any 

DeviceNetª or 

Profibus DP 

1 

1 x 10 -3 É 500 

n.o. / potential free 

ca. 30% of adjusted pressure 

60 / 0.5 

LED, green 

3 10 1) 

+10 É +50 

-20 É +70 

80 

14.5 É 36 

< 2 

0 É 10.6 

0.66 É 10 

1.333 


100 (330) 

tungsten, Al, platinum, 

nickel-plated stainl. steel, 

steel, stainless CrNi, Al 2 O 3 

steel, NiFe, ceramics, 

glass, NiFe, Mo, Ni 

CrNi8020, 

epoxy cement 

DN 16 ISO-KF 

11 (0.67) 

0.29 

IP 40 


PSG100-S 

PSG101-S 

With setpoint 

With DeviceNetª (PSG100-SD, PSG101-SD) 

With Profibus DP (PSG100-SP, PSG101-SP) 


n/a 350-030 

350-021 350-031 

350-022 350-032 

350-980 350-981 

1) Threaded connections only 

mm (inches) 

B6.18

Bayard-Alpert Gauge 

Vacuum Gauges 


BAG100-S, BAG101-S 

The Bayard-Alpert Gauge BAG100S covers an extremely wide 

measurement range with excellent reproducibility in the process 

pressure range. The sensor employs two filaments which are made 

of long-life yttrium oxide coated iridium for standard applications or 

alternatively tungsten, which is more compatible with halogens 

(Cl, Fl, Br) or hydrogen gas compositions. The gauge features 

selectable analog as well as digital communications by RS 232 C 

interface or fieldbus options like Profibus DP and DeviceNet. 

The IP54 rating ensures protection against dust, water spray, and 

electromagnetic interferences. 

Advantages 

♦ Wide measurement range of 2 x 10 -10 to 1 x 10 -1 mbar 

(1.5 x 10 -10 to 7.5 x 10 -2 Torr) with a single sensor 

♦ High reproducibility of ±10% of the measurement value within the 

process pressure range 

♦ Fully encapsulated sensor with a very stable electrode geometry 

♦ Longer life through dual cathodesÐautomatic switchover in case of failure 

♦ Long-life iridium cathodes with yttrium oxide coating 

♦ Continuous measurement available during electron bombardment degas 

♦ Easy-to-exchange sensors with automatic self-adjustment to 

maintain reproducibility 

♦ Relay contact switching threshold adjustable over a wide range 

♦ Analog output with selectable logarithmic / linear characteristic 

♦ Digital interfaces: RS 232 C / Fieldbus: Profibus DP or DeviceNetª 

♦ Rugged IP 54 metal enclosure 

♦ High EMI compatibility through screened enclosure, screened sensor, 

and interference suppression on all inputs and outputs 


♦ Pressure measurement in semiconductor processes and 

transfer chambers 

♦ Evaporation and coating systems 

♦ General pressure measurement and control in fine and high vacuum range 

The innovative Bayard-Alpert Transmitters BAG100-S and BAG101-S offer 

a wide measurement range spanning from 2 x 10 -10 to 1 x 10 -1 mbar. 

The wide range Bayard-Alpert measuring system is mechanically protected 

by the metal tube which surrounds it. The rugged arrangement of the 

electrodes ensures highly repeatable measurements over the entire range. 

Each sensor is individually calibrated in the factory. The calibration data 

are stored in an EEPROM which is fully integrated into the sensor. 

When exchanging the sensor, the electronics of the transmitter are 

automatically adjusted to the currently connected sensor so that the 

specified reproducibility can be guaranteed. The sensor with a CF flange 

is equipped with a welded current feedthrough which enables degassing 

of the sensor at a temperature of 150 ¡C with the electronics in place. 

Sensor supply and processing of the measurement data is performed by 

microprocessor controlled electronics which require a 24 V power supply 

and draw a very low current. The microcontroller also controls the 

BAG100-S and BAG101-S in that it monitors the emission, converts and 

corrects the measurement data (automatic correction of the sensorÕs 

sensitivity, matching of the unit etc.) and monitors the trigger thresholds 

for the relay. 

The selectable signal output characteristics (linear / logarithmic) as well 

as the digital computer interfaces permit easy integration in existing or 

future system concepts. 

B6 

B6.19

Vacuum Gauges 


Fieldbus 




for each connected instrument and simplifies your connection diagram. 

Device type 

DeviceNet 



BAG100-SD 

BAG101-SD 

generic 

no 

no 

The measures of control include: monitoring of measurement values, 

automatic zero point adjustment of gauges, update operator of scheduled 

maintenance work, warning signals in case of instrument failure, and more. 

Profibus DP 



instruments such as I/O, motors, valves and pressure transducers. 

The exchange of data with the decentralized instruments takes place 

mostly in cycles. The basic functions of the Profibus DP Communication 

Profile also include acyclic communication services for parameter setting, 

controlling, monitoring, and alert functions of intelligent instruments. 



Baud rates 



Bit Strobe 

Polling 

Cyclic 


Supply 

Connector 

k Baud 

V DC 

no 

no 

125 

250 

500 

no 

yes 

yes 

yes 

yes 

11 É 25 

Microstyle, 5 pin 

DeviceNet 


state/cyclic commands. Like with other DeviceNet instruments the user 

can monitor and control all available sensor functions. 

Profibus DP 

Supported baud rates (auto detection) 

k Baud 

BAG100-SP 

9.6 

19.2 

93.75 

187.5 

500 

1500 


no 

Configuring 


Bytes 

2 each 


yes 

Connector 

D sub, 9 pin 

mm (inches) 

B6.20


Vacuum Gauges 


BAG100-S 

BAG101-S 


Reproducibility 

Repeatability 

Long term sensitivity drift 

Filament material 

Number of filaments 

Degas (p < 2 x 10 -5 mbar (1.5 x 10 -5 Torr)) 

mbar 

Torr 

% of reading 

% of reading 

% of reading 

Setpoint 

Range 

mbar 

Relay contact 

Hysteresis 


V / A DC 

Relay status 


bar 

Temperature 


Storage ¡C 

Bakeout at flange DN 25 ISO-KF ¡C 

Bakeout at flange DN 40 CF-R ¡C 

Power supply 

Voltage 

VDC 

Current Consumption 

Operation 

A 

Bakeout 

A 

Measurement start (approx. 1 sec.) 

A 


V 


V 

Selectable scaling 


Response time (at p > 1 x 10 -6 mbar) 

ms 

Connector 


m (ft) 

Materials exposed to process media (excl. filament) 

Internal volume, approx. DN 25 KF / DN 40 CF cm 3 (inch 3 ) 

Weight, approx. DN 25 KF / DN 40 CF 

kg 


2 x 10 -10 É 1 x 10 -1 2 x 10 -10 É 5 x 10 -3 

1.5 x 10 -10 É 7.5 x 10 -2 1.5 x 10 -10 É 3.8 x 10 -3 

±10 

±2 

±2 

yttrium oxide, iridium 

tungsten 

2 

electron bombardment, 3 min max. 

1 1 

1 x 10 -9 É 1 x 10 -1 1 x 10 -9 É 1 x 10 -3 



approx. 10% of adjusted pressure approx. 10% of adjusted pressure 

60 / 0.5 60 / 0.5 

LED, green 

LED, green 

2 

0 É +50 

-20 É +70 

80 

150 

20 É 28 

0.5 

0.8 

1.4 

0 É 10 

0 É 10 

1 or 3 decades out of 9 

RS 232 C 

100 

D sub, 15 pin (shielded) 

100 (330) 

stainless steel, glass, NiFe, NiCr 

24 / 34 (1.46 / 2.1) 

0.98 / 1.28 

IP 54 

B6 


BAG100-S 

BAG101-S 

DN 25 ISO-KF 

DN 40 CF-R 

With Profibus DP (BAG100-SP) 

DN 25 ISO-KF 

DN 40 CF-R 

With DeviceNetª (BAG100-SD, BAG101-SD) 

DN 25 ISO-KF 

DN 40 CF-R 


DN 25 ISO-KF 

DN 40 CF-R 

24 V DC supply / RS 232 C line 

352-000 n/a 

352-002 352-003 

352-010 n/a 

352-011 n/a 

352-005 352-007 

352-006 352-008 

352-490 352-492 

352-491 352-493 

353-511 

B6.21

Vacuum Gauges 

Penning Gauge PEG100 


The Penning Gauge PEG100 provides reliable high vacuum 

measurements. The rugged penning cold cathode sensor has no 

filament to burn out. Due to titanium cathode plates and the reduced 

high voltage after plasma ignition, the gauge can be operated also in 

sputtering applications. The fieldbus options, in addition to the 

logarithmic analog output signal, allow easy integration into vacuum 

systems using Profibus DP or DeviceNet protocols. 

Patent pending on sensor 

Advantages 

♦ Wide measurement range from 1 x 10 -9 to 1 x 10 -2 mbar (7.5 x 10 -10 

to 7.5 x 10 -3 Torr) 

♦ All-metal cold cathode sensor (Penning) with ceramic feedthrough 

♦ New electrode geometry provides excellent ignition properties 

♦ Decreased high voltage after plasma ignition and titanium cathode 

plates reduce risk of contamination, even during sputtering operations 

with argon 

♦ The anode ring and the titanium cathode can be cleaned or 

replaced easily 

♦ Minimal magnetic field intensity adjacent to gauge 

♦ LED indicator for power on and plasma ignited 

♦ Logarithmic analog output signal 

♦ Fieldbus interface (Profibus DP, DeviceNet) for easy integration into 

vacuum systems using network communications 


♦ High vacuum pressure monitoring 

♦ Evaporation and sputtering systems 

♦ General vacuum measurement and control in the fine and high 

vacuum range 

The Penning Gauge PEG100 is a cold cathode sensor based on the well 

proven principle of Penning. For degassing of the all-metal sensor with 

Al 2 

O 3 

current feedthrough, the housing of the transmitter with its electronics 

and magnet may easily be removed. The magnet offers a closed magnetic 

field for negligible stray field. The PEG therefore may also be installed close 

to sensitive parts within a system. The anode ring and the titanium cathode 

plates may be exchanged easily for quick maintenance should they become 

contaminated. Since sputtered titan is not magnetic Ð limiting the build up of 

short circuits within the sensor Ð the risk of contamination is greatly 

reduced. The newly designed cathode plate acts as a baffle for the sensor. 

Fieldbus 



information, independent control, maintenance and diagnostic routines for 

each connected instrument and simplifies your connection diagram. 

The measures of control include the monitoring of measurement values, the 

automatic zero point adjustment of gauges, reminding the operator of 

scheduled maintenance work, warning signals in case of instrument failure 

and more. 

Profibus DP 



instruments such as I/O, motors, valves and pressure transducers. The 

exchange of data with the decentralized instruments takes place mostly in 

cycles. The basic functions of the Profibus DP Communication Profile also 

include acyclic communication services for parameter setting, controlling, 

monitoring, and alert functions of intelligent instruments. 

DeviceNet 


state/cyclic commands. Like with other DeviceNet instruments the user can 

monitor and control all available sensor functions. 

B6.22


Vacuum Gauges 

Profibus DP 

PEG100-P 


PEG100 

Supported baud rates (auto detection) 


Configuring 



k Baud 

Bytes 

Bytes 

9.6 

19.2 

93.75 

187.5 

500 

1500 

5 

2 

yes 


Accuracy, 1 x 10 -8 É 1 x 10 -4 mbar 

mbar 

Torr 

% of reading 


bar 

Temperature 


Storage ¡C 

Bakeout 

without electronics ¡C 

with electronics, at flange ¡C 

1 x 10 -9 É 1 x 10 -2 

7.5 x 10 -10 É 7.5 x 10 -3 

Å ±30 

10 

+10 É +50 

-20 É +75 

350 

70 

Connector 

D sub 9 pin 

Power supply 

Voltage 


VDC 

W 

14.5 É 36 

< 2 

Device type 





Baud rates 

DeviceNet 

k baud 

PEG100-D 

generic 

no 

no 

no 

no 

125 

250 

500 




Connector 



V 

V 

V/decade 

m (ft) 


Weight, approx. 

kg 


0 É 10.6 

0.66 É 10 

1.333 


100 (330) 

stainless steel, CrNi, 

Al 2 O 3 , NiFe, Mo, Cu, Ni, Ti 

21 (1.28) 

0.5 

IP 40 


no 


Bit Strobe 

Polling 

Cyclic 


Supply 

Connector 

V DC 

yes 

yes 

yes 

yes 

11 É 25 

Phoenix Combicon, 5 pin 


PEG100 

DN 25 ISO-KF 

DN 40 CF-R 

With DeviceNetª (PEG100-D) 

DN 25 ISO-KF 

DN 40 CF-R 

With Profibus DP (PEG100-P) 

DN 25 ISO-KF 

Replacement cathode plates, titanium 

Set of 5 pieces 

PEG100 

351-000 

351-002 

351-003 

351-004 

351-005 

351-490 

B6 

mm (inches) 

B6.23

Vacuum Gauges 

Vacuum Gauge Controller VGC103 


By combining up to three principles of measurement Ð from hot 

cathode, cold cathode, Pirani or capacitance diaphragm gauges Ð 

the Vacuum Gauge Controller VGC103 covers the entire pressure 

range from 10 -10 to 2000 mbar (Torr). Switching over of the display 

to the right pressure range is automatic for the most common sensor 

combinations. The display of the VGC103 combines the advantages 

of analog and digital readouts. 

Advantages 

♦ Can be combined with up to three sensor types for an extremely wide 

measurement range 

♦ Full remote control via RS 232 C interface 

♦ User selectable measurement unit (millibar, Torr, Pascal or micron) 

♦ Analog bar graph display compliments digital readout 

♦ Three adjustable setpoints with adjustable hysteresis, may be assigned 

to any channel 

♦ Programmable 0 É 10 V chart recorder output with logarithmic / linear 

characteristics for each gauge or combination of PSG and BAG 

♦ Compact bench-top unit which can be installed in panel cut-outs or a 

19Ó racks (1/4 19Ó, 3U height) 

The VGC103 easily fits your application specifications thanks to the 

possibility of combining various sensors with different methods of 

measurement and different measurement ranges. 

Multiple Recorder Outputs and Control 

Signals For Simplified Process Integration 

The VGC103 offers standard features that other controllers only offer as 

add-on options: 

♦ Three adjustable setpoints with adjustable hysteresis and arbitrary 

allocation to the three measuring channels 

♦ Automatic control of the emission (Bayard-Alpert Gauge BAG) or of high 

voltage (Penning Gauge PEG) with Pirani Gauge PSG on channel 2 

Easy To Read – Easy To Use 

The large digital display allows for easy and quick reading of the 

measurement value, while the analog bar graph display allows for at a 

glance verification. During pressure measurement the display changes 

automatically over to the input channel of the correct sensor for the sensor 

combination: Ch 2 = PSG, Ch 3 = BAG. The values can be displayed in 

millibar, Torr, Pascal or micron. 

With its compact dimensions the VGC (1/4 19Ó, 3U height) easily fits 

into panel cutouts or 19Ó racks and can be used just as easily as a 

bench top unit. 

B6.24


Vacuum Gauges 

Rear view of the VGC103 

B6 

Cables 


Cable to VGC103 in m (ft) 

3 (9.9) 

5 (16.5) 

10 (33) 

15 (49.5) 

20 (66) 

30 (99) 

40 (132) 

50 (165) 

75 (247.5) 

100 (330) 

PSG/PEG BPG/BAG CDG 

398-500 398-520 398-540 

398-501 398-521 398-541 

398-502 398-522 398-542 

398-503 398-523 398-543 

398-504 398-524 398-544 

398-505 398-525 398-545 

398-506 398-526 n/a 

398-507 398-527 n/a 

398-508 398-528 n/a 

398-509 398-529 n/a 

B6.25

Vacuum Gauges 


Measurement channels 

Display 

Range 


mbar 

Torr 

Digital 

Analog 

Switching 

Rate 1/s 

Connectable transmitters with display range 

CDG 

Torr 

BPG 

mbar (Torr) 

PSG 

mbar (Torr) 

PEG 

mbar (Torr) 

BAG 

mbar (Torr) 

Measurement unit (selectable) 

Type of gas (selectable) Ð BAG only 

Setpoints 

Adjustment range 

Hysteresis 

Relay contact 


V / A DC 

Ready indication relay 

Relay contact 


V / A DC 

Analog output 

Channels 

Range 

Channel 1, 2, 3 

Channel 4 


Connector 

Power 

Output for setpoint and analog output 

Supply 

V 

Frequency 

Hz 

Consumption 

W 

Temperature 


VGC103 

3 

backlit 

2 x 10 -10 É 2000 

1.5 x 10 -10 É 1500 

LCD, 7-segments 

LCD, bargraph 

automatic or manual between connected sensors 

4 

1 x 10 -3 x FS É 1 x FS 

5 x 10 -10 É 1000 

5 x 10 -4 É 1000 

1 x 10 -9 É 1 x 10 -2 

2 x 10 -10 É 1 x 10 -1 

mbar, Torr, Pascal, micron 

Air, Ar, N 2 

3 assignable to channel 1, 2 or 3 

sensor dependent 

adjustable 

potential free changeover contact 

60 / 0.5 

1 assignable to channel 1, 2 or 3 

potential free changeover contact 

60 / 0.5 

4 

0 É 10 V 

Sensor analog output signal 

Output of channel 1, 2, 3 with selectable scaling or combination PSG and BAG 

RS 232 C 

D sub, 9 pin 

D sub, 25 pin 

85 É 264 

50/60 

60 

0 É 50 


VGC103 

3 channel controller 398-000 

mm (inches) 

B6.26

Vacuum Switch VSA100 

Vacuum Gauges 

Vacuum Switch VSA100 

The pressure switch VSA100 is used as a safety switch in vacuum 

systems. For example, to automatically interrupt the gas supply 

when venting vacuum systems with a purge gas at a pressure of 

6 mbar below atmospheric pressure. 

Advantages 

♦ Reliable control of atmospheric pressure during venting 

♦ High contact rating and life time 


Switching pressure at venting mbar (Torr) 

6 (4.5) below 

atmospheric pressure 

♦ Rugged design 

♦ Easy to integrate 

♦ IP 44 protection 

♦ Can be connected to a programmable control 

Switching pressure at pumping 

Switching inaccuracy 

Max. permissible 

operating pressure (absolute) 

mbar (Torr) 

mbar (Torr) 

mbar (Torr) 

3 (2.25) below 

atmospheric pressure 

1 (0.75) 

2000 (1500) 


♦ Control of load lock chambers 

♦ Safety shutdown of vacuum systems 

Temperature 


Storage ¡C 

Switching contact 

0 É +85 

-25 É +85 

Changeover contacts, 

gold-plated, for prog. controls 

B6 

At a differential pressure of 6 mbar below atmospheric pressure an elastic 

diaphragm actuates a high current changeover contact which in turn may 

be used to directly switch any ancillary equipment. The electrical connection 

is concealed by a polymeric cover 

Contact life (at 5 A) 


Electrical connection 

Cable length 

V AC / A / VA 

m (ft) 

> 10 5 switching cycles 

220 / 5 / 1100 

6.3 mm flat plug 

3 (9.9) 

Technical Note 

Due to the diaphragm material used (EPDM) the Vacuum Switch VSA100 is 

not suited for applications in which the process gas contains large quantities 

of helium. The leak rate of the diaphragm for helium is > 10 -6 mbar x l x s -1 . 

Vacuum connection 


Protection class 

DN 16 ISO-KF 

stainless steel 1.4305, 

EPDM, polyamide with 

glass fibre, epoxy cement 

IP 44 


DN 16 ISO-KF, complete with 3 m (10 ft) cable 

399-000 

mm (inches) 

B6.27

Vacuum Gauges 

Calibration Service 

Calibration Service 

INFICON offers calibration services for vacuum gauges. A DKD calibration 

certificate or a factory calibration certificate can be issued. Calibration to 

other standards (e.g. NIST) is available upon request. 

Advantages 

♦ Known deviation to calibration standards 

♦ Controlled quality over time 


♦ Reference to standard is required 

♦ Reference for customer in-house calibration service of vacuum gauges 

DKD Calibration 

The German Calibration Service (DKD) ensures traceability of industrial 

measurements and testing to national calibration standards. It is run jointly 

by the Federal Institution for Physics and Technology (PTB), the Industry, 

the Federal Minister for Economics and the Western European Metrology 

Club (WEMC). 

The transfer standards employed in the DKD calibration facility are checked 

regularly (recalibrated) by the PTB. 

Factory Calibration 

Factory calibrations are run with standards which have not been calibrated 

directly at the PTB; instead the transfer standards of the DKD calibration 

service are used. Thus traceability to national standards is ensured in 

both cases. 

Other Calibrations 

NIST Calibration available upon request. Call for pricing and availability. 


Calibration range 

to 10 -3 mbar/Torr 



DKD Calibration 

Factory Calibration 

398-900 398-910 

398-901 398-911 

398-902 398-912 

B6.28

INFICON CATALOG 2000-2001 - Schoonover, Inc.

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