B2 - Schoonover, Inc.
B2 - Schoonover, Inc.
B2 - Schoonover, Inc.
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INSTRUMENTATION<br />
CATALOG 2 0 0 0 - 2 0 0 1<br />
<strong>Inc</strong>luding revised<br />
FUNDAMENTALS OF VACUUM TECHNOLOGY REFERENCE BOOK
Contents<br />
Instrumentation Catalog 2000-2001<br />
Product Information. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B<br />
In Situ Analysis. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B.1<br />
Sensor Integration and Analysis Systems . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B1.2<br />
Residual Gas and Process Gas Analyzers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . <strong>B2</strong>.2<br />
Thin Film Metrology Sensor Systems. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B3.2<br />
Thin Film Deposition Controllers and Monitors . . . . . . . . . . . . . . . . . . . . . . . . . . B4.2<br />
Leak Detectors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B5.2<br />
Vacuum Gauges . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B6.2<br />
Vacuum Feedthroughs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B7.2<br />
Vacuum Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.2<br />
Vacuum Fitting and Ultra-high Vacuum Components. . . . . . . . . . . . . . . . . . . . . . . . . . B9.2<br />
Oil Diffusion Pumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B10.2<br />
Product Index . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . D<br />
How to order . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .. . . . . . . . . . . . . . . . .Appendix<br />
Fax Inquiry Page . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Appendix<br />
Sales and Service Offices . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Appendix<br />
A<br />
A.3
B1<br />
FABGUARDTM<br />
Sensor Integration and Analysis System
Sensor Integration and Analysis System<br />
Contents<br />
General<br />
Fabguard Sensor Integration and Analysis System ................................. B1.3<br />
B1.2
FabGuard TM<br />
Sensor Integration and Analysis System<br />
FabGuard TM<br />
Sensor Integration<br />
and Analysis System<br />
B1<br />
FabGuard Features at a Glance<br />
♦ Run-by-run and real-time analysis for process control and fault finding<br />
reduces scrap and improves process control<br />
♦ Automated data collection and storage of historical files to enhance SPC<br />
♦ Data combined from multiple sensors reduces hardware redundancy<br />
while allowing all data from an entire tool, process or fab to be integrated<br />
for convenient access and analysis<br />
♦ Single user interface for all tool data reduces learning curve<br />
♦ Classification of faults for quicker response to problems,<br />
minimizing downtime<br />
FabGuard’s sophisticated data analyses yield new insights into tool and process performance.<br />
Powerful Data Management<br />
for Enhanced Productivity<br />
Theshifttolarger, more expensive wafers and smaller geometries makes<br />
precise process control more vital to profitability than ever before. These<br />
cost pressures make it critical to maximize fab productivity, both by reducing<br />
the number of ruined wafers and by maximizing equipment utilization.<br />
FabGuard Sensor Integration and Analysis System helps semiconductor<br />
manufacturers meet these challenges by enhancing tool productivity,<br />
providing process control, and reducing losses from process drift,<br />
contamination, tool malfunction, or unnecessary test wafers. It accomplishes<br />
this by tapping into a rich, underutilized resource—the vast amount of data<br />
generated by tools and process sensors—and using that data in more<br />
innovative and comprehensive ways than previously possible.<br />
FabGuard Continuously Monitors<br />
and Controls Your Process<br />
FabGuard starts by automatically collecting all available data, both from<br />
INFICON sensors and the built-in sensors the tool uses for proper operation.<br />
Data is archived and analysis results are stored in an SQL-searchable<br />
database. Operators can view all information through a single, easy-to-use<br />
interface. Presenting data from all types of sensors in a consistent format<br />
improves the learning curve, while reducing hardware redundancy by doing<br />
the work of multiple equipment from multiple vendors. Remote monitoring is<br />
also possible, either from a central location in the fab or from off-site.<br />
FabGuard then analyzes the data using sophisticated physical models and<br />
statistical techniques, looking for correlations across multiple parameters<br />
and comparing the process second-by-second to models known to be good<br />
from previous runs. These robust techniques allow FabGuard to reliably<br />
detect process events that can then be used for process control and to<br />
quickly detect process excursions with far fewer false alarms.<br />
♦ Overall impression of tool/process health to aid preventive<br />
maintenance personnel<br />
How FabGuard Works<br />
FabGuard Sensor Integration and Analysis System’s architecture is<br />
organized into several sections:<br />
Communication Engine<br />
Receives information related to tool events (e.g., wafer ID) and sends<br />
information to the tool controller.Also interfaces through drivers with<br />
INFICON sensors and the tool’s own sensors.<br />
Analysis Engine<br />
Complex statistical analyses are performed using a variety of techniques. In<br />
essence, “good” data is used to create a model to which data from<br />
successive runs can be compared. Historical data is used to re-train the<br />
engine to correct for sensor drift, thereby improving the robustness of the<br />
analysis and reducing the likelihood of false positives.<br />
Decision/Control Engine<br />
Determines which commands should be sent to the tool to control<br />
wafer processing.<br />
Fault Engine<br />
Determines the source of out-of-spec conditions, whether in the wafer,the<br />
process or the tool. It classifies faults, tracks process trends and creates a<br />
library of faults for each tool or process.<br />
User Interface<br />
Consistent for all sensors and processes, simplifying the learning process.<br />
Screens can be viewed at the local workstation or a remote site.<br />
Results Database<br />
All data, both current and historical, can be easily located through<br />
SQL searches.<br />
B1.3
Sensor Integration and Analysis System<br />
FabGuard TM<br />
Manage a Process, a Tool, or Your Entire Fab<br />
FabGuard Sensor Integration and Analysis System’s advanced data analysis<br />
creates reliable information that can be used to advance process controls<br />
from event-based (e.g., endpoint detection), go/no go and statistical process<br />
control (SPC) techniques to run-by-run control and even real-time fault<br />
detection. As a result, processes become more stable and problems are<br />
detected sooner without the need for extensive test wafer usage or process<br />
setup time, so yields increase.<br />
By simultaneously looking at all the data, FabGuard is able to provide new<br />
insights—an advantage for fine-tuning or troubleshooting tools or processes.<br />
Its information and integration capabilities can also be extended to the entire<br />
fab. By combining analysis results from multiple FabGuard systems, the<br />
status of every tool can be shown on a single screen. More sophisticated<br />
applications could include comparing tools to assist in tool matching and<br />
promoting consistent processing, and tracking process performance across<br />
multiple tools. Transferring recipes and models between fabs is also<br />
possible, insuring better control on similar processes.<br />
Unmatched Experience and Support<br />
Make INFICON the Right Choice<br />
INFICON residual gas analyzers, optical sensors, thin film monitors/<br />
controllers, vacuum gauges and helium leak detectors are used in fabs<br />
throughout the world to make processes more precise, productive and<br />
reliable. Our experience in developing both leading-edge sensors and<br />
software puts us in a strong position to integrate various data sources and<br />
use the data in much more powerful ways than can be achieved by handling<br />
the data from each source separately.<br />
The highly trained people in our global network of sales and service offices<br />
will be with you at each step, from helping you determine how the FabGuard<br />
system can best meet your needs, through installation, to providing<br />
responsive, ongoing support.<br />
Pinpointing Problems to Minimize<br />
Wafer Waste and Tool Downtime<br />
If a process excursion does occur, FabGuard can immediately activate an<br />
alarm or alert the appropriate person, then shut down the tool before<br />
additional wafers are spoiled. FabGuard also classifies the fault by labeling<br />
the analysis, thereby creating a tool- or process-specific library of faults.<br />
This minimizes downtime by helping maintenance personnel locate and<br />
correct the problem faster. FabGuard System’s comprehensive database<br />
also provides an overview of the health of the tool and the process, keeping<br />
preventive maintenance personnel in tune with tool performance and<br />
reducing unscheduled tool downtime.<br />
Fabguard Can Monitor Production at the Process, Tool and Fab Level<br />
PVD<br />
CVD<br />
ETCH<br />
1<br />
14<br />
26<br />
8<br />
FabGuard Remote<br />
Status Viewer<br />
1<br />
8<br />
14<br />
26<br />
Operating within normal parameters.<br />
Regen Cryo Pump soon on Chamber A.<br />
Particle Count reaching maximum tolerance (chamber clean required).<br />
Endpoint outside of specification. Check flow rate MFC2.<br />
B1.4
Residual Gas and<br />
Process Gas Analyzers<br />
<strong>B2</strong>
Residual Gas and Process Gas Analyzers<br />
Contents<br />
General<br />
Applications and Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . <strong>B2</strong>.3<br />
Products<br />
Transpector¨ 2 Gas Analysis System. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . <strong>B2</strong>.4<br />
TranspectorWare TM Software. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . <strong>B2</strong>.10<br />
Transpector¨ 2 Gas Analysis System Upgrade Package . . . . . . . . . . . . . . . . . . . . . . . . . . . . . <strong>B2</strong>.12<br />
Transpector¨ XPR 2 Gas Analysis System. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . <strong>B2</strong>.14<br />
Preclude TM Photoresist Detector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . <strong>B2</strong>.17<br />
Transpector¨ CIS2 Gas Analysis System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . <strong>B2</strong>.20<br />
Fabstar TM Gas Analysis System. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . <strong>B2</strong>.26<br />
PPM 422 Plasma Process Monitor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . <strong>B2</strong>.27<br />
Composer¨ Gas Composition Controller . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . <strong>B2</strong>.28<br />
TWare32 TM for Windows¨ 95/98/NT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . <strong>B2</strong>.31<br />
Pressure Converters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . <strong>B2</strong>.36<br />
IPC400 Pumping Packages . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . <strong>B2</strong>.37<br />
<strong>B2</strong>.2
Applications and Accessories<br />
Residual Gas and Process Gas Analyzers<br />
Applications and Accessories<br />
Transpector 2<br />
Transpector XPR 2<br />
Preclude<br />
Transpector CIS 2<br />
FabStar<br />
PPM 422<br />
Composer<br />
<strong>B2</strong><br />
Applications<br />
Production of semiconductors<br />
Vacuum measurement systems<br />
Research and development<br />
Multi-chamber systems<br />
Calibration systems<br />
Lamps and tubes manufacture<br />
Cluster systems<br />
Particle accelerators<br />
Gas analysis<br />
Sputtering<br />
Vacuum furnaces<br />
Leak testing<br />
CVD<br />
Process monitoring<br />
Process control<br />
Process troubleshooting<br />
Accessories<br />
◆ ◆ ◆ ◆ ◆ ◆<br />
◆ ◆ ◆ ◆ ◆<br />
◆ ◆ ◆ ◆ ◆<br />
◆ ◆ ◆ ◆<br />
◆<br />
◆<br />
◆ ◆ ◆ ◆ ◆ ◆<br />
◆<br />
◆ ◆ ◆ ◆ ◆<br />
◆ ◆ ◆ ◆<br />
◆<br />
◆ ◆ ◆ ◆ ◆ ◆<br />
◆ ◆ ◆ ◆<br />
◆ ◆ ◆ ◆ ◆ ◆ ◆<br />
◆ ◆ ◆ ◆ ◆ ◆<br />
◆ ◆ ◆ ◆ ◆ ◆<br />
Compact sensor<br />
◆<br />
◆<br />
High-performance sensor<br />
Pressure converters<br />
Software (TranspectorWare or TWare 32)<br />
Atmospheric sampler<br />
Heating jackets<br />
◆ ◆ ◆ ◆<br />
◆ ◆ ◆ ◆<br />
◆ ◆ ◆ ◆<br />
◆ ◆ ◆<br />
◆ ◆ ◆ ◆ ◆ ◆<br />
.<br />
<strong>B2</strong>.3
Residual Gas and Process Gas Analyzers<br />
Transpector® 2 Gas Analysis System<br />
Transpector ® 2 Gas Analysis System<br />
INFICON, the leader in RGA technology, has upgraded the<br />
Transpector gas analysis family of instruments to meet the demands<br />
of todayÕs processes and applications. Transpector 2 offers improved<br />
hydrogen detection, faster scanning, an expanded dynamic range,<br />
improved abundance sensitivity, and superior peak position and<br />
amplitude stability. It is the smartest choice for process monitoring,<br />
process diagnostics, and leak detection.<br />
<strong>B2</strong><br />
Transpector 2 is a quadrupole-based smart sensor that has all of the<br />
sensor drive electronics plus a microprocessor in a single, compact<br />
enclosure that attaches to the sensor. Because it is a smart sensor, it gives<br />
you the flexibility of using your existing computer or choosing a PC and<br />
software package from INFICON. Two communications links, RS232 for<br />
single-sensor and RS485 for multiple-sensor configurations, connect<br />
Transpector to the control computer. Simple command protocols direct<br />
all Transpector functions.<br />
Combining Transpector 2 with TranspectorWare TM or TWare 32 software<br />
provides an ideal system for meeting todayÕs needs for research, production<br />
process monitoring, data collection, and statistical process control (SPC).<br />
Available for Windows¨ 3.1, 95, 98 or NT, these software packages contain<br />
a full array of basic RGA features, including trend analysis, spectrum<br />
scanning, leak check, analog, and selected peak modes. They also contain<br />
process monitoring features that include recipe generation, automated data<br />
collection, and process deviation monitoring.<br />
Improvements Bring Better<br />
Hydrogen Detection<br />
Transpector 2 offers more accurate and reliable data due to advanced<br />
RF and preamplifier measurement circuitry. These electronic advances<br />
translate to improved hydrogen detection and a lower minimum detectable<br />
partial pressure for all gases for better contamination control, as well as<br />
faster and more stable scanning to keep up with todayÕs faster processes.<br />
The Transpector 2 advanced RF circuitry employs a higher RF frequency<br />
while maintaining acceptable power levels, resulting in hydrogen detection<br />
to the ppm level. Additionally, because the RF frequency is digitally<br />
synthesized, it automatically adjusts to and locks in the appropriate<br />
frequency for your sensor. The improved RF circuitry reduces warm-up time<br />
and provides superior peak amplitude and position stability, virtually<br />
eliminating the need for routine mass scale tuning.<br />
Better Data Faster<br />
A new preamplifier measurement algorithm allows the user to scan faster<br />
over low-level signals to keep up with process changes. Because the noise<br />
is reduced, the data is more stable and timely. When sampling with the<br />
electron multiplier, the signal-to-noise ratio is up to seven times better than<br />
the original TranspectorÕs (up to 10 times better in Faraday cup mode). The<br />
electronics offer nine-decades of dynamic range (from 1 x 10 -6 to 1 x 10 -15<br />
amps).<br />
This scan of argon was sampled at three milliTorr using TranspectorWare TM for Windows with<br />
Transpector 2 electronics on a closed-ion-source system. In this example, Transpector 2<br />
advanced RF circuitry allows detection of hydrogen down to seven parts per million.<br />
<strong>B2</strong>.4
Transpector® 2 Gas Analysis System<br />
Residual Gas and Process Gas Analyzers<br />
<strong>B2</strong><br />
TranspectorWare TM leak mode requires only single-button operation and includes a<br />
full-range thermometer-type display, trend chart, and audible tone output.<br />
Custom Tool Integration<br />
For more advanced applications, INFICON offers FabGuard TM , a custom tool<br />
integration software package. FabGuard provides sophisticated alarming<br />
based on the tool state, tool data or Transpector data, organizes data on a<br />
wafer-by-wafer basis, performs wafer-based statistical calculations, via a<br />
SECS II interface for factory automation and wafer tracking.<br />
Only Pay for the<br />
Performance You<br />
Need<br />
The Transpector Gas Analysis System<br />
offers a multitude of choices to fit your<br />
application requirements. For base<br />
pressure applications, we offer several<br />
open-source Transpector models ranging from one to 300<br />
amu with Faraday Cup (FC) or combination Electron Multiplier/Faraday Cup<br />
(EM/FC) detectors, depending on the exact level of performance required.<br />
For process monitoring applications, the Transpector XPR 2 offers the<br />
simplest form of gas contamination monitoring and process verification<br />
available. It operates at process pressures up to 20 millitorr without pumps,<br />
detecting contaminants during the process down to 10 ppm.<br />
For applications requiring ppm or sub-ppm<br />
contamination monitoring, INFICON offers the<br />
Transpector Closed Ion Source (CIS2). It features a<br />
completely interlocked pumping system that allows<br />
process sampling from atmosphere to high vacuum.<br />
In Transpector CIS2, this Closed Ion Source<br />
operates at a relatively high pressure, reducing the<br />
masking effects of background residuals to enable<br />
detection of contaminants at sub-ppm levels.<br />
TranspectorWare for Windows using Transpector 2 performs all standard gas analysis functions,<br />
including analog, bar, and selected peak monitoring. It has pre-configured screens for automated<br />
data archiving, tuning, and leak detection.<br />
Simplify Multichamber Configurations<br />
Transpector 2Õs multiplexing capabilities make multichamber installations<br />
simpler and more economical to operate. A single computer can operate<br />
multiple Transpectors in any combination of compact, high-performance,<br />
CIS, and XPR models on an RS485 network. Each Transpector 2 is easily<br />
assigned an address through its configuration DIP switches. For troubleshooting<br />
or service functions, local control of any sensor on the network is<br />
accomplished simply by connecting the RS232C port to a computer and<br />
operating via TranspectorWare or TWare32 TM or performing diagnostics via<br />
HyperTerminal. While on the network, each unit operates independent of<br />
and simultaneously with the other sensors on the network, so all relays and<br />
controls within each Transpector 2 are continuously operational. The power<br />
supply port connects Transpector 2 to 24 volts, supplied by the tool or an<br />
external power supply.<br />
It Protects Your Process and Itself<br />
Transpector 2 stores your calibration and setpoint data independent of the<br />
control computer. (The computer acts as a peripheral device, storing and<br />
displaying your process data and allowing you to communicate with the<br />
sensor.) So if you disconnect the computer from the sensor, or if<br />
communications are lost for any other reason, the sensor continues to<br />
monitor and control the vacuum system as programmed. In addition,<br />
Transpector 2 automatically shuts off its emission when the total pressure<br />
exceeds the limits of the sensor in use, or if the electronics exceeds its<br />
normal operating temperature.<br />
Transpector 2 can monitor and control up to three setpoint status relays,<br />
providing an external signal for alarm indication or process interruption<br />
when a gas exceeds its specified level. Two differential 10-volt analog input<br />
channels are provided for incorporating analog data with RGA data<br />
(e.g., total pressure, optical emission, temperature gauge data).<br />
Two LEDsÑone that shows whether the emission is on or off and one that<br />
shows when Transpector 2 has power and is ready to communicate Ð<br />
provide a local indication of TranspectorÕs status, eliminating the need to<br />
refer to the PC and software in a remote location.<br />
<strong>B2</strong>.5
Residual Gas and Process Gas Analyzers<br />
Transpector® 2 Gas Analysis System<br />
Semiconductor Applications<br />
The Transpector 2 H100M, mounted on the front end of a cluster tool, is<br />
used to establish the background/baseline of the front end (handler) while<br />
the loadlocks go through a pumpdown. When wafers are ready for<br />
processing, the Transpector 2 monitors the wafer-in state and provides<br />
detailed information on the degas process, with alarm limits set for specific<br />
contaminants. The Transpector 2 operates continuously and reliably while<br />
experiencing extreme Argon bursts from the cool module. The information it<br />
provides has a direct correlation to vacuum integrity, pump performance,<br />
contamination, leaks, and tool state.<br />
Transpector 2<br />
Gas Analysis<br />
System<br />
PVD<br />
ETCH CVD IMPLANT<br />
Tool State Process State* Tool State* Process State* Tool State* Process State* Tool State Process State<br />
Residual Gas<br />
Analyzers<br />
(Transpector<br />
Open Ion<br />
Source):<br />
C100F/M,<br />
H100F/M<br />
H200F/M,<br />
H300F/M<br />
Leak Detection<br />
Chamber<br />
Outgassing<br />
Rate of Rise<br />
Cryopump<br />
Loading<br />
MFC Leaks<br />
Gas Line Leaks<br />
Argon Flow<br />
Reactive Gas<br />
Flow (N 2 O 2 )<br />
Detection Limit<br />
100 ppm<br />
Gas Supply<br />
Contamination<br />
MFC Instability<br />
Photoresist<br />
Contamination 2<br />
Leak Detection<br />
Chamber<br />
Outgassing<br />
Rate of Rise<br />
Cryopump<br />
Loading<br />
MFC Leaks<br />
Gas Line Leaks<br />
Carrier Gas Flow<br />
Reactive<br />
Gas Flow<br />
Detection Limit<br />
100 ppm<br />
Gas Supply<br />
Contamination<br />
MFC Instability<br />
Monitor<br />
Selectivity<br />
Monitor<br />
Endpoint<br />
Leak Detection<br />
Chamber<br />
Outgassing<br />
Rate of Rise<br />
MFC Leaks<br />
Gas Line Leaks<br />
Carrier Gas Flow<br />
Precursor<br />
Gas Flow<br />
Delivery System<br />
Stability<br />
Detection Limit<br />
100 ppm<br />
Gas Supply Contamination<br />
Monitor Chamber<br />
Clean Endpoint<br />
Photoresist<br />
Contamination<br />
Leak Detection<br />
Chamber<br />
Outgassing<br />
Cryopump<br />
Loading<br />
MFC Leaks<br />
Gas Line Leaks<br />
Argon Flow<br />
Leaks on Rotary<br />
Feedthroughs<br />
MFC Instability<br />
Monitoring<br />
Arcing<br />
Monitor Process<br />
Gases (AsH 3 ,<br />
PH 3 and BF 3 )<br />
Photoresist<br />
Contamination<br />
Process Gas<br />
Analyzer<br />
(Transpector<br />
XPR 1 ):<br />
XPR2<br />
Leak Detection<br />
Chamber<br />
Outgassing<br />
Rate of Rise<br />
Cryopump<br />
Loading<br />
MFC Leaks<br />
Gas Line Leaks<br />
Argon Flow<br />
Reactive Gas<br />
Flow (N 2 O 2 )<br />
Detection Limit<br />
10 ppm<br />
Gas Supply<br />
Contamination<br />
MFC Instability<br />
N/A<br />
N/A<br />
N/A<br />
N/A<br />
Leak Detection<br />
Chamber<br />
Outgassing<br />
Cryopump<br />
Loading<br />
MFC Leaks<br />
Gas Line Leaks<br />
Argon Flow<br />
Leaks on Rotary<br />
Feedthroughs<br />
MFC Instability<br />
Monitoring<br />
Arcing<br />
Process Gas<br />
Analyzers<br />
(Transpector<br />
Closed Ion<br />
Source<br />
[CIS]):<br />
H100CIS2,<br />
H200CIS2,<br />
H300CIS2<br />
Leak Detection<br />
Chamber<br />
Outgassing<br />
Rate of Rise<br />
Cryopump<br />
Loading<br />
MFC Leaks<br />
Gas Line Leaks<br />
Argon Flow<br />
Reactive Gas<br />
Flow (N 2 O 2 )<br />
Detection Limit<br />
_
Transpector® 2 Gas Analysis System<br />
Residual Gas and Process Gas Analyzers<br />
Variety of Software Options<br />
If one of our standard software packages (TranspectorWare or TWare32 for<br />
Windows) does not meet your application needs, we offer custom<br />
programming packages. A Dynamic Data Exchange (DDE) driver can<br />
automatically set up the Transpector 2 for communication, allowing the user<br />
to specify the data to be collected and reading it directly into a<br />
DDE-compatible program such as Excelª or WonderWare ª .<br />
We have a 32 bit driver for Windows 95, 98 and Windows NT.<br />
Transpector® 2 Features at a Glance:<br />
♦ 100, 200, and 300 amu systems with Faraday cup or combination<br />
electron multiplier/Faraday Cup<br />
♦ Compact or high performance sensor designs<br />
♦ Improved hydrogen detection<br />
♦ Superior peak amplitude and position stability<br />
♦ Up to 10 times improvement in signal-to-noise ratio compared to<br />
original Transpector<br />
♦ Faster scanning over low-level signals<br />
♦ Nine-decade electronic dynamic range<br />
♦ Software options for single- and multichamber systems<br />
♦ Partial pressure measurement from 1x10 -4 Torr to 5x10 -15 Torr<br />
Applications<br />
Leak detection, vacuum troubleshooting and outgassing studies in:<br />
♦ Optical coating<br />
♦ Surface science<br />
♦ Desorption studies<br />
♦ MBE<br />
♦ High-energy physics<br />
♦ Accelerators/storage rings<br />
♦ Aerospace<br />
Process characterization and monitoring in:<br />
♦ Vacuum heat treatment<br />
♦ Disk manufacture<br />
♦ Semiconductor IC manufacturing<br />
♦ Flat panel manufacturing<br />
<strong>B2</strong><br />
4.87" [12.4 cm]<br />
4.87" [12.4 cm]<br />
5.62" [14.3 cm]<br />
5.62" [14.3 cm]<br />
7.75" [19.7 cm] C series<br />
8.17" [20.8 cm] H series<br />
6.65" [16.9 cm]<br />
C100F, C100M<br />
8.6" [21.9 cm]<br />
H100F, H200F, H300F<br />
12.1" [30.7 cm]<br />
H100M, H200M, H300M<br />
.<br />
<strong>B2</strong>.7
Residual Gas and Process Gas Analyzers<br />
TranspectorWare TM Software<br />
Technical Data<br />
C100F C100M H100F H100M H200F H200M H300F H300M<br />
Sensor length (vacuum side) 4.6" 7" 10.4" 7" 10.4" 7" 10.4"<br />
(11.7 cm) (17.8 cm) (26.4 cm) (17.8 cm) (26.4 cm) (17.8 cm) (26.4 cm)<br />
Mass range 1 to 100 amu 1 to 100 amu 1 to 200 amu 1 to 300 amu<br />
Detector type FC Microchannel FC Channeltron¨ FC Channeltron¨ FC Channeltron¨<br />
Plate EM/FC EM/FC EM/FC EM/FC<br />
Resolution<br />
< 1amu wide @ 10% peak height over the entire mass range<br />
(per 1993 AVS recommended practice)<br />
Temperature coefficient (during an 8-hour<br />
< 1% of peak height per degree C (for FC Only)<br />
period, after a half hour warm-up)<br />
SensitivityÑ<br />
amps/Torr (amps/mbar): FC 2x10 -4 2x10 -4 2x10 -4 1x10 -4 2x10 -4 1x10 -4 1x10 -4 5x10 -5<br />
(1.5x10 -4 ) (1.5x10 -4 ) (1.5x10 -4 ) (7.6x10 -5 ) (1.5x10 -4 ) (7.6x10 -5 ) (7.6x10 -5 ) (3.8x10 -5 )<br />
EM N/A 0.25 (0.2) N/A 500 (380) N/A 500 (380) N/A 250 (190)<br />
Min. detectable partial<br />
Pressure 1 ÑTorr (mbar): FC 3x10 -13 N/A 3x10 -13 N/A 3x10 -13 N/A 6x10 -13 N/A<br />
(4x10 -13 ) (4x10 -13 ) (4x10 -13 ) (8x10 -13 )<br />
EM N/A 3x10 -14 N/A 5x10 -15 N/A 5x10 -15 N/A 1x10 -14<br />
N/A=not applicable<br />
* Electronics and sensors may be purchased separately. Multiplexing operation requires optional software.<br />
1 Minimum detectable partial pressure is calculated as the standard deviation of the noise<br />
(minimum detectable signal) divided by the sensitivity of the sensor (FC or EM) measured at a four-second dwell time.<br />
(4x10 -14 ) (6.6x10 -15 ) (6.6x10 -15 ) (1.3x10 -14 )<br />
Zero blast interference at mass 2<br />
< 100 ppm<br />
Max. operating pressureÑ<br />
Torr (mbar): FC 5x10 -4 5x10 -4 5x10 -4 5x10 -4 5x10 -4 5x10 -4 5x10 -4 5x10 -4<br />
(6.6x10 -4 ) (6.6x10 -4 ) (6.6x10 -4 ) (6.6x10 -4 ) (6.6x10 -4 ) (6.6x10 -4 ) (6.6x10 -4 ) (6.6x10 -4 )<br />
EM N/A 1x10 -5 N/A 1x10 -5 N/A 1x10 -5 N/A 1x10 -5<br />
(1.3x10 -5 ) (1.3x10 -5 ) (1.3x10 -5 ) (1.3x10 -5 )<br />
Max. sensor operating temp. FC 200¡C 200¡C 250¡C 250¡C 250¡C 250¡C 250¡C 250¡C<br />
EM N/A 100¡C N/A 125¡C N/A 125¡C N/A 125¡C<br />
Max. bakeout temperature<br />
(electronics removed) 200¡C 350¡C 400¡C 350¡C 400¡C 350¡C 400¡C<br />
Operating temperature<br />
20¡C to 50¡C ambient<br />
Power input<br />
20 to 30 V DC, 9-pin male ÒDÓ connector, internally isolated from system ground<br />
RS232 serial communications<br />
Nonisolated, baud selection 1200 through 9600, 9-pin female ÒDÓ connector, TxD, RxD, CTS, DTR<br />
RS485 addressable Isolated, 4 wire, baud fixed, half duplex, global address @ 0,<br />
communications interface<br />
fixed address 1 of 31, 9-pin female ÒDÓ connector, +TxD, -TxD, +RxD, -RxD<br />
Relay outputs<br />
4 relays, 24 V at 0.5 amps (1 for operational status, 3 for setpoint limits)<br />
Inputs<br />
2 nonisolated TTL inputs, contact closure (1 for remote emission on, 1 for remote emission off);<br />
2 differential analog inputs, 0 to 10 V DC<br />
Electronics enclosure<br />
Drip-resistant<br />
User-configured switches<br />
5 positions: device address (1 of 31); Primary Link Select (RS232/485); 2 positions: baud rate<br />
(8-position DIP switch)<br />
LED indicators (green)<br />
1 for CPU status, 1 for emission status<br />
<strong>B2</strong>.8
Transpector® 2 Gas Analysis System<br />
Residual Gas and Process Gas Analyzers<br />
Ordering Information Code-No. TSP2 - ___ ___ ___ ___ ___ ___ ___ ___ ___<br />
TRANSPECTOR 2 package Ð Iridium filament<br />
Electronics unit and sensor<br />
100 AMU, FC, compact sensor (C100F) 01<br />
100 AMU, EM/FC, compact sensor (C100M) 02<br />
100 AMU, FC, high performance sensor (H100F) 03<br />
100 AMU, EM/FC, high performance sensor (H100M) 04<br />
200 AMU, FC, high performance sensor (H200F) 05<br />
200 AMU, EM/FC, high performance sensor (H200M) 06<br />
300 AMU, FC, high performance sensor (H300F) 07<br />
300 AMU, EM/FC, high performance sensor (H300M) 08<br />
Power supply package<br />
None 0<br />
80-250 VAC/4 ft. (1.2m) standard cable (standard plug) 1<br />
80-250 VAC/4 ft. (1.2m) standard cable (German plug) 2<br />
Power supply cable<br />
None 0<br />
15 ft. (4.5m) cable 1<br />
30 ft. (9m) cable 2<br />
RS232 communications cable - for single sensor operation<br />
None 0<br />
15 ft. (4.5m) cable 1<br />
30 ft. (9m) cable 2<br />
RS485 communications cable kit Ð for multiple sensor operation<br />
None 0<br />
15 ft. (4.5m) cable 1<br />
30 ft. (9m) cable 2<br />
Computer communications module<br />
None 0<br />
RS485C communications kit (used with TranspectorWare or TWare Lite) 1<br />
TCA485 communications kit - US version (used with TWare 32) 2<br />
TCA485 communications kit - German version (used with TWare 32) 3<br />
TCA485 communications kit - Japan version (used with TWare 32) 4<br />
TCA485 communications kit - UK version (used with TWare 32) 5<br />
Software<br />
None 0<br />
TWare 32 single sensor version 1<br />
TWare 32 multi-sensor version 2<br />
TWare Lite single sensor version 3<br />
TWare Lite multi-sensor version 4<br />
TranspectorWare single sensor 5<br />
TranspectorWare multi-sensor 6<br />
Heating jacket system<br />
None 0<br />
Compact sensor heating jacket (120 VAC) 1<br />
High performance Faraday cup heating jacket (120 VAC) 2<br />
High performance electron multiplier heating jacket (120 VAC) 3<br />
Compact sensor heating jacket, (230 VAC) 4<br />
High performance Faraday cup heating jacket, (230 VAC) 5<br />
High performance electron multiplier heating jacket, (230 VAC) 6<br />
Analog Outputs<br />
None 0<br />
4 channel analog outputs (0-10V) 1<br />
4 channel analog outputs (0-5V) 2<br />
.<br />
Each TRANSPECTOR 2 package contains the sensor,<br />
the electronics unit and a matching DN 40 CF extension<br />
Consult factory for longer cable lengths.<br />
<strong>B2</strong>.9<br />
<strong>B2</strong>
Residual Gas and Process Gas Analyzers<br />
TranspectorWare TM Software<br />
TranspectorWare TM<br />
Software<br />
TranspectorWare process gas characterization software provides statistical<br />
process control on a wafer-by-wafer or process-step basis. Designed for<br />
use with the Transpector TM Gas Analysis System, it is compatible with<br />
Windows TM 3.1, 95 and 98.<br />
Data Collection Synchronized for<br />
Wafer-by-Wafer Control<br />
Through the use of a digital I/O board installed in the PC, TranspectorWare<br />
will start and stop RGA data collection recipes based on an external signal.<br />
This allows users to more closely synchronize data acquisition with the<br />
process for more precise statistical process control. Data collection may be<br />
isolated to specific process steps by programming one recipe to run during<br />
wafer processing, another during the interwafer period, and another during<br />
pumpdown or base pressure.<br />
Tuning Routine Improves<br />
Measurement Consistency<br />
The user enters a mass (usually argon) and value in either amps or partial<br />
pressure. TranspectorWare then automatically adjusts the electron multiplier<br />
voltage and/or sensitivity until the desired value is displayed, providing<br />
process data consistency from run to run. Users may enter up to 10 tune<br />
points for precise adjustment of peak position and resolution across the<br />
instrumentÕs mass range.<br />
True Statistical Process Control<br />
TranspectorWare provides the capability to average process runs and set a<br />
bandwidth around the norm or average. In TranspectorWare, true statistical<br />
process control is applied using the central limit theorem. This allows the<br />
adjustment of bandwidths to three sigma and calculation of a one-point<br />
norm (an average of all the data for a specific mass) to be used as a trigger<br />
set point. After establishing norms for specific masses, the user may<br />
compare future runs to those norms with visual, audible and digital output<br />
signals for any mass that exceeds its bandwidth.<br />
Additional Features Add Convenience<br />
TranspectorWare allows a library file to be NIST formatted. For easier<br />
spectrum identification, the user imports the file to the NIST database and<br />
uses the NIST search routine to identify spectrum compounds.<br />
TranspectorWare also includes enhanced networking through an improved<br />
RS485 communications card with 64 bytes of data buffering.<br />
Advantages<br />
♦ Displays process deviations in a form similar to that of a conventional<br />
Statistical Process Control (SPC) chart, so that data can be interpreted<br />
without a knowledge of mass spectrometry<br />
♦ Basic functions like analog, bar, leak, partial pressure, table, trend and<br />
library of spectra are included with the software package<br />
♦ Easy post processing of data since these are stored in the ASCII format<br />
♦ Real-time TREND display<br />
♦ The spectra are stored in a Òsea of data fileÓ (SOD) from which the data<br />
for the current TREND display (or past displays) can be extracted<br />
♦ Early detection of system deviations<br />
♦ Automatic data acquisition<br />
♦ Two partial pressure displays, automatic calculation of sensitivity<br />
♦ Presentation of both large and small peaks through a logarithmic display<br />
♦ Expandable spectra library<br />
Automatically adjusts the multiplier voltage and sensor<br />
sensitivity to achieve a desired partial pressure value, providing<br />
process measurement consistency, reliability and repeatability.<br />
<strong>B2</strong>.10
TranspectorWare TM Software<br />
Residual Gas and Process Gas Analyzers<br />
Technical Data<br />
TranspectorWare TM<br />
Transpector models supported<br />
Communications interface<br />
Communications baud rate<br />
Maximum communications cable length<br />
Transpector, Transpector 2 (all models)<br />
RS232, RS485<br />
RS232 - User Selectable (1200, 2400, 9600)<br />
RS485 - 57.6k<br />
RS232 - 50 ft (15m)<br />
RS485 - 1000 ft (305m)<br />
<strong>B2</strong><br />
Computer system requirements<br />
Processor (minimum)<br />
Minimum system for communication<br />
with up to 2 Transpectors<br />
Pentium 133 MHz<br />
Recommended for communication with up to<br />
8 Transpectors (more than 8, consult factory)<br />
PentiumII 200 MHz<br />
RAM (minimum)<br />
Available hard disk space required to<br />
load TranspectorWare<br />
Available hard disk space required for data storage<br />
Monitor<br />
Resolution<br />
Serial Ports<br />
Transpector requirements<br />
Communications cable<br />
32MB<br />
5MB<br />
500MB<br />
14 inch, SVGA 15 inch, SVGA<br />
640 x 480 800 x 600<br />
One free serial port for RS232<br />
one free ISA expansion slot for RS485 card<br />
Version 1.09 firmware or higher<br />
(serial number Series 28 or higher)<br />
One cable is required for each Transpector<br />
RS232 for single-sensor configurations<br />
RS485 for multi-sensor configurations (order with Transpector)<br />
Ordering Information<br />
Part Number<br />
TranspectorWare for Windows Ð<br />
Single sensor version<br />
TranspectorWare for Windows Ð<br />
Multi-sensor version<br />
TWare Lite for Windows Ð<br />
Single sensor version<br />
TWare Lite for Windows Ð<br />
Multi-sensor version<br />
911-058-G1<br />
911-059-G1<br />
911-630-G1<br />
911-631-G1<br />
.<br />
<strong>B2</strong>.11
Residual Gas and Process Gas Analyzers<br />
Transpector® 2 Gas Analysis System Upgrade Package<br />
Transpector ® 2 Gas Analysis System<br />
Upgrade Package<br />
Upgrade your Quadrex or QX2000<br />
to Transpector 2<br />
The Transpector 2 upgrade package allows you to retain your existing<br />
Quadrex or QX2000 sensor while substituting the electronics for the<br />
Transpector 2 Smart Sensor technology. The Transpector 2 design lets<br />
you choose the computer (desktop or notebook), and software package.<br />
The Transpector 2 sensor communicates with your chosen computer<br />
via RS232 (for single-sensor configurations) or RS485 (for multiple<br />
sensor applications.)<br />
The Transpector 2 upgrade package includes an electronics unit, a power<br />
supply, a power supply cable, a communications cable, software center<br />
contact, and manuals (electronics and software).<br />
Upgrade your Transpector<br />
to Transpector 2<br />
You can upgrade your existing Transpector sensor by simply substituting<br />
the new Transpector 2 electronics. The new electronics extends the<br />
dynamic range of the Transpector to 1 X 10 -15 amps due to an improved<br />
signal-to-noise ratio and offers better peak stability through a redesigned<br />
crystal controlled RF circuit. A new power supply, power supply cable and<br />
communications cable is recommended with your upgrade to comply with<br />
radiated and conducted emission standards.<br />
Benefits<br />
The following chart shows the benefits of upgrading your system to the<br />
Transpector 2 technology.<br />
Quadrex QX2000 Transpector<br />
<strong>Inc</strong>reased sensitivity ◆ ◆ ◆<br />
<strong>Inc</strong>reased speed<br />
(depending on computer used) ◆ ◆ ◆<br />
Software enhancements ◆ ◆<br />
Unlimited data storage<br />
<strong>Inc</strong>reased data storage<br />
Additional options available ◆ ◆<br />
(such as multiplexing)<br />
Additional features<br />
(such as trend analysis,<br />
log scale, spectral library,<br />
Microsoft Windows software)<br />
Larger display (computer dependent) ◆ ◆<br />
Less hardware ◆ ◆<br />
More software options ◆ ◆<br />
<strong>Inc</strong>reased signal to noise ratio ◆ ◆ ◆<br />
Lower detection limits ◆ ◆ ◆<br />
◆<br />
◆<br />
◆<br />
<strong>B2</strong>.12
Transpector® 2 Gas Analysis System Upgrade Package<br />
Residual Gas and Process Gas Analyzers<br />
Ordering Information Code-No. TSP2QU- ___ ___ ___ ___ ___ ___ ___ ___ ___<br />
Transpector upgrade packages<br />
H200M, H200F, Quadrex and QX upgrade package 03<br />
H100M, H100F, Quadrex and QX upgrade package 04<br />
Power supply package<br />
None 0<br />
80-250 VAC/4 ft. (1.2m) standard cable (standard plug) 1<br />
80-250 VAC/4 ft. (1.2m) standard cable (German plug) 2<br />
Power supply cable<br />
None 0<br />
15 ft. (4.5m) cable 1<br />
30 ft. (9m) cable 2<br />
RS232 communications cable - for single sensor operation<br />
None 0<br />
15 ft. (4.5m) cable 1<br />
30 ft. (9m) cable 2<br />
RS485 communications cable kit Ð for multiple sensor operation<br />
None 0<br />
15 ft. (4.5m) cable 1<br />
30 ft. (9m) cable 2<br />
Computer communications module<br />
None 0<br />
RS485C communications kit (used with TranspectorWare or TWare Lite) 1<br />
TCA485 communications kit - US version (used with TWare 32) 2<br />
TCA485 communications kit - German version (used with TWare 32) 3<br />
TCA485 communications kit - Japan version (used with TWare 32) 4<br />
TCA485 communications kit - UK version (used with TWare 32) 5<br />
Software<br />
None 0<br />
TWare 32 single sensor version 1<br />
TWare 32 multi-sensor version 2<br />
TWare Lite single sensor version 3<br />
TWare Lite multi-sensor version 4<br />
TranspectorWare single sensor 5<br />
TranspectorWare multi-sensor 6<br />
Analog Outputs<br />
None 0<br />
4 channel analog outputs (0-10V) 1<br />
4 channel analog outputs (0-5V) 2<br />
Sensor Refurbishment<br />
None 0<br />
Sensor with no EM replacement (includes new ion source and tuning) 1<br />
Sensor with EM replacement (includes new ion source, new EM and tuning) 2<br />
<strong>B2</strong><br />
.<br />
<strong>B2</strong>.13
Residual Gas and Process Gas Analyzers<br />
Transpector® XPR Gas Analysis System<br />
Transpector ® XPR 2 Gas Analysis System<br />
Transpector XPR 2 is a technological breakthrough in quadrupole-based<br />
process gas analysis, moving well beyond conventional leak detection<br />
application in a production environment. ItÕs the first gas analyzer with an<br />
extended pressure range to operate from 20 mTorr down to ultrahigh<br />
vacuum without the need for complex pressure conversion systems.<br />
Innovative Sensor Design<br />
Because the mean free path (the average distance that an ion travels<br />
before interacting with a gas molecule) becomes much smaller at higher<br />
gas pressures, Transpector XPR 2 employs a unique miniature sensor<br />
design to permit operation at gas pressures as high as 20 mTorr without<br />
compromising high-quality performance. This new sensor, 10 times smaller<br />
than the sensor in a conventional RGA, provides a short path for signal ions<br />
to travel to reach the detector, eliminating the effect of collisional losses.<br />
The remarkable engineering and proprietary manufacturing of Transpector<br />
XPR 2 operates at extended pressure ranges and establishes new limits of<br />
precision and tolerance critical to accurate, reliable performance on a<br />
repeatable basis.<br />
Miniature Quadrupole<br />
Precise dimensions and alignment of the four rods (quadrupoles) of a mass<br />
filter are critical to achieve accurate and reliable performance specifications.<br />
Assembly techniques used to manufacture quadrupole sensors do not scale<br />
down with the exacting precision required of an extended pressure range<br />
sensor. Transpector XPR 2 takes advantage of revolutionary manufacturing<br />
methods (patented and patent pending) to produce a sensor with<br />
uncompromised performance.<br />
Exact alignment of the filter rods in Transpector XPR 2 delivers excellent<br />
mass resolution and overall performance. Without it, peaks begin to blend,<br />
and, in designs employing multiple quadrupole arrays, performance<br />
problems increase proportionally. While arrays may transmit signals<br />
generated in the ion source, they can result in smaller peaks being<br />
obscured by larger peaks lacking good definition, or the appearance of<br />
false peaks due to inaccurate mass filtering. The INFICON proprietary<br />
manufacturing process eliminates the mechanical assembly of the filter rods<br />
and produces an exceptionally accurate quadrupole. This innovative design<br />
allows Transpector XPR to scan a mass range from 0 to 100 amu with less<br />
than 1 amu resolution at 10% of the peak height (per AVS standard 2.3)<br />
and operate up to 20 mTorr.<br />
Dual lon Source<br />
In the past, total pressure measurement in quadrupole systems has always<br />
been compromised by conventional ion source designs. Now, the<br />
Transpector XPR 2 patented dual ion source supplies one ion stream to the<br />
quadrupole filter for partial pressure measurement and a second ion stream<br />
to a total pressure collector. The Transpector XPR 2 dual-ion source allows<br />
continuous total pressure measurement comparable to the accuracy<br />
expected of an ion gauge.<br />
This innovative dual ion source approach aids in measurement accuracy<br />
in the millitorr range by correcting for high-pressure sensitivity loss.<br />
The unique interplay between each of the ion sources eliminates the<br />
problems of conventional single ion source sensors Ð nonlinear response<br />
and degradation of data quality at higher pressures.<br />
Transpector XPR 2 ion source has dual-electron energy capability,<br />
software-switchable between 40 and 70 eV. This eliminates spectral<br />
interference due to peaks from doubly charged ions. For example, the<br />
doubly ionized argon 36 isotope peak (m/z = 36 amu/2 + = 18) will mask<br />
low levels of H 2 O (m/z = 18 amu/1 + = 18). Transpector XPR 2 lower<br />
electron energy provides a significant advantage when extreme sensitivity<br />
for monitoring water vapor in the presence of argon is required.<br />
The filament material is yttrium-coated iridium. It provides long lifetime and<br />
resistance to burnout due to accidental overpressure. Filament assemblies<br />
are easily replaced in the field to meet the requirements of your production<br />
uptime.<br />
EM/FC Detector<br />
Transpector XPR 2 employs a combination electron multiplier/Faraday Cup<br />
detector for acute sensitivity for leak detection and residual gas analysis in<br />
high vacuum systems. The Faraday Cup is used when sampling at higher<br />
pressures (typically above 1 x 10 -5 Torr), providing a minimum detectable<br />
partial pressure (MDPP) of 1 x 10 -9 Torr, or better than 10 parts per million<br />
(ppm). Turning on the electron multiplier at lower pressures increases the<br />
MDPP to 3 x 10 -12 Torr. This dual-detector system in Transpector XPR 2<br />
provides excellent performance for wide-ranging vacuum pressures<br />
and applications.<br />
Crystal-Controlled RF Prevents Peak Drift<br />
Significant electronic advances have been made in RF and preamplifier<br />
circuitry. With the introduction of Transpector XPR 2, there is no need for<br />
routine tuning of peak position and resolution, because Transpector XPR 2<br />
RF circuitry is crystal-controlled. It provides superior system stability by<br />
virtually eliminating peak drift, providing accurate and reliable data.<br />
In addition, the Transpector XPR 2 new preamplifier measurement<br />
algorithm improves the signal to noise ratio, allowing detection of currents<br />
to 1 x 10 -15 amps.<br />
<strong>B2</strong>.14
Transpector® XPR Gas Analysis System<br />
Residual Gas and Process Gas Analyzers<br />
Interlock Protection<br />
Interlock protection for the Transpector XPR 2 allows the XPR filament<br />
emission to operate at safe pressures (
Residual Gas and Process Gas Analyzers<br />
Transpector® XPR Gas Analysis System<br />
Ordering Information Code-No. XPR2/120- ___ ___ ___ ___ ___ ___ ___ ___ ___<br />
TRANSPECTOR XPR Package Ð with yttria coated iridium filaments<br />
100 amu, EM/FC, XPR2 Sensor PK, with interlocks 02<br />
Power supply package<br />
None 0<br />
80-250 VAC/4 ft. (1.2m) standard cable (standard plug) 1<br />
80-250 VAC/4 ft. (1.2m) standard cable (German plug) 2<br />
Power supply cable<br />
None 0<br />
15 ft. (4.5m) cable 1<br />
30 ft. (9m) cable 2<br />
RS232 communications cable - for single sensor operation<br />
None 0<br />
15 ft. (4.5m) cable 1<br />
30 ft. (9m) cable 2<br />
RS485 communications cable kit Ð for multiple sensor operation<br />
None 0<br />
15 ft. (4.5m) cable 1<br />
30 ft. (9m) cable 2<br />
Computer communications module<br />
None 0<br />
RS485C communications kit (used with TranspectorWare or TWare Lite) 1<br />
TCA485 communications kit - US version (used with TWare 32) 2<br />
TCA485 communications kit - German version (used with TWare 32) 3<br />
TCA485 communications kit - Japan version (used with TWare 32) 4<br />
TCA485 communications kit - UK version (used with TWare 32) 5<br />
Software<br />
None 0<br />
TWare 32 single sensor version 1<br />
TWare 32 multi-sensor version 2<br />
TWare Lite single sensor version 3<br />
TWare Lite multi-sensor version 4<br />
TranspectorWare single sensor 5<br />
TranspectorWare multi-sensor 6<br />
Right angle valve<br />
None 0<br />
Manual right angle valve with heating jacket 1<br />
Electropneumatic right angle valve 24vdc 2<br />
solenoids and heating jacket<br />
Analog Outputs<br />
None 0<br />
4 channel analog outputs (0-10V) 1<br />
4 channel analog outputs (0-5V) 2<br />
Note: for 230VAC option, change from ÒXPR2/120Ó to ÒXPR2/230.Ó The 230VAC version includes a German style plug for the power supply and the appropriate parts for 230VAC heater operation.<br />
Transpector is a registered trademark and TranspectorWare is a trademark of INFICON <strong>Inc</strong>. All other products and trademarks are the property of their respective owners<br />
<strong>B2</strong>.16
Preclude TM Photoresist Detector<br />
Residual Gas and Process Gas Analyzers<br />
Preclude TM<br />
Photoresist Detector<br />
In Situ Photoresist Detection to<br />
Reduce Downtime<br />
TodayÕs physical vapor deposition (PVD) cluster tools demand the utmost in<br />
cleanliness. Even contamination in the range of a few parts per million (ppm)<br />
can cause problems. So when a wafer with residual photoresist is heated<br />
under vacuum in the degas chamber, causing the photoresist to vaporize<br />
and spread throughout the tool, the result can be a disaster. Your highthroughput<br />
PVD tool is brought to a halt and can be offline for days. ThatÕs<br />
extremely costly in terms of lost production and man-hours for clean-up.<br />
<strong>B2</strong><br />
The INFICON Preclude ª Photoresist Detector prevents this expensive<br />
downtime by continuously monitoring the degas chambers for the<br />
signatures of photoresist compounds. Once Preclude detects photoresist,<br />
it triggers an alarm and/or provides an output that can be used to<br />
automatically stop the degas cycle, mitigating the contamination of the tool.<br />
Stop Small Problems<br />
from Becoming Big Ones<br />
Ideally, the ashing and stripping steps that precede degassing should leave<br />
the wafers completely free of photoresist. But that doesnÕt always happen.<br />
Photoresist removal can be incomplete or inadvertently missed altogether.<br />
Even trace levels of photoresist that are too small to contaminate the tool<br />
can cause problems with the deposition processes that follow wafer<br />
degassing, reducing your yields.<br />
Preclude monitors every wafer degas cycle for photoresist contamination.<br />
Once installed, it needs no operator involvement. In fact, unless it detects<br />
a contamination problem, youÕll hardly know itÕs there.<br />
To ensure reliability, we tested the Preclude system in the real world.<br />
It continuously monitored production PVD tools for well over a year,<br />
providing trouble-free contamination detection. A major source of this<br />
reliability is the INFICON Transpector¨ 2 Residual Gas Analyzer (RGA)<br />
thatÕs at the heart of every Preclude system. Because of its proven record<br />
of unrivaled durability, the Transpector is found on more tools than any<br />
other RGA. When the PVD tool is down for maintenance, the Preclude<br />
Photoresist Detector can be operated as a full-featured RGA,complete<br />
with high-sensitivity helium leak detection.<br />
Advanced Technology<br />
Eliminates False Alarms<br />
Preclude is designed to prevent PVD tool downtime and increase wafer<br />
yields. Any false alarms would have the opposite effect, so we were careful<br />
to ensure that PrecludeÕs extreme sensitivity didnÕt come at the expense<br />
of reliability.<br />
Two wafers run through degas cycles.The first (scans 4 through 29) shows a typical wafer<br />
where small amounts of water vapor outgas. The second wafer is contaminated and<br />
demonstrates the mechanisms of photoresist outgassing. An initial burst of low-vapor-pressure<br />
gases is released as the wafer temperature ramps up. At sufficiently high temperatures,<br />
photoresist compounds experience pyrolysis, which can result in large portions of a PVD<br />
cluster tool becoming contaminated.<br />
PVD tool degas chambers are typically mounted on vacuum buffer<br />
chambers, which are a hub for loadlocks, process chambers, passthroughs<br />
and cool-down stations. All this activity creates numerous pressure<br />
transients that could easily trigger false alarms in a less sophisticated<br />
photoresist detector.<br />
To ensure that doesnÕt happen, INFICON worked in cooperation with several<br />
semiconductor fabs to develop patent-pending technology that<br />
simultaneously looks at many factors during a suspected contamination<br />
event. This intelligent system gives Preclude its combination of unsurpassed<br />
sensitivity and reliability.<br />
Preclude Photoresist Detector<br />
Features at a Glance<br />
♦ Detects photoresist in PVD tool degas chambers, mitigating<br />
contamination that can cause costly downtime and extensive clean-up<br />
♦ Sensitive enough to detect trace photoresist contamination that,<br />
while not harmful to the tool, can cause problems with later<br />
deposition processes<br />
♦ Patent-pending technology prevents false alarms<br />
♦ Runs continuously and automatically without user intervention<br />
♦ Can share a PC with Transpector ¨ gas analyzers<br />
<strong>B2</strong>.17
Residual Gas and Process Gas Analyzers<br />
Preclude TM Photoresist Detector<br />
How Preclude Photoresist Detector Works<br />
Preclude uses quadrupole mass spectrometer technology to continuously<br />
monitor the degas chamber. During the degas cycle, the wafer temperature<br />
is typically ramped up under vacuum to 250¡C. When no photoresist is<br />
present, only small amounts of water vapor will outgas from the wafer<br />
surface. But when there is photoresist contamination, the water vapor will<br />
be accompanied by a rapid rise in the volatile compounds that were used to<br />
suspend the photoresist in a liquid state when it was applied to the wafer.<br />
These volatile compounds, while generally not harmful, are a precursor<br />
of the problems to follow. Next come the smoke-like byproducts of the<br />
hardened photoresist as it breaks down or burns. These can spread<br />
throughout the tool, leaving residues on chamber surfaces. Preclude detects<br />
and analyzes all these events to provide reliable photoresist detection while<br />
eliminating false alarms.<br />
1 x 10 -9<br />
Detection Time for Preclude vs. Competition<br />
Competitor’s MDPP<br />
Partial Pressure<br />
1 x 10 -2<br />
1 x 10 -3<br />
1 x 10 -4<br />
1 x 10 -5<br />
1<br />
Detecting Photoresist in Unclamped Degas Chambers<br />
Water Vapor<br />
Argon<br />
Photoresist<br />
21<br />
41<br />
61<br />
101<br />
121<br />
141<br />
161<br />
181<br />
201<br />
221<br />
241<br />
261<br />
281<br />
301<br />
321<br />
341<br />
361<br />
381<br />
401<br />
Scan Number<br />
Detecting photoresist is complicated by large pressure excursions typical of systems<br />
employing unclamped degas processes.The degas chamber is often not isolated<br />
from events taking place in the buffer chamber. As wafers are cycled in and out of the<br />
PVD cluster tool, large spikes of water vapor are observed as loadlocks are opened<br />
to the buffer chamber. Argon bursts associated with cooldown chambers being<br />
vented into the buffer chamber account for more severe effects. Outgassing from a<br />
wafer contaminated with photoresist and subject to degas heat is seen at scan<br />
number 221. A photoresist detection system must be able to distinguish harmless tool<br />
behavior from true photoresist events.<br />
Photoresist<br />
Signal<br />
3 x 10 -12<br />
Preclude’s MDPP<br />
Time<br />
Detection Time for Preclude vs. Competition<br />
Because Preclude detects photoresist at lower levels than other<br />
instruments, photoresist can be detected earlier. (Data based<br />
on published specifications. Preclude at 32 ms dwell and EM off.)<br />
<strong>B2</strong>.18
Preclude TM Photoresist Detector<br />
Residual Gas and Process Gas Analyzers<br />
Technical Data<br />
Operation<br />
Maximum continuous operating pressure 1<br />
Maximum permissible pressure bursts 2<br />
Emission interlock 3<br />
Mass position stability 4<br />
Peak amplitude stability 4<br />
Achievable instrument reproducibility 5<br />
Temperature stability 4<br />
Detection time for one photoresist channel 6<br />
Detection time for six photoresist channels 7<br />
Activation time (time to alarm)<br />
Recommended preventative maintenance<br />
Minimum detectable partial pressure (MDPP) 8<br />
Minimum detectable helium partial pressure 9<br />
Electronics dimensions<br />
Overall dimensions (without interlocks)<br />
Detector type<br />
Software<br />
Photoresist set-up<br />
Alarm output<br />
Hardware output<br />
Connection to tool<br />
Preclude TM Photoresist Detector<br />
Fully automatic once photoresist recipe is initialized<br />
< 1 mTorr<br />
20 mTorr at the Preclude sensor<br />
Pirani thermoconductivity gauge<br />
< 0.1 AMU over 24 hours (after 30-minute warm-up)<br />
< 2% over 24 hours (after 30-minute warm-up)<br />
< 2% deviation<br />
< 1% of peak height per ¡C (with EM off)<br />
28 ms<br />
< 1 second (typical application)<br />
Programmable timer after detection time: 0-25 seconds<br />
Ion source replacement after 4,000 hours (typical application)<br />
3 x 10 -12 Torr (4 x 10 -12 mbar) FC operation for photoresist detection<br />
3 x 10 -14 Torr (4 x 10 -14 mbar) EM operation for leak detection<br />
4.87" (12.4 cm) x 5.62" (14.3 cm) x 7.75" (19.7 cm)<br />
6.65" (16.9 cm)<br />
Microchannel Plate EM/FC<br />
TranspectorWare¨ 3.1 or higher, or TWare 32 version 2.0 or higher<br />
Programmable masses, recipe driven<br />
Boolean logic for AND/OR of photoresist channels<br />
Relay output, 24 V at 0.5 amps<br />
Prewired cable on Preclude end with terminating wires on tool end, 30' (9 meter) length<br />
<strong>B2</strong><br />
1 Recommended pressure range
Residual Gas and Process Gas Analyzers<br />
Transpector® CIS2 Gas Analysis System<br />
Transpector ® CIS2 Gas Analysis System<br />
New Vacuum System Controller Saves Space<br />
All control functions have been consolidated into a single device that is<br />
mounted to the Transpector 2 RGA, freeing up rack space and simplifying<br />
installation. Although instructions are received from the controlling computer<br />
via an RS485 network, the Transpector CIS2 Gas Analysis System<br />
independently stores all calibration and setpoint data. This ensures that if<br />
communications are lost, the sensor continues to monitor and control the<br />
vacuum system as programmed. In addition, all functions are fully<br />
interlocked to protect Transpector CIS2 and your tool from component<br />
failure, system overpressure, or operator errors. For further protection, the<br />
system automatically shuts down and isolates the sensor head in case of<br />
power interruption, accidental pressure bursts, or component failure.<br />
New pumping system is smaller, lighter, and more efficient. The pumps<br />
can handle lighter, aggressive gases, allowing process sampling from<br />
atmosphere to high vacuum.<br />
As wafer sizes increase and chip geometries decrease, getting detailed<br />
and accurate information on your process becomes more vital than ever.<br />
The Transpector CIS2 system provides that information, using a closed ion<br />
source (CIS) to detect contaminants at sub-ppm levels. Optional<br />
TranspectorWare¨ and TWare 32 TM software works with the Transpector<br />
CIS2 to provide automatic or manual control as well as status information,<br />
while a new Vacuum System Controller (VSC) frees up expensive fab<br />
space by eliminating the need for rack-mounted electronics.<br />
Improvements Bring Unprecedented<br />
Functionality and Control<br />
New TranspectorWare or TWare 32 Software Adds VersatilityÑThese<br />
software packages provide automatic valve control through recipes, manual<br />
control of all components, and status information on all components. It<br />
includes a full array of basic residual gas analysis (RGA) features, including<br />
trend analysis, bar graph, leak check, analog, and selected peak modes. It<br />
also contains process monitoring features that include recipe generation,<br />
automated data collection, norm generation, and process deviation<br />
monitoring. A single PC can control multiple Transpectors in any<br />
combination of CIS, XPR, or open-ion-source models through an RS485<br />
network.<br />
Software Designed for Flexibility and Operating EaseÑAll Transpector<br />
CIS2 components are software controlled. Automatic pumpdown and<br />
shutdown sequences provide user-friendly operation while protecting the<br />
sensor if a problem develops. Opening and closing of all valves is based<br />
on recipes that can be started and stopped manually or via tool inputs.<br />
Bakeout recipes are user-programmable through a simple dialog.<br />
The status of all system components is available at a glance through<br />
an on-screen display, and all components can be controlled manually.<br />
In case of subsequent questions, all component activity is recorded in<br />
a chronological event log.<br />
Improvements Produce Better Data<br />
The Transpector CIS2 Gas Analysis System incorporates all the<br />
improvements of the new Transpector 2, including better zero blast<br />
suppression, increased abundance sensitivity (less interference between<br />
adjacent masses), and a signal-to-noise ratio thatÕs up to 10 times better<br />
than previous Transpectors and other gas analyzers.<br />
New Inlets Have Less Surface Area<br />
This minimizes surface reactions and shortens response times.<br />
New Smart Sensor Gauges Provide Accurate<br />
and Reliable Interlocks<br />
An ion gauge on the ultrahigh-vacuum manifold protects the RGA filament<br />
by preventing operation if overpressure occurs, while a Pirani sensor on the<br />
foreline provides additional protection. These smart sensor gauges donÕt<br />
require rack-mounted electronics.<br />
New Cleanroom-Compatible Heaters<br />
They reduce particulates generated in the fab.<br />
New Calibration Standards Allow for Qualitative<br />
and Quantitative References<br />
RGA stability data can be gathered from process gases. In addition, the<br />
Transpector CIS2 sampling system permits the introduction of calibration<br />
gases as references while keeping them isolated from the process. This<br />
provides an alternative for monitoring RGA stability and absolute<br />
sensitivities for a range of masses in the calibration gas.<br />
Multiple Valve Options Let You Customize<br />
Transpector CIS2 to your Process<br />
Sampling and isolation valves are available for various processes, in<br />
different geometries, with KF or ConFlat¨ connectors, for manual or<br />
automatic operation, and for a wide range of operating pressures.<br />
<strong>B2</strong>.20
Transpector® CIS2 Gas Analysis System<br />
Residual Gas and Process Gas Analyzers<br />
Configurations for Physical Vapor<br />
Deposition (PVD) Applications<br />
Transpector CIS2 helps reduce film defects by detecting ppm-level<br />
contaminants during the sputtering process.<br />
New PVD Ion Source<br />
Linear operation allows direct sampling up to 10 mTorr (1.3 x 10 -2 mbar).<br />
New PVD Inlet Valve<br />
With its small footprint, it allows full conductance for sampling base<br />
pressure and full ultrahigh vacuum isolation.<br />
Optional Calibration Gas Inlet<br />
Allows introduction of ppm references directly into the ion source.<br />
Configurations for Chemical Vapor<br />
Deposition (CVD)/Etch Applications<br />
Transpector CIS2 provides dependable process monitoring in aggressive<br />
gas environments.<br />
New CVD/Etch Ion Source<br />
Special shielding enhances reliability by preventing deposits that can cause<br />
premature failure.<br />
New Heated Dual Inlet<br />
Provides optimized sampling at base and process pressures.<br />
Ultrahigh Vacuum Compound Pump<br />
Besides being corrosionproof, it includes a nitrogen purge for longer<br />
pump life.<br />
Special Gauges<br />
Designed to withstand long exposures to aggressive gases.<br />
New Special High-Pressure Inlet<br />
Improves sampling response time for high-pressure applications.<br />
Custom Tool Integration<br />
For more advanced applications, INFICON offers a custom tool integration<br />
software package called FabGuard. This software provides sophisticated<br />
alarming based on the tool state and Transpector data, organizes data on a<br />
wafer-by-wafer basis, performs wafer-based statistic calculations, and has a<br />
SECS II interface for factory automation, including wafer tracking.<br />
How Transpector CIS2 Works<br />
To prevent the background residuals in the sensor and pumping package<br />
from masking the residuals in the sample, INFICONÕs Transpector CIS2<br />
uses a closed ion source with a tungsten filament. In addition to contributing<br />
negligible background, this filament has longer life in aggressive gas<br />
processes, resisting many corrosive gases (such as WF6) and reactive<br />
gases (such as silane).<br />
The closed ion source operates at relatively high pressure while the rest of<br />
the sensor (the quadrupole rods and detector) stays at a higher vacuum.<br />
This high pressure inside the ion chamber allows for relatively concentrated<br />
samples of process gases, enhancing the sample signal relative to the<br />
sensor background signals, thereby allowing for very sensitive ppm analysis.<br />
In CVD applications, process gas molecules flow through the sampling<br />
orifice; in PVD applications they go directly to the ion chamber. Electrons<br />
from the tungsten filament enter the ion chamber through a separate<br />
opening to bombard the gas molecules, converting some into charged ions.<br />
Varying electric fields then selectively pass these ions through the sensor<br />
for analysis.<br />
Transpector CIS2 Features at a Glance:<br />
♦ Detects residual process gases down to less than one ppm<br />
♦ New Vacuum System Controller eliminates the need for<br />
rack-mounted electronic<br />
♦ TranspectorWare or TWare 32 software allows automatic or manual<br />
control of all components while providing complete status information<br />
♦ New features improve performance in PVD and CVD applications<br />
Applications<br />
♦ Process contamination identification<br />
♦ Base pressure analysis<br />
♦ Gas purity analysis<br />
♦ Chemical reaction verification<br />
♦ Photoresist detection<br />
♦ Process gas verification<br />
♦ Vacuum system leak detection<br />
♦ Tool diagnostics<br />
♦ Preventative maintenance<br />
♦ Tool characterization<br />
<strong>B2</strong><br />
The closed ion source uses a tungsten<br />
filament that contributes negligible<br />
background while resisting many<br />
corrosive and reactive gases.<br />
<strong>B2</strong>.21
Residual Gas and Process Gas Analyzers<br />
Transpector® CIS2 Gas Analysis System<br />
8<br />
VSC<br />
TRANSPECTOR 2<br />
1<br />
XXXX<br />
3<br />
14<br />
2<br />
4<br />
10<br />
XXXX<br />
RS485<br />
PIRANI<br />
6<br />
POWER MODULE<br />
7<br />
ITR 100<br />
13<br />
5<br />
N 2<br />
16<br />
15<br />
INLET OPTIONS<br />
9<br />
12<br />
18<br />
CIS<br />
11<br />
17<br />
Transpector CIS2 software showing the compound pump status window. Full information about<br />
each of the components used within the system is available through these status windows.<br />
Software showing a typical PVD configuration with calibration standard.<br />
<strong>B2</strong>.22
Transpector® CIS2 Gas Analysis System<br />
Residual Gas and Process Gas Analyzers<br />
Transpector ® CIS2 Configuration Key:<br />
1. Transpector 2 Electronics Unit<br />
2. CIS 2 Vacuum System Controller (VSC)Ð<br />
♦<br />
♦<br />
♦<br />
♦<br />
♦<br />
♦<br />
♦<br />
♦<br />
Control and display of vacuum system status is by<br />
TranspectorWareª software via the VSC.<br />
Sampling valve control is integrated into analysis recipes or<br />
by manual control.<br />
Manual control of all components through password access.<br />
Automatic pumpdown and shutdown sequences.<br />
Separate temperature control for manifold and sample valves up<br />
to 200¡C; constant temperature or timed bakeout sequences.<br />
Automatic protection for sensor emission and electron multiplier<br />
by sensing high-vacuum overpressure, foreline overpressure,<br />
power interruption or failure.<br />
Status information on all components, including operation time<br />
and preventative maintenance times.<br />
Safety and interlock control of all components, regardless of<br />
computer status.<br />
3. Transpector SensorÐ100, 200 or 300 amu with PVD or CVD/etch<br />
closed ion source and EM/FC mounted in a UHV manifold.<br />
4. UHV Compound PumpÐATH 30+ or ATH 30C (corrosive service);<br />
grease-lubricated ceramic bearings.<br />
5. Vacuum System Ionization GaugeÐITR-100 measures and protects<br />
analyzer vacuum. Nude sensor with dual yttria-coated iridium<br />
filaments (PVD) or dual tungsten filaments (CVD/etch).<br />
6. Foreline Pressure GaugeÐPirani sensor measures and protects<br />
analyzer vacuum, using tungsten element for PVD and platinum<br />
element for CVD/etch.<br />
7. Miniature Foreline Isolation Valve<br />
8. Independent Heaters for manifold and sampling valves<br />
(40¡C to 200¡C).<br />
9. CIS Power ModuleÐProvides 24 VDC to all components; houses<br />
the compound pump controller board and controls power for<br />
the heaters.<br />
10. Fan/Solenoid Valve AssemblyÐProvides cooling for the compound<br />
pump and solenoid activation of all valves.<br />
11. Diaphragm PumpÑMVP 015 dry, leak-tight diaphragm pump for<br />
backing the compound pump.<br />
12. Vent ValveÐnormally closed; opened before start of<br />
diaphragm pump.<br />
13. Purge ValveÐfor purging the compound pump bearings in<br />
aggressive gas applications.<br />
Inlet Valves ÐÐ normally closed, electropneumatic, 70-110 psig air.<br />
14. PVDÐ90¡ Isolation ValveÐfully open or closed for use with PVD<br />
closed ion source.<br />
15. Dual-Pressure In-Line Inlet ValveÐwith two replaceable orifices to<br />
sample process and background pressures of< 100 Torr with<br />
CVD/etch closed ion source.<br />
16. Dual-Pressure 90¡ Inlet ValveÐ90¡ version of 15.<br />
17. Dual-Pressure Inlet Valve with High-Pressure SamplingÐBypass<br />
to compound pump will draw a sample of 10 sccm to the orifice<br />
for high-pressure applications requiring fast response time.<br />
18. ComputerÐfor controlling and displaying TranspectorWareª or<br />
TWare 32ª software.<br />
<strong>B2</strong><br />
Not shown: Optional Calibration Gas Flow StandardÐfor RGA tuning and quantifiable references.<br />
<strong>B2</strong>.23
Residual Gas and Process Gas Analyzers<br />
Transpector® CIS2 Gas Analysis System<br />
Technical Data<br />
Transpector ® CIS2 Gas Analysis System<br />
1 to 100, 1 to 200 or 1 to 300 amu<br />
Mass range<br />
5 Depends on orifice size selected in the inlet system.<br />
Detector type<br />
Resolution (per 1993 AVS Recommended Practice)<br />
Base pressure performance<br />
(UHV system after 8-hour bake @ 200¡C)<br />
Ambient temperature<br />
Relative humidity<br />
Utility requirements<br />
high-performance combination electron multiplier/Faraday cup (EM/FC)<br />
< 1 amu wide @ 10% peak height over entire mass range<br />
< 5 x 10 -9 Torr ( 6.6 x 10 -9 mbar)<br />
(UHV system after 8-hour bake @ 200¡C)<br />
20¡C to 50¡C<br />
² 80%<br />
No rack space required.<br />
110/120 VAC, 4-amp or 220/240 VAC, 2-amp outlet located at the power module<br />
110/120 VAC, 1.5-amp or 220/240 VAC, 0.75-amp outlet located at the foreline pump<br />
70-110 psig (5.8-8.6 bar) of compressed air located near the compound pump<br />
15 psig (1.3 bar) of dry nitrogen located at the compound pump for CVD/etch applications (10 sccms consumption)<br />
Sensitivity<br />
35 eV @ 200 mA 70 eV @ 2000 mA<br />
EM/FC (as FC)<br />
measured @ 3 x 10 -3 Torr (4 x 10 -3 mbar)<br />
measured @ 1 x 10 -7 Torr (1.3 x 10 -7 mbar)<br />
EM/FC (as EM) 1<br />
Process Monitoring<br />
Background Monitoring<br />
³ 1 x 10 -6 amps/Torr (7.6 x 10 -7 amps/mbar) ³ 1 x 10 -5 amps/Torr (7.6 x 10 -6 amps/mbar)<br />
³ 1 amps/Torr (0.76 amps/mbar) ³ 10 amps/Torr (7.6 amps/mbar)<br />
Zero blast<br />
< 1 ppm contribution of zero blast @ mass 2 with 3 mTorr of Ar<br />
PVD ION SOURCE<br />
Ion source conductance<br />
Process pressure range 2<br />
Minimum detectable composition change 3<br />
0.1 l/s (1 x 10 -4 m3/s)<br />
1 to 10 mTorr (1.3 x 10 -3 to 1.3 x 10 -2 mbar)<br />
0.2 ppm<br />
Minimum detectable partial pressure<br />
35 eV @ 200 mA 70 eV @ 2000 mA<br />
EM/FC (as EM)<br />
CVD/ETCH ION SOURCE<br />
Ion source conductance<br />
² 5 x 10 -13 Torr (6.6 x 10 -13 mbar) ² 5 x 10 -14 Torr (6.6 x 10 -14 mbar)<br />
0.7 l/s (7 x 10-4 m3/s)<br />
Process pressure range<br />
(defined by orifice diameter in inlet system)<br />
Orifice Size (Optimum Pressure)<br />
0.01, 0.1, 1, 10, 100 Torr<br />
(0.013, 0.13, 1.3, 13, 133 mbar)<br />
Minimum detectable composition change 3<br />
< 1 ppm<br />
1, 4, 5<br />
Minimum detectable partial pressure<br />
Maximum pressure EM/FC (as EM) 35 eV @ 200 m<br />
35 eV @ 200 mA 70 eV @ 2000 mA<br />
0.01 Torr (0.013 mbar)<br />
² 5 x 10 -12 Torr (6.6 x 10 -12 mbar) ² 1 x 10 -12 Torr (1.3 x 10 -12 mbar)<br />
0.1 Torr (0.13 mbar)<br />
² 5 x 10 -11 Torr (6.6 x 10 -11 mbar) ² 1 x 10 -11 Torr (1.3 x 10 -11 mbar)<br />
1 Torr (1.3 mbar)<br />
² 5 x 10 -10 Torr (6.6 x 10 -10 mbar) ² 1 x 10 -10 Torr (1.3 x 10 -10 mbar)<br />
10 Torr (13 mbar)<br />
² 5 x 10 -9 Torr (6.6 x 10 -9 mbar) ² 1 x 10 -9 Torr (1.3 x 10 -9 mbar)<br />
100 Torr (133 mbar)<br />
² 5 x 10 -8 Torr (6.6 x 10 -8 mbar) ² 1 x 10 -8 Torr (1.3 x 10 -8 mbar)<br />
1 Values were measured with an electron multiplier gain of 7.5 x 10 5 .<br />
2 Higher operating pressures (up to 30 mtorr) are possible with reduced performance.<br />
3 Value is measured as minimum detectable change of CO 2, N 2, O 2 or He ion current in the presence of 100% argon.<br />
4 Minimum Detectable Partial Pressure (MDPP) is calculated as the standard deviation of the noise (minimum detectable signal) divided by the sensitivity of the sensor (EM or FC)<br />
with a dwell of one second.<br />
<strong>B2</strong>.24
Transpector® CIS2 Gas Analysis System<br />
Residual Gas and Process Gas Analyzers<br />
Ordering Information *Code-No. CIS2 -____ ____ ____ ____ ____ ____ ____ ____ ____ ____<br />
AMU range Transpector CIS 2<br />
100 AMU<br />
200 AMU<br />
300 AMU<br />
Sensor type<br />
PVD/LG electron multiplier<br />
CVD/LG electron multiplier<br />
IMP/LG electron multiplier<br />
Pumping system<br />
Alcatel ATH 20/40, thoria-coated iridium<br />
Alcatel ATH 20/40C, w/purge, W<br />
Alcatel ATH 20/40C, w/purge, for atmosphere<br />
Inlet valve<br />
PVD valve and heater<br />
CVD dual 90¡ valve, w/CF35<br />
CVD dual in-line valve, w/CF35<br />
CVD dual in-line valve, w/sample draw, w/CF35<br />
CVD dual 90¡ valve, w/sample draw, w/CF35<br />
Single capillary atmospheric inlet<br />
CVD dual 90¡ valve, w/sample draw, w/KF40<br />
CVD dual 90¡ valve, w/KF40<br />
CVD dual in-line valve, w/sample draw, w/KF40<br />
CVD dual in-line valve, w/KF40<br />
V1 orifice<br />
None<br />
Gasket (Ni VCR)<br />
10 mTorr<br />
100 mTorr<br />
1 Torr<br />
10 Torr<br />
100 Torr<br />
1.5m capillary<br />
3.0m capillary<br />
V2 orifice<br />
None<br />
Gasket (Ni VCR)<br />
10 mTorr<br />
100 mTorr<br />
1 Torr<br />
10 Torr<br />
100 Torr<br />
PM control cables<br />
1m<br />
3m<br />
5m<br />
9m<br />
Foreline pump<br />
None<br />
Standard pump, 120 VAC<br />
Standard pump, 230 VAC<br />
Foreline hose control<br />
None<br />
1m<br />
3m<br />
5m<br />
9m<br />
Calibration<br />
None<br />
Gasket and 4-VCR plug (for PVD inlet)<br />
PVD gas valve, hardware<br />
CVD gas valve, hardware<br />
1<br />
2<br />
3<br />
2<br />
4<br />
6<br />
1<br />
3<br />
4<br />
01<br />
02<br />
03<br />
04<br />
05<br />
07<br />
11<br />
12<br />
13<br />
14<br />
00<br />
01<br />
02<br />
03<br />
04<br />
05<br />
06<br />
20<br />
21<br />
00<br />
01<br />
02<br />
03<br />
04<br />
05<br />
06<br />
1<br />
3<br />
5<br />
9<br />
0<br />
1<br />
2<br />
0<br />
1<br />
3<br />
5<br />
9<br />
0<br />
1<br />
2<br />
3<br />
* Consult factory before ordering a CIS2 for proper application assistance.<br />
<strong>B2</strong><br />
<strong>B2</strong>.25
Residual Gas and Process Gas Analyzers<br />
FabStar TM Gas Analysis System<br />
FabStar TM<br />
Gas Analysis System<br />
Exhaust Abatement and<br />
Process Optimization<br />
Reliable Identification of Gases at<br />
Atmospheric Pressure<br />
FabStar is a corrosive-resistant, benchtop gas analysis system that provides<br />
quantitative and qualitative analysis of gases in semiconductor fabrication<br />
facilities. Its user interface provides maximum flexibility for correlation of<br />
FabStar data with process conditions.<br />
Semiconductor Applications<br />
♦ Exhaust Abatement<br />
♦ Process Optimization<br />
♦ Process Research<br />
♦ Alternative Chemistries<br />
♦ Scrubber Efficiency<br />
♦ PFC Research<br />
♦ Gas Optimization<br />
FabStar Features at a Glance<br />
♦ Simple operation and fast response time<br />
♦ Qualitative and quantitative analysis<br />
♦ Monitors up to 64 components<br />
♦ Detection limits down to ppm level<br />
♦ No memory effects<br />
FabStar Offers<br />
♦ Valve control and system operation via software<br />
Specifications<br />
Mass Range<br />
1 - 100 amu<br />
1 - 200 amu<br />
1 - 300 amu<br />
Gas Connection Stainless steel capillary<br />
1/16" O.D. (1.6 mm O.D.)<br />
3.28' (1 meter length)<br />
Gas Inlet<br />
Valve control via software with two stage pressure reduction<br />
Sampling Pressure 1 atmosphere (760 torr) (1 bar)<br />
Capillary Temperature Up to 200û C<br />
Dimensions (WxHxL) 11" x 16" x 28" (280x420x710 mm)<br />
Weight<br />
99 lbs. (45 kg)<br />
Configuration<br />
♦ Qualitative analysis of all gases using spectrum libraries<br />
♦ Quantitative analysis with concentration algorithm and<br />
statistical functions<br />
4<br />
1<br />
2<br />
♦ Gas concentrations plotted over user-defined times to identify trends<br />
3<br />
Note: Contact the sales office nearest you for ordering information.<br />
Key:<br />
1 Heating conditioning of the analysis chamber<br />
2 Heated gas inlet chamber<br />
3 Temperature controlled gas transfer line (capillary)<br />
4 Quadrupole mass spectrometer<br />
<strong>B2</strong>.26
PPM 422 Plasma Process Monitor<br />
Residual Gas and Process Gas Analyzers<br />
PPM 422 Plasma Process Monitor<br />
User Advantages<br />
♦ Detection of neutral particles and of positive and negative ions from<br />
the plasma<br />
♦ Energy analysis of neutral particles and of positive and negative ions<br />
<strong>B2</strong><br />
♦ Measurement of radicals<br />
♦ End point detection of plasma processes<br />
♦ Large dynamic range<br />
♦ High measuring speed<br />
The PPM 422 is a differentially pumped mass spectrometer unit with<br />
integrated energy analyzer for measuring neutral particles, positive and<br />
negative ions, as well as for energy analysis of ions and neutral particles<br />
in plasma processes.<br />
The extraction orifice is located near the plasma. It can be floating or<br />
biased. Directly behind the extraction orifice, there is a lens and the ion<br />
source with 2 filaments, followed by a lens and the energy analyzer. An<br />
additional lens focuses the ions into the mass filter. The mass filter, the ion<br />
source, the lens system, the energy analyzer, and the deflection unit are<br />
isolated to ground and may be biased up to 500 V.<br />
The PPM is operated with the Balzers Quadstar TM software package<br />
specially optimized for this application.<br />
1 Turbo pump<br />
2 Secondary electron<br />
multiplier SEM<br />
3 Deflection unit<br />
4 Quadrupole<br />
mass filter<br />
5 Extraction orifice<br />
6 Safety shield<br />
against arcing<br />
7 Entrance lens<br />
8 Ion source<br />
9 Transfer lens<br />
10 Energy analyzer<br />
Mass spectrum of positive ions<br />
Mass spectra of positive ions from a plasma reveal detailed information of the various species<br />
contained in a plasma, and therefore allow an insight into plasma chemistry. The basis for<br />
reactive ion etching is the conversion of the material to be removed into volatile reaction products<br />
which can be pumped away. An example is the etching of tungsten in SF6 plasma where metallic<br />
tungsten is converted into WF6. This reaction product can be recognized in the mass spectrum<br />
by means of the various dissociation products (WF5+, WF4+, WF3+, WF2+).<br />
Mass spectrum of negative ions<br />
Negative ions are a major component in a plasma with electro-negative species like fluorine,<br />
chlorine, oxygen or hydrogen. In certain plasma processes like plasma polymerization, the<br />
negative ions play a key role, which is partly due to the very long residence time of negative ions<br />
in the glow region. Therefore, detection of negative ions is highly desirable. The figure shows<br />
a mass spectrum of negative ions from a SF6 plasma in the mass range 100-200 amu.<br />
Besides the peaks due to the etch gas SF6, one can recognize various peak groups related<br />
to the etched molybdenum.<br />
Note: Contact the sales office nearest you for ordering information.<br />
<strong>B2</strong>.27
Residual Gas and Process Gas Analyzers<br />
Composer® Gas Composition Controller<br />
Composer ® Gas Composition Controller<br />
Composer ¨ Gas Composition Controller offers a simple and reliable way to<br />
measure and control the composition of binary gas combinations to a level<br />
of precision unavailable before now.<br />
How do you verify that precursor / dopant delivery<br />
is stable throughout your structure growth?<br />
Composer can measure and control the ratio of a variety of binary gasses.<br />
Its wide pressure range (70 to 1000 Torr) and high sensitivity (for example,<br />
its ability to measure 0.00011% of TMIn in H2), make Composer an<br />
indispensable tool for semiconductor applications, in both R & D and<br />
production environments, as well as for many industrial processes using<br />
binary gas mixtures.<br />
Accurately Determines Precursor /<br />
Carrier Gas Ratios<br />
Composer consists of two main components: an acoustic cell transducer<br />
and a controller. Based on the principle that sound velocity varies with gas<br />
composition, Composer determines the composition of a binary gas mixture<br />
inside the transducerÕs acoustic chamber by measuring the speed of sound<br />
waves through the chamber.<br />
Unprecedented Sensitivity and Reliability<br />
Our resonance measurement technique enables a frequency resolution of<br />
0.1 Hz, equivalent to 0.00011% of TMIn (TriMethylIndium) in H2. This is<br />
about 10 times better than the resolution of acoustic time-of-flight techniques.<br />
The resonance measurement technique also allows operation to pressures<br />
as low as 70 Torr. Again much better than acoustic time-of-flight techniques.<br />
Composer may allow your old reactor to build the latest devices.<br />
Easy to Calibrate<br />
The transducer has no consumable parts, is easy to calibrate, and is<br />
highly stable.<br />
Composer is calibrated by simply purging the transducer cell with pure<br />
carrier gas and pressing the Reference Zero button.<br />
Monitors and Controls the Gas Mixture<br />
Composer can be set up simply to monitor gas composition, allowing the<br />
operator to alter the flow of gas through the bubbler to correct the<br />
concentration as needed. The system can also be configured to maintain or<br />
vary the concentration automatically. For applications with very high flow<br />
rates, a portion of the gas can be sampled.<br />
Provides Control of Precursor Fluence<br />
When set up for automatic control, Composer can control either concentration<br />
or bulk flow by feeding precision analog signals to the bubbler and/or<br />
carrier gas flow controllers. A PID or fuzzy logic control loop adjusts the<br />
precision analog signals to keep concentration or bulk flow at the desired<br />
set-point. Relays can also be made to open and close in accordance with<br />
user defined setpoints.<br />
Composer can be integrated into a reactorÕs control system using either<br />
digital or analog signals.<br />
Uses Source Material Efficiently<br />
As the amount of precursor in the bubbler decreases, Composer detects<br />
this change in precursor pick-up efficiency and increases the flow rate of<br />
carrier gas through the bubbler accordinglyÐminimizing transientsÐand<br />
using expensive source materials efficiently.<br />
Monitors Carrier Gas Flow Stability<br />
Composer can be used to verify that carrier gas flow is stable throughout<br />
and between process runs. The transducer is inherently stable and can<br />
be relied on to reproduce results day after dayÐfor the long haul.<br />
Bulk Flow or Concentration Control?<br />
Composer can control either bulk flow or concentration control. Composer<br />
may be configured to emulate the measurement and control features of<br />
existing instruments. This allows the easiest possible retrofit of the<br />
ComposerÕs superior performance into your overworked reactor.<br />
Or, choosing the concentration control configuration still provides dynamic<br />
flux control of precursors into your reactor, but with the additional benefit of<br />
total flow conservation. This advanced control scheme insures the sum of<br />
the bubbler and dilution (push) flow is absolutely constant.. Either way<br />
Composer is an easy choice.<br />
<strong>B2</strong>.28
Composer® Gas Composition Controller<br />
Residual Gas and Process Gas Analyzers<br />
Verifies That Lines are Completely Purged<br />
Composer can be used to verify that gas lines are completely purged<br />
ensuring the integrity of gas delivered to your process.<br />
It’s not just for MOCVD<br />
Composer is versatile enough to be used in many applications requiring<br />
precise measurement of binary gases.<br />
Choose What’s Right for Your Process<br />
The console comes in either an LCD or LED version. All parametric values<br />
can be entered through the front panel with the LCD console, while a<br />
computer interface is required for the LED model.<br />
The transducer can be ordered with elastomer seals, either Viton¨ or<br />
Kalrez¨; or with metal seals for use with hygroscopic materials.<br />
<strong>B2</strong><br />
Technical Data<br />
Operating Pressure Range<br />
Routine Overpressure Rating<br />
Maximum Transducer Pressure<br />
Temperature Range<br />
Gas Flow Range<br />
Temperature Stability<br />
Frequency Stability<br />
Sensitivity<br />
Reproducibility<br />
Sensor Body and Pipes<br />
Isolation Diaphragms<br />
Inlet / Outlet<br />
Leak Rate<br />
Measurement Rate<br />
Swept Volume<br />
Power<br />
Required:<br />
Optional:<br />
Composer® Gas Composition Controller<br />
70 to 1000 Torr; 9.3 to 133.3 kPa<br />
up to 1520 Torr, 202.7 kPa<br />
6200 Torr (826.6 kPa) Absolute; pressure over 6200 Torr may damage Transducer diaphragms<br />
Up to 65¡C (Transducer)<br />
Up to 1800 sccm<br />
Controlled within 0.1¡C<br />
Stable within 0.0045%<br />
0.00011% of TMIn in H 2<br />
Residual Gas and Process Gas Analyzers<br />
Composer® Gas Composition Controller<br />
Ordering Information Code-No. CP- ____ ____ ____ ____ ____ ____ ____ ____<br />
Base Unit<br />
Composer console with LED indicators<br />
Composer console with LCD display<br />
Composer console with LED and analog I/O option<br />
Composer console with LCD and analog I/O option<br />
1<br />
2<br />
3<br />
4<br />
Transducer<br />
Transducer system VITON ¨ seals<br />
Transducer system KALREZ¨ seals<br />
Transducer system Ni plated <strong>Inc</strong>onel¨ seals<br />
1<br />
2<br />
3<br />
Power Supply Package<br />
None<br />
80-250 VAC/4 ft. (1.2m) standard cable (standard plug)<br />
80-250 VAC/4 ft. (1.2m) standard cable (German plug)<br />
0<br />
1<br />
2<br />
Power Supply Cable Extension<br />
None<br />
15 ft. (4.5m) cable<br />
30 ft. (9m) cable<br />
Special length cable (10 ft. increments up to 100 ft.)<br />
0<br />
1<br />
2<br />
RS232 Communications Cable<br />
None<br />
15 ft. (4.5m) cable<br />
30 ft. (9m) cable<br />
Special length cable (10 ft. increments up to 100 ft.)<br />
0<br />
1<br />
2<br />
Composer / Transducer Interconnection Cable<br />
5 ft. (1.5m) cable<br />
10 ft. (3.0m) cable<br />
20 ft. (6.0m) cable<br />
Software Option<br />
None<br />
Monitor Software<br />
Rack Mount Kits<br />
None<br />
1 unit rack mount kit<br />
2 unit rack mount kit<br />
1<br />
2<br />
3<br />
0<br />
1<br />
0<br />
1<br />
2<br />
<strong>B2</strong>.30
TWare32 TM for Windows ® 95/98/NT/2000<br />
Residual Gas and Process Gas Analyzers<br />
TWare32 TM<br />
for Windows ® 95/98/NT/2000<br />
Collect and Display RGA Data With<br />
Unmatched Convenience<br />
Not all RGA applications require all the latest features (and the complex<br />
software screens needed to control them). TWare32ª gives you all the<br />
popular RGA functionsÐmonitoring, leak detection, recipe-controlled<br />
operation and tuning/calibrationÐin a simplified system thatÕs easier and<br />
faster to use.<br />
<strong>B2</strong><br />
Right from the start, youÕll notice how well thought out TWare32 is. ItÕs<br />
preconfigured for typical process monitoring, immediately ready to show<br />
a bar graph and trend display of commonly monitored gases such as<br />
hydrogen, water vapor, nitrogen, oxygen, argon and carbon dioxide.<br />
You can also easily customize TWare32 using the wizard-guided<br />
recipe editor.<br />
TWare32 is easy and fast to use. We kept it simple by focusing on the RGA<br />
functions people use most. The intelligent user interface lets you access<br />
data with fewer keystrokes and mouse clicks. Behind this elegant simplicity,<br />
youÕll find state-of-the-art software that runs on Windows¨ NT platforms, as<br />
well as Windows 95, 98 and 2000.<br />
TWare32 helps you get the most out of your Transpector RGAs, including<br />
the original Transpector, XPR, XPR2 and Transpector 2 models, as well as<br />
the CIS2 and Preclude.<br />
If you only need to operate one Transpector, the single-sensor version of<br />
TWare32 is a cost-effective solution. With the multisensor version, youÕll be<br />
able to control a network of various types of Transpectors from a single<br />
computer. You wonÕt need to find a slot for an RS485 board either, since the<br />
new TCA485 Transpector Communications Adapter plugs right onto the<br />
back of your PC using an available RS232 port.<br />
Features at a Glance<br />
♦ New simple design makes it easy to do basic gas analysis functions<br />
♦ Works with Windows 95/98/NT/2000<br />
♦ Use with all Transpector RGAs<br />
♦ Single sensor and multisensor versions<br />
♦ New TCA485 Transpector Communications Adapter plugs onto back<br />
of computer, eliminates need for internal RS485 board<br />
<strong>B2</strong>.31
Residual Gas and Process Gas Analyzers TWare32 TM for Windows ® 95/98/NT/2000<br />
Monitor Mode<br />
TWare32 can be configured to capture all data, all the time, while<br />
simultaneously displaying it in the optimum format for viewing. Displays<br />
may be analog, bar, trend, partial pressure and up to 30 selected peaks<br />
over any mass range. The File Open function lets you scroll through all data<br />
to quickly find what youÕre looking for. Data can also be exported to a<br />
spreadsheet program, greatly enhancing post-process analysis.<br />
D<br />
E<br />
A<br />
Three graphs permit simultaneous viewing<br />
of total pressure (top), user-selected masses<br />
over time (middle) and full scan capabilities<br />
(bottom). Masses and lines are color<br />
coordinated.<br />
A<br />
C<br />
F<br />
B<br />
B<br />
While all data from the selected scan range<br />
is stored at all times, the display remains<br />
uncluttered since only the masses youÕve<br />
selected are displayed.<br />
C<br />
Moving the cursor to a specific time<br />
automatically freezes the scan and displays<br />
the appropriate data.<br />
D<br />
This pull-down menu makes it easy to switch<br />
between sensors.<br />
E<br />
Frequently used keys such as filament<br />
emission, EM, start/stop, freeze, change<br />
mode, and increment/decrement stored<br />
data files are always available.<br />
F<br />
Checking the Selected Peaks box<br />
immediately changes the bottom display<br />
from full spectrum scanning to only the<br />
masses youÕve selected. This provides<br />
data faster.<br />
I<br />
H<br />
G<br />
This pull-down menu makes it easy to run a<br />
recent recipe.<br />
H<br />
You can quickly switch between the major<br />
modes (monitor, run, leak and tune) with these<br />
buttons or the right-hand mouse button.<br />
I<br />
A standard Windows-style toolbar lets you<br />
quickly close, open, create a recipe, take a<br />
snapshot of data, print files, and get complete<br />
online help.<br />
G<br />
<strong>B2</strong>.32
TWare32 TM for Windows® 95/98/NT/2000<br />
Residual Gas and Process Gas Analyzers<br />
Leak Check Mode<br />
D<br />
The full-range thermometer-type display,<br />
trend chart and audible tone output help<br />
you pinpoint leaks quickly and easily.<br />
B<br />
A<br />
B<br />
All modes show ÒrealÓ time.<br />
Warning and alarm levels can be set<br />
automatically and modified manually.<br />
<strong>B2</strong><br />
C<br />
C<br />
D<br />
Simultaneously view time-trend,<br />
thermometer-type and total<br />
pressure displays.<br />
Leak Check features include<br />
programmable mass, scan time (dwell),<br />
start/stop, sound and full-screen display.<br />
A<br />
A<br />
B<br />
Tune Mode<br />
ÒCalibrateÓ automatically adjusts the<br />
multiplier voltage and sensor sensitivity<br />
to achieve a desired value, ensuring<br />
measurement consistency, reliability and<br />
repeatability. ÒTuneÓ allows the user to<br />
adjust mass resolution or mass position.<br />
D<br />
A<br />
B<br />
These buttons make it easy to store and<br />
recall tuning parameters and display<br />
markers that aid in positioning peaks and<br />
adjusting resolutions.<br />
Tune using up to 10 masses<br />
(two shown).<br />
C<br />
C<br />
C<br />
Mass position and resolution can be<br />
tuned automatically or adjusted manually<br />
with these buttons.<br />
D<br />
Parameters for each sensor can be<br />
adjusted to optimize performance.<br />
<strong>B2</strong>.33
Residual Gas and Process Gas Analyzers<br />
TWare32 TM for Windows ® 95/98/NT/2000<br />
Easily Create Custom Recipes<br />
Recipe Editor<br />
This wizard makes it easy to create or edit a customized recipe for your<br />
particular application. It guides you step by step, asking for only the<br />
necessary information. For advanced users, a tab-style recipe editor lets<br />
you quickly jump to the parameters of interest.<br />
A<br />
B<br />
C<br />
D<br />
E<br />
F<br />
Description Screen:<br />
Sensor State Screen:<br />
Spectrum Screen:<br />
Collection Parameters Screen:<br />
Scheduler Screen:<br />
Finish Screen:<br />
Here you can name the recipe, add a description, and specify whether data should be collected for the<br />
full spectrum or selected peaks.<br />
Select the emission and EM initial and end states.<br />
Select scanning parameters and trend display masses. TWare32 will estimate the scan duration.<br />
Select the scanning interval and the way you want the data to be saved.<br />
Set the start and stop conditions, and number of scans.<br />
View a summary of your recipe information, and save it as a recipe file. If there are any errors, the ÒbackÓ button<br />
makes it easy to go back and make changes.<br />
F<br />
D<br />
E<br />
C<br />
B<br />
A<br />
<strong>B2</strong>.34
TWare32 TM for Windows ® 95/98/NT/2000<br />
Residual Gas and Process Gas Analyzers<br />
Technical Data<br />
TWare 32 for Windows® 95/98/NT/2000<br />
SPECIFICATIONS<br />
Transpector Models Supported<br />
Communications Interface<br />
Communications Baud Rate<br />
Maximum Communications Cable Length<br />
All Transpectors, including Transpector, Transpector 2, Transpector AGM, Transpector CIS,<br />
Transpector XPR, Transpector XPR2, CIS2 and Preclude<br />
RS232 or RS485 via TCA485<br />
RS232 Ñ User Selectable (4800 or 9600 (default))<br />
RS485 Ñ 57,600<br />
RS232 Ñ 30.5 meters (100 feet)<br />
RS485 Ñ 305 meters (1000 feet)<br />
<strong>B2</strong><br />
COMPUTER SYSTEM REQUIREMENTS<br />
Minimum specifications for<br />
operating 1 or 2 Transpectors<br />
Minimum specifications for<br />
operating 3 or more Transpectors<br />
Processor Pentium I Pentium II<br />
Processor Speed 166 MHz or greater 233 MHz or greater<br />
RAM 32 MB or greater 64 MB or greater<br />
Hard Disk Space for Loading TWare32 5 MB or greater 5 MB or greater<br />
Hard Disk Space for Data Storage 500 MB or greater 500 MB or greater<br />
Monitor (Desktop) 14" SVGA or greater 14" SVGA or greater<br />
Monitor Resolution 800 x 600 or greater 800 x 600 or greater<br />
Serial Port One RS232 port for single or One RS232 port for single or<br />
multi with TCA485<br />
multi with TCA485<br />
Operating System Windows NT 4.0 or greater, Windows NT 4.0 or greater,<br />
Windows 95, or Windows 98, or Windows 2000 Windows 95, or Windows 98, or Windows 2000<br />
Ordering Information<br />
TWare32 Ñ Single (Diskette)<br />
TWare32 Ñ Multi (Diskette)<br />
TCA485 (U.S. Version)<br />
TCA485 (German Version)<br />
TCA485 (Japanese Version)<br />
TCA485 (U.K. Version)<br />
Code No.<br />
911-339-G1<br />
911-339-G2<br />
911-600-G2<br />
911-600-G3<br />
911-600-G4<br />
911-600-G5<br />
TWare32 User Guide 074-334<br />
TWare32 Cleanroom User Guide<br />
074-334CR<br />
<strong>B2</strong>.35
Residual Gas and Process Gas Analyzers<br />
Pressure Converters<br />
Pressure Converters<br />
General<br />
Gas analysis applications involving gas pressures too high for direct<br />
exposure to the quadrupole sensor (pressures greater than 1 x 10 -4 mbar)<br />
require a pressure converter to reduce the pressure and keep the sensor<br />
at high vacuum. With a pressure converter, the quadrupole sensor may be<br />
used for such high-pressure applications as sputtering, vacuum furnace<br />
analysis, and analysis of laser gas.<br />
Pressure converters use orifices and/or capillaries to reduce the partial<br />
pressure of each gas-mixture component by a fixed proportion without<br />
mass discrimination.<br />
An orifice, a small disk with a defined hole, acts as a conductance limitation.<br />
When both the volume and the high vacuum pump speed are constant, the<br />
orifice hole size determines the pressure at the quadrupole sensor. Orifices<br />
are available in various sizes to cover various pressure ranges.<br />
High vacuum<br />
10 -5 Torr (mbar)<br />
1 10 100 760 1500 Torr<br />
1.3 13.3 133 1000 2000 mbar<br />
10 Torr<br />
Single Inlet or Dual Inlets allow sampling via<br />
orifice(s) with approximately one decade of<br />
sampling range per orifice. Standard orifices are<br />
10mT, 100mT, 1T, 10T and 100T.<br />
Single Inlet<br />
10 Torr<br />
Dual Inlet<br />
For high pressure sampling, a high pressure<br />
by-pass can be used for pulling the sample to<br />
the RGA to improve the response time.<br />
Dual Inlet with High Pressure By-pass<br />
100 Torr<br />
IPC-2A has the full conductance of a wide open<br />
valve for UHV sampling and a single orifice for<br />
high pressure sampling.<br />
IPC 2A<br />
10 Torr<br />
The atmospheric capillary sampler uses two<br />
stages (a capillary and an orifice) to reduce the<br />
pressure from atmosphere to high vacuum<br />
where the RGA can analyze the sample.<br />
100 Torr<br />
Atmospheric sampler<br />
2 atmospheres<br />
<strong>B2</strong>.36
IPC400 Pumping Packages<br />
Residual Gas and Process Gas Analyzers<br />
IPC400 Pumping Packages<br />
The IPC400 pumping packages extend the sampling range of the<br />
Transpector Gas Analysis System. These dry pumping packages are small,<br />
lightweight and portable. Combined with any standard open ion source<br />
Transpector, they can sample any process from two atmospheres to high<br />
vacuum.<br />
Typical Applications<br />
The IPC400 pumping system has the flexibility to work with most high<br />
pressure applications such as:<br />
♦ RTP, typically at atmosphere<br />
♦ LP CVD<br />
♦ CVD<br />
♦ Some Etch applications<br />
♦ High pressure PVD such as IMP<br />
♦ 300 mm applications such as Degas modules<br />
♦ Industrial applications<br />
Flexibility<br />
The IPC400 is available in corrosive or non-corrosive pumping packages<br />
and various inlet designs for installation in any orientation. The inlet options<br />
are:<br />
♦ The proven IPC-2A Pressure Converter (manual)<br />
♦ New manual single orifice inlet, manual or electropneumatic versions, for<br />
applications with one pressure range<br />
♦ Dual inlets from the high end CIS2 design Ð These include various<br />
process connections (CF40, KF40 and KF25) in an in-line orientation<br />
♦ Dual inlets with a high pressure by-pass for process pressures greater<br />
than 5 Torr (improves response time)<br />
♦ Multi-capillary inlet Ð for applications from 100 Torr to two atmospheres<br />
Features<br />
The IPC400 Pumping System has an integrated compound pump which<br />
allows interlocking the RGA simple. The 24 v DC diaphragm pump is small<br />
and lightweight and can be used worldwide. The IPC400 controller provides<br />
for valve operation and a single start / stop button. A new line of cleanroom<br />
compatible heaters is also controlled via the controller. These single<br />
temperature 150 o C heaters provide uniform heating for cleaning the vacuum<br />
surfaces as well as the RGA.<br />
Design Your Own System<br />
The IPC400 combined with the reliable Compact FC or FC/EM Transpector<br />
2 provides the smallest package. Yet, the IPC400 can be matched with any<br />
High Performance Transpector 2 to cover a mass range up to 300 AMU.<br />
By simply choosing the appropriate RGA for your budget or application, you<br />
will have a powerful sampling system designed for monitoring contaminants<br />
down to the 100 ppm level.<br />
<strong>B2</strong><br />
<strong>B2</strong>.37
Residual Gas and Process Gas Analyzers<br />
IPC400 Pumping Packages<br />
Technical Data<br />
IPC400 Pumping Packages<br />
Ultimate pressure<br />
Inlet pressure<br />
Available Inlets:<br />
IPC-2A Manual version w/heater<br />
IPC-2A Orifices Available:<br />
Torr (mbar)<br />
mbar<br />
Torr (mbar)<br />
< 2 x 10 -8<br />
Inlet Dependent<br />
10 mTorr (1.3 x 10 -2 mbar), 150 mTorr (2 x 10 -1 mbar),<br />
1 Torr (1.3 mbar), 10 Torr (13 mbar)<br />
Single Orifice Inlet (Manual or Electropneumatic versions)<br />
Dual Inlet, In line, KF25 process connection with heater<br />
Dual Inlet, In line, KF25 process connection<br />
with high pressure by-pass with heater<br />
Dual Inlet, In line, KF40 process connection with heater<br />
Dual Inlet, In line, KF 40 process connection<br />
with high pressure by-pass with heater<br />
Dual Inlet, In line, CF40 process connection with heater<br />
Dual Inlet, In line, CF 40 process connection<br />
with high pressure by-pass with heater<br />
Single and Dual Inlet Orifices Available:<br />
Atmospheric Inlet - Multi-capillary with inlet heater<br />
(no capillary heater)<br />
Atmospheric Inlet Capillaries Available:<br />
Process connection flange<br />
Inlet valve control<br />
Pumping system: (standard)<br />
(corrosive)<br />
IPC400 controller<br />
IPC400 remote capabilities<br />
IPC400 power<br />
IPC400 operating temperature<br />
Relative humidity<br />
Heating jackets<br />
Compressed air (valve operation)<br />
Nitrogen (compound pump purge)<br />
No orifice (for pressures less than 1 mTorr)<br />
10 mTorr (1.3 x 10 -2 mbar), 100 mTorr (1.3 x 10 -1 mbar),<br />
1 Torr (1.3 mbar), 10 Torr (13 mbar) and 100 Torr (133 mbar)<br />
1.5 meters and 3 meters<br />
Inlet Dependent - KF25, KF40, CF40 (dual inlet),<br />
1/4Ó MVCR (single inlet) and 1/16Ó OD capillary (atm inlet)<br />
Manual using IPC400 controller<br />
ATH 30+ with leak tight dry diaphragm pump<br />
ATH 30C with leak tight dry diaphragm pump<br />
Interlocks RGA filament and pumping system, single start / stop button,<br />
manual control of inlet valves, 24V power for complete system<br />
Remote Start / Stop TTL signal<br />
Remote Inlet Valve TTL signals (3)<br />
Switchable: 100/120 VAC or 220/240 VAC<br />
20 o C to 50 o C<br />
< 80%<br />
Fixed single temperature Ð 150 o C<br />
Required Ð 70-110 psig (5.8 - 8.6 bar)<br />
Required for corrosive pumping system -<br />
15 psig (1.3 bar) of dry nitrogen<br />
Note: Corrosive version comes with a regulator to allow 70-110 psig of dry nitrogen to be used for both the valve control and nitrogen purge.<br />
Note: Contact the sales office nearest you for ordering information.<br />
<strong>B2</strong>.38
B3<br />
Thin Film Metrology<br />
Sensor System
Thin Film Metrology Sensor System<br />
Contents<br />
Products<br />
LES1200 Thin Film Metrology Sensor System. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B3.3<br />
Technical Data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B3.5<br />
Ordering Information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B3.5<br />
Options . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B3.6<br />
OES 1200 Optical Emission Sensor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B3.7<br />
Technical Data. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B3.9<br />
B3.2
LES1200<br />
Thin Film Metrology Sensor System<br />
LES1200 Thin Film Metrology Sensor System<br />
Flexible Enough to Be Used Many Ways<br />
Whether developing a new process, decreasing the number of test wafers<br />
in the fab, or increasing yield on a small-volume production run, the LES1200<br />
easily adapts to your needs.<br />
Streamline Production<br />
The LES1200 monitors every product wafer, detecting process flaws as they occur.<br />
Enhance Overall Equipment Effectiveness<br />
Semiconductor manufacturing tools are only processing product wafers 30%<br />
to 40% of the time. As wafer size increases, feature size decreases, and the<br />
cost of production rises, minimizing unproductive time becomes more<br />
important than ever. One way to do this is through more comprehensive in<br />
situ monitoring from a wafer-state sensor that uses full wafer imaging, so<br />
your process can be better understood and controlled, and problems can<br />
be detected earlier.<br />
In Situ Process Monitoring and Control<br />
The LES1200 Thin Film Metrology Sensor combines the best of established<br />
sensor technology, including interferometry, reflectometry, and optical<br />
emission, with advanced analysis software. This results in unique capabilities<br />
that significantly impact the cost, quality, and economics of IC manufacturing.<br />
Rate, Uniformity and Endpoint<br />
for Every Wafer<br />
The LES1200 provides real-time determination of endpoint, as well as rate<br />
and uniformity, over the entire wafer surfaceÑon every product waferÑ<br />
reducing the number of monitor wafers required and the number of product<br />
wafers scrapped due to undetected problems. Used in both plasma etching<br />
and deposition processes to visualize wafer processing and directly<br />
measure rate and uniformity, the LES1200 Thin Film Metrology Sensor<br />
expedites process development, transfer to production, and enables rapid<br />
scaling up to larger diameter wafers and smaller feature sizes.<br />
The LES1200 pays for itself in a matter of months by significantly<br />
enhancing equipment productivity. It provides data for SPC, increases<br />
throughput, streamlines equipment maintenance, and saves time. And<br />
because one PC can control up to four independent sensor modules,<br />
per-chamber cost is minimized.<br />
This smart sensor monitors every product wafer, in situ. Process flaws are<br />
detected as they occurÑwith fewer expensive, time consuming test wafers,<br />
and before expensive additional processing steps. Because it uses signals<br />
from over 180,000 independent points on the wafer (current measurements<br />
are from 1 to 50 points), the LES1200 is very robust in production applications.<br />
Its measurements remain accurate and reliable regardless of wafer<br />
placement, underlying topography, patterns, etc.<br />
The LES1200 can be used to gather data for SPC or for advanced process<br />
control. Preventive maintenance can be scheduled based on actual<br />
equipment performance. Equipment requalification takes less time and<br />
consumes fewer wafers.<br />
Simplify Development<br />
The LES1200 provides immediate feedback, allowing rapid determination<br />
of the effect of process parameters on process performance. Quantitative<br />
measurements are available within seconds, instead of the minutes or<br />
hours previously required. This significantly decreases both the time and<br />
materials needed for process development.<br />
Speed Up Process Transfer<br />
The same sensor can be used for both development and production.<br />
This simplifies process transfer and allows accumulated knowledge to be<br />
used for improving productivity.<br />
A Fully Integrated System<br />
The LES1200 consists of up to four computer controlled CCD-based sensors,<br />
filters, optics, and software. Each sensor head is mounted directly onto a<br />
semiconductor etching or deposition tool (wherever there is a clear view of the<br />
wafer). The LES1200 also incorporates communication with the tool to receive<br />
recipe IDs and to provide a real time endpoint signal (thereby decreasing<br />
operator intervention), and with the factory defect management database to<br />
provide measurements for SPC. The software combines a field proven<br />
analysis engine with the advanced features of Windows NT 4.0. Fifteen signal<br />
processing algorithms, including optical emission, interferometry, and<br />
reflectometry analysis, yield a wealth of information about the process.<br />
Each sensor can be independently operated in either manual mode or recipe<br />
mode. In manual mode, the software allows complete control, useful when an<br />
in-depth analysis of each wafer is required, such as during process<br />
development or equipment troubleshooting. In recipe mode, wafers are<br />
monitored automaticallyÐÐ simplifying operation and reducing or eliminating<br />
operator intervention.<br />
B3<br />
B3.3
Thin Film Metrology Sensor System<br />
LES1200<br />
System Components<br />
♦ PC computer (minimum Pentium or equivalent processor)<br />
♦ PCI multi-sensor control board for up to four sensor heads<br />
♦ Software for data acquisition, control and analysis<br />
♦ Remote, pixel-memory-mapped CCD head(s)<br />
♦ Control daughter board(s)<br />
♦ Imaging optics<br />
Options<br />
♦ External light source<br />
♦ TR1200 Trench Metrology Sensor head<br />
♦ Tool communication interface and software<br />
Installation Requirements<br />
♦ Optical access to the wafer via a viewpoint at an angle of less than 60¡<br />
from wafer normal (larger angles can usually be accommodated)<br />
♦ Clear view of the region of interest on the wafer during processing<br />
Sensor Platform System<br />
Sensor Platform:<br />
♦ FabGuard software<br />
♦ PCI sensor control board<br />
Add Ð one or more Thin Film or Trench Metrology sensor heads<br />
Add Ð one computer control system<br />
Add Ð communications package (optional)<br />
two days installation and training<br />
one year technical support and updates<br />
(software and documentation)<br />
LES1200 Thin Film Metrology<br />
Sensor Head<br />
♦ Software for data acquisition, control and analysis<br />
♦ Remote, pixel-memory mapped CCD head<br />
♦ Control daughter board<br />
♦ Bi-directional digital cable<br />
♦ Single focal length lens 2<br />
♦ Two narrow bandpass filters 2<br />
♦ Mount for sensor head<br />
OR<br />
TR1200 Trench Metrology Sensor Head 1<br />
♦ Software for data acquisition, control and analysis<br />
♦ Laser head<br />
♦ Beam expansion and re-focusing optics<br />
♦ Laser-line bandpass filter<br />
♦ Neutral density filter<br />
♦ Remote, pixel-memory mapped CCD head<br />
♦ Control daughter board<br />
♦ Bi-directional digital cable<br />
♦ Mount for sensor head<br />
1 632.8mn HeNe or 543.5nm HeNe laser standard; other lasers optional.<br />
2 Focal length/wavelength options; application dependent.<br />
B3.4
LES1200<br />
Thin Film Metrology Sensor System<br />
Ordering Information SPSC -____ ____ ____ ____ ____ ____ ____<br />
Sensor platform<br />
1st sensor head:<br />
None<br />
LES1200 Thin Film Metrology Sensor Head<br />
TR1200 Trench Metrology Sensor Head<br />
2nd sensor head:<br />
None<br />
LES1200 Thin Film Metrology Sensor Head<br />
TR1200 Trench Metrology Sensor Head<br />
3rd sensor head:<br />
None<br />
LES1200 Thin Film Metrology Sensor Head<br />
TR1200 Trench Metrology Sensor Head<br />
4th sensor head:<br />
None<br />
LES1200 Thin Film Metrology Sensor Head<br />
TR1200 Trench Metrology Sensor Head<br />
Computer option:<br />
None (set-up fee for customer supplied computers)<br />
COMP-D desktop computer<br />
Standard configuration for system with one sensor 1<br />
300 Mhz Pentium II with 128MB RAM; PCI and ISA bus;<br />
SCSI fast controller, PCI bus; 4GB fast SCSI hard disk;<br />
SCSI CD-ROM; 4-8GB DAT SCSI tape drive & backup<br />
software; video card 1280x1024x256, 4MB memory,<br />
PCI bus; 17" monitor; trackball or mouse;<br />
Windows NT 4.0 workstation; screen capture software<br />
COMP-I industrial computer<br />
Typical configuration is similar to Desktop with<br />
the following additions: heavy duty, rack-mount<br />
industrial chassis; backplane with 6 ISA, 6 PCI,<br />
1 CPU slots; 300w power supply.<br />
Communications package:<br />
None<br />
Special<br />
Maximum rate<br />
Minimum rate<br />
Accuracy<br />
Maximum film thickness (typical)<br />
Minimum film thickness<br />
Technical Data<br />
Maximum data acquisition rate<br />
Minimum open area (applies to etching only)<br />
CCD spectral range<br />
Cable length<br />
Sensor space requirement<br />
Sensor weight<br />
1<br />
0<br />
1<br />
2<br />
0<br />
1<br />
2<br />
0<br />
1<br />
2<br />
0<br />
1<br />
2<br />
0<br />
1<br />
2<br />
0<br />
1 1 Additional RAM and/or additional CPU(s) may be required for a system with more than one<br />
sensor; larger hard drives may also be recommended.<br />
LES1200<br />
polysilicon 130,000 /min<br />
oxide 300,000 /min<br />
20 /min<br />
1% - 2%<br />
polysilicon 15,000<br />
oxide 50,000<br />
polysilicon 700<br />
oxide 1200<br />
25 Hz<br />
5%<br />
400 -1100 nm (down to 220 nm with UV modifications)<br />
10M standard<br />
approximately 70 mm x 100 mm x 70 mm (including mounting bracket)<br />
Thin Film Metrology Sensor System<br />
LES1200<br />
Ordering Information<br />
Additional lens<br />
3.5 mm<br />
3.6 mm<br />
4.8 mm<br />
6.0 mm<br />
8.0 mm<br />
12 mm<br />
16 mm<br />
25 mm<br />
50 mm<br />
75 mm<br />
Additional bandwidth wavelength filters-short<br />
436 nm<br />
486 nm<br />
535 nm<br />
543.5 nm<br />
610 nm<br />
620 nm<br />
632.8 nm<br />
656 nm<br />
740 nm<br />
780 nm<br />
Additional bandwidth wavelength filters-long<br />
436 nm<br />
486 nm<br />
535 nm<br />
543.5 nm<br />
610 nm<br />
620 nm<br />
632.8 nm<br />
656 nm<br />
740 nm<br />
780 nm<br />
Neutral density filters for TR1200 sensors<br />
1%<br />
3%<br />
10%<br />
30%<br />
Beam steering mirror for TR1200 sensors<br />
Polarizer kit<br />
Computer options<br />
Ethernet¨ network card<br />
Token ring network card<br />
System options<br />
IO-1200-B standalone basic i/o<br />
FabGuard analysis software<br />
Options and Accessories<br />
Part Number<br />
763-410<br />
763-411<br />
763-412<br />
763-413<br />
763-414<br />
763-415<br />
763-416<br />
763-417<br />
763-418<br />
763-419<br />
763-420<br />
763-421<br />
763-422<br />
763-423<br />
763-424<br />
763-425<br />
763-426<br />
763-427<br />
763-428<br />
763-429<br />
763-440<br />
763-441<br />
763-442<br />
763-443<br />
763-444<br />
763-445<br />
763-446<br />
763-447<br />
763-448<br />
763-449<br />
763-460<br />
763-461<br />
763-462<br />
763-463<br />
763-465<br />
763-710-G1<br />
763-470<br />
763-471<br />
763-480<br />
921-030-G2<br />
B3.6
OES1200 Optical Emission Sensor<br />
Thin Film Metrology Sensor System<br />
OES1200 Optical Emission Sensor<br />
Reliably Detect Endpoint in<br />
Low Open Area Etch Processing<br />
As device densities continue to increase, etched area continues to<br />
decrease, especially in critical contact and via processes. Endpoint<br />
detection is therefore becoming more difficult just as reliably detecting<br />
endpoint becomes more critical to process yield.<br />
Stopping the etch process based on time works only if the etch rate is<br />
absolutely stable and all incoming wafers are the same. Unfortunately,<br />
this is often not the case.<br />
The OES1200 Optical Emission Sensor brings precise endpoint detection<br />
to contact and via oxide etching, even for open areas less than one percent.<br />
B3<br />
Advanced Hardware and Software Permit<br />
Detection of Very Subtle Changes<br />
How the OES1200<br />
Optical Emission Sensor Works<br />
The OES1200 is an ultraviolet/visible light spectrometer. It is linked to an<br />
etch chamber with a fiberoptic cable.<br />
A grating disperses all wavelengths of light from the plasma between 200<br />
nm and 700 nm to different positions along a detector consisting of 512<br />
light-sensitive pixels in a linear array. Each pixel corresponds to a different<br />
wavelength of light.<br />
Multiple Applications<br />
While the OES1200Õs major strength is for low open area applications, it is<br />
flexible enough to be used for:<br />
♦ High open area endpoint detection<br />
♦ Chamber clean endpoint detection<br />
♦ Process development<br />
Endpoint is reached as material on a wafer surface is completely removed<br />
and a different, underlying material is exposed. Transition from one layer to<br />
the next can be identified by changes in plasma emission characteristics<br />
resulting from changes in process gas consumption and product generation.<br />
These plasma emission changes can be very subtle, sometimes<br />
indistinguishable from background noise, since they are caused only by<br />
reactions occurring in the unmasked portion of the waferÑless than one<br />
percent in some applications. The OES1200 reliably detects these changes<br />
by examining optical emission over many wavelengths.<br />
Correlated Analysis Techniques<br />
Enhance Signal-to-Noise Ratio<br />
Recording the full spectrum of optical emission during the etching process is<br />
only the first step in determining endpoint. The OES1200 software performs<br />
a variety of advanced multivariate statistical analyses on the detectorÕs<br />
output. These analyses effectively amplify the signal without amplifying<br />
noise. The result is reliable endpoint detection.<br />
♦ Plasma diagnostics<br />
B3.7
Thin Film Metrology Sensor System<br />
OES1200 Optical Emission Sensor<br />
B3.8
OES1200 Optical Emission Sensor<br />
Thin Film Metrology Sensor System<br />
OES1200 Optical Emission Sensor<br />
Features at a Glance<br />
♦ Reliably determines endpoint in low open area etch applications, thereby<br />
improving yields<br />
♦ Operates under the FabGuardª sensor system, which can operate a<br />
variety of sensors and control the production tool using a single PC<br />
♦ Runs continuously and automatically without user intervention<br />
Components<br />
FabGuardª software for data acquisition, control, analysis, and<br />
database management:<br />
♦ OES1200 sensor<br />
♦ Fiberoptic cable<br />
♦ System installation<br />
♦ Electronic and hard copies of User Guide<br />
♦ User training<br />
Minimum computer control system for data acquisition and analysis:<br />
♦ PC-compatible Pentium II 300 MHz CPU<br />
♦ 128 MB memory<br />
♦ 4 GB SCSI hard drive<br />
♦ 1280 x 1024, 256-color graphics and 17" monitor<br />
♦ PCI and ISA bus<br />
♦ Windows NT 4.0<br />
Options<br />
♦ Tool and/or host communication interface and software<br />
♦ Multistation software license<br />
♦ Extended service contract<br />
Installation Requirements<br />
Optical access to the plasma via a viewport; an angle of 90¡ to the<br />
wafer surface is usually best.<br />
B3<br />
Spectral range<br />
Resolution<br />
Technical Data<br />
OES1200<br />
200 Ð700 nm<br />
2 nm<br />
Number of pixels 512<br />
Maximum data acquisition rate<br />
Exposure time<br />
20 Hz<br />
10 ms to 10 sec.<br />
Maximum # of sensors per computer 4<br />
Minimum % open area detectable<br />
> 0.1% (depending on process chemistry and other related process factors)<br />
B3.9
Thin Film Deposition<br />
Controllers and Monitors<br />
B4
Thin Film Deposition Controllers and Monitors<br />
Contents<br />
General<br />
Thin Film Deposition Controllers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B4.3<br />
Products<br />
XTC/2, XTC/C Thin Film Deposition Controller . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B4.4<br />
XTM/2 Thin Film Deposition Monitor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B4.6<br />
IC/5 Thin Film Deposition Controller . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B4.8<br />
Sentinel¨ III Thin Film Deposition Controller . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B4.18<br />
Accessories<br />
Oscillators . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B4.12<br />
Feedthroughs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B4.12<br />
Sensors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B4.13<br />
Quartz Crystals . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B4.17<br />
Applications and Accessories<br />
Controller<br />
XTC/2<br />
XTC/C<br />
XTM/2<br />
IC/5<br />
Sentinel¨ III<br />
Application<br />
Ion beam method<br />
◆<br />
Thermal evaporation method<br />
Sputtering method<br />
Accessories<br />
Oscillators<br />
Oscillator packages<br />
Connection cables<br />
Feedthroughs<br />
◆ ◆ ◆ ◆ ◆<br />
◆ ◆ ◆ ◆<br />
◆ ◆ ◆ ◆<br />
◆ ◆ ◆ ◆<br />
◆ ◆ ◆ ◆ ◆<br />
◆ ◆ ◆ ◆ ◆<br />
Sensors<br />
Standard<br />
Sputter<br />
Compact<br />
UHV(bakeable)<br />
Dual<br />
CrystalSix<br />
EIES<br />
Sentinel¨ III<br />
Application<br />
Microwave sputtering processes<br />
◆<br />
Thermal thin film systems<br />
High vacuum systems<br />
◆ ◆ ◆ ◆ ◆<br />
◆ ◆ ◆ ◆ ◆ ◆<br />
UHV systems<br />
Diode sputtering processes<br />
Accessories<br />
Shutter assemblies<br />
Control valves<br />
◆<br />
◆<br />
◆ ◆ ◆ ◆ ◆<br />
◆ ◆ ◆ ◆ ◆ ◆<br />
◆<br />
B4.2
General<br />
Thin Film Deposition Controllers and Monitors<br />
Thin Film Deposition Controllers<br />
Controller<br />
Vacuum Feedthrough<br />
Oscillator<br />
Water<br />
and air<br />
Components for the production of thin films<br />
Introduction<br />
Crystal sensor<br />
Vacuum system<br />
Quartz <br />
monitor <br />
crystal<br />
However simple or complex your process, INFICON has a thin film<br />
deposition controller to meet your needs. All models use ModeLock, our<br />
revolutionary, patented measurement system, making them the most<br />
precise, most advanced controllers available.<br />
A controller, oscillator assembly, vacuum feedthrough, crystal sensor<br />
and crystals are necessary to produce thin films in new installations.<br />
Fewer components are required when upgrading existing systems.<br />
Unsurpassed Performance<br />
ModeLock provides crystal frequency information with precision<br />
unobtainable from conventional active oscillator systems. This precision,<br />
combined with control algorithms tailored to your deposition process,<br />
provides unsurpassed performance for long crystal life, low-rate<br />
depositions, and overall rate control.<br />
ModeLockÕs extension of crystal life is especially impressive. For some<br />
materials this system increases crystal life by nearly 100%.<br />
We call our system ModeLock because it virtually eliminates Òmode<br />
hopping,Ó a failure to maintain crystal oscillation at the fundamental<br />
frequency. ModeLock offers a single-measurement resolution of 0.005 Ð<br />
even while measuring at ten times per second. This kind of precision means<br />
smoother rate control Ð especially important at low rates of deposition.<br />
How ModeLock Works<br />
Conventional measurement uses the quartz monitor crystal to control the<br />
oscillator circuit. As the electrical characteristics of the crystal change<br />
during deposition, the oscillator circuit becomes less stable, eventually<br />
ÒhoppingÓ to another resonant frequency or failing completely.<br />
ModeLock is faster, more powerful and more precise. It continually tests<br />
and analyzes the phase/frequency relationship of the monitor crystal.<br />
ModeLock generates a precise frequency and applies it to the crystal.<br />
It then analyzes the returned phase and frequency information, makes<br />
comparisons, and computes the new resonant frequency. The entire<br />
process occurs thousands of times per second, yet distinguishes resonant<br />
frequencies 0.0055 Hz apart.<br />
ModeLockÕs intelligent link between monitor crystal and instrument<br />
enhances crystal performance. ItÕs the fastest available measurement<br />
system, providing the highest precision and freedom from mode hopping.<br />
You enjoy improved yield, throughput, and quality.<br />
Extending Crystal Life in<br />
Sputtering Processes<br />
All controllers come with INFICONÕs RateWatcher ¨ feature, which provides<br />
long-term rate control for in-line or load-locked sputtering processes.<br />
RateWatcher ¨ takes advantage of a sputtering sourceÕs short-term stability<br />
by sampling the deposition rate periodically. In a cycle that may repeat<br />
indefinitely, RateWatcher ¨ opens a shutter on the sensor, exposes it to<br />
the deposition source, adjusts the power to achieve the desired deposition<br />
rate, recloses the shutter, then holds power at the adjusted level.<br />
This sampling approach greatly extends the life of the crystal, allowing<br />
automatic correction of rate changes due to cathode wear.<br />
Security Times Six<br />
All INFICON deposition controllers can be equipped with the optional,<br />
patented CrystalSix TM sensor, which holds six crystals. Whenever one crystal<br />
becomes unstable or fails, the deposition controller signals the CrystalSix to<br />
automatically sequence to the next crystal for uninterrupted control.<br />
Because ModeLock nearly doubles the life of each crystal, the CrystalSix<br />
sensor lets you deposit without interruptions up to twelve times as long as a<br />
conventional single-crystal system, significantly enhancing process security.<br />
B4<br />
B4.3
Thin Film Deposition Controllers and Monitors<br />
XTC/2, XTC/C Thin Film Deposition Controller<br />
XTC/2, XTC/C Thin Film Deposition Controller<br />
XTC/2 thin film deposition controller<br />
Advantages<br />
XTC/C thin film deposition controller<br />
♦ Exclusive ModeLock measurement for controlling the deposition rate of<br />
thin films Ð especially valuable in low deposition rate film production<br />
♦ Eliminates frequency mode hopping<br />
♦ Extends crystal life<br />
♦ Two control signals for the source<br />
♦ Operates two sensors<br />
♦ Economical alternative to more complex deposition controllers<br />
♦ Controllable via RS232C computer interface (standard) or via IEEE488<br />
interface (optional)<br />
♦ Saves rack space<br />
♦ <strong>Inc</strong>ludes RateWatcher¨ for extended crystal life Ð provides long-term rate<br />
control for in-line and load-locked sputtering processes<br />
♦ Easy-to-read LCD display (XTC/2 only)<br />
♦ Light-saving mode (Bulb Save) extends the display life<br />
♦ 8 separate input functions<br />
♦ 12 relay output functions<br />
♦ Up to 8 controllable crucible positions<br />
♦ Chart recorder output signal selectable for power, deviation of deposition<br />
rate, and deposition rate or film thickness<br />
♦ Adaptable to different sources and power supplies<br />
♦ Base unit for measurement and control without additional display and<br />
keyboard (XTC/C)<br />
Typical Applications<br />
♦ Control of a one to three layer<br />
process with the ability to choose<br />
among 9 stored thin films<br />
♦ Economical deposition control<br />
for less complex processes<br />
Dimensional drawing for the XTC/2 and XTC/C<br />
Ordering Information<br />
Order through our feature/option part number ordering system for a control unit configured with all features and options installed.<br />
Contact INFICON for details. Base unit includes RS232C communication. Only one Òadditional computer communications moduleÓ can be added to the control unit.<br />
Note: A complete deposition control system requires 5 components: a controller, an oscillator package, a vacuum feedthrough, a crystal sensor, and crystals.<br />
Existing installations may only require individual components.<br />
B4.4<br />
Ordering Information Code-No. XTC/2 or XTC/C – _____ _____ _____ _____ _____<br />
Base unit<br />
XTC/2, XTC/C, 115 V<br />
XTC/2, XTC/C, 230 V<br />
Additional computer communications module<br />
None (RS232C only)<br />
IEEE488 GPIB parallel<br />
Remote hand-held power controller<br />
None<br />
Hand-held power controller<br />
Rack mount kits<br />
None<br />
For 1 unit<br />
For 2 units<br />
Optional crystals (only available for the XTC/2)<br />
None 0<br />
One box gold crystals (10 crystals/box) 1<br />
Five boxes gold crystals (10 crystals/box) 2<br />
Ten boxes gold crystals (10 crystals/box) 3<br />
One box silver crystals (10 crystals/box) 4<br />
Five boxes silver crystals (10 crystals/box) 5<br />
Ten boxes silver crystals (10 crystals/box) 6<br />
1<br />
2<br />
1<br />
2<br />
0<br />
1<br />
0<br />
1<br />
2
XTC/2, XTC/C Thin Film Deposition Controller Thin Film Deposition Controllers and Monitors<br />
Technical Data<br />
XTC/2<br />
Thin Film Deposition Controller<br />
XTC/C<br />
Crystal range and precision<br />
Resolution for film thickness and deposition rate*<br />
MHz<br />
6.0 to 5.0 ± .05 Hz (per 250 ms sample)<br />
0.0617 (per 250 ms sample)<br />
Thickness accuracy %<br />
0.5<br />
Measurement frequency<br />
Source control voltage<br />
Number of sources<br />
Output resolution<br />
Update rate, max.<br />
Inputs<br />
Outputs<br />
Internal inputs/outputs<br />
Hz<br />
V<br />
Bit<br />
Hz<br />
4<br />
0 to ± 10<br />
2<br />
15 over the full range (10 V)<br />
4<br />
8 defined TTL/CMOS logic compatible or closure to ground<br />
12 single pole closing contacts (relays), 2.5 A at 120 V (100 VA)<br />
not applicable<br />
Display type **<br />
Thickness resolution **<br />
Rate resolution **<br />
4x multiplexed LCD display<br />
8 x LED, no display<br />
1<br />
0.1 for 1 to 99.9 /s / 1 for 100 to 999 /s<br />
B4<br />
Operation<br />
Power requirements<br />
90 to 132 V AC or 180 to 264 V AC, 47 to 63 Hz, 25 VA<br />
Operating temperature ¡C<br />
0 to 50<br />
Max. frequency shift for the oscillator<br />
Process data memory<br />
Thin film programs<br />
Process layers<br />
Hardware interface<br />
Sensors<br />
Single<br />
Dual<br />
CrystalSix<br />
Crucible positions<br />
Weight<br />
Dimensions (H x W x D)<br />
MHz<br />
lbs. / kg<br />
in. / mm<br />
1.0<br />
9<br />
3<br />
2<br />
1<br />
2<br />
8<br />
5.95 / 2.7<br />
3.47 x 7.92 x 11.9 / 89 x 203 x 305<br />
* Material density = 1.0; Z ratio = 1.0; quartz frequency = 6 MHz ** Applies only to XTC/2; the XTC/C has LED displays /S/M = Angstrom/second/measurement<br />
Ordering Information<br />
Hand-held power controller<br />
Allows remote control of deposition power levels while the controller is in manual mode.<br />
Hand-held power control module plugs into the control unitÕs front panel.<br />
Unit rack mount kits<br />
Provides all required materials to mount the control unit in a standard rack.<br />
Control units are half-rack in width. Two units can be mounted side-by-side in one standard rack width.<br />
Choose the appropriate kit for the number and configuration of units to be mounted.<br />
1 unit rack mount kit<br />
2 unit rack mount kit<br />
IEEE488 computer communications module<br />
A plug-in module that provides complete computer interface capability utilizing the IEEE488 industry protocols.<br />
XTC/2 and XTC/C instruction manual (one is provided with each unit)<br />
Accessories and Spare Parts<br />
Part Number<br />
755-262-G1<br />
757-212-G1<br />
757-212-G2<br />
757-122-G2<br />
074-183<br />
B4.5
Thin Film Deposition Controllers and Monitors<br />
XTM/2 Thin Film Deposition Monitor<br />
XTM/2 Thin Film Deposition Monitor<br />
♦ Operate in ÒdepositÓ or ÒetchÓ modes<br />
♦ Saves rack space<br />
♦ Simple operation<br />
♦ ÒOperateÓ and ÒProgrammingÓ modes<br />
♦ Select settings for etch mode, chart recorder output ranges and<br />
restricting access to parameters via rear-mounted configuration switches<br />
♦ Stores programmed data<br />
♦ Four fixed function relays (ON/OFF)<br />
Advantages<br />
♦ Exclusive ModeLock measurement for monitoring thin film deposition<br />
rate Ð especially valuable for low deposition rate film production<br />
♦ Eliminates frequency mode hopping<br />
♦ Extends crystal life<br />
♦ More cost-effective than conventional Òactive oscillatorÓ units<br />
♦ Improved resolution of 0.01 angstroms when multiple measurement<br />
averaging is selected<br />
♦ Select units of measurement (angstrom, gram, hertz) for a direct<br />
readout (when applied to non-traditional applications such as corrosion<br />
and contamination studies)<br />
♦ Control via the RS232C computer interface (standard) or via the<br />
IEEE488 interface (optional)<br />
♦ Five fixed input functions, selectable via TTL signals<br />
Typical<br />
Applications<br />
♦ Monitor any single-layer<br />
deposition process and<br />
select among 9 thin<br />
films stored in memory<br />
♦ Measure removal rate<br />
and film thickness in<br />
etch mode<br />
♦ Special applications,<br />
such as corrosion<br />
and contaminationcause<br />
investigation<br />
Displayed unit of measurement<br />
Type of measurement Rate Film thickness<br />
Thickness /s k<br />
Mass ng/s or µg/s µg or mg<br />
Frequency n.a. Hz<br />
Dimensional drawing for the XTM/2<br />
Ordering Information Code-No. XTM/2 – _____ _____ _____ _____<br />
Base unit<br />
XTM/2, 115 V<br />
XTM/2, 230 V<br />
Additional computer communications module<br />
None (only RS232C)<br />
IEEE488 GPIB parallel<br />
Rack mount kits<br />
None<br />
For 1 unit<br />
For 2 units<br />
1<br />
2<br />
1<br />
2<br />
0<br />
1<br />
2<br />
Optional crystals (only available for the XTM/2)<br />
None 0<br />
One box gold crystals (10 crystals/box) 1<br />
Five boxes gold crystals (10 crystals/box) 2<br />
Ten boxes gold crystals (10 crystals/box) 3<br />
One box silver crystals (10 crystals/box) 4<br />
Five boxes silver crystals (10 crystals/box) 5<br />
Ten boxes silver crystals (10 crystals/box) 6<br />
Ordering Information Ð Order through our feature/option part number ordering system for a control unit configured with all features and options installed.<br />
Contact INFICON for details. Base unit includes RS232C communication. Only one Òadditional computer communications moduleÓ can be added to the control unit.<br />
Note: A complete deposition control system requires 5 components: a controller, an oscillator package, a vacuum feedthrough, a crystal sensor, and crystals.<br />
Existing installations may only require individual components.<br />
B4.6
XTM/2 Thin Film Deposition Monitor<br />
Thin Film Deposition Controllers and Monitors<br />
Technical Data<br />
Measurement data<br />
Crystal range and precision<br />
MHz<br />
Resolution for film thickness<br />
and deposition rate *<br />
Thickness accuracy %<br />
Measurements per second<br />
Averaging of the measurements<br />
Operating modes<br />
Display type<br />
Thickness resolution<br />
Rate resolution**<br />
Alternative units of measurement<br />
Update rate<br />
Process variables<br />
Memory<br />
Chart recorder output<br />
Voltage<br />
V<br />
Resolution<br />
Update rate<br />
Hz<br />
Functions<br />
Max. load<br />
kOhm<br />
Inputs<br />
TTL<br />
Outputs<br />
I/O Sample rate<br />
Hz<br />
Hardware interface<br />
Sensor<br />
Sub D<br />
Inputs<br />
Sub D<br />
Outputs<br />
Sub D<br />
Communication<br />
Chart recorder<br />
Power supply<br />
V<br />
Operating temperature ¡C<br />
Weight<br />
lbs. / kg<br />
Dimensions (W x H x D)<br />
in. / mm<br />
Hz<br />
XTM/2 Thin Film Deposition Monitor<br />
6.0 to 5.0 ± 0.1 Hz (per 250 ms sample)<br />
0.123 (per 250 ms sample)<br />
0.5<br />
4<br />
selectable 1 /4, 1, 4 or 16 seconds<br />
deposition and etching<br />
2 x multiplexed LCD display<br />
1<br />
0.01, 0.02, 0.05 /s for 0 to 9.99 /s (dependent on averaging) 0.1 /s for 10 to 99.9 /s, 1 for 100 to 999 /s<br />
µg, mg (mass) Hz (frequency)<br />
1<br />
9 sets 6 variables per set<br />
0 to ± 10<br />
13 bit over the full range (one bit is reserved for the sign)<br />
4<br />
Rate or film thickness or mass<br />
2.0<br />
5<br />
4 single pole closing contacts (relays), 2.5 A at 120 V (100 VA)<br />
4<br />
15 pin<br />
25 pin<br />
9 pin<br />
RS232C as standard (IEEE488 optional)<br />
BNC<br />
90 to 132 or 180 to 264, 49 to 61 Hz 25 Hz, 25 VA<br />
0 to 50<br />
5.95 / 2.7<br />
3.47 x 7.92 x 11.9 / 89 x 203 x 305<br />
B4<br />
* Material density = 1.0; Z ratio = 1.0; quartz frequency = 6 MHz<br />
** Alternative units of measurement; these are scaled accordingly. Resolution can only be improved through averaging.<br />
IEEE488 computer communications module<br />
Ordering Information<br />
Plug-in module that provides complete interface capability utilizing the IEEE488 industry standard protocols.<br />
Unit rack mount kits<br />
Provides all required materials to mount the control units into a standard rack.<br />
The control units are 1 /2 rack in width. Two units can be mounted side by side in one standard rack width.<br />
Choose the appropriate kit for the number and configuration of units to be mounted.<br />
Kit for 1 unit<br />
Kit for 2 units<br />
XTM/2 instruction manual (one is provided with each unit)<br />
Accessories and Spare Parts<br />
Part Number<br />
757-122-G2<br />
757-212-G1<br />
757-212-G2<br />
074-186<br />
B4.7
Thin Film Deposition Controllers and Monitors<br />
IC/5 Thin Film Deposition Controller<br />
IC/5 Thin Film Deposition Controller<br />
Typical Applications<br />
♦ Multi-source deposition<br />
♦ Flexible control<br />
♦ Coordination of processes between pump system, valves, substrate<br />
heater, substrate drive and selected deposition process<br />
Advantages<br />
♦ ModeLock measurement system for superior rate control, and longer<br />
crystal life<br />
♦ Extensive logic and process control capabilities, including 100<br />
programmable logic statements; 20 counters and 20 timers;<br />
I/O relay boards providing up to 24 relay outputs, 28 TTL inputs and<br />
14 TTL outputs<br />
♦ Dedicate the CrystalSix sensorÕs crystals to specific materials<br />
♦ Unique, multiple-sensor control<br />
♦ Six assignable analog outputs for source control or chart recorder<br />
outputs, including rate, thickness, and rate deviation<br />
♦ Optical and precision coating<br />
♦ Research, development, production<br />
♦ Precise measurement of film thickness in multi-layer systems<br />
Options<br />
♦ 3 1 / 2" disk drive<br />
♦ Off-line editing software<br />
♦ Microbalance measurement card to control low deposition rates of<br />
low-density materials<br />
♦ Extend input and output capacity with optional I/O cards<br />
♦ Generous on-board storage of process data and recipe files Ð up to 50<br />
processes and 250 total layers Ð with optional diskette drive for nearly<br />
unlimited storage<br />
♦ Data logging to remote communications port, printer port, or<br />
diskette drive<br />
♦ Codeposition<br />
♦ Auto Z function for accurate thickness measurement of layered or<br />
alloyed materials deposited onto a single crystal<br />
Dimensional drawing for the IC/5<br />
♦ RateWatcher feature provides long-term rate control for in-line or<br />
load-locked sputtering processes, or processes using a thermal<br />
resistive source<br />
♦ Standard RS232 computer interface or optional IEEE488 interface<br />
B4.8
IC/5 Thin Film Deposition Controller<br />
Thin Film Deposition Controllers and Monitors<br />
Technical Data<br />
Measurement data<br />
Crystal range and precision<br />
MHz<br />
Thickness & rate resolution *<br />
Thickness accuracy** %<br />
Measurement frequency<br />
Hz<br />
Display type<br />
Thickness resolution<br />
Rate resolution<br />
Source control outputs<br />
Voltage<br />
Resolution<br />
Max. update rate<br />
Chart recorder output***<br />
Inputs and outputs<br />
14 TTL inputs standard<br />
8 relays @ 120v (2.5 amp max, 100 VA) standard<br />
14 TTL inputs<br />
8 relays @ 120v (2.5 amp max, 100 VA) optional with<br />
one additional I/O card<br />
8 relays @ 120v (2.5 amp max, 100 VA) standard<br />
14 TTL outputs optional with 2nd additional I/O<br />
Logic statements<br />
V<br />
Hz<br />
IC/5 Thin Film Deposition Controller<br />
6.0 to 4.5 ± 0.047 Hz (per 100 ms sample)<br />
0.006 (per 100-msec sample)<br />
0.5<br />
10<br />
5"x9" (13 x 23 cm), CRT amber<br />
1<br />
0.1 /s for 0 to 99.9 /s / 1 /s for 100 to 999 /s<br />
up to 6<br />
0 to ± 10.0 / 0 to ± 5 / 0 to ± 2.5<br />
15 bit over the full range (10V)<br />
10<br />
0 to 10V<br />
760-162-G1<br />
760-162-G2<br />
100 fully programmable<br />
B4<br />
Power supply<br />
Weight<br />
Dimensions (W x H x D)<br />
V<br />
lbs. / kg<br />
in. / mm<br />
100 +10%, -15% VAC 50/60 Hz, 120 +10%, -10% VAC 50/60 Hz, 220 +15%, -10% VAC 50/60 Hz,<br />
240 +10%, -10% VAC 50/60 Hz<br />
29 / 13.2<br />
5.25 x 17.66 x 18.5 / 133 x 448 x 470<br />
* Material density = 1.0; Z ratio = 1.0; quartz frequency = 6 MHz<br />
** Varies according to process, value reflects typical accuracy.<br />
*** The IC/5 has 6 DAC outputs that can be selected as source control voltage outputs or chart recorder outputs.<br />
B4.9
Thin Film Deposition Controllers and Monitors<br />
IC/5 Thin Film Deposition Controller<br />
Ordering Information Code-No. IC/5 – ____ ____ ____ ____ ____ ____ ____ ____<br />
Base unit<br />
IC/5, 100 V, 50/60 Hz<br />
IC/5, 120 V, 50/60 Hz<br />
IC/5, 220 V, 50/60 Hz<br />
IC/5, 240 V, 50/60 Hz<br />
Sensor module (each module contains 2 sensor inputs)<br />
1 standard module (included with the base unit)<br />
2 standard modules<br />
3 standard modules<br />
4 standard modules<br />
1 microbalance module (replaces standard module)<br />
2 microbalance modules (replaces standard module)<br />
3 microbalance modules (replaces standard module)<br />
4 microbalance modules (replaces standard module)<br />
Additional computer communications module<br />
(RS232C is standard)<br />
None<br />
IEEE488 parallel<br />
I/O relay module (8 relay outputs, 14 TTL inputs)<br />
1 (included in the base unit)<br />
2<br />
Optional TTL relay module<br />
(8 relay outputs, 14 TTL outputs)<br />
None<br />
1<br />
Optional 3 1 /2" (1.44 Mb) disk drive<br />
None<br />
1<br />
Optional offline editor software<br />
None<br />
One<br />
Optional crystals<br />
None<br />
One box gold crystals (10 crystals/box)<br />
Five boxes gold crystals (10 crystals/box)<br />
Ten boxes gold crystals (10 crystals/box)<br />
One box silver crystals (10 crystals/box)<br />
Five boxes silver crystals (10 crystals/box)<br />
Ten boxes silver crystals (10 crystals/box)<br />
1<br />
2<br />
3<br />
4<br />
1<br />
2<br />
3<br />
4<br />
5<br />
6<br />
7<br />
8<br />
1<br />
2<br />
1<br />
2<br />
1<br />
2<br />
1<br />
2<br />
0<br />
1<br />
0<br />
1<br />
2<br />
3<br />
4<br />
5<br />
6<br />
Note: A complete deposition system needs 5 components: a base unit, an oscillator package, a vacuum feedthrough, a crystal sensor and crystals.<br />
In preexisting installations, only some of these components will be required.<br />
B4.10
IC/5 Thin Film Deposition Controller<br />
Thin Film Deposition Controllers and Monitors<br />
Ordering Information<br />
Sensor module<br />
Plug-in module for simultaneous connection of two sensors via sockets on the rear of the unit.<br />
Up to four such modules (for 8 sensors) may be installed in the IC/5.<br />
Microbalance module<br />
Plug-in module for simultaneous connection of two sensors via sockets on the rear of the unit. <strong>Inc</strong>orporates<br />
a highly stable reference oscillator. Up to four such modules (for 8 sensors) may be installed in the IC/5.<br />
IEEE488 computer communications module<br />
Plug-in module for operation in connection with standard industry protocols.<br />
I/O relay module<br />
Plug-in module with 8 programmable relay outputs and 14 TTL inputs. The IC/5 supports the operation<br />
of two I/O relay modules. One is included as standard with the base unit.<br />
TTL relay module<br />
Plug-in module with 8 programmable relay outputs and 14 TTL outputs.<br />
The IC/5 supports the operation of one TTL relay module.<br />
Disk drive kit<br />
Kit with a 3 1 /2", 1.44 Mb disk drive for storing process data and other data.<br />
Complete with all required hardware, cables and installation instructions for the IC/5.<br />
The IC/5 supports the operation of one disk drive.<br />
Replacement disk drive<br />
3 1 /2", 1.44 Mb disk drive for the IC/5. Only intended as a replacement for a disk drive already<br />
installed in the IC/5.<br />
Adapter kits<br />
Signal converter and cable kit for retrofitting an IC/5 to an already existing system, replacing:<br />
IC 6000 or<br />
IC/4 or IC/4 PLUS<br />
Adapter cable<br />
Cable kit for retrofitting an IC/5 to an already existing system, replacing:<br />
STC-200<br />
Others<br />
IC/5 offline software editor<br />
A software package for generating and editing of processes, for defining materials and the entry of all<br />
parameters for an IC/5 on a PC (DOS program, Windows compatible).<br />
IC/5 manual (one provided with each unit)<br />
Accessories and Spare Parts<br />
Part Number<br />
760-132-G1<br />
760-132-G2<br />
760-142-G2<br />
760-162-G1<br />
760-162-G2<br />
760-023-G2<br />
035-013<br />
600-1083-P1<br />
600-1084-P1<br />
600-1046-P1<br />
Contact Factory<br />
760-030-G1<br />
074-237<br />
B4<br />
B4.11
Thin Film Deposition Controllers and Monitors<br />
Oscillators and Feedthroughs<br />
Oscillators<br />
Ordering Information<br />
XTC/2, XTC/C, XTM/2 oscillator packages with connection cables<br />
15' oscillator package (4.5m)<br />
30' oscillator package (9.0m)<br />
50' oscillator package (15.24m)<br />
100' oscillator package (30m)<br />
IC/5 oscillator packages with connection cables<br />
15' oscillator package (4.5 m)<br />
30' oscillator package (9.0m)<br />
50' oscillator package (15.24m)<br />
100' oscillator package (30.0m)<br />
Spare parts and accessories<br />
Oscillators (oscillator only, no connecting cables)<br />
XTC/2, XTC/C, XTM/2 oscillator<br />
IC/5 oscillator<br />
XTC/2, XTC/C, XTM/2 connection cables<br />
6" cable, oscillator - vacuum feedthrough (15cm)<br />
15' cable, controller - oscillator (4.5m)<br />
30' cable, controller - oscillator (9.0m)<br />
50' cable, controller - oscillator (15.24m)<br />
100' cable, controller - oscillator (30.0m)<br />
IC/5 connection cables<br />
6" cable, oscillator - vacuum feedthrough (15cm)<br />
15' cable, controller - oscillator (4.5m)<br />
30' cable, controller - oscillator (9.0m)<br />
50' cable, controller - oscillator (15.24m)<br />
100' cable, controller - oscillator (30.0m)<br />
Part Number<br />
757-305-G15<br />
757-305-G30<br />
757-305-G50<br />
757-305-G100<br />
760-025-G15<br />
760-025-G30<br />
760-025-G50<br />
760-025-G100<br />
757-302-G1<br />
760-600-G1<br />
755-257-G6<br />
757-303-G15<br />
757-303-G30<br />
757-303-G50<br />
757-303-G100<br />
755-257-G6<br />
600-1039-G15<br />
600-1039-G30<br />
600-1039-G50<br />
600-1039-G100<br />
All oscillator packages include cable between controller and oscillator, oscillator and cable between oscillator and vacuum feedthrough.<br />
One oscillator package is required for each crystal sensor assembly, which is connected to the controller.<br />
Feedthroughs<br />
Each crystal sensor, except the UHV bakeable types, requires a vacuum feedthrough. INFICON supplies a variety of<br />
feedthroughs to meet the needs of each system, including feedthroughs for the dual sensor and shuttered single sensors.<br />
All feedthroughs are built of 304 type stainless steel to rigid performance standards and factory tested by INFICON<br />
to assure electrical and vacuum integrity to better than 10 -9 std. cc/sec. (1x10 -9 mbar). Air and water lines<br />
are 3 /16 in. (.48 cm) O.D.<br />
Ordering Information<br />
Standard 1" bolt hole mounting with VITON O-ring seal<br />
For 1 coaxial cable and 2 water tubes<br />
For 1 coaxial cable, 2 water tubes and one air tube for shutter<br />
Standard 2 3 /4" ConFlat¨ flange with copper gasket or VITON quad-ring gasket<br />
For 1 coaxial cable and 2 water tubes<br />
For 2 coaxial cables, 2 water tubes and one air tube for shutter<br />
Gaskets<br />
1" VITON O-ring for 1" bolt hole feedthroughs<br />
2 3 /4" VITON quad-ring gasket<br />
2 3 /4" copper gasket<br />
Part Number<br />
002-042<br />
750-030-G1<br />
002-043<br />
002-080<br />
070-237<br />
002-064<br />
012-328<br />
2 3 /4" ConFlat¨ = DN 40 CF<br />
B4.12
Sensors<br />
Thin Film Deposition Controllers and Monitors<br />
Sensors<br />
Sensor Options<br />
INFICON offers a range of six sensor heads to meet the requirements of<br />
any process application. Each sensor is designed and built by INFICON<br />
to assure unmatched quality and thermal performance.<br />
Sputter sensor 007-031<br />
Sputter Sensor<br />
INFICONÕs patented design is optimized for diode and magnetron sputtering<br />
processes. The only head with a rear-accessible crystal.<br />
Standard sensor 750-211-G1<br />
Standard Sensor<br />
A durable, stainless steel sensor for most thermal deposition systems.<br />
Compatible with both HV and UHV processes.<br />
UHV Bakeable Sensor<br />
Bakeable sensor 007-219<br />
Ideal for UHV applications, bakeable to 450¡C. The assembly is available<br />
in three standard lengths and includes sensor and ConFlat¨ feedthrough.<br />
Also available with an optional shutter assembly.<br />
B4<br />
Compact sensor 750-213-G1<br />
Compact Sensor<br />
Identical to the standard sensor, but with water tubes and coax connected<br />
to the rear of the sensor body.<br />
Optional Shutter Assembly<br />
Pneumatically operated shutter sensor assembly, available for standard,<br />
compact and dual sensor heads. Required for RateWatcher ¨ features.<br />
UHV sensor shutter is used for the sputtering sensor.<br />
Shutter assembly 750-210-G1<br />
Dual sensor 750-212-G2<br />
Dual Sensor<br />
Designed specifically for use with the CrystalSwitch feature. Features<br />
two independent sensor heads and a pneumatic shutter to shield the<br />
unused crystal.<br />
CrystalSix TM Sensor<br />
Patented six-crystal design.<br />
Automatically sequences to the<br />
next crystal when the active<br />
crystal becomes unstable or fails,<br />
maintaining uninterrupted control.<br />
Works with the XTC/2, XTC/C, and CrystalSix Sensor 750-446-G1<br />
the IC/5. Requires no special<br />
vacuum port; all necessary connections are available on a single 1" or 2 3 /4"<br />
ConFlat ¨ flange vacuum feedthrough.<br />
B4.13
Thin Film Deposition Controllers and Monitors<br />
Sensors<br />
Technical Data<br />
Temperature, max. ¡C<br />
(for bake only; water flow<br />
required for actual<br />
deposition monitoring)<br />
Standard Sputtering Compact<br />
Sensor Sensor Sensor<br />
130* 105* 130*<br />
Dimensions (maximum envelope)<br />
Dimensions with shutter assembly<br />
Water tube and coax length<br />
Body and holder<br />
in. / cm<br />
in. / mm<br />
1.063" x 1.33" x .69" high 1.36" dia. x .47" high 1.11" x 1.06" x 1.06" high<br />
(2.7cm dia. x 3.4cm x 1.75cm high) (3.45cm dia. x 1.18cm high) (2.8cm x 2.7cm x 2.7cm high)<br />
1.67" x 2.15" x 1.95" high 1.36"dia. x 1.28" high 2.08" x 1.62" x 1.83" high<br />
(4.2cm dia. x 5.5cm x 5.0cm high) (3.45cm dia. x 3.25cm high) (5.3cm x 4.1cm x 4.6cm high)<br />
Standard 30 / 762 Standard 30 / 762 Standard 30 / 762<br />
Stainless steel 304 Gold plated beryllium-copper Stainless steel 304<br />
Bakeable Dual Shutter CrystalSix<br />
UHV Sensor Sensor Assembly<br />
Temperature, max. * ¡C<br />
(for bake only; water flow<br />
required for actual<br />
deposition monitoring)<br />
450¡C 130* 400 130*<br />
Dimensions (maximum envelope)<br />
Dimensions with shutter assembly<br />
Water tube and coax length<br />
Body and holder<br />
in. / mm<br />
1.35" x 1.38" x .94" high 1.06" x 2.20" x 0.69" high Varies with sensor 3.5" dia x 2.0" high<br />
(3.4cm x 3.5cm x 2.4cm high) (2.7cm x 5.6cm x 1.75cm high) (8.9cm dia. x 5.1cm high)<br />
1.46" x 1.37" x 1.21" high 1.54" x 2.20" x 1.95" high _ _<br />
(3.7cm x 3.5cm x 3.1cm high) (3.9cm x 5.6cm x 5.0cm high)<br />
Standard 29.7 / 750 Standard 29.7 / 762 Ð Standard 29.7 / 754<br />
Standard 19.81 / 503<br />
Standard 11.9 / 302<br />
Stainless steel 304 Stainless steel 304 Stainless steel 300 Stainless steel 304<br />
(plate, holders and<br />
material shield)<br />
aluminum body<br />
* A conservative maximum device temperature, limited by the properties of Teflon (PTFE) at higher temperatures in vacuum.<br />
In usage, the water cooling allows operation in significantly elevated environments without harmful effects.<br />
B4.14
Sensors<br />
Thin Film Deposition Controllers and Monitors<br />
Standard sensor Ð for use in thermal depositions.<br />
Standard sensor with shutter (requires 007-199 control valve).<br />
Ordering Information<br />
Sputtering sensor Ð for use in sputtering or thermal depositions.<br />
Compact sensor Ð for use in thermal depositions, with rear mounted water tubes<br />
and in-vacuum coaxial cable for vertical installation.<br />
Compact sensor with shutter (requires 007-199 control valve).<br />
UHV bakeable sensor - for ultra-high vacuum applications bakeable to 450¡C. Specified lengths are measured from the<br />
center of the crystal to the face of the feedthrough flange. Sensor includes an integral 2 3 /4" ConFlat¨ flange feedthrough.<br />
Consult factory for a special bakeable crystal holder for sputtering applications and special bakeable sensor lengths.<br />
11.7 in./30cm bakeable sensor<br />
19.5 in./50cm bakeable sensor<br />
29.6 in./76cm bakeable sensor<br />
11.7 in./30cm bakeable sensor with shutter (requires 007-199 control valve)<br />
19.5 in./50cm bakeable sensor with shutter (requires 007-199 control valve)<br />
29.6 in./76cm bakeable sensor with shutter (requires 007-199 control valve)<br />
Dual sensor Ð two independent crystals contained in one sensor. Specifically designed for use with CrystalSwitch,<br />
with self-contained pneumatic shutter. Requires two active sensor circuits (requires 007-199 control valve).<br />
CrystalSix multiple sensor Ð six crystals contained in one sensor. Specifically designed for use with<br />
CrystalSwitch, this sensor sequentially advances to the next available crystal (requires 007-199 control valve;<br />
the required flow restrictor is easily installed into this valve).<br />
Pneumatic shutter assembly Ð for Ònew styleÓ 750-211 standard, 750-213 compact or 750-212 dual.<br />
A complete shutter assembly that can be added to non-shuttered crystal sensors (requires 007-199 control valve).<br />
Pneumatic shutter assembly (sputtering) Ð a complete shutter assembly that can be added to non-shuttered<br />
sputtering sensors (requires 007-199 control valve).<br />
Pneumatic shutter actuator control valve Ð for use with all shutter assemblies. May be mounted to either<br />
2 3 /4" or 1" feedthrough. Bracket and tubing supplied. Requires 24 V, AC or DC.<br />
In-vacuum cable assembly - this cable connects the crystal sensor head to the vacuum feedthrough.<br />
These special lengths are replacements for our standard length 30.75 in. (78cm) cable.<br />
6 in./ 15.2cm<br />
12 in./ 30.5cm<br />
24 in./ 61.0cm<br />
36 in./ 91.4cm<br />
48 in./121.9cm<br />
60 in./152.4cm<br />
72 in./182.9cm<br />
Material director Ð used for codeposition processing.<br />
It reduces the influence of one material on the other during the measurements (crosstalk).<br />
The crystal holder is exchanged against this material director. *<br />
For 750-211 or 213 standard or compact sensors<br />
For bakeable sensor<br />
Sensor emulator<br />
A diagnostic tool with multiple connections for emulating all or part of the sensor-crystal circuit from the oscillator<br />
connection to the sensor head. (For use with standard, compact, and dual sensors, connects to any INFICON<br />
feedthrough or oscillator to verify electrical connection.)<br />
Sensors<br />
Part Number<br />
750-211-G1<br />
750-211-G2<br />
007-031<br />
750-213-G1<br />
750-213-G2<br />
007-219<br />
007-220<br />
007-221<br />
750-012-G1<br />
750-012-G2<br />
750-012-G3<br />
750-212-G2<br />
750-446-G1<br />
750-210-G1<br />
750-005-G1<br />
007-199<br />
321-039-G12<br />
007-252<br />
321-039-G11<br />
007-059<br />
007-061<br />
321-039-G13<br />
321-039-G14<br />
750-201-G1<br />
750-202-G1<br />
760-601-G1<br />
B4<br />
* Note: This material director can not be used with sensors while using the pneumatic shutter feature<br />
B4.15
Thin Film Deposition Controllers and Monitors<br />
Sensors<br />
Ordering Information<br />
Standard, compact and dual sensors<br />
Body assembly<br />
Standard<br />
Compact<br />
Dual<br />
Crystal holder<br />
For 750-211, 212 or 213 sensor assemblies<br />
For 007-205, 206, 216, 218, 237, and 750-040-G1 or G3 sensor assemblies<br />
Finger spring contact strip<br />
Pneumatic actuator kit<br />
Shutter<br />
Sputtering sensor<br />
Body assembly<br />
Front cover assembly<br />
Crystal holder<br />
CrystalSix sensor<br />
Cover, heat shield<br />
Crystal holder<br />
Pneumatic actuator kit<br />
Crystal holder extraction tool<br />
For all sensors listed above:<br />
In-vacuum cable, 30.75 in. / 78cm long<br />
Crystal snatcher<br />
Ceramic retainer<br />
Bakeable sensor<br />
Ceramic retainer<br />
Crystal holder<br />
Pneumatic actuator<br />
12 in. / 30.5cm<br />
20 in. / 50.8cm<br />
30 in. / 76.2cm<br />
Pneumatic actuator kit<br />
Shutter<br />
Accessories<br />
Part Number<br />
750-207-G1<br />
750-209-G1<br />
750-208-G1<br />
750-172-G1<br />
007-083<br />
750-171-P1<br />
750-128-G1<br />
750-216-G1<br />
007-048<br />
007-047<br />
007-049<br />
750-250-G1<br />
750-262-G1<br />
750-286-P2<br />
750-279-P1<br />
007-044<br />
008-007<br />
007-023<br />
007-064<br />
750-218-G1<br />
750-022-G5<br />
750-022-G6<br />
750-022-G7<br />
750-193-G1<br />
750-216-G1<br />
B4.16
Quartz Crystals<br />
Thin Film Deposition Controllers and Monitors<br />
Quartz Crystals<br />
The quality and longevity of the crystal used in the sensor head affect<br />
not only the accuracy of rate and thickness measurements, but also the<br />
successful completion of the process being controlled. INFICON quartz<br />
crystals offer proven quality and durability.<br />
Advantages<br />
♦ Plano-convex configuration suppresses unwanted modes for<br />
greater accuracy<br />
♦ AT-cut crystal orientation enhances stability over a wide range of<br />
operating temperatures<br />
♦ Adhesion underlayer improves electrode-to-crystal bonding for longer<br />
crystal reliability<br />
♦ Gold or silver electrode coating for maximum electrode life<br />
♦ 100% factory testing of each crystalÕs frequency and activity<br />
(series resistance)<br />
♦ Compatibility with all INFICON sensor heads and most other<br />
manufacturerÕs instruments<br />
♦ Clean room processing to avoid particulate contamination<br />
Technical Notes<br />
Silver-coated crystals are recommended for use with most dielectric<br />
coatings for better adhesion. Since silver tarnishes, gold should be<br />
used whenever practical.<br />
Discounts available for 50 or more packages.<br />
B4<br />
Technical Data<br />
Frequency<br />
Diameter<br />
Electrode<br />
Configuration<br />
MHz<br />
in/mm<br />
6 (5 MHz available)<br />
.550/14<br />
Gold or silver<br />
AT-cut plano-convex<br />
Ordering Information<br />
Silver-coated quartz, 6 MHz, 10 per package<br />
Gold-coated quartz, 6 MHz 10 per package<br />
Silver-coated quartz, 5 MHz, 10 per package<br />
Gold-coated quartz, 5 MHz 10 per package<br />
Part Number<br />
008-009-G10<br />
008-010-G10<br />
750-226-G2<br />
750-225-G2<br />
B4.17
Thin Film Deposition Controllers and Monitors<br />
Sentinel ® III Thin Film Deposition Controller<br />
Sentinel ® III Thin Film Deposition Controller<br />
The system can independently control simultaneous evaporation of<br />
elements from two separate sources as well as sequential evaporation of<br />
two elements with interfacial alloying between layers. Operators can also<br />
measure evaporation rates of two elements from one source while<br />
controlling the source power.<br />
Sentinel ¨ III can measure and control single-element depositions in<br />
continuous or batch operations while monitoring the level of background<br />
gas. In addition, it can measure the evaporation rate of fractionated<br />
elements from certain compounds and can even reject cross-channel<br />
interference in binary-alloy depositions.<br />
Sentinel¨ III is designed to meet demanding vacuum-deposition<br />
requirements. Using advanced Electron Impact Emission Spectroscopy<br />
(EIES), a technology pioneered by INFICON, the system offers precise<br />
control over MBE, UHV and HV processes as well as flexibility to meet<br />
specialized needs in both production and development environments.<br />
The light intensity of any material Ð the number of photons it emits Ð is<br />
directly proportional to its number density in the sensor. The important<br />
conclusion here is that light intensity can be used to measure evaporation<br />
rate. And that's precisely what the Sentinel¨ III does.<br />
Rate Control of Thin Film<br />
Superconductive Materials<br />
For high-vacuum processes that require the simultaneous evaporation of<br />
materials such as Y, Ba and Cu in 1:2:3 atomic ratios, the Sentinel¨ III can<br />
control individual deposition rates with proven reliability. By monitoring<br />
each evaporant's optical emission line, the Sentinel¨ III combines material<br />
selectivity with a sensitivity for the elements most frequently used in making<br />
superconductive thin films.<br />
Real-Time Feedback<br />
During the process cycle, critical information is displayed in real time,<br />
including thickness, source power, evaporation rate and rate deviation.<br />
Sentinel¨ III measures evaporation rates and corrects source power<br />
hundreds of times per minute.<br />
Flexible System Integration<br />
Internal and external I/0 displays provide programming flexibility for<br />
complete system integration. The RS232 communications interface, in both<br />
SECS II and lnficon formats, is standard; IEEE488 is available as an option.<br />
EIES Sensor<br />
Precision<br />
The Sentinel¨ III is a remarkably precise instrument. Its sensor, with a life<br />
exceeding 1,000 hours, offers rate sensitivity from 0.1 to 10,000 /sec.<br />
Innovative Approach to<br />
Challenging Applications<br />
The Sentinel¨ can monitor and control the vapor flux, phasing and ratio<br />
for two materials in alloy deposition. It can also control the evaporation<br />
of Group IV materials in MBE applications. Even when deposition rates<br />
are low over an extended period of time, as in MBE, when rates are<br />
high with large material accumulations, as in terminal and backside<br />
metallizations or web coating on thin, flexible substrates, the Sentinel ¨ III<br />
meets the challenge.<br />
Control System Components<br />
B4.18
Sentinel ® III Thin Film Deposition Controller<br />
Thin Film Deposition Controllers and Monitors<br />
Technical Data<br />
Optical measurement channels<br />
Control channels<br />
Crystal measurement (optional)<br />
Measurement/control interval<br />
Optical sensor<br />
Crystal sensor<br />
msec<br />
msec<br />
Sentinel ® III Control Unit and Sensor Control Unit (SCU)<br />
3<br />
2<br />
1<br />
125<br />
250<br />
I/0 SCAN interval msec<br />
250<br />
Display update interval<br />
Control output (2 channels)<br />
sec<br />
V<br />
1<br />
0 to -10 or 0 to -5<br />
2 channel thickness display k<br />
3 channel rate display /sec<br />
2 channel power display %<br />
Rate control resolution<br />
Analog recorder outputs<br />
Full scale calibration<br />
Remote inputs<br />
Activation<br />
Relay outputs<br />
Ratings<br />
Computer interfaces<br />
Data logging<br />
Power requirements<br />
/sec<br />
Operating temperature (non-vacuum comp) ¡C<br />
V<br />
0 to 999.9 Auto - ranged<br />
0.1 to 99.9<br />
1 to 999 Auto - ranged<br />
0 to 99<br />
0.1<br />
3 Channels showing rate<br />
0 to +10<br />
6 Fixed, 6 Programmable<br />
Contact Closure or 6 to 40 V AC/DC<br />
6 Fixed, 6 Programmable<br />
1amp/120 V Max.<br />
(Standard) RS232<br />
(Optional) IEEE488<br />
RS232<br />
100/120/220/240 Vac (+5, -10%), 50 - 60 Hz, 150 VA<br />
0-50<br />
B4<br />
Weight (shipping)<br />
lb/kg.<br />
75/34<br />
Technical Data<br />
Crystal sensor<br />
Usage<br />
Thickness accuracy<br />
Base frequency<br />
Optical filter changer filters (max)<br />
Operating voltages<br />
Fiber optics<br />
Feedthrough packages<br />
Optical discriminators<br />
Fixed wavelength filter<br />
GM200 monochromator<br />
Options<br />
1<br />
Calibration or Measurement<br />
±1% over useful life of crystal<br />
6 MHz<br />
4<br />
100/120 & 220/240 VAC 50/60 Hz 10 VA<br />
Standard Lengths, sensor to feedthrough 15", 30", & 45"<br />
2 3 /4" ConFlat¨, or 1" bolt<br />
See Price List for complete listing<br />
200 to 500nm wavelength manual adjustable<br />
. B4.19
Thin Film Deposition Controllers and Monitors<br />
Sentinel ® III Thin Film Deposition Controller<br />
Ordering Information<br />
Sentinel¨ III Single Material Controller<br />
Uses EIES sensor technology and provides complete automatic control of one material vacuum<br />
deposited processes<br />
Up to four materials may be controlled sequentially when used in conjunction with the automatic<br />
filter changer (IPN 753-002-G10)<br />
Input voltage factory set to 120 VAC, 50/60 Hz<br />
<strong>Inc</strong>ludes:<br />
Input voltage selectable, 100/120/220/240 VAC (+5; -10%)<br />
Control unit with CRT display<br />
Sensor control unit (SCU)<br />
Photomultiplier detector assembly (PMT)<br />
Cables 30' (9.1m) from control unit to SCU, 5' (1.5m) from SCU to feedthrough<br />
12/12 Input/output relay interface<br />
Source control output<br />
Analog output (rate)<br />
RS232 computer interface<br />
Ship kit, includes rack mount<br />
Sentinel¨ III instruction manual<br />
Requires one feedthrough package and either one narrowband optical filter or monochromator<br />
Automatic calibration feature requires one crystal sensor package and associated sensor<br />
shutter assembly<br />
Sentinel¨ Single Material Controller<br />
Same as above, except input voltage factory set to 240 VAC<br />
Sentinel¨ Two Material Controller<br />
Uses EIES sensor technology and provides complete automatic control of two materials,<br />
either sequential or codeposited vacuum processes<br />
Up to five materials may be controlled when used in conjunction with the automatic filter changer<br />
(IPN 753-002-G10)<br />
Input voltage factory set to 120 VAC, 50/60 Hz<br />
<strong>Inc</strong>ludes:<br />
Input voltage selectable, 100/120/220/240 VAC (+5, -10%)<br />
Control unit with CRT display<br />
Sensor control unit (SCU)<br />
2 Photomultiplier detector assemblies (PMT)<br />
Beam splitter<br />
Cables 30' (9.1m) from control unit to SCU, 5' (1.5m) from SCU to feedthrough<br />
12/12 Input/output relay interface<br />
Source control output<br />
Analog output (rate)<br />
RS232 computer interface<br />
Ship Kit, includes rack mount<br />
Sentinel¨ III instruction manual<br />
Requires one feedthrough package and either two narrowband optical filters or two monochromators<br />
Automatic calibration feature requires one crystal sensor package and associated sensor shutter assembly<br />
Sentinel¨ III Two Material Controller<br />
Same as above, except input voltage factory set to 240 VAC<br />
Options<br />
IEEE488 Computer Interface<br />
A plug-in module conforming to IEEE488 bus specifications, providing complete interface capability<br />
to system computer<br />
Filter Changer<br />
Will automatically select up to four filters for sequential processing of four different materials<br />
Narrowband filters must be ordered separately<br />
<strong>Inc</strong>ludes SCU interface card and cable<br />
(NOTE: Use PMT supplied with system)<br />
Deposition Controller<br />
Part Number<br />
753-002-G1<br />
753-002-G17<br />
753-002-G2<br />
753-002-G18<br />
017-432-G4<br />
753-002-G10<br />
B4.20
Sentinel ® III Thin Film Deposition Controller<br />
Thin Film Deposition Controllers and Monitors<br />
EIES Sensor and Feedthrough Packages,<br />
Rigid or Fiber Optics<br />
System installations require a feedthrough package that conforms to specific<br />
customer requirements. INFICON offers both 1" bolt and 2 3 /4" ConFlat¨<br />
flange mounting in either rigid or flexible optical transmission couplings.<br />
Each package has been designed for maximum customer flexibility.<br />
Technical Data<br />
EIES Sensor<br />
Specifications<br />
Sensitivity ([S+N]/S = 2)<br />
/sec Cu<br />
0.0025 (Specified Test)<br />
Operating pressure<br />
Maximum<br />
Recommended<br />
Filament life (typical)<br />
TORR<br />
TORR<br />
hr<br />
5 x 10 -4<br />
Thin Film Deposition Controllers and Monitors<br />
Sentinel ® III Thin Film Deposition Controller<br />
Ordering Information<br />
1" (2.54cm) Bolt Feedthrough and Sensor Package<br />
Package includes all in-vacuum components necessary for system installation.<br />
Maximum length from sensor to feedthroughs is 24" (61.0cm) and may be field modified for<br />
installations requiringshorter lengths. <strong>Inc</strong>ludes:<br />
EIES sensor<br />
20" (50.8cm) rigid optical coupling<br />
In-vacuum filament cable kit<br />
1" (2.54cm) bolt feedthrough<br />
2 3 /4" (NW35CF) Conflat¨ Feedthrough and Sensor Package<br />
Bakeable package (400¡C max) which includes all in-vacuum components necessary for system installation.<br />
Maximum length from feedthrough to sensor is 24" and may be field modified for installations requiring<br />
shorter lengths. <strong>Inc</strong>ludes:<br />
EIES sensor<br />
20" (50.8cm) rigid optical coupling<br />
In-vacuum filament cable kit<br />
2 3 /4" (NW35CF) Conflat copper gasket feedthrough<br />
EIES Sensor and<br />
Rigid Feedthrough<br />
Part Number<br />
753-002-G4<br />
753-002-G5<br />
EIES Sensor and Fiber Optic Feedthrough Packages<br />
Available in two sizes, with three standard lengths each. These packages allow installation in<br />
applications wherea direct line between sensor and feedthrough is not possible. Also for installations<br />
requiring distances of greater than 12" (30.5cm) between sensor and feedthrough, these packages<br />
improve the performance of the Sentinel ¨ III by increasing the transmission efficiency of the optical signal.<br />
1" (2.54cm) Bolt Feedthrough and Sensor Package for Fiber Optics includes:<br />
EIES sensor<br />
Fiber optic coupling<br />
In-vacuum filament cable<br />
1" (2.54cm) bolt fiber optic<br />
Packages are available in the following lengths from sensor to feedthrough:<br />
15" (38.1cm)<br />
30" (76.2cm)<br />
45" (114.3cm)<br />
2 3 /4"(NW35CF) Conflat¨ Feedthrough and Sensor Package for Fiber Optics includes:<br />
EIES sensor<br />
Fiber optic coupling<br />
In-vacuum filament cable kit<br />
2 3 /4" (NW35CF) Conflat fiber optic feedthrough<br />
Packages are available in the following lengths from sensor to feedthrough:<br />
15" (38.1cm)<br />
30" (76.2cm)<br />
45" (114.3cm)<br />
753-002-G6<br />
753-002-G7<br />
753-002-G8<br />
753-002-G11<br />
753-002-G12<br />
753-002-G13<br />
B4.22
Sentinel ® III Thin Film Deposition Controller<br />
Thin Film Deposition Controllers and Monitors<br />
Narrowband Filters<br />
Specific material selection is accomplished by the use of narrowband filters.<br />
INFICON offers a selection of optical discriminators to meet the needs of<br />
your process.<br />
Ordering Information<br />
Part Number<br />
Ordering Information<br />
Part Number<br />
Wavelength<br />
Wavelength<br />
Aluminum Al 3961<br />
011-302<br />
Molybdenum Mo 3133<br />
011-309<br />
Argon / Strontium Ar / Sr 4596<br />
011-339<br />
Nickel Ni 3415<br />
011-310<br />
Barium (1) Ba (1) 3072<br />
011-346<br />
Nitrogen N 2 3914<br />
011-340<br />
Barium (2) Ba (2) 4554<br />
011-348<br />
Oxygen 0 2 2594<br />
011-341<br />
Boron B 2496<br />
Cadmium Cd 3261<br />
Calcium Ca 4226<br />
011-601<br />
011-324<br />
011-600<br />
Palladium Pd 2455<br />
Platinum Pt 2659<br />
Rhenium Re 2275<br />
011-332<br />
011-343<br />
011-349<br />
B4<br />
Carbon Dioxide CO 2 2890<br />
011-337<br />
Samarium / Lanthanum Sm / La 4422<br />
011-347<br />
Chromium Cr 3605<br />
011-317<br />
Scandium Sc 4020<br />
011-330<br />
Copper Cu 3247<br />
011-306<br />
Silicon Si 2520<br />
011-327<br />
Erbium Er 4008<br />
011-328<br />
Silver Ag 3281<br />
011-301<br />
Gallium Ga 4170<br />
011-308<br />
Tantalum / Germanium Ta/Ge 2650<br />
011-338<br />
Gold (1) Au (1) 2676<br />
011-304<br />
Tin Sn 3175<br />
011-314<br />
Gold (2)/Cobalt Au (2) / Co 2428<br />
011-305<br />
Titanium (2) Ti (2) 3982<br />
011-331<br />
Helium He 5016<br />
011-342<br />
Tungsten W 2551<br />
011-335<br />
Indium In 4511<br />
011-326<br />
Uranium / Niobium U238 / Nb 3582<br />
011-318<br />
Iron Fe 3720<br />
011-307<br />
Vanadium V 3184<br />
011-329<br />
Lead / Titanium Pb / Ti 3637<br />
011-311<br />
Water H 2 0 3100<br />
011-319<br />
Manganese Mn 2798<br />
011-336<br />
Yttrium Y 4077<br />
011-321<br />
Zirconium / Hafnium Zr/Hf 2983<br />
011-345<br />
B4.23
Thin Film Deposition Controllers and Monitors<br />
Sentinel ® III Thin Film Deposition Controller<br />
Ordering Information<br />
Filter changer<br />
Will automatically select up to four filters for sequential processing of four different materials.<br />
Narrow band filters must be ordered separately <strong>Inc</strong>ludes SCU interface card and cable.<br />
(Note: Use PMT supplied with system.)<br />
GM-200 monochromator<br />
A compact 200mm f/4.0 double dispersion, grating instrument that is wavelength selectable from 180-750 nm.<br />
The gratings are blazed at 240nm and maintain high efficiency over the 200-500nm range of interest.<br />
The resolution is selectable to 1, 2, 3, 4 or 5nm for best performance for every process.<br />
The GM-200 is shipped complete with all optics for attachment between the feedthrough or beam splitter<br />
and photodetector.<br />
EIES sensor light shield kit<br />
The optical light shield is designed to fit over the EIES sensor to reduce extraneous light noise entering the sensor.<br />
It is used for some refractory metals and is customer installed.<br />
Scattered materials shield<br />
For applications in which substrates are RF etched prior to deposition. This field-installed retrofit kit provides<br />
an entrance and exit aperture that reduces the occurrence of secondary electron generation.<br />
Water cooled EIES sensor<br />
For high-vapor pressure materials (Cd, Zn, etc.)<br />
System Options<br />
Part Number<br />
753-002-G10<br />
011-219<br />
016-427-G1<br />
016-010-G1<br />
753-002-G15<br />
Spare Parts<br />
Part Number<br />
Sentinel¨ III control unit<br />
With video display RS232 interface, analog output and 12/12 I/0 relay interface. Input voltage factory set to 120 VAC<br />
Sensor control unit<br />
Will drive two EIES sensors and process three PMT output signals<br />
Photomultiplier detector assembly<br />
For Sentinel¨ III includes photomultiplier tube<br />
Photomultiplier detector assembly with cables<br />
Cable set includes photomultiplier tube, 5' (1.5m) signal cable and 5' (1.5m) high-voltage cable<br />
Replacement photomultiplier tube (for 016-350-G1 and 753-002-G9)<br />
I/0 Relay module<br />
Provides 12 input and 12 output interface capability<br />
Beam splitter<br />
EIES sensor assembly<br />
EIES sensor emitter adaptor<br />
Double ended sensor assembly<br />
1" (2.54cm) bolt feedthrough assembly<br />
2 3 /4" (NW35CF) conflat feedthrough assembly<br />
In-vacuum cable kit<br />
For EIES sensor<br />
High rate EIES sensor cover (Aperture opening: .43 x .18 in.)<br />
Standard EIES sensor cover (Aperture opening: .43 x .36 in.)<br />
Sentinel¨ III instruction manual<br />
753-003-G1<br />
753-200-G1<br />
016-350-G1<br />
753-002-G9<br />
009-139<br />
017-422-G2<br />
016-204-G1<br />
016-400-G2<br />
016-201-G1<br />
016-402-G1<br />
016-230-G2<br />
016-390-G1<br />
016-405-G1<br />
016-205-P1<br />
016-205-P2<br />
074-087<br />
B4.24
Leak Detectors<br />
Helium and Refrigerant<br />
B5
Leak Detectors<br />
Contents<br />
General<br />
Applications and Accessories. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B5.3<br />
Leak Detection - Leak Testing . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B5.4<br />
Leak Detection Methods. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B5.5<br />
Operating Principles of the INFICON Helium Leak Detectors . . . . . . . . . . . . . . . . . . . . . . . . . . B5.7<br />
Products<br />
ULTRATEST UL 200 Helium Leak Detector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B5.10<br />
ULTRATEST UL 200 dry Helium Leak Detector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B5.11<br />
Modul 200 Mobile and Flexible Helium Leak Detector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B5.12<br />
Mobile Leak Detection Systems Fitted to the CART 200 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B5.14<br />
LDS 1000 Modular Leak Detection System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B5.16<br />
ULTRATEST UL 500 Stationary Helium Leak Detector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B5.18<br />
ULTRATEST UL 500 dry Stationary Helium Leak Detector. . . . . . . . . . . . . . . . . . . . . . . . . . . . B5.20<br />
Protec Helium Sniffer Leak Detector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B5.22<br />
Ecotec II Sniffer Leak Detector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B5.24<br />
HLD4000A Sniffer Leak Detector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B5.26<br />
Contura Z Helium Leak Detector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B5.28<br />
Product-Related Accessories<br />
Calibrated Leaks . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B5.30<br />
Screw-in Calibrated Leaks. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B5.32<br />
Helium Sample Probes (Sniffers). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B5.34<br />
Accessories for the UL 500 and UL 500 dry . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B5.35<br />
Accessories for the UL 200, UL 200 dry and Modul 200. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B5.36<br />
General Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B5.37<br />
Other Accessories<br />
Connection Flanges . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B5.38<br />
Connection Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B5.38<br />
B5.2
General<br />
Leak Detectors<br />
Applications and Accessories<br />
Applications<br />
Semiconductor production<br />
Vacuum coating<br />
Research and development<br />
Chemistry/pharmaceutical<br />
Metallurgy/furnaces<br />
Lamps and tube manufacture<br />
Automotive industry<br />
Laser engineering<br />
Particle accelerators<br />
Analytical engineering<br />
Systems with cryo pumps<br />
Cooling and air conditioning<br />
Electrical engineering<br />
Mechanical engineering<br />
Flexible packaging<br />
Power plants<br />
Systems engineering<br />
UHV applications<br />
Test Instruments /<br />
Leak Detectors<br />
Accessories<br />
Calibrated leaks<br />
Screw-in calibrated leaks<br />
Helium sniffers<br />
Helium sniffers<br />
Interfaces<br />
Gas ballast facilities<br />
Trigger relay boards<br />
Seal kits<br />
Transport Case<br />
Partial flow system<br />
Exhaust filter sets<br />
PC software LeakWare<br />
PC software LDS-WARE<br />
Monitor software<br />
Calibrated test leak<br />
UL 200<br />
UL 200 dry<br />
Modul 200, oil-free<br />
Modul 200, oil-sealed<br />
LDS 1000<br />
UL 500<br />
UL 500 dry<br />
Protec<br />
Ecotec II<br />
HLD4000A<br />
Contura Z<br />
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Page<br />
B5.30 ◆ ◆ ◆ ◆ standard standard ◆<br />
B5.32 ◆ ◆<br />
B5.22/24 ◆ ◆<br />
B5.34 ◆ ◆ ◆ ◆ standard ◆ ◆ standard ◆<br />
B5.35 standard standard standard standard standard ◆ ◆ standard standard<br />
B5.35 standard standard ◆ ◆<br />
B5.35 standard standard standard standard ◆ ◆ standard standard<br />
B5.35 ◆ ◆ ◆ ◆ ◆ ◆ ◆ ◆<br />
B5.36 ◆ ◆ ◆ ◆<br />
B5.36 ◆ ◆ ◆<br />
B5.36 standard standard ◆ ◆ ◆<br />
B5.36 ◆ ◆ ◆ ◆<br />
B5.16 ◆<br />
B5.28 ◆<br />
B5.28 standard<br />
B5<br />
B5.3
Leak Detectors<br />
Leak Detection – Leak Testing<br />
Leak Detection – Leak Testing<br />
Whether a component or a system is leak-tight depends on the application<br />
it is to be used in and the leak rate that is acceptable. Absolutely leak-tight<br />
components and systems do not exist. A component is considered<br />
technically leak-tight if its leak rate remains below a value defined for this<br />
particular component. In order to provide a quantitative measure, the term<br />
Òleak rateÓ with the symbol Òq L<br />
Ó was introduced. In vacuum technology mbar<br />
x l x s -1 is used as the unit for leak rates.<br />
A leak rate of 1 mbar x l x s -1 exists in a closed vessel having a volume of<br />
1 liter when the pressure increases by 1 mbar within one second, or in case<br />
of an overpressure it decreases by 1 mbar within one second.<br />
q L = V x △p (mbar x l x s -1 )<br />
△t<br />
The wide range of leak rates from several 100 mbar x l x s -1 to below<br />
10 -11 mbar x l x s -1 as they occur in practice necessitates the use of<br />
different leak detection principles and hence leak detectors (see figure).<br />
Besides the determination of the total leak tightness, it is usually important<br />
to locate the leak, quickly and precisely, in order to seal it. Instruments for<br />
local leak detection are called leak detectors. The leak detectors presented<br />
in this product section can be used for the localization of leaks, and in<br />
addition some are suitable for determining the total leak rate of test objects.<br />
Overview of the leak rate detection ranges<br />
Leak Rate<br />
atm x cm3 x s-1* kg x h-1 g/a<br />
mbar x l x s-1 cm3 x s-1 * Torr x l s-1* Pa x m3 x s-1 air C2H2F4 (R 134a)<br />
1 mbar x l x s -1 (He) 1 0.99 0.75 0.1 4.3 x 10 -3 2.28 x 10 5<br />
1 atm x cm 3 x s -1 * = cm 3 (STP) x s -1 1.01 1 0.76 0.101 4.3 x 10 -3 2.3x 10 5<br />
1 torr x l x s -1 * 1.33 1.33 1 0.133 5.7 x 10 -3 3.0 x 10 5<br />
Pa x m 3 x s -1 10 9.87 7.5 1 4.28 x 10 -2 2.28 x 10 6<br />
1 kg x h -1 air 234 234 175 23.4 1 Ð<br />
1 g/a C 2 H 2 F 4 (R 134a) 7.58 x 10 -6 6.3 x 10 -6 4.8 x 10 -6 6.41 x 10 -7 Ð 1<br />
* According to international system of units only Pa x m 3 x s -1 is permissible<br />
B5.4
Leak Detection Methods<br />
Leak Detectors<br />
Leak Detection Methods<br />
There are two main groups of leak detection methods; for both there are<br />
special instruments available:<br />
Vacuum Methods<br />
The equipment to be tested is evacuated. The pressure ratio between<br />
inside and outside is 0:1.<br />
Overpressure Methods<br />
The equipment to be tested is pressurized with a search gas or a search<br />
gas mixture. The pressure ratio between inside and outside is over 1:1.<br />
Between the two methods there exist many variations depending on the<br />
particular application.<br />
General Notes<br />
1. The lowest leak rates can only be measured by employing the vacuum<br />
method, whereby the following applies: The lower the leak rate, the higher<br />
the requirements are concerning cleanness and ultimate vacuum.<br />
The pressure will then rise as a function of time. Curve (a) shows the<br />
theoretical pressure rise if there is only a leak. Curve (b) shows the<br />
pressure rise due to outgassing from the surfaces of the test object.<br />
This pressure rise tends to tail off in the direction of a saturation level. If in<br />
such a case the time allowed for monitoring the pressure rise is too short,<br />
a leak will be indicated which in reality does not exist. If one waits long<br />
enough for the pressure to rise, i.e. after the bend of curve (b) the<br />
outgassing process can then be disregarded, so that the leak rate can be<br />
determined from the known volume of the test object and the measured<br />
pressure rise over a fixed rise time (see equation on page 4). Curve (c)<br />
shows the pressure rise as it occurs in practice, where outgassing and leak<br />
rate add. The detectable leak rate depends on the volume of the test object,<br />
the obtained ultimate pressure and the outgassing from the test object. In<br />
connection with very large test objects this method is time consuming if<br />
extremely low leak rates are to be determined in the fine and rough<br />
vacuum range.<br />
Local Leak Detection<br />
2. If possible the test objects should be tested under the same conditions<br />
that will be used in their final application, i.e. parts for vacuum operation<br />
should be tested according to the vacuum method and parts for<br />
overpressure operation should be tested using the overpressure method.<br />
5<br />
Fig 2<br />
1<br />
B5<br />
Leak Testing Based on Vacuum Methods<br />
LD<br />
HELIUM<br />
(Vacuum inside the test object)<br />
2<br />
Pressure Rise Method<br />
With this method it is only possible to determine the total leak rate.<br />
The test object is evacuated with a vacuum pump or a vacuum pump<br />
system. A valve is used to isolate the test object from the vacuum pump.<br />
Fig 1<br />
Local leak detection Ð Evacuated test object<br />
3<br />
4<br />
Key to the Figures<br />
1 Test object, 2 Leak detector, 3 Search gas cylinder , 4 Vacuum pump,<br />
5 Hood, 6 Spray gun for search gas , 7 Sniffer probe<br />
a) Pressure rise due to leakage<br />
b) Pressure rise due to outgassing from the chamber walls<br />
c) Both effects combined<br />
Pressure rise in a vacuum chamber after switching off the pump; double log. plot<br />
The test object is evacuated by a vacuum pump (auxiliary pump) until the<br />
pressure is low enough for the leak detector to operate. When using a<br />
helium leak detector, its own pump system will take care of further<br />
evacuation. Suspicious spots on the test object will then be sprayed with a<br />
fine jet of search gas. Search gas entering through leaks into the test object<br />
is pumped out by the vacuum pump and it is converted by the leak detector<br />
into an electrical signal which is then displayed. This permits rapid detection<br />
and determination of the size of even the smallest leaks.<br />
B5.5
Leak Detectors<br />
Leak Detection Methods<br />
Integral Method<br />
3<br />
Fig 3<br />
LD<br />
HELIUM<br />
5<br />
1<br />
2<br />
Local Leak Detection with<br />
Leak Detectors – Sniffing<br />
The test object is filled with the search gas or the search gas/air mixture to<br />
which the leak detector is sensitive. The leak detector is equipped with a<br />
sniffer probe, whereby there is a low pressure at the probe tip. If the sniffer<br />
tip passes suspicious points on the test object the search gas coming out of<br />
the leak is sucked in and transferred to the detection system of the leak<br />
detector. After conversion into electrical signals these are displayed<br />
optically and acoustically by the leak detector.<br />
Integral Method – Hood Test<br />
4<br />
Integral method Ð Evacuated test object<br />
5<br />
1<br />
Key to the Figures<br />
1 Test object, 2 Leak detector, 3 Search gas cylinder , 4 Vacuum pump,<br />
5 Hood, 6 Spray gun for search gas , 7 Sniffer probe<br />
3<br />
7<br />
Determination of the total leak rate of a test object. The testing arrangement<br />
is the same as for local leak detection, but in this case the test object is not<br />
sprayed with search gas on selected areas, but it is surrounded by a hood<br />
or a chamber which is filled with the search gas. Thus the entire outer<br />
surface of the test object comes into contact with the search gas.<br />
If the search gas enters the test object, the total leak rate is indicated<br />
independently of the number of existing leaks. With helium leak detectors it<br />
is possible to determine the helium content of the air. This is utilized in the<br />
detection of gross leaks.<br />
Leak Testing Based on<br />
Overpressure Methods<br />
(Overpressure within the test object)<br />
Pressure Drop Method<br />
The test object is filled with a gas (for example air or nitrogen) until the<br />
testing pressure is reached. Precision vacuum gauges are used to detect a<br />
possible pressure drop during the testing period. This method is simple to<br />
implement, it is suitable for the determination of gross leaks and can be<br />
improved upon by using differential pressure gauges. By applying soap<br />
solutions or similar, leaks can be located.<br />
2<br />
LD<br />
HELIUM<br />
Integral method (search gas accumulation)<br />
Search gas overpressure in the test object<br />
To determine the total leak rate of a test object subjected to a search gas<br />
overpressure, the test object is surrounded by a hood of a known volume.<br />
The search gas which escapes through the leaks collects in the hood.<br />
After a fixed accumulation period a sniffer probe is used to measure the<br />
concentration of the search gas which has collected in the hood. Before this<br />
the leak detector should be calibrated by a reference measurement using a<br />
known search gas concentration.<br />
The leak rate can then be determined by the equation for q L<br />
where V is the<br />
volume of the hood, ∆p is the partial pressure difference of the search gas<br />
(concentration change) and t is the accumulation period.<br />
Uncertainties in the determination of the volume, leaks in the hood and a<br />
wrong accumulation period make precise leak rate measurements based on<br />
this method very questionable.<br />
Integral Method – Vacuum Hood Test<br />
1<br />
3<br />
5<br />
1<br />
3<br />
7<br />
LD<br />
HELIUM<br />
2<br />
2<br />
LD<br />
HELIUM<br />
4<br />
Leak detection Ð Search gas overpressure in the test object<br />
Integral method Ð Search gas overpressure in the test object<br />
B5.6
Operating Principles of the INFICON Helium Leak Detectors<br />
Leak Detectors<br />
This test is a variation of the hood test described above, which has<br />
considerable advantages. A vacuum chamber which is evacuated by an<br />
auxiliary pump and which is connected to a leak detector is used as the<br />
hood. The search gas escaping through the leaks is converted by the<br />
detection system of the leak detector into electrical signals which are<br />
immediately displayed. After calibration of the leak detector with a calibrated<br />
leak it is possible to quantitatively determine the total leak rate. This method<br />
permits the detection of very small leaks and is especially suited for<br />
automatic industrial leak detection.<br />
Integral Method – Bombing-Test<br />
This method is used for testing hermetically sealed components such as<br />
transistors, IC-packages or dry reed relays. It is basically a variation of the<br />
vacuum hood test. Here the test objects are placed in a vessel which is<br />
pressurized with the search gas Ð preferably helium. At a fairly high search<br />
gas pressure and after a period of up to several hours it is tried to enrich<br />
the search gas inside leaky test objects. This is the actual so called<br />
ÒbombingÓ process.<br />
After this, the test objects are transferred to a vacuum chamber and their<br />
total leak rate is determined in the same way as in the vacuum hood test.<br />
During evacuation of the vacuum chamber down to the required testing<br />
pressure, those test objects which have a gross leak already lost their<br />
accumulated search gas. These parts are not detected as leaking during<br />
the actual leak test. Therefore the test with the vacuum chamber is often<br />
preceded by a Òbubble testÓ.<br />
This method permits the detection of the lowest leak rates and is used<br />
mainly in automatic industrial leak testing especially when it is not possible<br />
to fill the parts with gas in any other way.<br />
Operating Principles of the<br />
INFICON Helium Leak Detectors<br />
Operating Principle<br />
A helium leak detector permits the localization of leaks and the quantitative<br />
determination of the leak rate, i.e. the gas flow through the leak. Such a<br />
leak detector is therefore a helium flow meter.<br />
In practice the leak detector performs this task by firstly evacuating the part<br />
which is to be tested, so that gas from the outside may enter through an<br />
existing leak due to the pressure difference present. If only helium is<br />
brought in front of the leak (for example by using a spray gun) this helium<br />
flows through the leak and is pumped out by the leak detector. The helium<br />
partial pressure present in the leak detector is measured by a sector mass<br />
spectrometer and is displayed as a leak rate. This is usually given in terms<br />
of volume flow of the helium (pV-flow).<br />
Important Specifications<br />
The two most important features of a leak detector are its measurement<br />
range (detection limits) and its response time.<br />
The measurement range is limited by the lowest and the highest detectable<br />
leak rate. The lowest detectable leak rate is defined by the sum of drift and<br />
noise in the most sensitive measurement range. Usually the sum of noise<br />
amplitude and zero drift per minute is made to be equivalent to the lowest<br />
detectable leak rate. With INFICON leak detectors the amount of drift is so<br />
low, that the noise amplitude alone determines the detection limit.<br />
The highest detectable leak rate depends strongly on the method<br />
employed. Especially the counterflow method and partial flow operation<br />
(see description below) permit the measurement of very high leak rates<br />
even with a sensitive helium leak detector. In addition the multi-stage<br />
switchable high impedance input amplifiers of the INFICON leak detectors<br />
also permit the measurement of high leak rates.<br />
In practical applications, especially in the localization of leaks the response<br />
time is of great significance. This is the time it takes from spraying the test<br />
object with helium until a measured value is displayed by the leak detector.<br />
The response time of the electronic signal conditioning circuitry is an<br />
important factor in the overall response time. In the case of INFICON leak<br />
detectors the response time of the electronic circuitry is well below 1 s.<br />
The volume flow rate for helium at the point of the test object is of decisive<br />
significance to leak detection on components which are pumped down<br />
solely by the leak detector. This volume flow rate provided by the leak<br />
detector takes care of the helium entering through a leak and it ensures<br />
quick detection by the leak detector. On the other hand, the volume of the<br />
test object delays the arrival of the helium signal. The response time can be<br />
calculated by using the following simple equation:<br />
V<br />
Response time for helium t A<br />
= 3 á ÑÑÑ<br />
S He<br />
(for 95% of the final value)<br />
with V = Volume of the test object<br />
S He<br />
= Volume flow rate for helium at the point of the test object<br />
(or at the inlet of the leak detector, if it alone pumps down<br />
the test object).<br />
Main Flow Method<br />
The classic operating principle of helium leak detectors is based on the<br />
main flow method. Here the entire helium flow passes through the high<br />
vacuum system of the leak detector, where the mass spectrometer<br />
measures the partial pressure of the helium. In this, the use of a liquid<br />
nitrogen cold trap is essential to remove water vapor or other condensible<br />
gases in the vacuum system which impair the operation. Moreover, the use<br />
B5<br />
B5.7
Leak Detectors<br />
Operating Principles of the INFICON Helium Leak Detectors<br />
of a cold trap permits the low operating pressures for the mass<br />
spectrometer to be reached (below 10 -4 mbar) despite the directly<br />
connected (and possibly contaminated) test object.<br />
The helium which now enters the forevacuum can still be detected, as it is<br />
able to flow against the pumping direction of the turbomolecular pump into<br />
the mass spectrometer. This is due to the high particle velocity of the<br />
helium. The sensitivity of this counterflow arrangement is equal to that of<br />
the main flow principle, provided the right combination of volume flow rate<br />
of the backing pump and helium compression of the turbomolecular<br />
pump is used.<br />
The advantages of the counterflow method are:<br />
Ð No liquid nitrogen is required<br />
Ð High permissible inlet pressures (i.e. pressure within the test object)<br />
This makes the counterflow method especially suitable for mobile leak<br />
detection on systems. For leak detection on larger components where a<br />
short response time is essential (i.e. high volume flow rate) an additional<br />
turbomolecular pump stage is required at the inlet of the leak detector.<br />
The INFICON leak detector ULTRATEST UL 500 is the only instrument to<br />
offer this optimized counterflow method.<br />
Main flow method<br />
The advantages of the main flow method are:<br />
Ð Highest sensitivity, i.e. low detection limit<br />
Ð Short response time due to a high volume flow rate at the inlet.<br />
The main flow method is thus especially suitable for stationary leak<br />
detection on components. Leak detection on systems having their own<br />
pump sets and at higher pressures requires the use of an external throttling<br />
valve, i.e. a partial flow with subsequently reduced sensitivity is utilized.<br />
Counterflow Method<br />
With this method the test object is not connected to the high vacuum.<br />
Instead it is connected to the forevacuum (between turbomolecular pump<br />
and backing pump), so that the entire gas flow (especially water vapor)<br />
does not contribute to the pressure increase in the mass spectrometer.<br />
Thus a cold trap is no longer required!<br />
Partial Flow Method<br />
In order to expand the measurement range in the direction of higher leak<br />
rates and for operation at higher inlet pressures, helium leak detectors<br />
incorporate a partial flow or a gross leak system. This consists basically of<br />
a throttle and a rotary vane pump. At pressures above the normal inlet<br />
pressure (main flow: above 10 -2 mbar, counterflow: above 10 -1 mbar) or in<br />
the case of high helium leak rates, the inlet valve is closed and the main<br />
flow is allowed to enter the partial flow pump, whereas only a small part<br />
enters the leak detector via the partial flow throttle. Thus the total pressure<br />
and the helium pressure are dropped to values suitable for operation of the<br />
leak detector.<br />
Main flow or<br />
counterflow<br />
leak detector<br />
Partial flow method<br />
To obtain correct leak rate readings in the partial flow mode, the partial flow<br />
ratio, i.e. the ratio between the actually measured gas flow and the total<br />
gas flow must be known and stable.<br />
Counterflow method<br />
In all INFICON leak detectors this is achieved by a partial flow throttle<br />
made of ruby with a precisely machined hole. This ensures that the<br />
quantitatively determined leak rates are always correct without calibration,<br />
even for gross leaks.<br />
B5.8
Operating Principles of the INFICON Helium Leak Detectors<br />
Leak Detectors<br />
Calibration of Helium Leak Detectors<br />
with Calibrated Leaks<br />
In the process of leak detection one expects that a test object which does<br />
not have a leak produces a zero reading on the leak detector. In this any<br />
malfunctions are excluded. Thus calibrated leaks, i.e. artificial leaks which<br />
produce a known helium leak rate are essential for reliable results.<br />
To obtain a quantitatively correct leak rate reading the sensitivity of the leak<br />
detector must also be adjusted. This requires the use of a calibrated leak.<br />
INFICON offers calibrated helium leaks of various designs covering the<br />
range between 10 -8 to 10 -4 mbar x l x s -1 as part of the standard range<br />
of products. All leak rates are traceable to the standards of the German<br />
Calibration Service controlled by the PTB (Federal Institution of Physics<br />
and Technology). If requested each helium calibrated leak can be supplied<br />
with a calibration certificate issued by the German Calibration Service.<br />
The calibration itself is performed by the German Calibration Service<br />
for Vacuum.<br />
B5<br />
B5.9
Leak Detectors<br />
ULTRATEST UL 200 Helium Leak Detector<br />
ULTRATEST UL 200 Helium Leak Detector<br />
The UL 200 is a portable multi-purpose helium leak detector and is<br />
equally well suited to both service and series production testing.<br />
Its rugged design and its ease of use make the UL 200 the best<br />
selling leak detector in the world.<br />
Technical Data UL 200<br />
Advantages<br />
◆ Quick start-up<br />
◆ Extremely fast response time<br />
◆ Oil-free gas admission system<br />
◆ One of the smallest helium leak detectors in the world<br />
◆ High sensitivity<br />
◆ Ergonomically designed<br />
◆ Hand unit can be operated with one hand equally well by right<br />
and left-handers<br />
Typical Applications<br />
Leak tests in connection with:<br />
◆ Quality assurance<br />
◆ Automotive industry<br />
◆ Analytical instruments<br />
◆ Systems manufacture<br />
◆ Power station engineering<br />
◆ Research and development<br />
◆ Semiconductor industry<br />
◆ High vacuum and ultra-high vacuum engineering<br />
◆ Ideal tool for industrial series production testing Ð in the cooling<br />
and air conditioning industries, for example<br />
In connection with the sniffer lines which are available as accessories<br />
the UL 200 may also be used as a sniffer leak detector.<br />
In connection with a partial flow pump set the UL 200 may also be<br />
used for the detection of leaks on large vessels.<br />
Smallest detectable helium leak rate<br />
(Vacuum mode) mbar x l x s -1 < 5 x 10 -11<br />
Smallest detectable helium leak rate<br />
(Sniffer mode) mbar x l x s -1 < 1 x 10 -7<br />
Max. detectable helium leak rate<br />
(Vacuum mode) mbar x l x s -1 1 x 10 -1<br />
Max. inlet pressure/with<br />
partial flow pump set mbar (Torr) 3 / 1000 / (2.25 / 760)<br />
Pumping speed during the m 3 x h -1 / cfm 2.5 (50 Hz) / 1.5<br />
evacuation process m 3 x h -1 / cfm 3.0 (60 Hz) / 1.8<br />
Pumping speed for helium at the inlet l/s 1<br />
Time constant of the leak signal<br />
(blanked off, 63% of final value) s < 1<br />
Leak rate measurement range mbar x l x s -1 1 x 10 -11 to 1 x 10 -1<br />
Units of measurement (selectable) mbar x l x s -1 ,<br />
Atm x cc x sec -1 ,<br />
Pa x m 3 x s -1 , ppm,<br />
Torr x l x s -1 * ) , g/a* ) , oz/y* )<br />
Time until ready for operation min < 3<br />
Mass spectrometer<br />
180¡ magnetic<br />
sector field<br />
Ion source<br />
2 yttrium / iridium<br />
long-life cathodes<br />
Detectable masses amu 2, 3 and 4<br />
Test port DN 1 x 25 KF<br />
Length of the cable on the hand unit m 4<br />
Dimensions (W x H x D) mm (in.) 490 x 430 x 250<br />
(19.6 x 17.2 x 10 in.)<br />
Weight kg (lbs.) 37 (82)<br />
Ordering Information<br />
* ) Not for Japan version (Cat. No. 142 00)<br />
UL 200<br />
Part Number<br />
ULTRATEST UL 200, 220 V, mbar readout, with TL 7 140 00<br />
115 V, mbar readout, with TL 7 141 00<br />
100 V, Pa readout, with TL 7 142 00<br />
110 V, mbar readout without TL 7 141 01<br />
100 V, Pa readout without TL 7 142 01<br />
PC software LeakWare 140 90<br />
For further accessories see Section<br />
ÒAccessories for UL 200, UL 200 dry and<br />
Modul 200Ó Ð Page B5.36<br />
B5.10
ULTRATEST UL 200 dry Helium Leak Detector<br />
Leak Detectors<br />
ULTRATEST UL 200 dry Helium Leak Detector<br />
The UL 200 dry is a compact portable helium leak detector capable<br />
of meeting the highest cleanliness requirements.<br />
Technical Data<br />
UL 200 dry<br />
Based on the well-proven technology of the UL 200, but equipped with an<br />
oil-free pump system, the UL 200 dry meets the highest requirements<br />
concerning cleanness while at the same time being small in size.<br />
Advantages<br />
◆ Oil-free ÒdryÒ pump system<br />
◆ Small footprint<br />
◆ Quick start-up<br />
◆ Extremely fast response<br />
Typical Applications<br />
Leak tests with stringent requirements concerning cleanliness, for example<br />
◆ Semiconductor industry<br />
Ð After repairs or maintenance work<br />
◆ Semiconductor industry<br />
Ð Production of semiconductor components<br />
◆ Pharmaceutical/medicine<br />
◆ Laser<br />
Smallest detectable helium leak rate<br />
(Vacuum mode) mbar x l x s -1 < 3 x 10 -10<br />
Smallest detectable helium leak rate<br />
(Sniffer mode) mbar x l x s -1 < 1 x 10 -7<br />
Max. detectable helium leak rate<br />
(Vacuum mode) mbar x l x s -1 1 x 10 -1<br />
Max. permissible inlet pressure mbar (Torr) 3.5 (2.63)<br />
Pumping speed during the m 3 x h -1 / cfm 1.6 (50 Hz) / 0.94<br />
evacuation process m 3 x h -1 / cfm 1.9 (60 Hz) / 1.12<br />
Pumping speed for helium at the inlet l/s 0.6<br />
Time constant of the leak signal<br />
(blanked off, 63% of final value) s < 1<br />
Leak rate measurement range mbar x l x s -1 1 x 10 -11 to 1 x 10 -1<br />
Units of measurement (selectable) mbar x l x s -1 ,<br />
Atm x cc x sec -1 ,<br />
Pa x m 3 x s -1 , ppm<br />
Torr x l x s -1 * ) , g/a * ) ,oz/y* )<br />
Time until ready for operation min < 3<br />
Mass spectrometer<br />
Ion source<br />
Ordering Information<br />
180¡ magnetic<br />
sector field<br />
2 yttrium / iridium<br />
long-life cathodes<br />
Detectable masses amu 2, 3 and 4<br />
Test port DN 1 x 25 KF<br />
Length of the cable on the hand unit m 4<br />
Dimensions (W x H x D) mm (in.) 490 x 430 x 250<br />
(19.6 x 17.2 x 10 in.)<br />
Weight kg (lbs.) 34.5 (76)<br />
UL 200 dry<br />
Part Number<br />
ULTRATEST UL 200 dry<br />
220 V, mbar readout, with TL 7 140 15<br />
100 V, Pa readout, with TL 7 141 15<br />
115 V, mbar readout, with TL 7 142 15<br />
PC software LeakWare 140 90<br />
For further accessories see Section<br />
ÒAccessories for UL 200, UL 200 dry and<br />
Modul 200Ó Ð Page B5.36<br />
* ) Not in Japan version (Part Number 141 15)<br />
B5.11<br />
B5
Leak Detectors<br />
Modul 200 Mobile and Flexible Helium Leak Detector<br />
Modul 200 Mobile and<br />
Flexible Helium Leak Detector<br />
The Modul 200 combines the excellent characteristics of the UL 200<br />
with those of the pump system which has been added to the basic<br />
leak detector module.<br />
The Modul 200 is available in two basic groups:<br />
◆ Dry, mobile leak detectors with selectable pumping speed Ð in<br />
combination with a laboratory trolley suitable for clean room applications<br />
◆ Oil-sealed, mobile leak detectors offering a high pumping speed at an<br />
optimum price-to-performance ratio.<br />
Modul 200 with Dry-Compressing<br />
Scroll Pump<br />
This combination represents a dry high-performance leak detector.<br />
Advantages<br />
◆ Very high pumping speed which is also acceptable for testing<br />
semiconductor production chambers without having to use their own<br />
pump systems<br />
◆ Fast response<br />
◆ Quick recovery (after helium contamination)<br />
◆ Absolutely dry<br />
◆ High sensitivity<br />
Typical Applications<br />
All applications which demand a clean process.<br />
Modul 200 with Oil-Sealed<br />
Backing Pump<br />
This combination represents a powerful leak detector, the pumping speed of<br />
which is adapted to the particular application in each case.<br />
Advantages<br />
◆ Cost-effective leak detector<br />
◆ Pumping speed optimized for the particular application<br />
◆ Fast response<br />
◆ Quick recovery<br />
◆ High sensitivity<br />
Typical Applications<br />
All applications involving short cycles and/or larger volumes and which<br />
require a mobile system<br />
◆ Automotive industry<br />
◆ Cooling and air conditioning<br />
◆ Manufacturers of furnaces/machines/systems<br />
◆ Packaging<br />
◆ Semiconductor industry (chip manufacturers)<br />
◆ Semiconductor industry (tool manufacturers and subcontractors)<br />
◆ High purity gas industry<br />
◆ Research and development<br />
◆ UHV applications<br />
B5.12
Modul 200 Mobile and Flexible Helium Leak Detector<br />
Leak Detectors<br />
Technical Data<br />
Modul 200<br />
With Scroll Pump<br />
With Rotary Vane Vacuum Pump<br />
Smallest detectable helium leak rate<br />
(Vacuum mode) mbar x l x s -1 < 5 x 10 -11<br />
Smallest detectable helium leak rate<br />
(Sniffer mode) mbar x l x s -1 < 1 x 10 -7<br />
Max. detectable helium leak rate<br />
(Vacuum mode) mbar x l x s -1 10 -1<br />
Max. permissible inlet pressure mbar (Torr) 3 (2.25)<br />
Pumping speed during the evacuation process<br />
TriScroll 600 m 3 x h -1 (cfm) 25 (14.7) Depends on the type of rotary vane vacuum pump used<br />
Pumping speed for helium at the inlet flange l/s 8 Depends on the type of rotary vane vacuum pump used<br />
Time constant of the leak signal<br />
(blanked off, 63% of final value) s < 1<br />
Leak rate measurement range mbar x l x s -1 1 x 10 -11 to 1 x 10 -1<br />
Units of measurement (selectable) mbar x l x s -1 , Atm x cc x sec -1 , Pa x m 3 x s -1 , ppm, Torr x l x s -1 *) , g/a *) , oz/y *)<br />
Time until ready for operation min < 3<br />
Mass spectrometer<br />
180¡ magnetic sector field<br />
Ion source<br />
2 yttrium / iridium long-life cathodes<br />
Detectable masses amu 2, 3 and 4<br />
Test port DN 1 x 25 KF<br />
Length of the cable on the hand unit m 4<br />
Dimensions (W x H x D) mm (in.) 490 x 430 x 250 (19.6 x 17.2 x 10)<br />
Weight (without pump) kg (lbs.) 30.5 (67)<br />
B5<br />
The following Part Numbers contain only the individual components needed for assembly by the customer. For building a portable system we recommend our<br />
factory tested and pre-assembled systems (see next page ÒMobile Leak Detection Systems fitted to CART 200Ó).<br />
Ordering Information<br />
Modul 200<br />
Part Number<br />
Modul 200 without pump 1)<br />
Euro, 220-240 V, 50/60 Hz 140 34<br />
US,115 V, 50/60 Hz 141 34<br />
Japan,100 V, 50/60 Hz 141 36<br />
Modul 200 with TriScroll 600<br />
Euro, 220-240 V, 50/60 Hz 140 44<br />
US,115 V, 50/60 Hz 141 44<br />
Japan,100 V, 50/60 Hz 141 46<br />
Modul 200 with oil-sealed rotary vane vacuum pump<br />
upon request<br />
PC software LeakWare 140 90<br />
For further accessories see Section<br />
ÒAccessories for UL 200, UL 200 dry and<br />
Modul 200Ó - Page B5.36<br />
*) Not for Japan version (Part number 141 36 and 141 46)<br />
1) But without integrated backing pump<br />
Please order cart separately<br />
B5.13
Leak Detectors Mobile Leak Detection Systems Fitted to CART 200<br />
Mobile Leak Detection Systems<br />
Fitted to CART 200<br />
These mobile systems are designed to fit on the CART 200 or<br />
the CART 200 CR. Either cart will accommodate the UL 200,<br />
UL 200 dry or Modul 200 leak detectors.<br />
Additional backing pumps (depending on the version required) are<br />
installed on the bottom level of the carts.<br />
CART 200 with Modul 200 and TRIVAC D<br />
25 B (helium cylinder is not included)<br />
CART 200 CR with UL 200 dry and<br />
TriScroll (helium cylinder is not included)<br />
The pre-assembled and tested systems include all required connecting<br />
components between leak detector and backing pump.<br />
Only the upper section of the system will be packaged separately.<br />
148<br />
705<br />
300<br />
320<br />
The helium cylinder is not part of the delivery.<br />
CART 200<br />
CART 200 is a special transport cart made of painted steel with an<br />
integrated holder for gas cylinders and space for small parts and<br />
documents. The leak detector and the pump are accommodated on<br />
two levels.<br />
CART 200 CR (Clean Room)<br />
Cart 200 CR is the clean room version of the CART 200. The fully enclosed<br />
cart is made of stainless steel. The pump is covered to prevent particles<br />
from escaping from the cart.<br />
Advantages<br />
◆ Complete, fully operational leak detection system<br />
◆ Simple to operate<br />
◆ Choice of either oil-sealed or dry compressing backing pump<br />
◆ In the case of these systems, the transport cart CART 200/<br />
CART 200 CR is included<br />
1108<br />
685<br />
225<br />
560<br />
Dimensional drawing for the CART 200 (CR)<br />
480<br />
540<br />
B5.14
Mobile Leak Detection Systems Fitted to CART 200<br />
Leak Detectors<br />
Technical Data<br />
Modul 200 on CART<br />
Smallest detectable leak rate for air<br />
(Vacuum mode) mbar x l x s -1 < 5 x 10 -11<br />
Smallest detectable leak rate for helium<br />
(Sniffer mode) mbar x l x s -1 < 1 x 10 -7<br />
Max. detectable leak rate for helium<br />
(Vacuum mode) mbar x l x s -1 10 -1<br />
Max. inlet pressure mbar (Torr) 3<br />
Pumping speed during the evacuation process with<br />
TriScroll 600 m 3 x h -1 25<br />
TRIVAC D 16 B, US m 3 x h -1 20<br />
TRIVAC D 25 B, Euro m 3 x h -1 25<br />
Max. pumping speed for helium at the inlet flange l/s 8<br />
Time constant of the leak signal<br />
(blanked off, 63 % of final value) s < 1<br />
Leak rate measurement range mbar x l x s -1 1 x 10 -11 to 1 x 10 -1<br />
Units of measurement (selectable) mbar x l x s -1 , Atm x cc x sec -1 , Pa x m 3 x s -1 , ppm, Torr x l x s -1 1) , g/a 1) , oz/y 1)<br />
Time until ready for operation min < 3<br />
Mass spectrometer<br />
180¡ magnetic sector field<br />
Ion source<br />
2 yttrium / iridium long-life cathodes<br />
Detectable masses amu 2,3 and 4<br />
Test port DN 1 x 25 KF<br />
Cable length for the hand unit m 4<br />
Dimensions (W x H x D) mm (in.) 490 x 430 x 250 (19.6 x 17.2 x 10)<br />
Weight (without pump) kg (lbs.) 30.5 (67)<br />
B5<br />
Ordering Information<br />
Modul 200 on<br />
Modul 200 on<br />
CART 200 Part Number CART 200 CR<br />
UL 200 with partial flow pump set<br />
TRIVAC D 25 B Euro 140 85 140 80<br />
TRIVAC D 16 B US 141 85 141 80<br />
Japan Ñ 142 80<br />
UL 200 dry with partial flow pump set<br />
TriScroll 600 Euro 140 75 140 65<br />
US 141 75 141 65<br />
Japan 142 75 142 65<br />
Modul 200 2) with<br />
TriScroll 600 Euro 140 73 140 60<br />
US / Japan 141 70 141 60<br />
TRIVAC D 25 B Euro 140 72 140 62<br />
TRIVAC D 16 B US 141 72 Ñ<br />
1) Not for Japan version (Part Number 142 80, 142 75, 142 65,141 70 and 141 60)<br />
2) Without integrated backing pump<br />
B5.15
Leak Detectors<br />
LDS 1000 Modular Leak Detection System<br />
LDS 1000 Modular Leak Detection System<br />
For Integration in Industrial<br />
Leak Testing Systems<br />
The LDS 1000 is a helium leak detector for universal integration in<br />
industrial leak testing systems (vacuum or sniffing method).<br />
The detection system has been separated from the power supply<br />
electronics so that the LDS 1000 may be adapted to the particular<br />
application with great flexibility.<br />
Advantages<br />
◆ Fast response time for short testing cycles<br />
◆ Measurement of the true leak rate of the test sample while<br />
simultaneously pumping down the test chamber (partial flow operation)<br />
◆ Control and acquisition of data via programmable control compatible<br />
signals or RS 232 C interface<br />
◆ Easy to operate<br />
Typical Applications<br />
Leak tests in the areas of:<br />
◆ Mechanical engineering<br />
◆ Manufacture of systems<br />
◆ Automotive industry<br />
◆ Lamps and tube production<br />
◆ Switching over from vacuum leak detection to sniffer leak detection<br />
upon a single key press allows for immediate pin-pointing of the leak<br />
during the same test step<br />
◆ The operating unit may also be detached from the instrument<br />
◆ Control and data acquisition software LDS-WARE (optional)<br />
◆ Chart recorder output 0 - 10 V lin/log for logging the leak rate and the<br />
forevacuum pressure<br />
◆ Calibration through internal calibrated leak Ñ also externally or<br />
dynamically while pumping down is in progress<br />
◆ Electronics module prepared for mounting in a 19" rack (3 HU) to offer<br />
protection against dust, high temperatures or electromagnetic interference<br />
330<br />
Dimensional drawing of the LDS 1000<br />
210<br />
135<br />
115<br />
170<br />
190<br />
128.5<br />
483<br />
320<br />
380<br />
Dimensional drawing of the electronics module for the LDS 1000<br />
B5.16
LDS 1000 Modular Leak Detection System<br />
Leak Detectors<br />
Technical Data<br />
Smallest detectable helium leak rate<br />
FINE mode mbar x 1 x s -1 5 x 10 -11<br />
GROSS mode mbar x 1 x s -1 3,5 x 10 -10<br />
Sniffer mode mbar x 1 x s -1 1 x 10 -7<br />
Units of measurement (selectable)<br />
mbar x l x s -1 , Pa x m 3 x s -1 , Atm x cc x sec -1 , g/a, ppm<br />
Max. inlet pressure mbar (Torr) 3 (2.25)<br />
Response time s < 1<br />
Ion source<br />
2 yttrium/iridium long life cathodes<br />
Vacuum connections DN 16 KF<br />
Relays 7<br />
Trigger relays/status relays 4 / 3<br />
Control inputs Programmable control compatible (max. 35 V)<br />
Chart recorder output lin/log V 0 - 10<br />
Interface<br />
LDS 1000<br />
Modular Leak Detection System<br />
RS 232 C<br />
Ordering Information<br />
LDS 1000<br />
Part Number<br />
LDS 1000, basic unit<br />
Consisting of 19" electronics module 145 00<br />
with integrated operating unit and mass spectrometer<br />
Connection cable<br />
Electronics module / mass spectrometer module<br />
1.5 m (4.8 ft) 145 34<br />
3.0 m (10 ft) 145 33<br />
5.0 m (16 ft) 145 30<br />
10.0 m (32 ft) consult factory<br />
Options<br />
Pump module (complete with connection accessories)<br />
TRIVAC D 2,5 E Single phase world motor 145 10<br />
TRIVAC D 5 E Single phase motor EURO/USA 145 11<br />
TRIVAC D 5 E Three phase world motor 145 12<br />
Internal standard calibrated leak<br />
TL 7 145 49<br />
Sniffer mode accessories<br />
Sniffer valve 145 20<br />
Sniffer line, with sniffer probe, 200 mm<br />
line length 3.0 m (10 ft) 145 21<br />
5.0 m (16 ft) 145 22<br />
10.0 m (32 ft) 145 23<br />
Replacement sniffer probe, 400 mm 200 04 642<br />
Extension cable<br />
Electronics module / Operating unit<br />
3.0 m (10 ft) 145 40<br />
5.0 m (16 ft) 145 41<br />
10.0 m (32 ft) 145 42<br />
PC software LDS-WARE 145 91<br />
B5<br />
B5.17
Leak Detectors<br />
ULTRATEST UL 500 Stationary Helium Leak Detector<br />
ULTRATEST UL 500<br />
Stationary Helium Leak Detector<br />
The ULTRATEST UL 500 is an automatic leak detector offering<br />
fast pumpdown and short response times.<br />
Advantages<br />
◆ Wide dynamic measurement range over 14 decades<br />
◆ Leak detection is possible from atmospheric pressure<br />
◆ Short pumpdown and response times<br />
◆ Fully automatic run-up and very simple to operate via two<br />
main push-buttons<br />
◆ Large, clearly arranged and easy to read LCD display with analog<br />
and digital leak rate readout, and status display with alphanumeric<br />
plain text display for user guidance<br />
◆ Autoranging Ð rapid automatic range switching<br />
◆ Autozero Ð automatic Zero alignment<br />
◆ Autocal Ð automatic calibration via built-in calibrated leak<br />
◆ Low-maintenance special turbomolecular pump for quick operational<br />
readiness and high pumping speed at the test port<br />
Typical Applications<br />
Quality control of all types of components, continuous short cycle operation<br />
of large quantities (series testing) and single tests, for example in:<br />
◆ Electrical industry<br />
◆ Semiconductor industry<br />
◆ Cooling and air conditioning industry<br />
◆ Automotive industry<br />
◆ Container assembly<br />
◆ Packaging industry<br />
◆ Precision mechanics<br />
◆ Research<br />
The UL 500 can be used in connection with a helium sniffer for<br />
overpressure leak detection.<br />
◆ Electro-pneumatically operated long-life bellows-sealed valves<br />
◆ Mobile unit (table top enclosure) on castors<br />
◆ Optional V.24 / RS 232 C computer interface<br />
Dimensional drawing for the UL 500<br />
B5.18
ULTRATEST UL 500 Stationary Helium Leak Detector<br />
Leak Detectors<br />
Technical Data<br />
ULTRATEST UL 500<br />
Smallest detectable leak rate for air mbar x l x s -1 7 x 10 -11<br />
Smallest detectable leak rate for helium mbar x l x s -1 2 x 10 -10<br />
Largest detectable leak rate for helium mbar x l x s -1 10<br />
Largest leak rate which can be indicated (qualitative) mbar x l x s -1 1000<br />
Max. inlet pressure for quantitative measurement mbar (Torr) 100 (75)<br />
Max. inlet pressure for qualitative measurement mbar (Torr) 1000 (750)<br />
Time until ready for operation min ² 5<br />
Detectable masses amu 2, 3 and 4<br />
Pumping speed during the evacuation process m 3 x h -1 25<br />
Pumping speed for helium at the test port l x s -1 ³ 12<br />
Time constant of the leak signal (blanked off, 63% of final value) s ² 1<br />
Pumpdown time until ready to detect leaks<br />
Without additional volume s 6<br />
At a test volume of 1 l s 6<br />
At a test volume of 50 l s 150<br />
Response times<br />
Up to a test volume of 10 l s ² 1<br />
Up to a test volume of 50 l s ² 5<br />
Display capacity for leak rates<br />
1. Quasi-analog display 360¡ circular display, logarithmic divisions,<br />
1 decade per turn<br />
Bar scale for leak rate exponent<br />
Digital exponent display from Ð 10 to + 3<br />
2. Digital display 2 digits, two-digit exponent, sign<br />
B5<br />
Units of measurement (selectable) mbar x l x s -1 , Atm x cc x sec -1<br />
Pa x m 3 x s -1 , ppm<br />
Calibrated leak TL 7 (built-in), leak rate in the range mbar x l x s -1 10 -7<br />
Test port DN 40 KF<br />
Vacuum pumps<br />
High vacuum pump<br />
Backing pump<br />
Auxiliary pump<br />
Option<br />
Inputs/outputs<br />
Chart recorder output<br />
TURBOVAC 150 LS<br />
TRIVAC D 4 B<br />
TRIVAC D 25 B<br />
TRIVAC D 40 / 65 B<br />
2 channels 0 - 10 V<br />
Mains connection V 100, 110, 127, 200, 220, 240,<br />
380, 50/60 Hz (selectable)<br />
Dimensions (W x H x D) mm (in.) 627 x 1105 x 775<br />
(24.7 x 43.5 x 30.5 in.)<br />
Weight kg (lbs.) 205 (453)<br />
Ordering Information<br />
ULTRATEST UL 500<br />
Part Number<br />
ULTRATEST UL 500, with TRIVAC D 25 B and calibrated leak TL 7 155 85<br />
Options for larger test volumes<br />
ULTRATEST UL 500, with TRIVAC D 40 B, 380 V, 3 phase<br />
ULTRATEST UL 500, with TRIVAC D 65 B, 380 V, 3 phase<br />
For accessories see Section ÒAccessories for UL 500 and 500 dryÓ Ð Modul 200Ó - Page B5.35<br />
upon request<br />
upon request<br />
B5.19
Leak Detectors<br />
ULTRATEST UL 500 dry Stationary Helium Leak Detector<br />
Ultratest UL 500 dry<br />
Stationary Helium Leak Detector<br />
The ULTRATEST UL 500 dry is a dry automatic helium leak detector<br />
of the highest performance class.<br />
Advantages<br />
◆ Wide dynamic measurement range over 14 decades<br />
◆ Entirely dry vacuum system<br />
◆ Short pumpdown and response times<br />
◆ Fast clean-up after helium contamination<br />
◆ Fully automatic run-up and very simple to operate via<br />
two main push-buttons<br />
◆ Autoranging Ð rapid automatic range switching<br />
◆ Autozero Ð automatic Zero alignment<br />
◆ Autocal Ð automatic calibration via built-in calibrated leak<br />
Typical Applications<br />
Quality checks on all types of components, especially those which must<br />
meet stringent requirements regarding cleanliness.<br />
◆ Semiconductor industry (tool manufacturers) vacuum chambers, locks,<br />
gas supply lines<br />
◆ Semiconductor industry (subcontractors) series tests on tool<br />
components under short cycle conditions<br />
◆ Research and development nuclear fusion systems, space simulation<br />
chambers, UHV systems, storage rings<br />
The UL 500 dry may also be used in all those applications where the<br />
oil-sealed UL 500 is used.<br />
◆ Large, clearly arranged and easy to read LCD display with analog<br />
and digital leak rate readout, and status display with alphanumeric<br />
plain text display for user guidance<br />
◆ Low-maintenance special turbomolecular pump for quick operational<br />
readiness and high pumping speed at the test port<br />
◆ Electro-pneumatically operated long-life bellows-sealed valves<br />
Dimensional drawing for the UL 500 dry<br />
B5.20
ULTRATEST UL 500 dry Stationary Helium Leak Detector<br />
Leak Detectors<br />
Technical Data<br />
ULTRATEST UL 500 dry<br />
Smallest detectable helium leak rate mbar x l x s -1 5 x 10 -11<br />
Largest quantitatively detectable helium leak rate mbar x l x s -1 10<br />
Max. inlet pressure for quantitative measurements mbar (Torr) 100 / (75)<br />
Time until ready for operation min ² 5<br />
Detectable masses amu 2, 3 and 4<br />
Pumping speed during the evacuation process m 3 x h -1 25<br />
Pumping speed for helium at test port l x s -1 ³ 12<br />
Time constant of the leak signal (blanked off, 63% of final value) s < 1<br />
Pumpdown time until ready for leak detection<br />
Without additional volume s 6<br />
At a test volume of 1 l s 6<br />
At a test volume of 50 l s 150<br />
Response times<br />
Up to a test volume of 10 l s ² 1<br />
Up to a test volume of 50 l s ² 5<br />
Display capacity for leak rates<br />
1. Quasi-analog display 360¡ circular display, 45 segments logarithmic divisions,<br />
1 decade per turn<br />
Bar scale for leak rate exponent<br />
2. Digital display 2 digits, two-digit exponent, sign<br />
Units of measurement (selectable) ppm, mbar x l x s -1 , Pa x m 3 x s -1<br />
Atm x cc x sec -1<br />
Vacuum pumps<br />
High vacuum pump<br />
TURBOVAC 150 LS<br />
Backing vacuum pump Tri Scroll 600<br />
Auxiliary pump TURBOVAC 35 LS / diaphragm MD 4<br />
B5<br />
Mains connection V 115 / 200 / 220 / 380<br />
Mains frequency Hz 50/60<br />
Chart recorder output<br />
2 channels 0 - 10 V<br />
Noise level during operation, max. dB (A) 58<br />
Dimensions (W x H x D) mm (in.) 1105 x 627 x 775 (43.5 x 24.7 x 30.5 in.)<br />
Weight kg (lbs.) 205 (453)<br />
Ordering Information<br />
ULTRATEST UL 500 dry<br />
Part Number<br />
ULTRATEST UL 500 dry with calibrated leak TL 7, TURBOVAC 35 LS and 150 LS<br />
115 / 220 V, 1 phase 140 50<br />
200 / 380 V, 3 phase 140 51<br />
For accessories see Section ÒAccessories for UL 500 and 500 dryÓ - Page B5.35<br />
B5.21
Leak Detectors<br />
Protec Helium Sniffer Leak Detector<br />
Protec Helium Sniffer Leak Detector<br />
The Protec is a sniffer leak detector exclusively for helium as the<br />
test gas. It represents a cost-effective alternative to the UL 200<br />
or the Ecotec II when dealing with sniffer applications involving<br />
helium only. It is the ideal instrument for tests on components or<br />
refrigerant systems before they are filled. Its sensitivity, response<br />
time and price-to-performance ratio exceed the specifications of<br />
comparable instruments.<br />
Advantages<br />
◆ Fast response<br />
◆ Reproducible test results<br />
◆ With background subtraction facility for leak detection in atmospheres<br />
contaminated with helium<br />
◆ Highly flexible and rugged sniffer lines up to 10 m long for individual<br />
use and inaccessible test samples<br />
◆ Quasi-analog leak rate display with digital exponent<br />
◆ Audio alarm (volume is variable)<br />
Typical Applications<br />
Protec is ideal for all helium sniffing applications where pressurized<br />
components need to be leak tested. The main areas of application are:<br />
◆ Refrigerating / air conditioning industries<br />
- Testing of individual components<br />
- Testing of assembled systems before filling<br />
◆ Car industry<br />
- Brake lines<br />
- Fuel lines<br />
- Air conditioning systems and their components<br />
◆ Multi-line display panel for the leak rates (digital) and<br />
instrument messages<br />
◆ Autoranging<br />
◆ Simple to operate<br />
◆ Highly reliable<br />
◆ Protected against misoperation<br />
◆ Sniffer tips with exchangeable filter made of felt, and additional<br />
sinter filter<br />
B5.22
Protec Helium Sniffer Leak Detector<br />
Leak Detectors<br />
Technical Data<br />
PROTEC<br />
Detectable gases<br />
Smallest detectable leak rate for helium mbar x l x s -1 ² 4 x 10 -7<br />
Measurement range<br />
Response time s ² 1<br />
Time until ready to operate min < 3<br />
Units of measurement (selectable)<br />
Helium<br />
6 Dekaden<br />
mbar x l x s -1 , g/a, oz/y, Pa x m 3 x s -1 , ppm<br />
Gas flow sccm 70 - 90<br />
Sniffer line m 3, 5, 10<br />
Operating panel<br />
Inputs<br />
Outputs<br />
Computer interface<br />
Mains power supply<br />
Leak rate display, audio alarm,<br />
display of error messages (plain text)<br />
Digital control signals for data acquisition<br />
and control purposes<br />
Relay contacts for triggers and status signalling<br />
RS 232 C<br />
90 - 127 V, 50 / 60 Hz<br />
115 - 140 V, 60 Hz<br />
187 - 265 V, 50/60 Hz<br />
Ambient temperature range ¡C +10 to +45<br />
Dimensions (W x H x D) mm (in.) 580 x 260 x 380<br />
(22.8 x 12.24 x 15)<br />
Weight kg (lbs.) 30 (66)<br />
B5<br />
Ordering Information<br />
PROTEC<br />
Part Number<br />
Helium sniffer leak detector Protec 187 V - 265 V, 50/60 Hz 122 05<br />
90 V - 127 V, 50/60 Hz 122 06<br />
115 V - 140 V, 60 Hz 122 07<br />
Sniffer Lines with integrated LEDs and push-button for background subtraction<br />
SL 303 3 m 122 10<br />
SL 305 5 m 122 11<br />
SL 310 10 m 122 12<br />
Sniffer Probes rigid 120 mm 122 13<br />
385 mm 122 15<br />
flexible 120 mm 122 14<br />
385 mm 122 16<br />
External loudspeaker 122 08<br />
Helium sniffer calibrated leak<br />
S-TL 4 (10 -4 mbar x l x s -1 ) 122 37<br />
S-TL 5 (10 -5 mbar x l x s -1 ) 122 38<br />
S-TL 6 (10 -6 mbar x l x s -1 ) 122 39<br />
Replacement filter tip 122 17<br />
Replacement filters<br />
Felt (25 pieces) 200 35 02<br />
Sinter (5 pieces with gasket) 200 35 00<br />
B5.23
Leak Detectors<br />
Ecotec II Sniffer Leak Detector<br />
Ecotec II Sniffer Leak Detector<br />
For Refrigerant, SF6 and Other Gases<br />
The Ecotec II is a sniffer leak detector, for highly selective detection<br />
of refrigerants (R 134a, for example) and other gases. It may be<br />
programmed for simultaneous detection of two different gases in<br />
order to arrive at clear results even under critical conditions<br />
(to clearly differentiate between the propellant of an insulating<br />
foam and a refrigerant, for example).<br />
Advantages<br />
◆ 65 pre-programmed gases<br />
◆ 40 freely definable gases<br />
◆ Simultaneous detection of up to 4 gases<br />
◆ Selective measurements on refrigerants<br />
◆ Quasi-analog leak rate display through 45 LED segments and<br />
with a digital exponent<br />
◆ Background suppression<br />
◆ Highly flexible and rugged sniffer lines up to 10 m long for individual<br />
use and inaccessible test samples<br />
◆ Sniffer tips with exchangeable filter made of felt, and additional<br />
sinter filter<br />
Typical Applications<br />
The Ecotec II is used to test for leaks on soldered/welded joints and<br />
screwed connections which are exposed to pressures, for example in<br />
production lines for:<br />
◆ Refrigerators and deep freezers<br />
◆ Compressors and evaporators<br />
◆ Cooling and refrigeration systems<br />
◆ Air conditioning units (automotive industry)<br />
◆ Refrigerant vehicles<br />
◆ Halogen lamps<br />
◆ High tension switches<br />
◆ Audio alarm (variable volume)<br />
◆ Multi-line display for leak rates (digital) and status error messages<br />
◆ Autoranging<br />
◆ Easy to operate<br />
◆ Fast response, quick testing<br />
◆ Reproducible test results<br />
◆ Highly reliable<br />
◆ Protected against misoperation<br />
◆ Mobile<br />
◆ Long periods between maintenance through an oil-free vacuum system<br />
without any valves<br />
B5.24
Ecotec II Sniffer Leak Detector<br />
Leak Detectors<br />
Technical Data<br />
ECOTEC II<br />
Detectable gases<br />
For all refrigerants<br />
Smallest detectable leak rate for refrigerants R 600a g/a 0.08<br />
R 134a g/a 0.08<br />
Gas library 106<br />
Measurement range g/a 0.08 to 999.9<br />
Response time s < 1<br />
Time until ready to operate min < 3<br />
Units of measurement (selectable)<br />
g/a, oz/y, mbar x l x s -1 , ppm<br />
Gas flow sccm 70 - 90<br />
Sniffer line m 3, 5, 10<br />
Operating panel<br />
Leak rate display, audio alarm, display of error messages<br />
(plain text)<br />
Inputs<br />
Digital control signals for data acquisition and control purposes<br />
Outputs<br />
Relay contacts for triggers and status signalling<br />
Computer interface<br />
RS 232 C<br />
Mains power supply<br />
90 - 127 V, 50/60 Hz<br />
115 - 140 V, 60 Hz<br />
187 - 265 V, 50/60 Hz<br />
Ambient temperature range ¡C +10 to +45<br />
Dimensions (W x H x D) mm 576 x 350 x 260<br />
Weight, approx. kg (lbs) 34 (75)<br />
Ordering Information<br />
ECOTEC II<br />
Part Number<br />
Refrigerant sniffer leak detector Ecotec II 187 - 265 V, 50/60 Hz 122 00<br />
115 - 140 V, 60 Hz 122 01<br />
090 - 127 V, 50/60 Hz 122 02<br />
Sniffer line with integrated LEDs and SL 303 3 m 122 10<br />
push-button for background subtraction SL 305 5 m 122 11<br />
SL 310 10 m 122 12<br />
Sniffer probe rigid 120 mm 122 13<br />
385 mm 122 15<br />
flexible 120 mm 122 14<br />
385 mm 122 16<br />
External loudspeaker 122 08<br />
Helium sniffer calibrated leak S-TL 4 (10 -4 mbar x l x s -1 ) 122 37<br />
S-TL 5 (10 -5 mbar x l x s -1 ) 122 38<br />
S-TL 6 (10 -6 mbar áx l x s -1 ) 122 39<br />
Replacement filter tip 122 17<br />
Replacement filters Felt (25 pieces) 200 35 02<br />
Sinter (5 pieces with gasket) 200 35 00<br />
Test leaks for refrigerants (2 - 5 g/a) R 134a 122 20<br />
R 600a 122 21<br />
R 404a 122 22<br />
R 502 122 23<br />
R 12 122 24<br />
R 22 122 25<br />
R 23 122 26<br />
R 152a 122 27<br />
R 407c 122 28<br />
R 410a 122 29<br />
R 401a 122 30<br />
R 290 122 31<br />
others<br />
upon request<br />
For calibrated leaks 16 g/a see section ÒCalibrated LeaksÓ - Page B5.30<br />
B5<br />
B5.25
Leak Detectors<br />
HLD4000A Sniffer Leak Detector<br />
HLD4000A Sniffer Leak Detector<br />
For Refrigerant R134a and Other Fluorine Based Refrigerants<br />
The HLD4000A Halogen Leak Detector is a simple, yet highly<br />
sensitive sniffer leak detector for detection of fluorine-based<br />
refrigerant gases.<br />
Using modern microprocessor technology, it is ideal for rough<br />
conditions and continuous use in industrial conditions.<br />
The HLD4000A Halogen Leak Detector is designed especially for detection<br />
of fluorocarbon compounds (for example R134a). It is used primarily for<br />
leak tests on components and systems charged with any fluorine-based<br />
refrigerant. The similar HLD4000C is designed for use with HCFCs<br />
(such as R22) or any compounds containing chlorine.<br />
Advantages<br />
◆ Small and lightweight<br />
◆ Quick start-up<br />
◆ Automatic calibration feature with built-in R134a calibration standard<br />
◆ Alphanumeric display for parameter entry and status messages in<br />
English (German, French and Spanish display text is available after<br />
exchanging an EPROM)<br />
◆ Bar graph display for the leak rates<br />
◆ Leak rate trigger with audio alarm<br />
◆ Relay output<br />
◆ Continual self-monitoring of the instrument<br />
◆ Comprehensive diagnostic program with user guidance for servicing<br />
◆ V.24/RS 232 C computer interface<br />
◆ Application oriented test programs<br />
◆ Very simple to operate<br />
◆ Fast response, quick testing<br />
◆ Reliable and reproducible test results<br />
◆ Fast automatic calibration with almost no user intervention<br />
◆ Selectable manual calibration mode<br />
◆ Protected against misoperation<br />
◆ Memory for test conditions<br />
◆ Automatic background suppression<br />
◆ Automatic flow control in the sniffer tip<br />
Typical Applications<br />
The HLD4000A is suited for sniffer leak detection (overpressure method)<br />
on the following products:<br />
◆ Refrigerators and deep freezers<br />
◆ Compressors and tubings<br />
◆ Air conditioning systems<br />
◆ Cooling systems<br />
◆ Refrigerating vehicles<br />
◆ Cold storage facilities<br />
◆ Heat pumps<br />
◆ Leak detection on components or systems filled with SF 6<br />
◆ May be used in series production, quality assurance and servicing<br />
◆ Ideal for series production testing<br />
Dimensional drawing for the HLD4000A<br />
B5.26
HLD4000A Sniffer Leak Detector<br />
Leak Detectors<br />
Technical Data<br />
HLD4000A<br />
Measurement range g/a (R 134a) 0.28 - 140<br />
or oz/y (R 134a) 0.01 - 5.0<br />
or mbar x l x s -1 2 x 10 -6 - 1 x 10 -3<br />
Response time s 0.5<br />
Flow cm 3 / min 300<br />
Sniffer line, approx m (ft.) 4.5 (14.8)<br />
Outputs<br />
Inputs<br />
V.24/RS232C computer interface<br />
2 relays for alarm signalling<br />
2 relays for remote control<br />
Ambient temperature for operation ¡C (F) 10 to 40 / (50 to 104¡)<br />
Mains voltage either volt / Hz 120 +5%/-25%, 50/60<br />
or volt / Hz 240 +5%/-25%, 50/60<br />
Power consumption watts 70<br />
Weight kg (lbs.) 6.8 (15)<br />
Halogen Leak Detector HLD 4000A,<br />
complete with probe and sensor for 120 VAC<br />
Halogen Leak Detector HLD 4000A,<br />
complete with probe and sensor for 240 VAC<br />
Ordering Information<br />
Halogen Leak Detector HLD 4000C,<br />
complete with probe and sensor for 120 VAC for detection of chlorine-containing compounds<br />
Halogen Leak Detector HLD 4000C,<br />
complete with probe and sensor for 240 VAC for detection of chlorine-containing compounds<br />
Carrying Case for HLD 4000<br />
HLD4000-110<br />
HLD4000-210<br />
HLD4000-310<br />
HLD4000-410<br />
701-081-G1<br />
Additional Operation and Maintenance Manual for HLD 4000 074-189<br />
Filters, Box of 50<br />
Replacement Sensor for HLD 4000A<br />
701-237-G1<br />
702-010-G1<br />
Replacement Sensor for HLD 4000C 001-025<br />
Replacement Leak Standard Gas Canister, HLD 4000A<br />
Replacement Leak Standard Gas Canister, HLD 4000C<br />
HLD4000A<br />
Part Number<br />
702-207-G1<br />
701-022-G1<br />
B5<br />
B5.27
Leak Detectors<br />
Contura Z Helium Leak Detector<br />
Contura Z Helium Leak Detector<br />
CONTURA Z verifies package strength and integrity for flexible,<br />
semi-rigid and rigid packaging.<br />
Non-Destructive Leak Testing<br />
For Flexible Packages<br />
Of the many requirements that a product package must meet, leaktightness<br />
merits special emphasis. In the case of packages under modified<br />
atmosphere, for example, a gas exchange must absolutely be avoided in<br />
order to preserve product quality. In the case of vacuum packages any rise<br />
in pressure (air pullers) or ingress of atmospheric oxygen is undesirable.<br />
Current testing methods are unsatisfactory, because of the inadequate<br />
display of their results, their handling requirements, their cost and, above<br />
all, their detection limits.<br />
Despite the variety of products, package types, packaging techniques<br />
and package materials, leaks are from just a few causes:<br />
Ð<br />
Ð<br />
Ð<br />
Ð<br />
Ð<br />
Product on the sealing seam<br />
Seal parameters out of tolerance<br />
Foil damaged during deep drawing<br />
Foil punctured by the product<br />
Wrinkles in the sealing seam<br />
The leaks caused by these defects range from obvious macrodamage<br />
down to microleaks whose effect is not known before the product reaches<br />
the consumer.<br />
Advantages<br />
◆ Nondestructive, stress-free testing<br />
◆ Immediate result<br />
◆ Detection of ultrasmall leak rates, including bacteria- and virus-tightness<br />
(
Contura Z Helium Leak Detector<br />
Leak Detectors<br />
Technical Data<br />
Contura Z<br />
Smallest detectable leak rate<br />
Automatic test sequence, test cycle duration approx. 15 s mbar x l x s -1 < 10 -7<br />
Continuous testing, test cycle duration 40 s mbar x l x s -1 < 10 -8<br />
Leak localization with sniffer probe mbar x l x s -1 < 10 -7<br />
Test cycle duration<br />
Base setting s approx. 15<br />
Continuous measurement (adjustable) s 999<br />
Measurement range<br />
Qualitative measurement mbar x l x s -1 1.0 x 10 -8 - 9.9 x 10 -1<br />
Quantitative measurement mbar x l x s -1 > 9.9 x 10 -1<br />
Recorder outputs V lin: per decade 1-10 mantissa<br />
Staircase voltage for the exponents V log: 0-10 total meas. range<br />
Relay outputs Pcs. 3<br />
Ready:<br />
Measurement output ready<br />
Fail:<br />
Error message<br />
Meas:<br />
Trigger leak rate pass / fail<br />
Power consumption kVA 1.7<br />
Ramp-up time (after startup) min < 3<br />
Usable diameter of foil chamber<br />
Up to a product height of 20 mm mm 540<br />
Up to a product height of 100 mm mm 460<br />
Maximum product size (W x D)<br />
Up to a product height of 20 mm mm 380 x 380 / 250 x 470<br />
Up to a product height of 100 mm mm 325 x 325 / 250 x 380<br />
Power supply, single-phase<br />
230 V ± 5%, 50 Hz<br />
230 V ± 5%, 60 Hz<br />
Dimensions (W x H x D) mm 790 x 1210 x 1230<br />
Weight kg (lbs.) 166 (365.2)<br />
B5<br />
Ordering Information<br />
Contura Z<br />
Part Number<br />
Leak testing unit EURO 230 V / 50 Hz 122 60<br />
Leak testing unit 230 V / 60 Hz 122 61<br />
MONITOR software 122 65<br />
Calibrated test leak 122 67<br />
Test diaphragm (50 pcs.) for measuring helium concentrations 122 68<br />
B5.29
Leak Detectors<br />
Calibrated Leaks<br />
Calibrated Leaks<br />
Calibrated leaks are required for the alignment of mass<br />
spectrometers, for the calibration of leak rates and for determining<br />
the response time of vacuum systems.<br />
Calibrated Leaks for Vacuum Applications<br />
TL 4 and TL 6<br />
Calibrated leaks without gas reservoir (capillary type of leak) for sensitivity<br />
and signal response time determinations during vacuum leak detection and<br />
for determination of sniffer sensitivity for overpressure leak detection.<br />
Nominal leak rate ranges 10 -4 mbar x l x s -1 for TL 4 and 10 -6 mbar x l x s -1<br />
for TL 6. Suitable for helium. A purging valve with hose nozzle permits a<br />
rapid exchange of the gas in the dead volume.<br />
TL 4 - 6<br />
Helium calibrated leak (capillary leak) for gross leaks, adjustable in the<br />
range between 10 -4 to 10 -6 mbar x l x s -1 , with exchangeable helium<br />
reservoir, pressure gauge and two manually operated valves. For<br />
calibration of leak rate readings and the alignment of helium mass<br />
spectrometers in the vacuum pressure range and for determining the<br />
sensitivity of sniffers in the overpressure range.<br />
TL 7<br />
Helium calibrated leak (capillary leak) with helium reservoir and<br />
electromagnetically operated valve, for installation in the ULTRATEST<br />
UL 200. Leak rate range 10 -7 mbar x l x s -1 . The electromagnetically<br />
operated valve provided permits the opening and closing of the calibrated<br />
leak to be controlled by the leak detectorÕs software.<br />
TL 8<br />
Helium calibrated leak calibrated for a leak rate in the range of<br />
10 -8 mbar x l x s -1 (helium leak rate), with gas reservoir and diaphragm<br />
shutoff valve. For alignment of a helium mass spectrometer, for calibration<br />
of the leak rate display of helium leak detectors and for response time<br />
measurements in connection with larger volumes.<br />
Advantages<br />
◆ Factory certificate (included) in accordance with DIN 55 350-18-4.2.2<br />
◆ Highly accurate<br />
◆ Very low temperature dependence<br />
◆ Determination of the nominal leak rate by comparison with a calibrated<br />
leak having a PTB 1) certificate<br />
◆ DKD 2) certificate (optional) traceable to PTB<br />
◆ Custom models for special applications<br />
The nominal leak rate applies only if the calibrated leak has been<br />
connected to a vacuum system at a pressure of less than 1 mbar.<br />
1) Federal Institution of Physics and Technology<br />
2) German Calibration Service<br />
Calibrated Leaks for Sniffer Applications<br />
These calibrated leaks have been set to a fixed value within the typical leak<br />
rate range (see Ordering Information).<br />
The exchangeable calibration gas reservoir is monitored through the<br />
built-in manometer.<br />
Helium Calibrated Leaks<br />
S-TL 4 to S-TL 6 with leak rates from 10 -4 to 10 -6 mbar x l x s -1 .<br />
Refrigerant Calibrated Leaks<br />
Available for all commonly used refrigerants with leak rates from 2 to 5 g/a<br />
and 16 g/a.<br />
B5.30
Calibrated Leaks<br />
Leak Detectors<br />
Technical Data Leak Rate Range Leak Detection Method Connection Flange<br />
TL 4, without helium gas reservoir 10 -4 mbar x l x s -1 Vacuum and sniffer DN 16 KF<br />
TL 6, without helium gas reservoir 10 -6 mbar x l x s -1 Vacuum and sniffer DN 16 KF<br />
TL 4-6, with helium gas reservoir 10 -4 to 10 -6 mbar x l x s -1 Vacuum and sniffer DN 16 KF<br />
TL 7, with helium gas reservoir 10 -7 mbar x l x s -1 Vacuum (for installation in the UL 200) DN 10 KF<br />
TL 8, with helium gas reservoir 10 -8 mbar x l x s -1 Vacuum DN 10 KF<br />
S-TL 4, with helium gas reservoir 10 -4 mbar x l x s -1 Sniffer Nozzle<br />
S-TL 5, with helium gas reservoir 10 -5 mbar x l x s -1 Sniffer Nozzle<br />
S-TL 6, with helium gas reservoir 10 -6 mbar x l x s -1 Sniffer Nozzle<br />
Calibrated leak for refrigerants 2 - 5 g/a resp. 16 g/a Sniffer nozzle<br />
Ordering Information<br />
Calibrated Leak<br />
Part Number<br />
TL 4, without helium gas reservoir *) 155 65<br />
TL 6, without helium gas reservoir *) 155 66<br />
TL 4-6, with helium gas reservoir *) 155 80<br />
TL 7, with helium gas reservoir,<br />
for installation within the UL 200 *) 140 23<br />
TL 8, with helium gas reservoir *) 165 57<br />
S-TL 4, with helium gas reservoir *) 122 37<br />
S-TL 5, with helium gas reservoir *) 122 38<br />
S-TL 6, with helium gas reservoir *) 122 35<br />
Calibrated leak for refrigerants *)<br />
(2 - 5 g/a, 0,07 - 0,18 oz/y)<br />
R 12 122 24<br />
R 22 122 25<br />
R 23 122 26<br />
R 134a 122 20<br />
R 152a 122 27<br />
R 290 122 31<br />
R 401a 122 30<br />
R 404a 122 22<br />
R 407c 122 28<br />
R 410a 122 29<br />
R 502 122 23<br />
R 600a 122 21<br />
(16 g/a, 0,56 oz/y)<br />
R 134a 122 40<br />
R 404a 122 42<br />
R 502 122 43<br />
R 600a 122 41<br />
Rubber bladder 200 20 218<br />
Hose clamp 200 20 217<br />
Helium can, 1 l 200 28 324<br />
DKD calibration for TL 7/8 154 15<br />
B5<br />
*) With factory certificate<br />
B5.31
Leak Detectors<br />
Screw-in Calibrated Leaks<br />
Screw-in Calibrated Leaks<br />
The manufacturers of helium leak testing systems need calibrated leaks of<br />
various sizes with individually adjusted leak rates for setting up and<br />
calibrating their systems.<br />
Depending on the type of application, these calibrated leaks are either<br />
installed in the test sample as a master leak or used as a continually<br />
available facility in the test chamber itself.<br />
INFICON is now offering a new family of calibrated leaks which are capable<br />
of meeting the requirements concerning type and required leak rate.<br />
Calibrated Leak with Cylindrical Casing<br />
This calibrated leak is used to check the sensitivity of a sniffing facility.<br />
Before and after the actual test, the operator checks the sensitivity of his<br />
test facility within the scope of a plausibility check.<br />
The connection on the side of the customerÕs system is provided via a<br />
VCO fitting for a diameter of 10 mm.<br />
Calibrated Leak with Screw-in Sleeve<br />
This calibrated leak is used as a so-called master leak to check the entire<br />
helium leak testing system.<br />
Generally two leaktight test samples are equipped with these calibrated<br />
leaks. These will ensure proper separation between Òpassed and<br />
rejectedÓ parts.<br />
They are fitted to the customerÕs test samples either by a welded joint or<br />
the screw-in sleeve is glued in place.<br />
Typical Applications<br />
◆ As a master calibrated leak built-in directly into the test sample<br />
◆ Directly installed to the test chamber<br />
◆ Use as a calibrated leak for sniffer applications<br />
Advantages<br />
Calibrated Leak with Pin Type Casing<br />
Serves as a calibrated leak for the entire helium leak testing system without<br />
being influenced by the presence of a test sample.<br />
Here a dummy is placed in the test chamber. The connection to the test<br />
chamber is directly by a DN 10 KF fitting. The test gas connection is either<br />
by a VCO fitting or a hose nozzle for flexible connections.<br />
◆ Various types adapted to different customer requirements<br />
◆ Simple to operate<br />
◆ Easy to install<br />
◆ Ideal installation dimensions<br />
◆ As a rule, all calibrated leaks are supplied with a certificate<br />
(factory certificate) indicating the leak rate which has been set up<br />
Connections on the side of the customerÕs system are:<br />
- 16 KF running to the vacuum chamber<br />
- Hose nozzle, 10 mm in diameter or<br />
VCO fitting, 10 mm in diameter<br />
B5.32
Screw-in Calibrated Leaks<br />
Leak Detectors<br />
Leak rate as a function of applied test pressure vs. 0 bar.<br />
B5<br />
Calibrated leak with screw-in sleeve<br />
Calibrated leak with pin type casing and hose nozzle<br />
Calibrated leak with pin type casing and VCO fitting<br />
Calibrated leak with cylindrical casing and VCO fitting<br />
Technical Data<br />
Calibrated Leak<br />
Casing Field 1 Field 2 Field 3<br />
Leak rate mbar x l x s -1 onlx 1-10 -4 10 -2 - 10 -5 10 -3 - 10 -8<br />
Ordering Information<br />
Calibrated Leak<br />
Part Number<br />
Calibrated leak<br />
With screw-in sleeve -- 143 00 143 01 143 02<br />
With pin type casing and VCO fitting 143 03 143 04 143 05 143 06<br />
With pin type casing and hose nozzle 143 07 143 08 143 09 143 10<br />
With cylindrical casing and VCO fitting 143 11 143 12 143 13 143 14<br />
* When ordering please always state leak rate, test pressure and helium concentration<br />
B5.33
Leak Detectors<br />
Helium Sample Probes (Sniffers)<br />
Helium Sample Probes (Sniffers)<br />
Helium sniffers in connection with the ULTRATEST leak detectors<br />
are used for leak testing test samples in which a helium<br />
overpressure is present. Besides accurate pinpointing of leaks, it is<br />
also possible to determine the leak rate of the escaping helium.<br />
Helium sniffer line<br />
SL 200 P<br />
Helium sniffer QUICK-TEST QT<br />
100 with sniffer<br />
Advantages<br />
Helium Sniffer Line SL 200 for the UL 200<br />
◆ Sniffer line connects directly at the test connection<br />
◆ Very fast response<br />
◆ Extremely low detection limit< 1 x 10 -7 mbar x l x s -1<br />
◆ Rigid and flexible sniffer tips 120 mm (included)<br />
Helium Sniffers QUICK-TEST QT 100 for the<br />
UL 100, UL 200 and UL 500<br />
◆ Sniffer leak detection for greater distances between test object<br />
and leak detector<br />
◆ Diaphragm pump for sampling the search gas<br />
◆ Smallest detectable leak rate 1 x 10 -6 mbar x l x s -1<br />
◆ Short response and decay times<br />
◆ High sniffer velocity<br />
◆ Built-in transformer for adaptation to any required power supply voltage<br />
Typical Applications<br />
◆ Storage and transportation vessels for gases and liquids<br />
◆ Gas supply systems<br />
◆ Gas compressors<br />
◆ Components for the cooling and air conditioning industries<br />
◆ Heat pumps and components for thermal energy recovery units<br />
◆ Chemical production plants<br />
◆ Supply and phone lines laid in the ground<br />
◆ Power station condensers and turbines<br />
◆ Window and door seals of cars, refrigerators, etc.<br />
◆ Revision checks on leak testing systems<br />
◆ Measurement of helium concentrations ranging from ppm to %<br />
◆ All hollow objects exposed to overpressures<br />
Technical Data SL 200 QT 100<br />
Smallest detectable leak rate mbar x l x s -1 < 10 -7 10 -6<br />
Supply voltage Ð 220 V, 50/60 Hz switchable<br />
to 110/120/240 V, 50/60 Hz<br />
Signal response time, approx. at a length of 5 m s < 1 1<br />
20 m s Ð 8<br />
50 m s Ð 20<br />
Connection flange DN 25 KF 25 KF<br />
Weight kg (lbs.) 0.6 (1.32) 3.5 (7.72 )<br />
B5.34<br />
Ordering Information<br />
SL 200 QT 100<br />
Part Number<br />
Helium sniffer line, SL 200 P, 4 m long, straight handle with red / green LED<br />
for go / no-go indication, rigid and flexible sniffer tip 120 mm 140 05 Ð<br />
Helium sniffer QUICK-TEST QT 100 Ð 155 94<br />
Sniffer line for the QT 100 5 m Ð 140 08<br />
20 m Ð 140 09<br />
50 m Ð upon request
Accessories for the UL 500 and UL 500 dry<br />
Leak Detectors<br />
Accessories for the UL 500 and UL 500 dry<br />
Helium sniffer line SL 200 P<br />
1. V.24/RS 232 C Interface<br />
V.24/RS 232 C computer interface pcb, including software and additional<br />
mechanical installation components. The installation of the interface permits<br />
remote control of the UL 500 and reading of the measurement data by a<br />
computer or a terminal. In the PRINT ONLY mode the measurement data<br />
are output continuously to a printer. The baud rate is adjustable in six steps<br />
from 300 to 9600 baud. The UL 500 operates as data terminal equipment<br />
(DTE). A standard 25 way Sub-D connector is used.<br />
2. Exhaust Filter Set<br />
(TRIVAC D 4 B and D 25 B)<br />
Kit for installation by the user.<br />
3. Lifting Eyes<br />
Kit for installation by the user.<br />
4. Search Gas Spray Gun<br />
The search gas spray gun with PVC hose (5 m long) is used for well aimed<br />
spraying of search gas at places where a leak is suspected.<br />
5. Trigger Relay and Start/Stop Pcb.<br />
Trigger relay board with three normally open floating contacts; switching<br />
capacity 2 A, 60 V max. (resistive load) for LIMIT LOW, LIMIT HIGH,<br />
READY. Start and Stop inputs (optocouplers) for remote control. A standard<br />
25 way Sub-D connector is used.<br />
Antistatic Mat (not shown)<br />
(10 -11 ½ to DIN 53 482, VDE 0303, Part 3) for installation by the user.<br />
Replacement Ion Source (not shown)<br />
Complete replacement component, including two built-in iridium cathodes.<br />
Seal Kit (not shown)<br />
The seal kit contains all gaskets which are required for routine servicing of<br />
the instruments (with the exception of the mechanical vacuum pumps).<br />
Electrical Gas Ballast and<br />
Fresh Air Inlet System (not shown)<br />
This kit for installation by the user contains a valve block<br />
(electro-magnetically operated), hose lines and screw-in adapters.<br />
When using this facility the gas ballast will be open slightly (by about 10%)<br />
all the time in order to prevent the accumulation of helium in the backing<br />
pumps during continuous industrial leak testing of components having<br />
relatively high leak rates.<br />
The gas ballast will then only fully open when entering the appropriate<br />
command via the keypad of the UL 500. With this option fitted, the gas<br />
ballast can only be closed manually.<br />
In instruments beginning with Serial No. D 880200001 the mounting holes<br />
for the valve block are already provided.<br />
Ordering Information<br />
Accessories<br />
Part Number<br />
V.24/RS232C Interface 156 05<br />
Exhaust filter set (TRIVAC D 4 B and D 25 B) 200 59 658<br />
Lifting eyes 200 59 475<br />
Antistatic mat 200 59 665<br />
Replacement ion source 165 04<br />
Set of gaskets 200 59 168<br />
Electrical gas ballast and fresh air inlet system 200 59 643<br />
Search gas spray gun 165 55<br />
Trigger relay and Start/Stop pcb. 156 06<br />
B5<br />
B5.35
Leak Detectors Accessories for UL 200, UL 200 dry and Modul 200<br />
Accessories for UL 200, UL 200 dry and Modul 200<br />
CART 200 (standard steel, painted)<br />
CART 200/CART 200 CR<br />
CART 200 CR (stainless steel)<br />
For the UL 200, UL 200 dry and Modul 200; including shelf and holder for<br />
gas cylinders. CART 200 CR (closed version) is made of stainless steel and<br />
is clean room compatible.<br />
Transport case<br />
Transport Case<br />
For impact protected transportation of the UL 200; complete with strong<br />
carrying handles and plastic castors. Separate case for accessories.<br />
The carts are prepared for accommodating the TriScroll 600 and the<br />
TRIVAC D 25 B pumps.<br />
Replacement ion source<br />
Replacement Ion Source<br />
Partial flow system without pump<br />
Complete replacement component, including two built-in yttrium coated<br />
iridium cathodes.<br />
Partial Flow System<br />
For evacuation of test objects up to 100 l. Gross leak detection up to<br />
10 mbar x l x s -1 . Maximum test pressure: 1000 mbar.<br />
Equipment:<br />
Valve block (with inlet and venting valve) plus right-angle bellows valve<br />
DN 25 KF made of stainless steel, solenoid drives, suited for remote control<br />
by the UL 200, mains power 220 V / 50 Hz.<br />
The partial flow systems are available without pumps or as complete<br />
systems with oil-sealed TRIVAC D 16 B / D 25 B rotary vane pumps or<br />
TriScroll 600 dry compressing pumps.<br />
Extension line<br />
8 m Extension Line<br />
The use of extension lines permits operation of the ULTRATEST UL 200 up<br />
to 30 m away from the test objects. A maximum of three extension lines<br />
(of 8 m each) may be connected in series.<br />
PC Software LeakWare (not shown)<br />
The Windows PC software is used for data acquisition, documentation of the<br />
measurements and to control the operation of the leak detector.<br />
B5.36
General Accessories<br />
Leak Detectors<br />
Ordering Information<br />
Accessories<br />
Part Number<br />
Transport case 140 96<br />
Carts<br />
CART 200 140 93<br />
CART 200 CR, stainless steel, with fan and clean room filter 110 V 140 94<br />
220 V 140 95<br />
Partial flow system for UL 200<br />
220 V, without pump 140 20<br />
110 V, without pump 140 28<br />
220 V, with D 25 B 140 25<br />
110 V, with D 16 B 140 26<br />
100 V, with D 25 B 140 27<br />
Partial flow system for UL 200 dry<br />
Without pump 140 29<br />
With TriScroll 600 114 88<br />
AF 16-25 exhaust filter, for partial flow system 189 11<br />
Replacement ion source 165 04<br />
PC software LeakWare 140 90<br />
8 m long extension line 140 22<br />
General Accessories<br />
B5<br />
Search Gas Spray Gun<br />
Test-Port Chamber<br />
Spring-loaded lid; 2 3/4" ID, 3/4" deep; DN 40 KF fitting.<br />
The search gas spray gun with PVC hose (5 m long) is used for well aimed<br />
spraying of search gas at places where a leak is suspected.<br />
Ordering Information<br />
Accessories<br />
Part Number<br />
Base Plate<br />
12" diameter stainless steel base plate.<br />
Test-port chamber<br />
DN 25 KF 122 44<br />
DN 40 KF 122 45<br />
Base plate<br />
DN 25 KF 122 46<br />
Search gas spray gun 165 55<br />
B5.37
Leak Detectors<br />
Connection Flanges and Connection Components<br />
Connection Flanges<br />
Leak Detectors Helium Sniffers Calibrated Leaks<br />
ULTRATEST UL 200 Ð DN 25 KF SL 200 Ð DN 25 KF TL 4 - 6 Ð DN 16 KF<br />
ULTRATEST UL 200 dry Ð DN 25 KF QT Ð DN 25 KF TL 8 Ð DN 10 KF<br />
MODUL 200 Ð DN 25 KF ST 100 - DN 25 KF<br />
ULTRATEST UL 500 Ð DN 40 KF<br />
ULTRATEST UL 500 dry Ð DN 40 KF<br />
If components of the same nominal width are connected, only one centering ring and one clamping ring is required.<br />
Connection Components<br />
When wanting to connect accessories (helium sniffer and calibrated leaks) to a leak detector, the following reducers and components may be necessary:<br />
Centering Rings Clamping Rings<br />
Reduction Reducers Stainless Steel / FPM Aluminum<br />
DN 25 / 16 KF Part No. 183 86, aluminum or DN 25 KF Part No. 883 47 DN 20 / 25 KF Part No. 183 42<br />
Part No. 885 04, stainless steel DN 16 KF Part No. 883 46 DN 10 / 16 KF Part No. 183 41<br />
DN 25 / 10 KF Part No. 183 86, aluminum or DN 10 / 16 KF Part No. 883 56 DN 20 / 25 KF Part No. 183 42<br />
Part No. 885 04, stainless steel DN 25 KF Part No. 883 47 DN 10 / 16 KF Part No. 183 41<br />
DN 40 / 25 KF Part No. 183 87, aluminum or DN 25 KF Part No. 883 47 DN 20 / 25 KF Part No. 183 42<br />
Part No. 885 05, stainless steel DN 40 KF Part No. 883 48 DN 32 / 40 KF Part No. 183 43<br />
DN 40 / 16 KF Part No. 183 89, aluminum or DN 16 KF Part No. 883 46 DN 10 / 16 KF Part No. 183 41<br />
Part No. 885 07, stainless steel DN 40 KF Part No. 883 48 DN 32 / 40 KF Part No. 183 43<br />
DN 40 / 10 KF Part No. 183 89, aluminum or DN 10 / 16 KF Part No. 883 56 DN 10 / 16 KF Part No. 183 41<br />
Part No. 885 07, stainless steel DN 40 KF Part No. 883 48 DN 32 / 40 KF Part No. 183 43<br />
The following metal hoses are recommended to connect the leak detectors to systems:<br />
Nominal Width Length Part Number<br />
DN 16 KF 1.0 m 868 01<br />
DN 16 KF 0.5 m 867 91<br />
DN 25 KF 1.0 m 868 03<br />
DN 25 KF 0.5 m 867 93<br />
DN 40 KF 1.0 m 868 05<br />
DN 40 KF 0.5 m 867 95<br />
B5.38
B6<br />
Vacuum Gauges<br />
Vacuum Gauges and Control Instruments
Vacuum Gauges<br />
Contents<br />
General<br />
Basic Terms of Vacuum Metrology . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B6.3<br />
Transmitter Technology . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B6.4<br />
Measurements Units Conversion Chart . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C1.3<br />
Sensors<br />
SKYª Capacitance Diaphragm Gauge. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B6.6<br />
CDG025, CDG045 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B6.6<br />
CDG045-SD . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B6.9<br />
Bayard-Alpert Pirani Gauge BPG400 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B6.12<br />
Pirani Standard Gauge. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B6.15<br />
PSG400, PSG400-S . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B6.15<br />
PSG100-S, PSG101-S . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B6.17<br />
Bayard-Alpert Gauge . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B6.19<br />
BAG100-S, BAG101-S . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B6.17<br />
Penning Gauge PEG100 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B6.22<br />
Controller<br />
Vacuum Gauge Controller VGC103 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B6.24<br />
Cables . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B6.25<br />
Vacuum Switch<br />
Vacuum Switch VSA100. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B6.27<br />
Calibration<br />
Calibration Service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B6.28<br />
B6.2
Basic Terms of Vacuum Metrology<br />
Vacuum Gauges<br />
Basic Terms of Vacuum Metrology<br />
Today, the total range of measurable vacuum pressure extends from<br />
atmospheric pressure (about 1000 mbar, 750 Torr) down to 10 -12 mbar<br />
(Torr) Ð over 15 decades. The instruments used for measuring pressure<br />
within this wide range are called vacuum gauges. It is impossible to create<br />
a single vacuum sensor capable of performing quantitative measurements<br />
throughout the entire pressure range. Therefore, a variety of different<br />
vacuum gauges are available, each with its own characteristic<br />
measurement range, commonly extending over several decades.<br />
Note the difference between direct and indirect pressure measurements.<br />
With direct pressure measurements, vacuum gauge readings are<br />
independent of gas type. Vacuum gauges, in which pressure is<br />
determined directly by recording the force acting on the surface of a<br />
diaphragm, are common.<br />
With indirect pressure measurements, pressure is determined as a function<br />
of a pressure-dependent property of the gas (i.e. thermal conductivity or<br />
resulting ion current). These properties not only depend on pressure, but<br />
also on the molar mass of the gases. Therefore, vacuum gauge presssure<br />
readings relying on indirect pressure measurements are gas composition<br />
dependent. These readings usually relate to air or nitrogen as the<br />
measurement gas. Appropriate correction factors must be applied for the<br />
measurement of other gases or vapors.<br />
Vacuum Gauges with Pressure Readings<br />
Independent of the Type of Gas<br />
Capacitance Diaphragm Vacuum Gauges<br />
A capacitance diaphragm gauge has two chambers. One is connected to<br />
the vacuum to be measured; the other holds a certain reference vacuum.<br />
The chambers are separated through a metal coated ceramic or thin metal<br />
membrane. Together with a parallel electrode this membrane functions as a<br />
condensator. When the pressure in one chamber is different from the<br />
pressure in the other chamber the membrane bends and thus changes the<br />
capacitance. The change is registered and converted into a pressure signal,<br />
a voltage proportional to the pressure. This method makes gas type<br />
independent absolute pressure measurement possible. Absolute capacitance<br />
gauges can accurately measure pressures from 10 -5 mbar (Torr) to well above<br />
atmospheric pressure using capacitance gauges having diaphragms of<br />
different thickness. 1)<br />
INFICON improvements in materials composition provide more stable and<br />
reliable measurements over an extended period of operation. At the same<br />
time, corrosion resistance is greatly enhanced by using ceramic instead<br />
of metal.<br />
Vacuum Gauges with Pressure Readings<br />
Depending on the Type of Gas<br />
Thermal Conductivity Vacuum Gauges (Pirani)<br />
The energy transfer from a hot wire by a gas can be used to measure the<br />
pressure. The heat is transferred into the gas by molecular collisions with<br />
the wire, i.e. by heat conduction and the rate at which the heat is<br />
transferred depends on the thermal conductivity of the gas.<br />
The heat loss from a wire (typically 5 µm to 20 µm in diameter) can be<br />
determined indirectly with a Wheatstone bridge circuit which both heats the<br />
wire and measures its resistance and therefore its temperature.<br />
A thin metal wire is suspended with at least one side electrically insulated<br />
in the gauge head and is exposed to the gas. Tungsten, nickel, iridium or<br />
platinum may be used for the wire. The wire is electrically heated and the<br />
heat transfer is electronically measured. There are three common operating<br />
methods: constant temperature method, constant voltage bridge, and the<br />
constant current bridge. All these methods indirectly measure the<br />
temperature of the wire by its resistance.<br />
This measurement principle uses the thermal conductivity of gases for<br />
pressure measurements from 10 -4 mbar (Torr) to atmospheric pressure.<br />
INFICON improvements in temperature compensation provide stable<br />
pressure readings in spite of large temperature changes, especially when<br />
measuring low pressures.<br />
Ionization Gauges<br />
When the pressure in a vacuum system is below about 10 -4 mbar (Torr),<br />
direct methods of measurement of the pressure by means such as the<br />
deflection of a diaphragm or measurement of bulk gas properties such as<br />
thermal conductivity are no longer readily applicable. Hence, it is necessary<br />
to resort to methods which essentially count the number of gas molecules<br />
present i.e., it is the number density not the pressure which is measured.<br />
One of the most convenient methods to measure the number density is to<br />
use some technique to ionize the gas molecules and then collect the ions.<br />
The resulting ion current is directly related to pressure and a calibration can<br />
be performed. The probability of ionizing a gas molecule will depend on a<br />
variety of factors and hence, the ionization gauge will have different<br />
sensitivity values for different gas species.<br />
B6<br />
1) For p < 1 mbar and T Gauge T Vacuum the linearity of a gauge with a controlled temperature is<br />
influenced by the thermal transpiration (gas type dependent) at the maximum in the same order<br />
of magnitude as the zero point stability. See K. F. Poulter, et al., Vacuum 33, 331 (1983);<br />
W. Jitschin and P. Ršhl, J. Vac. Sci. Technol. A, Vol. 5, No. 3, 1987.<br />
B6.3
Vacuum Gauges<br />
Transmitter Technology<br />
Hot Cathode Ionization Vacuum Gauges<br />
In a hot cathode ionization gauge, the electrons emitted from the surface of<br />
a hot filament are attracted to a highly transparent grid made from very thin<br />
wire and at a positive electrical potential. With the grid so open, there is a<br />
very high probability that the electron will pass right through the grid and<br />
not strike a wire. If the grid is surrounded by a screen at a negative<br />
electrical potential, the electron will be repelled by this screen and be<br />
attracted back to the grid. This process can happen many times before the<br />
electron finally hits the grid and is lost. As a result, very long electron paths<br />
can be achieved in a small volume, increasing the probability of ionizing a<br />
gas molecule. The resulting ions are attracted directly to the collector.<br />
Most hot cathode sensors used are based on this Bayard-Alpert<br />
arrangement of electrodes. With this electrode arrangement it is possible<br />
to make measurements in the pressure range from 10 -10 to 10 -2 mbar (Torr).<br />
Other electrode arrangements permit access to a higher range of pressures<br />
from 10 -10 mbar (Torr) up to 10 -1 mbar (Torr). For measurement of pressures<br />
below 10 -10 mbar (Torr), extractor ionization sensors are employed. In<br />
extractor ionization gauges, ions are focused on a very thin and short ion<br />
detector. Due to the geometry of this system, interfering influences such<br />
as X-ray effects and ion desorption are almost completely eliminated.<br />
The extractor ionization gauge permits pressure measurements in the<br />
range from 10 -12 to 10 -4 mbar (Torr).<br />
INFICON improvements in electrode arrangements provide a wider<br />
measurement range combined with excellent repeatability. The Bayard-<br />
Alpert Pirani Combination Gauge further improves the measurement range<br />
in an easy to use package.<br />
Cold Cathode Ionization Vacuum Gauges (Penning)<br />
The cold cathode ionization gauge dispenses with the hot filament and uses<br />
a combination of electric and magnetic fields. If one applies a potential of<br />
a few kilovolts between a parallel plate capacitor in the presence of a gas<br />
pressure of a few mbar (Torr), a glow discharge will result. In the glow<br />
discharge, energetic free electrons interact with neutral molecules to<br />
produce ions and more free electrons. The ions are attracted to the negative<br />
electrode and when they strike it, secondary electrons are created, which<br />
are attracted to the positive electrode. The glow discharge continues as<br />
long as the number of electrons being created is equal to or greater than<br />
the number being removed at the positive electrode.<br />
Transmitter Technology<br />
Transmitters convert an analog input signal (pressure) measurement value<br />
into an analog normed electronic measurement signal, i.e. 0 Ð 10 V.<br />
This measurement signal is typically available as a linear or logarithmic<br />
output signal. The advantages of transmitters over conventional gauges<br />
with a separate signal processing device are:<br />
♦ Sensor and electronics in one compact package<br />
♦ Large cost savings<br />
♦ Direct connection to customer control units<br />
♦ A simple formula to convert the measurement signal into any desired<br />
pressure unit<br />
♦ Clear error messages can be transmitted because of the structured<br />
measurement signals<br />
♦ Digital interfaces (RS 232 C, Profibus, DeviceNetª) allow direct<br />
measurement readings in digital form<br />
♦ Integrated setpoint for direct process control based on<br />
pressure measurement<br />
♦ Measurement signals can be transmitted over greater distances<br />
The INFICON transmitter vacuum gauge line provides unparalleled<br />
performance for system manufacturers taking advantage of unique<br />
technologies combined with cost saving potential. The transmitter<br />
technology combines the sensor with the control and evaluation electronics<br />
in one compact package. Several output concepts like 0 Ð 10 V analog<br />
output, digital RS 232 C and fieldbus communications are available.<br />
INFICON transmitter technology reduces the costs for vacuum<br />
measurement and system integration to a minimum.<br />
The Penning gauge design employs a ring as the positive electrode<br />
(anode), which is centrally located between two electrically connected,<br />
negatively charged, parallel plates (cathodes). Electrons are attracted to the<br />
plane of the ring. Upon arrival, these electrons pass through the ring, and<br />
continue to oscillate between the two cathode plates. This configuration<br />
lowers the pressure at which a discharge can be sustained by increasing<br />
the electron path length. By introducing a magnetic field this electron path<br />
becomes a spiral, significantly increasing the path length. This further<br />
lowers the pressure at which the discharge can be maintained.<br />
INFICON design concepts permit safe and reliable operation of ÒPenningÓ<br />
sensors in the pressure range from 1á10 -9 mbar to 1á10 -2 mbar (Torr).<br />
B6.4
Transmitter Technology<br />
Vacuum Gauges<br />
Conventional Measurement Systems<br />
Conventional vacuum measurement systems consist of separate sensors<br />
and control units. The unconditioned sensor signal has to be transmitted to<br />
the control and evaluation unit which makes the system susceptible to<br />
interferences and therefore requires special shielded cabling. Integration<br />
into vacuum systems is space consuming and usually inconvenient since<br />
the controller outputs are not linear or described completely by one<br />
simple formula and therefore require look-up tables to be integrated into<br />
the software.<br />
Transmitter Based Measurement Systems<br />
Analog Technology<br />
Digital Technology<br />
Digital interfaces (RS 232 C, Profibus DP, DeviceNetª) allow direct<br />
measurement readings in digital form and further enhance the advantages<br />
of transmitter technology. INFICON digital transmitters provide control of<br />
processes from one control position.<br />
This allows communication of exact digital information, independent control,<br />
maintenance and diagnostic routines for each connected instrument and<br />
simplifies the connection diagram further.<br />
Measures of control include: monitoring of measurement values, the<br />
automatic zero point adjustment of gauges, reminding the operator of<br />
scheduled maintenance work, warning signals in case of instrument<br />
failure and more.<br />
INFICON digital transmitters offer the flexibility and control of network<br />
communications further enhancing system quality and efficiency.<br />
B6<br />
The combination of sensor and electronics in one package simplifies the<br />
connection scheme of vacuum systems and saves valuable space and costs.<br />
The measuring signal is converted into an analog 0 Ð 10 V output signal,<br />
which can be directly converted to a digital signal and evaluated by a PLC or<br />
other control. This eliminates the need for a separate control and display unit.<br />
No look-up table is required anymore since the analog output signal is<br />
described completely by one simple formula. INFICON analog transmitters<br />
are the most economic solution for advanced vacuum measurement.<br />
B6.5
Vacuum Gauges<br />
SKY TM Capacitance Diaphragm Gauge<br />
SKY Capacitance Diaphragm Gauge<br />
CDG025, CDG045<br />
The SKY CDG uses an ultrapure aluminum oxide ceramic<br />
diaphragm instead of the traditional metal diaphragms used by<br />
other manufacturers. This ultrapure ceramic diaphragm is virtually<br />
corrosion proof resulting in improved reliability, stability and<br />
extended life time, even under the harshest conditions. SKY CDGs<br />
are used by several leading semiconductor system manufacturers.<br />
Patent pending on sensor and diaphragm<br />
Advantages<br />
♦ Marginal zero drift<br />
♦ Virtually corrosion proof Ð long sensor life results in reduced downtime<br />
thus reducing cost of ownership<br />
♦ Superior accuracy and repeatability over long period of operation<br />
♦ Better long-term and temperature stability<br />
♦ Less sensitive to frequent pressure cycles to atmosphere<br />
♦ Eliminates isolation valve (depending on operation mode)<br />
♦ Less susceptible to particles and process by-products through<br />
protective chamber<br />
♦ Fastest warm up time<br />
♦ Lower cost of investment<br />
♦ Supply with +15 V DC or +24 V DC<br />
Ceramic Diaphragms<br />
The diaphragm is the crucial element of any capacitance diaphragm gauge.<br />
Any alteration of the diaphragmÕs deflection characteristics leads to a<br />
change in the displayed pressure.<br />
The INFICON aluminum oxide ceramic (Alumina) diaphragms are especially<br />
designed and manufactured for the purpose of measuring also very low<br />
pressures. Ceramic membranes are produced from ultra pure, fine grained<br />
alumina powder in several sintering steps to achieve a dense, stress free<br />
and tension free diaphragm for the sensors. Several firing processes above<br />
1500 ¡C guarantee a purity of 99.5% or more than 99.9%. With this firing<br />
technique an exceptional uniformity of the material is achieved. Aluminum<br />
oxide ceramic diaphragms change less during operation than commonly<br />
used metal diaphragms. Temperature induced stretching, pressure and<br />
material induced creeping, as well as material alterations via corrosion, are<br />
greatly reduced or even eliminated in ceramic diaphragms. The pressure<br />
reading with ceramic diaphragms is more accurate and repeatable than with<br />
metal diaphragms over an extended period of time.<br />
♦ Drop-in replacement of existing CDGs due to interface compatibility<br />
Typical Applications<br />
♦ Etch, CVD, PVD, and other semiconductor production methods<br />
♦ Chemical process engineering<br />
♦ Reference sensor for monitoring of test instruments in accordance<br />
with DIN/ISO 9000<br />
B6.6
SKY TM Capacitance Diaphragm Gauge<br />
Vacuum Gauges<br />
A) Vacuum connection<br />
Stainless Steel, AlSl316L (18% Cr, 10% Ni, 3% Mo, 69% Fe)<br />
B) Protective chamber<br />
Stainless Steel, AlSl316L (18% Cr, 10% Ni, 3% Mo, 69% Fe)<br />
C) Plasma shield<br />
Stainless Steel, AlSl316L (18% Cr, 10% Ni, 3% Mo, 69% Fe)<br />
D) Metal-ceramic connection<br />
Vacon 70 (28% Ni, 23% Co, 49% Fe)<br />
and Braze, Ti, Ag, Cu<br />
E) Measurement chamber<br />
F) Reference chamber<br />
G) Diaphragm<br />
Al 2<br />
O 3<br />
³ 99.9% for 0.1 Ð 10 Torr<br />
Al 2<br />
O 3<br />
³ 99.5% for 100 Ð 1000 Torr<br />
H) Electrode<br />
Gold<br />
I) Glass ceramic solder<br />
J) Sensor housings<br />
Al 2<br />
O 3<br />
³ 99.5%<br />
Better Mechanical Stability<br />
The construction of the measuring cell is based on a symmetry principle.<br />
The diaphragm is bonded to the lower and upper sensor housing with the<br />
same material under the same process. Unwanted asymmetric tension of<br />
the diaphragm is avoided. Another benefit of such a relatively large bond is<br />
the good thermal contact between the housings and the diaphragm.<br />
Thanks to this construction the sensor has excellent mechanical and thermal<br />
stability. Even frequent pressure changes and overpressures cannot alter<br />
such a cell. The measuring results are consistent and remain excellent over<br />
much longer periods of operation than with metal ones.<br />
Better Temperature Stability<br />
Aluminum oxide ceramic has a significantly lower thermal expansion<br />
coefficient than the metals traditionally used. Conventional CDGs are<br />
constructed of a combination of ceramic parts and a metal diaphragm.<br />
The different thermal expansion of these materials can cause tension on the<br />
diaphragm resulting in a distorted pressure reading. The sensor of a<br />
SKYª CDG consists only of aluminum oxide ceramic. Because of this the<br />
span coefficient of a temperature compensated SKY CDG (CDG025) is<br />
improved over a conventional CDG by a factor of four. That of a temperature<br />
controlled gauge (CDG045) by a factor of two.<br />
High Corrosion Resistance<br />
Aluminum oxide ceramic is highly corrosion resistant. ThatÕs why the<br />
SKY CDGs are particularly useful under corrosive process conditions<br />
and deliver reliable measurement values much longer than conventional<br />
(metal diaphragm) CDGs. Corrosive process gases can impair or<br />
damage metal membranes to the point where accuracy and<br />
repeatability are adversely effected or the gauge ultimately fails.<br />
B6<br />
B6.7
Vacuum Gauges<br />
SKY TM Capacitance Diaphragm Gauge<br />
Technical Data<br />
Measurement range F.S. Torr 1)<br />
Lowest suggested control pressure<br />
Lowest suggested reading<br />
Lowest reading<br />
Accuracy 2)<br />
Torr<br />
Torr<br />
Torr<br />
Resolution<br />
% F.S.<br />
Temperature effects<br />
Zero coefficient<br />
% F.S./¡C<br />
Span coefficient<br />
% of reading/¡C<br />
Temperature<br />
Operation (ambient) ¡C<br />
Bakeout at flange ¡C<br />
Pressure, max. absolute<br />
Output signal (analog)<br />
Supply<br />
Voltage<br />
Operating 3) / heating current<br />
Response time<br />
Electrical connector<br />
Materials exposed to process media<br />
Torr<br />
VDC<br />
VDC<br />
mA<br />
ms<br />
Internal volume cm 3 (inch 3 )<br />
Weight<br />
Protection type<br />
kg<br />
CDG025<br />
CDG045<br />
Temperature Compensated Temperature Controlled 45 °C<br />
1000 100 10 1 1000 100 10 1 0.1<br />
5 5 x 10 -1 5 x 10 -2 5 x 10 -3 5 5 x 10 -1 5 x 10 -2 5 x 10 -3 5 x 10 -4<br />
5 x 10 -1 5 x 10 -2 5 x 10 -3 5 x 10 -4 5 x 10 -1 5 x 10 -2 5 x 10 -3 5 x 10 -4 5 x 10 -5<br />
1 x 10 -1 1 x 10 -2 1 x 10 -3 1 x 10 -4 1 x 10 -1 1 x 10 -2 1 x 10 -3 1 x 10 -4 1 x 10 -5<br />
0.2 0.15<br />
0.0015 0.0015 0.0015 0.0025 0.0015 0.0015 0.0015 0.0025 0.0025<br />
0.005 0.005 0.005 0.015 0.0025 0.0025 0.0025 0.0025 0.005<br />
0.01 0.01<br />
+5 É +50 +15 É +40<br />
+110 +90<br />
3000 2000 2000 2000 3000 2000 2000 2000 1000<br />
0 É +10 0 É +10<br />
+15 (±5%) or +24 (±10%) +15 (±5%) or +24 (±10%)<br />
60/- 60/- 220/440 220/670<br />
< 30 < 30 < 30 < 100 < 30 < 30 < 30 < 100 < 100<br />
D sub, 15 pin<br />
aluminum oxide ceramic (Al 2 O 3 ), stainless steel (AISI316L) 4) , Vacon 70 5)<br />
6 (0.36) 7 (0.43)<br />
0.26 0.49<br />
IP 30<br />
Ordering Information<br />
1000 100 10 1 1000 100 10 1 0.1<br />
Vacuum connector<br />
1/2Ó tube<br />
DN 16 ISO-KF<br />
DN 16 CF-R<br />
Swagelok¨ 8 VCR¨, female<br />
Terminal strip connector<br />
1) SKYª Capacitance Diaphragm Gauges are also available calibrated in mbar and Pa<br />
2) Non-linearity, hysteresis, repeatability at 25 ¡C ambient operating temperature without<br />
temperature effects<br />
360-000 361-000 362-000 364-000 360-010 361-010 362-010 364-010 365-010<br />
360-001 361-001 362-001 364-001 360-011 361-011 362-011 364-011 365-011<br />
360-002 361-002 362-002 364-002 360-012 361-012 362-012 364-012 365-012<br />
360-003 361-003 362-003 364-003 360-013 361-013 362-013 364-013 365-013<br />
374-990<br />
3) Typical value at 25 ¡C ambient temperature after reaching operating temperature<br />
4) 18% Cr, 10% Ni, 3% Mo, 69% Fe<br />
5) 28% Ni, 23% Co, 49% Fe<br />
mm (inches)<br />
mm (inches)<br />
B6.8
SKY TM Capacitance Diaphragm Gauge<br />
Vacuum Gauges<br />
SKY Capacitance Diaphragm Gauge<br />
CDG045-SD<br />
The SKY CDG045-SD provides the most powerful technology of<br />
network communications and advanced sensor technology available<br />
in the market.<br />
The SKY CDG045-SD combines the advantages of DeviceNet<br />
network communications with the innovative technology of aluminum<br />
oxide ceramic CDGs. DeviceNet improves system quality, lowers cost<br />
and increases efficiency. It allows communication of exact digital<br />
information, independent control, maintenance and diagnostic routines<br />
for each connected instrument and simplifies the connection diagram.<br />
The SKY CDG045-SD conforms to the ODVA Specifications defined<br />
by the Semiconductor Special Interest Group.<br />
Patent pending on sensor and diaphragm<br />
Advantages<br />
♦ Marginal zero drift<br />
♦ Virtually corrosion proof Ð long sensor life results in reduced downtime<br />
thus reducing cost of ownership<br />
♦ Superior accuracy and repeatability over long period of operation<br />
♦ Better long-term and temperature stability<br />
♦ Less sensitive to frequent pressure cycles to atmosphere<br />
♦ Eliminates isolation valve (depending on operation mode)<br />
♦ Less susceptible to particles and process by-products through<br />
protective chamber<br />
♦ Fastest warm up time<br />
♦ Lower cost of investment<br />
♦ Supply with 11 to 25 V DC<br />
♦ Drop-in replacement of existing CDGs due to interface compatibility<br />
Typical Applications<br />
♦ Etch, CVD, PVD, and other semiconductor production methods<br />
♦ Chemical process engineering<br />
♦ Reference sensor for monitoring of test instruments in accordance<br />
with DIN/ISO 9000<br />
Using the SKY CDG045-SD with Fieldbus interface, processes can be<br />
controlled from one central position. The measures of control include:<br />
monitoring of measurement values, the automatic zero point adjustment<br />
of gauges, reminding the operator of scheduled maintenance work,<br />
warning signals in case of instrument failure and more.<br />
DeviceNet is a Fieldbus protocol with trunkline-dropline configuration<br />
which makes it possible to connect industrial instruments such as sensors,<br />
switches, valves, actuators etc. in a master/slave or peer-to-peer network.<br />
Such networks can connect up to 64 individual knots or instruments per<br />
network segment with one host (such as a PLC or PC). Integrated<br />
instruments can receive orders and requests from the host, execute them<br />
and then send information back as a result. DeviceNet offers the simplicity<br />
of running the signal as well as the power supply through the same<br />
Fieldbus cable. Knots can also be removed from the network without<br />
having to turn them off and without having to disconnect the network.<br />
DeviceNet uses the CAN (Controller Area Network) communications<br />
protocol for data transfer. CAN was originally developed for the automobile<br />
industry for applications such as control of ABS breaking systems and air<br />
bags Ð applications requiring fast response times and high reliability.<br />
The same speed and reliability in data transfer is utilized in the INFICON<br />
sensors with DeviceNet.<br />
DeviceNet is an open networking standard that follows the DeviceNet<br />
specifications Ð this means that it is manufacturer independent.<br />
INFICON sensors adhere to these documented standards and guarantee<br />
real plug and play functionality.<br />
B6<br />
B6.9
Vacuum Gauges<br />
SKY TM Capacitance Diaphragm Gauge<br />
Protocol<br />
Technical Data<br />
Data rate switch<br />
Cable length<br />
125 Kbps m (ft)<br />
250 Kbps m (ft)<br />
500 Kbps m (ft)<br />
MAC ID<br />
Network size<br />
Digital functions<br />
Analog functions<br />
Visual communication indicators<br />
Electrical connector<br />
Specifications<br />
(ODVA Semiconductor Special Interest Group<br />
DeviceNet ODVA Specifications<br />
CDG045-SD<br />
DeviceNetª, group 2 slave only<br />
25 k, 250 k, 500 kBaud and programmable over network<br />
500 (1650)<br />
250 (825)<br />
100 (330)<br />
2 switches (address 00-63) or programmable over network<br />
up to 64 nodes per segment<br />
Read pressure, set 2 interlock relays A + B,<br />
select units: Torr, mbar, Pa, set zero over network (digital only)<br />
analog zero must be set with zero potentiometer,<br />
monitor: heater, gauge status, trip point high and low hysteresis,<br />
save state allows definition of behavior in case of error, detailed alarm and warning information<br />
Pressure monitor analog output 0 Ð 10 V<br />
LED network status (green/red)<br />
LED module status (green/red)<br />
2 LED interlock relays A + B (green/off)<br />
Micro style connector (with power and signal line), 5 pin<br />
DeviceNetª ÒVacuum Gauge Device ProfileÓ<br />
Interface Guidelines for DeviceNetª Devices on Semiconductor Manufacturing Tools<br />
Interface Guidelines Conformance Test Procedures<br />
Device type<br />
DeviceNet<br />
Explicit peer to peer messaging<br />
I/O peer to peer messaging<br />
Configuration consistency value<br />
Faulted node recovery<br />
Baud rates<br />
k Baud<br />
Master/Scanner<br />
I/O slave messaging<br />
Bit Strobe<br />
Polling<br />
Cyclic<br />
Change of State (COS)<br />
Interlock relays<br />
Range<br />
Relay contact<br />
Hysteresis<br />
Contact rating<br />
V / A DC<br />
Relay status<br />
Connector<br />
Supply for DeviceNetª and sensor together V DC<br />
Connectors for DeviceNetª<br />
for CDG, analog output and Interlock relay<br />
DeviceNet<br />
CDG045-SD<br />
generic<br />
no<br />
no<br />
no<br />
no<br />
125<br />
250<br />
500<br />
no<br />
no<br />
yes<br />
yes<br />
yes<br />
2<br />
1 x 10 -4 x F.S. É F.S.<br />
n.o., potential free<br />
adjustable over complete range<br />
60 / 0.5<br />
LED green<br />
D sub, 15 pin<br />
11 É 25<br />
Microstyle, 5 pin<br />
D sub, 15 pin<br />
B6.10
SKY TM Capacitance Diaphragm Gauge<br />
Vacuum Gauges<br />
Technical Data<br />
Measurement range F.S. Torr 1)<br />
Lowest suggested control pressure<br />
Torr<br />
Lowest suggested reading<br />
Torr<br />
Lowest reading<br />
Torr<br />
Accuracy 2)<br />
Resolution<br />
% F.S.<br />
Temperature effects<br />
Zero coefficient<br />
% F.S./¡C<br />
Span coefficient<br />
% of reading/¡C<br />
Temperature<br />
Operation (ambient) ¡C<br />
Bakeout at flange ¡C<br />
Pressure, max. absolute<br />
Torr<br />
Output signal (analog)<br />
V<br />
Supply<br />
Voltage<br />
V DC<br />
Operating 3) / heating current<br />
mA<br />
Response time<br />
ms<br />
Electrical connector<br />
Materials exposed to process media<br />
Internal volume cm 3 (inch 3 )<br />
Weight<br />
kg<br />
Protection type<br />
CDG045-SD<br />
Temperature Controlled 45 °C<br />
1000 100 10 1 0.1<br />
5 5 x 10 -1 5 x 10 -2 5 x 10 -3 5 x 10 -4<br />
5 x 10 -1 5 x 10 -2 5 x 10 -3 5 x 10 -4 5 x 10 -5<br />
1 x 10 -1 1 x 10 -2 1 x 10 -3 1 x 10 -4 1 x 10 -5<br />
0.15<br />
0.0015 0.0015 0.0015 0.0025 0.0025<br />
0.0025 0.0025 0.0025 0.0025 0.005<br />
0.01<br />
+15 É +40<br />
+90<br />
3000 2000 2000 2000 1000<br />
0 É +10<br />
11 - 25<br />
220/450<br />
< 30 < 30 < 30 < 100 < 100<br />
D sub, 15 pin<br />
aluminum oxide ceramic (Al 2 O 3 ), stainless steel (AISI316L) 4) , Vacon 70 5)<br />
7 (0.43)<br />
0.49<br />
IP30<br />
With DeviceNetª<br />
Swagelok¨ 8 VCR¨, female<br />
other flanges available on request<br />
Ordering Information<br />
1) SKYª Capacitance Diaphragm Gauges are also available calibrated in mbar and Pa<br />
2) Non-linearity, hysteresis, repeatability at 25 ¡C ambient operating temperature without<br />
temperature effects<br />
3) Typical value at 25 ¡C ambient temperature after reaching operating temperature at<br />
24 V DC supply<br />
4) 18% Cr, 10% Ni, 3% Mo, 69% Fe<br />
5) 28% Ni, 23% Co, 49% Fe<br />
1000 100 10 1 0.1<br />
360-303 361-303 362-303 364-303 365-303<br />
B6<br />
mm (inches)<br />
B6.11
Vacuum Gauges<br />
Bayard-Alpert Pirani Gauge BPG400<br />
Bayard-Alpert Pirani Gauge BPG400<br />
This outstanding Bayard-Alpert Pirani Combination Gauge<br />
(optional: with display) provides the functions of two gauges in a<br />
single compact unit measuring from atmosphere to 5 x 10 -10 mbar<br />
(3.8 x 10 -10 Torr). This reduces the complexity of installation, setup,<br />
and use of vacuum measurement on the system. The integrated<br />
Pirani protects the hot ion filament from burning out and reduces<br />
the contamination by automatically switching it off at high pressures.<br />
The optional integrated LCD display offers pressure reading and<br />
status information. The BPG400 provides the best performance<br />
for process and base pressure measurement in the most<br />
economic package.<br />
Patent granted on electronics Ð Patent pending on sensor<br />
Advantages<br />
♦ Extremely wide measurement range from 5 x 10 -10 mbar<br />
(3.8 x 10 -10 Torr) to atmosphere combined with excellent repeatability<br />
in the process pressure range (less than ±5%)<br />
♦ Long-life yttrium oxide coated iridium cathode<br />
♦ Robust, compact construction<br />
♦ Easy integration:<br />
Ð one formula produces a logarithmic analog output over entire<br />
pressure range<br />
Ð no interlock with other gauges is necessary<br />
Ð RS 232 C interface<br />
♦ Cost savings:<br />
Ð single gauge instead of two<br />
Ð single flange connection to the system<br />
Ð single cable<br />
♦ Single flange connection reduces probability of leaks<br />
♦ Easy use:<br />
Ð automatic high vacuum adjustment of Pirani through hot ion gauge<br />
Ð optional integrated LCD display for pressure reading and<br />
information status<br />
Ð optional bakeout extension<br />
Typical Applications<br />
♦ Pressure measurement in semiconductor processes and<br />
transfer chambers<br />
♦ Industrial coating (PVD)<br />
♦ General vacuum measurement and control on systems in rough to<br />
high vacuum range<br />
Advantages of BPG400 Over<br />
Conventional Technology<br />
Conventional hot ion gauges used for high vacuum measurement can only<br />
be operated below atmospheric pressures typically in the range below<br />
10 -2 mbar (Torr). When operated at higher pressures the filament lifetime is<br />
dramatically reduced and may burn out almost immediately. Therefore, hot<br />
ion gauges must be switched on only at specified operating pressures.<br />
Usually, a fore vacuum gauge (Pirani) controls the switching on and off of<br />
the hot ion gauge. Such systems consist of two gauges with the necessary<br />
tubing, cabling and corresponding costly signal processing, which is done<br />
by PLC software or hardwiring.<br />
♦ High reliability:<br />
Ð Pirani protects filament from burn out<br />
(withstands air inrush > 10,000 times)<br />
Ð In the unlikely case of failure the sensor can be easily replaced<br />
B6.12
Bayard-Alpert Pirani Gauge BPG400<br />
Vacuum Gauges<br />
Advanced BPG400<br />
The unique concept of the Bayard-Alpert Pirani Combination Gauge<br />
eliminates the disadvantages of conventional technology and provides<br />
unparalleled performance. The gauge consists of two sensing systems, a<br />
hot ion sensor and a Pirani sensor, which signals are combined in one<br />
single compact package.<br />
The enclosed sensor tube with integrated grid protects the sensor from<br />
external electrical fields. The optional baffle is recommended in case of<br />
particles or process by-products possibly contaminating the sensor or when<br />
freak ions, stray light or fast electrons could influence the measurement.<br />
<br />
The Pirani sensor automatically controls the switching on and off of the hot<br />
ion sensor at a defined switching threshold. The filament therefore is<br />
protected since the hot ion sensor is switched off instantaneously in case of<br />
an air inrush. This minimizes problems associated with operator error,<br />
extended signal processing time, and other system failures.<br />
The electron bombardment degas function provides efficient cleaning of a<br />
contaminated sensor. These measures as well as the yttrium oxide coated<br />
iridium filament extend the lifetime of the gauge to its best. When the end<br />
of the sensorÕs lifetime is reached, simply unplug the sensing element from<br />
the electronics and plug in the replacement.<br />
For higher bakeout temperatures the electronics can be easily removed<br />
when no reading is required or the bakeout extension can be attached<br />
between the sensor and the electronics when a reading is required.<br />
B6<br />
Withstands air inrush > 10,000 times.<br />
The BPG400 eases the integration into process systems and reduces cost.<br />
The combination gauge eliminates the need of two single gauges, which<br />
saves one gauge, one port, one cable, tubing, flanging and converter parts.<br />
The software integration is very easy and convenient since the output<br />
signal is described by a simple formula, which reduces cost further.<br />
B6.13
Vacuum Gauges<br />
Bayard-Alpert Pirani Gauge BPG400<br />
Technical Data<br />
BPG400<br />
Measurement range<br />
mbar<br />
Torr<br />
5 x 10 -10 É 1000<br />
3.8 x 10 -10 É 750<br />
Accuracy, 10 -8 É 10 -2 mbar<br />
% of reading<br />
±15%<br />
Repeatability, 10 -8 É 10 -2 mbar<br />
% of reading<br />
±5%<br />
Degas 1) (p < 7.2 x 10 -6 mbar (5.4 x 10 -6 Torr))<br />
electron bombardment,<br />
3 min max.<br />
Pressure, max. absolute<br />
bar<br />
2<br />
Temperature<br />
Operation (ambient) ¡C<br />
Storage ¡C<br />
Bakeout ¡C<br />
At flange with extension ¡C<br />
At flange without extension ¡C<br />
Electronics removed ¡C<br />
0 É +50<br />
-20 É +70<br />
150<br />
80<br />
150<br />
Power supply<br />
Voltage<br />
Consumption, max.<br />
V DC<br />
W<br />
20 É 28<br />
16<br />
Output signal analog<br />
Measurement range, logarithmic<br />
Relation voltage/pressure<br />
Error signal<br />
Minimum load<br />
V<br />
V<br />
V/decade<br />
V<br />
k½<br />
0 É 10<br />
0.774 É 10<br />
0.75<br />
< 0.4<br />
10<br />
optional: display for<br />
pressure and status<br />
information<br />
Interface (digital)<br />
RS 232 C<br />
Connector<br />
Cable length, max. 2)<br />
m (ft)<br />
D sub, 15 pin<br />
100 (330)<br />
mm (inches)<br />
Materials exposed to process media<br />
yttrium oxide, iridium,<br />
stainless steel, Cu, W,<br />
glass, NiFe, NiCr<br />
Internal volume KF / CF cm 3 (inch 3 )<br />
24 / 34 (1.46 / 2.1)<br />
Weight KF / CF<br />
g<br />
285 / 550<br />
Protection type<br />
IP 30<br />
Ordering Information<br />
BPG400<br />
Without LCD display<br />
DN 25 ISO-KF<br />
DN 40 CF-R<br />
353-500<br />
353-502<br />
With LCD display<br />
DN 25 ISO-KF<br />
DN 40 CF-R<br />
353-501<br />
353-503<br />
Replacement sensor<br />
DN 25 ISO-KF<br />
DN 40 CF-R<br />
354-490<br />
354-491<br />
Bakeout extension, 100 mm (3.94 inches)<br />
353-510<br />
24 V DC supply / RS 232 C line<br />
353-511<br />
Baffle<br />
353-512<br />
1) Reduced accuracy during degas<br />
2) RS 232 C operation < 30 m<br />
B6.14
Pirani Standard Gauge<br />
Vacuum Gauges<br />
Pirani Standard Gauge<br />
PSG400, PSG400-S<br />
The Pirani Standard Gauge PSG400 represents the most advanced<br />
Pirani technology in a very compact, rugged package. The improved<br />
temperature compensation by the incorporated twin Pirani provides<br />
faster, more stable vacuum measurement and eliminates the slow<br />
response towards atmospheric pressures. The rugged stainless steel<br />
sensor cell qualifies it for use on semiconductor systems, as well as<br />
traditional applications such as fore vacuum lines.<br />
Patent granted on electronics<br />
Advantages<br />
♦ Small footprint<br />
♦ Mount in any orientation<br />
♦ Metal sealed feedthrough with stainless steel measuring cell<br />
♦ Optimized temperature compensation with twin Pirani principle<br />
♦ Logarithmic signal output for easy integration<br />
♦ High overpressure capability to 10 bar absolute with<br />
threaded connections<br />
♦ Bakeable version available for 250 ¡C at flange<br />
♦ Sensor cell easily replaced<br />
Typical Applications<br />
♦ Controlling of high vacuum ionization gauges<br />
♦ Fore vacuum pressure monitoring<br />
♦ Safety circuits in vacuum systems<br />
♦ General vacuum measurement and control in fine and rough<br />
vacuum range<br />
Advantages of PSG400 Over<br />
Conventional Technology<br />
In conventional Pirani gauges the filament used as measurement element is<br />
one arm of a self-adjusting bridge circuit. The filament temperature is in the<br />
range of 120 ¡C. Whenever a pressure change occurs a gain control<br />
amplifier automatically adjusts the bridge voltage to keep the filament<br />
temperature constant. This bridge excitation is the primary measurement<br />
used in determining the pressure. The ambient operating temperature also<br />
has an influence on the power necessary to keep the filament temperature<br />
constant. Ambient temperature changes appear as changes in pressure.<br />
To compensate, a temperature sensitive element is placed close to the<br />
sensor. The ambient temperature is thus registered and the measurement<br />
signal is compensated, accordingly.<br />
Advanced PSG400<br />
This sensor consists of two filaments, which are kept constant at two<br />
separate operating temperatures (65 ¡C and 120 ¡C). A change in pressure<br />
affects both filaments the same way. The power required to keep the<br />
filaments at the constant temperature is pressure dependent. By using the<br />
power difference between the two filaments one can easily eliminate<br />
changes in the temperature and thus isolate the changes in pressure.<br />
This satisfies the need for temperature compensation, but eliminates the<br />
delays associated with using a separate temperature sensor, resulting in<br />
a very fast response time.<br />
B6<br />
B6.15
Vacuum Gauges<br />
Pirani Standard Gauge<br />
Technical Data<br />
PSG400 PSG400-S<br />
Measurement range<br />
Accuracy, 1 x 10 -2 É 100 mbar<br />
Repeatability, 1 x 10 -3 É 100 mbar<br />
Mounting orientation<br />
Setpoint<br />
Range<br />
Relay contact<br />
Hysteresis<br />
Contact rating<br />
Relay status<br />
mbar<br />
Torr<br />
% of reading<br />
% of reading<br />
mbar<br />
V / A DC<br />
Pressure, max. absolute<br />
bar<br />
Temperature<br />
Operation (ambient) ¡C<br />
Storage ¡C<br />
Bakeout at flange ¡C<br />
Power supply<br />
Voltage<br />
VDC<br />
Consumption, max.<br />
W<br />
Output signal analog<br />
V<br />
Measurement range, logarithmic<br />
V<br />
Relation voltage/pressure<br />
V/decade<br />
Error signal<br />
V<br />
Response time<br />
ms<br />
Connector<br />
Cable length, max.<br />
Materials exposed to process media<br />
m (ft)<br />
Internal volume KF / CF cm 3 (inch 3 )<br />
Weight KF / CF<br />
Protection type<br />
g<br />
5 x 10 -4 É 1000<br />
3.8 x 10 -4 É 750<br />
Å ±10<br />
Å ±2<br />
any<br />
n/a 1<br />
2 x 10 -3 É 500<br />
n.o.<br />
potential free<br />
approx. 30%<br />
of adjusted<br />
pressure<br />
60 / 0.5<br />
LED, green<br />
10 1)<br />
+ 5 É + 60<br />
- 20 É + 65<br />
80 / 250 2)<br />
14 É 32<br />
1<br />
0 É 10.3<br />
1.9 Ð 10<br />
1.286<br />
< 0.5<br />
10<br />
FCC 68, 8 pin (shielded)<br />
100 (330)<br />
tungsten, stainless steel,<br />
glass, Cu, NiFe, Ni<br />
2 / 10 (0.1 / 0.6)<br />
97 / 120<br />
IP 40<br />
mm (inches)<br />
Ordering Information<br />
PSG400<br />
PSG400-S<br />
DN 16 ISO-KF<br />
1/8Ó NPT<br />
DN 16 CF-R 2)<br />
1/2" tube<br />
Swagelok¨ 8 VCR¨, female<br />
Replacement sensor<br />
DN 16 ISO-KF<br />
1/8Ó NPT<br />
DN 16 CF-R 2)<br />
1/2Ó tube<br />
Swagelok¨ 8 VCR¨, female<br />
350-000 350-010<br />
350-001 350-011<br />
350-002 350-012<br />
350-003 350-013<br />
350-004 350-014<br />
350-990<br />
350-991<br />
350-992<br />
350-993<br />
350-994<br />
1) Threaded connections only 2) Extended tube for bakeout with 250 ¡C at flange<br />
B6.16
Pirani Standard Gauge<br />
Vacuum Gauges<br />
Pirani Standard Gauge<br />
PSG100-S, PSG101-S<br />
The Pirani Standard Gauges PSG100-S and PSG101-S are<br />
especially designed for easy integration into vacuum systems using<br />
Profibus DP or DeviceNetª fieldbus protocols. The gauges are<br />
equipped with a set point and for corrosive applications, a platinum<br />
filament version is available.<br />
Patent pending<br />
Advantages<br />
♦ Fieldbus interface (Profibus, DeviceNet) for easy integration into vacuum<br />
systems using network communications<br />
♦ For corrosive applications or high levels of water vapors the PSG101-S<br />
uses a platinum filament and a Al 2<br />
O 3<br />
ceramic feedthrough<br />
♦ Setpoint with adjustable threshold over a wide range<br />
♦ Mount in any position<br />
♦ Logarithmic analog output signal available<br />
♦ Sensor cell is easily replaced<br />
Typical Applications<br />
♦ Processes with corrosive gases (PSG101-S)<br />
♦ Fore vacuum pressure monitoring<br />
♦ Controlling of high vacuum ionization gauges<br />
♦ Safety circuits in vacuum systems<br />
♦ General vacuum measurement and control in the fine and rough<br />
vacuum range<br />
Fieldbus<br />
Fieldbus allows processes or applications the flexibility and control of<br />
network communications. It permits communication of exact digital<br />
information, independent control, maintenance and diagnostic routines<br />
for each connected instrument and simplifies your connection diagram.<br />
The measures of control include: monitoring of measurement values,<br />
automatic zero point adjustment of gauges, update operator of scheduled<br />
maintenance work, warning signals in case of instrument failure, and more.<br />
Profibus DP<br />
The central automation systems, e.g. PLC/PC or process control systems,<br />
communicate through a fast serial connection with decentralized<br />
instruments such as I/O, motors, valves and pressure transmitters. The<br />
exchange of data with the decentralized instruments takes place mostly in<br />
cycles. The basic functions of the Profibus DP Communication Profile also<br />
include acyclic communication services for parameter setting, controlling,<br />
monitoring, and alert functions of intelligent instruments.<br />
DeviceNet<br />
The DeviceNet interface supports polling, bit strobe and change of<br />
state/cyclic commands. Like with other DeviceNet instruments the user<br />
can monitor and control all available sensor functions.<br />
B6<br />
B6.17
Vacuum Gauges<br />
Pirani Standard Gauge<br />
Profibus DP<br />
PSG100-SP<br />
PSG101-SP<br />
Technical Data<br />
PSG100-S<br />
PSG101-S<br />
Supported baud rates (for auto detection)<br />
Expanded user parameter data<br />
Configuring<br />
Number of input and output data<br />
Sync-Mode and Freeze-Mode<br />
Connector<br />
Device type<br />
Explicit Peer to Peer Messaging<br />
I/O Peer to Peer Messaging<br />
Configuration consistency value<br />
Faulted node recovery<br />
Baud rates<br />
Master/Scanner<br />
I/O Slave Messaging<br />
Bit Strobe<br />
Polling<br />
Cyclic<br />
Change of State (COS)<br />
Supply<br />
Connector<br />
DeviceNet<br />
k Baud<br />
Bytes<br />
Bytes<br />
k Baud<br />
V DC<br />
9.6<br />
19.2<br />
93.75<br />
187.5<br />
500<br />
1500<br />
5<br />
2<br />
yes<br />
D sub, 9 pin<br />
PSG100-SD<br />
PSG101-SD<br />
generic<br />
no<br />
no<br />
no<br />
no<br />
125<br />
250<br />
500<br />
no<br />
yes<br />
yes<br />
yes<br />
yes<br />
11 É 25<br />
Phoenix Combicon, 5 pin<br />
Measurement range<br />
Filament material<br />
Mounting position<br />
Fieldbus protocol<br />
Setpoint<br />
Range<br />
Relay contact<br />
Hysteresis<br />
Contact rating<br />
Relay status<br />
Pressure, max. absolute<br />
mbar<br />
Torr<br />
mbar<br />
V / A DC<br />
bar<br />
Temperature<br />
Operation (ambient) ¡C<br />
Storage ¡C<br />
Bakeout at flange ¡C<br />
Power supply<br />
Voltage<br />
V DC<br />
Consumption, max.<br />
W<br />
Output signal analog<br />
V<br />
Measurement range<br />
V<br />
Relation voltage/pressure<br />
V/decade<br />
Connector<br />
Cable length, max. (analog)<br />
Materials exposed to process media<br />
m (ft)<br />
Flange<br />
Internal volume cm 3 (inch 3 )<br />
Weight, approx.<br />
Protection type<br />
kg<br />
5 x 10 -4 É 1000<br />
3.8 x 10 -4 É 750<br />
tungsten platinum<br />
any<br />
DeviceNetª or<br />
Profibus DP<br />
1<br />
1 x 10 -3 É 500<br />
n.o. / potential free<br />
ca. 30% of adjusted pressure<br />
60 / 0.5<br />
LED, green<br />
3 10 1)<br />
+10 É +50<br />
-20 É +70<br />
80<br />
14.5 É 36<br />
< 2<br />
0 É 10.6<br />
0.66 É 10<br />
1.333<br />
FCC 68, 8 pin (shielded)<br />
100 (330)<br />
tungsten, Al, platinum,<br />
nickel-plated stainl. steel,<br />
steel, stainless CrNi, Al 2 O 3<br />
steel, NiFe, ceramics,<br />
glass, NiFe, Mo, Ni<br />
CrNi8020,<br />
epoxy cement<br />
DN 16 ISO-KF<br />
11 (0.67)<br />
0.29<br />
IP 40<br />
Ordering Information<br />
PSG100-S<br />
PSG101-S<br />
With setpoint<br />
With DeviceNetª (PSG100-SD, PSG101-SD)<br />
With Profibus DP (PSG100-SP, PSG101-SP)<br />
Replacement sensor<br />
n/a 350-030<br />
350-021 350-031<br />
350-022 350-032<br />
350-980 350-981<br />
1) Threaded connections only<br />
mm (inches)<br />
B6.18
Bayard-Alpert Gauge<br />
Vacuum Gauges<br />
Bayard-Alpert Gauge<br />
BAG100-S, BAG101-S<br />
The Bayard-Alpert Gauge BAG100S covers an extremely wide<br />
measurement range with excellent reproducibility in the process<br />
pressure range. The sensor employs two filaments which are made<br />
of long-life yttrium oxide coated iridium for standard applications or<br />
alternatively tungsten, which is more compatible with halogens<br />
(Cl, Fl, Br) or hydrogen gas compositions. The gauge features<br />
selectable analog as well as digital communications by RS 232 C<br />
interface or fieldbus options like Profibus DP and DeviceNet.<br />
The IP54 rating ensures protection against dust, water spray, and<br />
electromagnetic interferences.<br />
Advantages<br />
♦ Wide measurement range of 2 x 10 -10 to 1 x 10 -1 mbar<br />
(1.5 x 10 -10 to 7.5 x 10 -2 Torr) with a single sensor<br />
♦ High reproducibility of ±10% of the measurement value within the<br />
process pressure range<br />
♦ Fully encapsulated sensor with a very stable electrode geometry<br />
♦ Longer life through dual cathodesÐautomatic switchover in case of failure<br />
♦ Long-life iridium cathodes with yttrium oxide coating<br />
♦ Continuous measurement available during electron bombardment degas<br />
♦ Easy-to-exchange sensors with automatic self-adjustment to<br />
maintain reproducibility<br />
♦ Relay contact switching threshold adjustable over a wide range<br />
♦ Analog output with selectable logarithmic / linear characteristic<br />
♦ Digital interfaces: RS 232 C / Fieldbus: Profibus DP or DeviceNetª<br />
♦ Rugged IP 54 metal enclosure<br />
♦ High EMI compatibility through screened enclosure, screened sensor,<br />
and interference suppression on all inputs and outputs<br />
Typical Applications<br />
♦ Pressure measurement in semiconductor processes and<br />
transfer chambers<br />
♦ Evaporation and coating systems<br />
♦ General pressure measurement and control in fine and high vacuum range<br />
The innovative Bayard-Alpert Transmitters BAG100-S and BAG101-S offer<br />
a wide measurement range spanning from 2 x 10 -10 to 1 x 10 -1 mbar.<br />
The wide range Bayard-Alpert measuring system is mechanically protected<br />
by the metal tube which surrounds it. The rugged arrangement of the<br />
electrodes ensures highly repeatable measurements over the entire range.<br />
Each sensor is individually calibrated in the factory. The calibration data<br />
are stored in an EEPROM which is fully integrated into the sensor.<br />
When exchanging the sensor, the electronics of the transmitter are<br />
automatically adjusted to the currently connected sensor so that the<br />
specified reproducibility can be guaranteed. The sensor with a CF flange<br />
is equipped with a welded current feedthrough which enables degassing<br />
of the sensor at a temperature of 150 ¡C with the electronics in place.<br />
Sensor supply and processing of the measurement data is performed by<br />
microprocessor controlled electronics which require a 24 V power supply<br />
and draw a very low current. The microcontroller also controls the<br />
BAG100-S and BAG101-S in that it monitors the emission, converts and<br />
corrects the measurement data (automatic correction of the sensorÕs<br />
sensitivity, matching of the unit etc.) and monitors the trigger thresholds<br />
for the relay.<br />
The selectable signal output characteristics (linear / logarithmic) as well<br />
as the digital computer interfaces permit easy integration in existing or<br />
future system concepts.<br />
B6<br />
B6.19
Vacuum Gauges<br />
Bayard-Alpert Gauge<br />
Fieldbus<br />
Fieldbus allows processes or applications the flexibility and control of<br />
network communications. It permits communication of exact digital<br />
information, independent control, maintenance and diagnostic routines<br />
for each connected instrument and simplifies your connection diagram.<br />
Device type<br />
DeviceNet<br />
Explicit Peer to Peer Messaging<br />
I/O Peer to Peer Messaging<br />
BAG100-SD<br />
BAG101-SD<br />
generic<br />
no<br />
no<br />
The measures of control include: monitoring of measurement values,<br />
automatic zero point adjustment of gauges, update operator of scheduled<br />
maintenance work, warning signals in case of instrument failure, and more.<br />
Profibus DP<br />
The central automation systems, e.g. PLC/PC or process control systems,<br />
communicate through a fast serial connection with decentralized<br />
instruments such as I/O, motors, valves and pressure transducers.<br />
The exchange of data with the decentralized instruments takes place<br />
mostly in cycles. The basic functions of the Profibus DP Communication<br />
Profile also include acyclic communication services for parameter setting,<br />
controlling, monitoring, and alert functions of intelligent instruments.<br />
Configuration consistency value<br />
Faulted node recovery<br />
Baud rates<br />
Master/Scanner<br />
I/O Slave Messaging<br />
Bit Strobe<br />
Polling<br />
Cyclic<br />
Change of State (COS)<br />
Supply<br />
Connector<br />
k Baud<br />
V DC<br />
no<br />
no<br />
125<br />
250<br />
500<br />
no<br />
yes<br />
yes<br />
yes<br />
yes<br />
11 É 25<br />
Microstyle, 5 pin<br />
DeviceNet<br />
The DeviceNet interface supports polling, bit strobe and change of<br />
state/cyclic commands. Like with other DeviceNet instruments the user<br />
can monitor and control all available sensor functions.<br />
Profibus DP<br />
Supported baud rates (auto detection)<br />
k Baud<br />
BAG100-SP<br />
9.6<br />
19.2<br />
93.75<br />
187.5<br />
500<br />
1500<br />
Expanded user parameter data<br />
no<br />
Configuring<br />
Number of input and output data<br />
Bytes<br />
2 each<br />
Sync-Mode and Freeze-Mode<br />
yes<br />
Connector<br />
D sub, 9 pin<br />
mm (inches)<br />
B6.20
Bayard-Alpert Gauge<br />
Vacuum Gauges<br />
Technical Data<br />
BAG100-S<br />
BAG101-S<br />
Measurement range<br />
Reproducibility<br />
Repeatability<br />
Long term sensitivity drift<br />
Filament material<br />
Number of filaments<br />
Degas (p < 2 x 10 -5 mbar (1.5 x 10 -5 Torr))<br />
mbar<br />
Torr<br />
% of reading<br />
% of reading<br />
% of reading<br />
Setpoint<br />
Range<br />
mbar<br />
Relay contact<br />
Hysteresis<br />
Contact rating<br />
V / A DC<br />
Relay status<br />
Pressure, max. absolute<br />
bar<br />
Temperature<br />
Operation (ambient) ¡C<br />
Storage ¡C<br />
Bakeout at flange DN 25 ISO-KF ¡C<br />
Bakeout at flange DN 40 CF-R ¡C<br />
Power supply<br />
Voltage<br />
VDC<br />
Current Consumption<br />
Operation<br />
A<br />
Bakeout<br />
A<br />
Measurement start (approx. 1 sec.)<br />
A<br />
Output signal analog<br />
V<br />
Measurement range<br />
V<br />
Selectable scaling<br />
Interface (digital)<br />
Response time (at p > 1 x 10 -6 mbar)<br />
ms<br />
Connector<br />
Cable length, max. (analog)<br />
m (ft)<br />
Materials exposed to process media (excl. filament)<br />
Internal volume, approx. DN 25 KF / DN 40 CF cm 3 (inch 3 )<br />
Weight, approx. DN 25 KF / DN 40 CF<br />
kg<br />
Protection type<br />
2 x 10 -10 É 1 x 10 -1 2 x 10 -10 É 5 x 10 -3<br />
1.5 x 10 -10 É 7.5 x 10 -2 1.5 x 10 -10 É 3.8 x 10 -3<br />
±10<br />
±2<br />
±2<br />
yttrium oxide, iridium<br />
tungsten<br />
2<br />
electron bombardment, 3 min max.<br />
1 1<br />
1 x 10 -9 É 1 x 10 -1 1 x 10 -9 É 1 x 10 -3<br />
n.o. / potential free<br />
n.o. / potential free<br />
approx. 10% of adjusted pressure approx. 10% of adjusted pressure<br />
60 / 0.5 60 / 0.5<br />
LED, green<br />
LED, green<br />
2<br />
0 É +50<br />
-20 É +70<br />
80<br />
150<br />
20 É 28<br />
0.5<br />
0.8<br />
1.4<br />
0 É 10<br />
0 É 10<br />
1 or 3 decades out of 9<br />
RS 232 C<br />
100<br />
D sub, 15 pin (shielded)<br />
100 (330)<br />
stainless steel, glass, NiFe, NiCr<br />
24 / 34 (1.46 / 2.1)<br />
0.98 / 1.28<br />
IP 54<br />
B6<br />
Ordering Information<br />
BAG100-S<br />
BAG101-S<br />
DN 25 ISO-KF<br />
DN 40 CF-R<br />
With Profibus DP (BAG100-SP)<br />
DN 25 ISO-KF<br />
DN 40 CF-R<br />
With DeviceNetª (BAG100-SD, BAG101-SD)<br />
DN 25 ISO-KF<br />
DN 40 CF-R<br />
Replacement sensor<br />
DN 25 ISO-KF<br />
DN 40 CF-R<br />
24 V DC supply / RS 232 C line<br />
352-000 n/a<br />
352-002 352-003<br />
352-010 n/a<br />
352-011 n/a<br />
352-005 352-007<br />
352-006 352-008<br />
352-490 352-492<br />
352-491 352-493<br />
353-511<br />
B6.21
Vacuum Gauges<br />
Penning Gauge PEG100<br />
Penning Gauge PEG100<br />
The Penning Gauge PEG100 provides reliable high vacuum<br />
measurements. The rugged penning cold cathode sensor has no<br />
filament to burn out. Due to titanium cathode plates and the reduced<br />
high voltage after plasma ignition, the gauge can be operated also in<br />
sputtering applications. The fieldbus options, in addition to the<br />
logarithmic analog output signal, allow easy integration into vacuum<br />
systems using Profibus DP or DeviceNet protocols.<br />
Patent pending on sensor<br />
Advantages<br />
♦ Wide measurement range from 1 x 10 -9 to 1 x 10 -2 mbar (7.5 x 10 -10<br />
to 7.5 x 10 -3 Torr)<br />
♦ All-metal cold cathode sensor (Penning) with ceramic feedthrough<br />
♦ New electrode geometry provides excellent ignition properties<br />
♦ Decreased high voltage after plasma ignition and titanium cathode<br />
plates reduce risk of contamination, even during sputtering operations<br />
with argon<br />
♦ The anode ring and the titanium cathode can be cleaned or<br />
replaced easily<br />
♦ Minimal magnetic field intensity adjacent to gauge<br />
♦ LED indicator for power on and plasma ignited<br />
♦ Logarithmic analog output signal<br />
♦ Fieldbus interface (Profibus DP, DeviceNet) for easy integration into<br />
vacuum systems using network communications<br />
Typical Applications<br />
♦ High vacuum pressure monitoring<br />
♦ Evaporation and sputtering systems<br />
♦ General vacuum measurement and control in the fine and high<br />
vacuum range<br />
The Penning Gauge PEG100 is a cold cathode sensor based on the well<br />
proven principle of Penning. For degassing of the all-metal sensor with<br />
Al 2<br />
O 3<br />
current feedthrough, the housing of the transmitter with its electronics<br />
and magnet may easily be removed. The magnet offers a closed magnetic<br />
field for negligible stray field. The PEG therefore may also be installed close<br />
to sensitive parts within a system. The anode ring and the titanium cathode<br />
plates may be exchanged easily for quick maintenance should they become<br />
contaminated. Since sputtered titan is not magnetic Ð limiting the build up of<br />
short circuits within the sensor Ð the risk of contamination is greatly<br />
reduced. The newly designed cathode plate acts as a baffle for the sensor.<br />
Fieldbus<br />
Fieldbus allows processes or applications the flexibility and control of<br />
network communications. It permits communication of exact digital<br />
information, independent control, maintenance and diagnostic routines for<br />
each connected instrument and simplifies your connection diagram.<br />
The measures of control include the monitoring of measurement values, the<br />
automatic zero point adjustment of gauges, reminding the operator of<br />
scheduled maintenance work, warning signals in case of instrument failure<br />
and more.<br />
Profibus DP<br />
The central automation systems, e.g. PLC/PC or process control systems,<br />
communicate through a fast serial connection with decentralized<br />
instruments such as I/O, motors, valves and pressure transducers. The<br />
exchange of data with the decentralized instruments takes place mostly in<br />
cycles. The basic functions of the Profibus DP Communication Profile also<br />
include acyclic communication services for parameter setting, controlling,<br />
monitoring, and alert functions of intelligent instruments.<br />
DeviceNet<br />
The DeviceNet interface supports polling, bit strobe and change of<br />
state/cyclic commands. Like with other DeviceNet instruments the user can<br />
monitor and control all available sensor functions.<br />
B6.22
Penning Gauge PEG100<br />
Vacuum Gauges<br />
Profibus DP<br />
PEG100-P<br />
Technical Data<br />
PEG100<br />
Supported baud rates (auto detection)<br />
Expanded user parameter data<br />
Configuring<br />
Number of input and output data<br />
Sync-Mode and Freeze-Mode<br />
k Baud<br />
Bytes<br />
Bytes<br />
9.6<br />
19.2<br />
93.75<br />
187.5<br />
500<br />
1500<br />
5<br />
2<br />
yes<br />
Measurement range<br />
Accuracy, 1 x 10 -8 É 1 x 10 -4 mbar<br />
mbar<br />
Torr<br />
% of reading<br />
Pressure, max. absolute<br />
bar<br />
Temperature<br />
Operation (ambient) ¡C<br />
Storage ¡C<br />
Bakeout<br />
without electronics ¡C<br />
with electronics, at flange ¡C<br />
1 x 10 -9 É 1 x 10 -2<br />
7.5 x 10 -10 É 7.5 x 10 -3<br />
Å ±30<br />
10<br />
+10 É +50<br />
-20 É +75<br />
350<br />
70<br />
Connector<br />
D sub 9 pin<br />
Power supply<br />
Voltage<br />
Consumption, max.<br />
VDC<br />
W<br />
14.5 É 36<br />
< 2<br />
Device type<br />
Explicit Peer to Peer Messaging<br />
I/O Peer to Peer Messaging<br />
Configuration consistency value<br />
Faulted node recovery<br />
Baud rates<br />
DeviceNet<br />
k baud<br />
PEG100-D<br />
generic<br />
no<br />
no<br />
no<br />
no<br />
125<br />
250<br />
500<br />
Output signal analog<br />
Measurement range<br />
Relation voltage/pressure<br />
Connector<br />
Cable length, max. (analog)<br />
Materials exposed to process media<br />
V<br />
V<br />
V/decade<br />
m (ft)<br />
Internal volume cm 3 (inch 3 )<br />
Weight, approx.<br />
kg<br />
Protection type<br />
0 É 10.6<br />
0.66 É 10<br />
1.333<br />
FCC 68, 8 pin (shielded)<br />
100 (330)<br />
stainless steel, CrNi,<br />
Al 2 O 3 , NiFe, Mo, Cu, Ni, Ti<br />
21 (1.28)<br />
0.5<br />
IP 40<br />
Master/Scanner<br />
no<br />
I/O Slave Messaging<br />
Bit Strobe<br />
Polling<br />
Cyclic<br />
Change of State (COS)<br />
Supply<br />
Connector<br />
V DC<br />
yes<br />
yes<br />
yes<br />
yes<br />
11 É 25<br />
Phoenix Combicon, 5 pin<br />
Ordering Information<br />
PEG100<br />
DN 25 ISO-KF<br />
DN 40 CF-R<br />
With DeviceNetª (PEG100-D)<br />
DN 25 ISO-KF<br />
DN 40 CF-R<br />
With Profibus DP (PEG100-P)<br />
DN 25 ISO-KF<br />
Replacement cathode plates, titanium<br />
Set of 5 pieces<br />
PEG100<br />
351-000<br />
351-002<br />
351-003<br />
351-004<br />
351-005<br />
351-490<br />
B6<br />
mm (inches)<br />
B6.23
Vacuum Gauges<br />
Vacuum Gauge Controller VGC103<br />
Vacuum Gauge Controller VGC103<br />
By combining up to three principles of measurement Ð from hot<br />
cathode, cold cathode, Pirani or capacitance diaphragm gauges Ð<br />
the Vacuum Gauge Controller VGC103 covers the entire pressure<br />
range from 10 -10 to 2000 mbar (Torr). Switching over of the display<br />
to the right pressure range is automatic for the most common sensor<br />
combinations. The display of the VGC103 combines the advantages<br />
of analog and digital readouts.<br />
Advantages<br />
♦ Can be combined with up to three sensor types for an extremely wide<br />
measurement range<br />
♦ Full remote control via RS 232 C interface<br />
♦ User selectable measurement unit (millibar, Torr, Pascal or micron)<br />
♦ Analog bar graph display compliments digital readout<br />
♦ Three adjustable setpoints with adjustable hysteresis, may be assigned<br />
to any channel<br />
♦ Programmable 0 É 10 V chart recorder output with logarithmic / linear<br />
characteristics for each gauge or combination of PSG and BAG<br />
♦ Compact bench-top unit which can be installed in panel cut-outs or a<br />
19Ó racks (1/4 19Ó, 3U height)<br />
The VGC103 easily fits your application specifications thanks to the<br />
possibility of combining various sensors with different methods of<br />
measurement and different measurement ranges.<br />
Multiple Recorder Outputs and Control<br />
Signals For Simplified Process Integration<br />
The VGC103 offers standard features that other controllers only offer as<br />
add-on options:<br />
♦ Three adjustable setpoints with adjustable hysteresis and arbitrary<br />
allocation to the three measuring channels<br />
♦ Automatic control of the emission (Bayard-Alpert Gauge BAG) or of high<br />
voltage (Penning Gauge PEG) with Pirani Gauge PSG on channel 2<br />
Easy To Read – Easy To Use<br />
The large digital display allows for easy and quick reading of the<br />
measurement value, while the analog bar graph display allows for at a<br />
glance verification. During pressure measurement the display changes<br />
automatically over to the input channel of the correct sensor for the sensor<br />
combination: Ch 2 = PSG, Ch 3 = BAG. The values can be displayed in<br />
millibar, Torr, Pascal or micron.<br />
With its compact dimensions the VGC (1/4 19Ó, 3U height) easily fits<br />
into panel cutouts or 19Ó racks and can be used just as easily as a<br />
bench top unit.<br />
B6.24
Vacuum Gauge Controller VGC103<br />
Vacuum Gauges<br />
Rear view of the VGC103<br />
B6<br />
Cables<br />
Technical Data<br />
Cable to VGC103 in m (ft)<br />
3 (9.9)<br />
5 (16.5)<br />
10 (33)<br />
15 (49.5)<br />
20 (66)<br />
30 (99)<br />
40 (132)<br />
50 (165)<br />
75 (247.5)<br />
100 (330)<br />
PSG/PEG BPG/BAG CDG<br />
398-500 398-520 398-540<br />
398-501 398-521 398-541<br />
398-502 398-522 398-542<br />
398-503 398-523 398-543<br />
398-504 398-524 398-544<br />
398-505 398-525 398-545<br />
398-506 398-526 n/a<br />
398-507 398-527 n/a<br />
398-508 398-528 n/a<br />
398-509 398-529 n/a<br />
B6.25
Vacuum Gauges<br />
Vacuum Gauge Controller VGC103<br />
Measurement channels<br />
Display<br />
Range<br />
Technical Data<br />
mbar<br />
Torr<br />
Digital<br />
Analog<br />
Switching<br />
Rate 1/s<br />
Connectable transmitters with display range<br />
CDG<br />
Torr<br />
BPG<br />
mbar (Torr)<br />
PSG<br />
mbar (Torr)<br />
PEG<br />
mbar (Torr)<br />
BAG<br />
mbar (Torr)<br />
Measurement unit (selectable)<br />
Type of gas (selectable) Ð BAG only<br />
Setpoints<br />
Adjustment range<br />
Hysteresis<br />
Relay contact<br />
Contact rating<br />
V / A DC<br />
Ready indication relay<br />
Relay contact<br />
Contact rating<br />
V / A DC<br />
Analog output<br />
Channels<br />
Range<br />
Channel 1, 2, 3<br />
Channel 4<br />
Interface (digital)<br />
Connector<br />
Power<br />
Output for setpoint and analog output<br />
Supply<br />
V<br />
Frequency<br />
Hz<br />
Consumption<br />
W<br />
Temperature<br />
Operation (ambient) ¡C<br />
VGC103<br />
3<br />
backlit<br />
2 x 10 -10 É 2000<br />
1.5 x 10 -10 É 1500<br />
LCD, 7-segments<br />
LCD, bargraph<br />
automatic or manual between connected sensors<br />
4<br />
1 x 10 -3 x FS É 1 x FS<br />
5 x 10 -10 É 1000<br />
5 x 10 -4 É 1000<br />
1 x 10 -9 É 1 x 10 -2<br />
2 x 10 -10 É 1 x 10 -1<br />
mbar, Torr, Pascal, micron<br />
Air, Ar, N 2<br />
3 assignable to channel 1, 2 or 3<br />
sensor dependent<br />
adjustable<br />
potential free changeover contact<br />
60 / 0.5<br />
1 assignable to channel 1, 2 or 3<br />
potential free changeover contact<br />
60 / 0.5<br />
4<br />
0 É 10 V<br />
Sensor analog output signal<br />
Output of channel 1, 2, 3 with selectable scaling or combination PSG and BAG<br />
RS 232 C<br />
D sub, 9 pin<br />
D sub, 25 pin<br />
85 É 264<br />
50/60<br />
60<br />
0 É 50<br />
Ordering Information<br />
VGC103<br />
3 channel controller 398-000<br />
mm (inches)<br />
B6.26
Vacuum Switch VSA100<br />
Vacuum Gauges<br />
Vacuum Switch VSA100<br />
The pressure switch VSA100 is used as a safety switch in vacuum<br />
systems. For example, to automatically interrupt the gas supply<br />
when venting vacuum systems with a purge gas at a pressure of<br />
6 mbar below atmospheric pressure.<br />
Advantages<br />
♦ Reliable control of atmospheric pressure during venting<br />
♦ High contact rating and life time<br />
Technical Data<br />
Switching pressure at venting mbar (Torr)<br />
6 (4.5) below<br />
atmospheric pressure<br />
♦ Rugged design<br />
♦ Easy to integrate<br />
♦ IP 44 protection<br />
♦ Can be connected to a programmable control<br />
Switching pressure at pumping<br />
Switching inaccuracy<br />
Max. permissible<br />
operating pressure (absolute)<br />
mbar (Torr)<br />
mbar (Torr)<br />
mbar (Torr)<br />
3 (2.25) below<br />
atmospheric pressure<br />
1 (0.75)<br />
2000 (1500)<br />
Typical Applications<br />
♦ Control of load lock chambers<br />
♦ Safety shutdown of vacuum systems<br />
Temperature<br />
Operation (ambient) ¡C<br />
Storage ¡C<br />
Switching contact<br />
0 É +85<br />
-25 É +85<br />
Changeover contacts,<br />
gold-plated, for prog. controls<br />
B6<br />
At a differential pressure of 6 mbar below atmospheric pressure an elastic<br />
diaphragm actuates a high current changeover contact which in turn may<br />
be used to directly switch any ancillary equipment. The electrical connection<br />
is concealed by a polymeric cover<br />
Contact life (at 5 A)<br />
Contact rating<br />
Electrical connection<br />
Cable length<br />
V AC / A / VA<br />
m (ft)<br />
> 10 5 switching cycles<br />
220 / 5 / 1100<br />
6.3 mm flat plug<br />
3 (9.9)<br />
Technical Note<br />
Due to the diaphragm material used (EPDM) the Vacuum Switch VSA100 is<br />
not suited for applications in which the process gas contains large quantities<br />
of helium. The leak rate of the diaphragm for helium is > 10 -6 mbar x l x s -1 .<br />
Vacuum connection<br />
Materials exposed to process media<br />
Protection class<br />
DN 16 ISO-KF<br />
stainless steel 1.4305,<br />
EPDM, polyamide with<br />
glass fibre, epoxy cement<br />
IP 44<br />
Ordering Information<br />
DN 16 ISO-KF, complete with 3 m (10 ft) cable<br />
399-000<br />
mm (inches)<br />
B6.27
Vacuum Gauges<br />
Calibration Service<br />
Calibration Service<br />
INFICON offers calibration services for vacuum gauges. A DKD calibration<br />
certificate or a factory calibration certificate can be issued. Calibration to<br />
other standards (e.g. NIST) is available upon request.<br />
Advantages<br />
♦ Known deviation to calibration standards<br />
♦ Controlled quality over time<br />
Typical Applications<br />
♦ Reference to standard is required<br />
♦ Reference for customer in-house calibration service of vacuum gauges<br />
DKD Calibration<br />
The German Calibration Service (DKD) ensures traceability of industrial<br />
measurements and testing to national calibration standards. It is run jointly<br />
by the Federal Institution for Physics and Technology (PTB), the Industry,<br />
the Federal Minister for Economics and the Western European Metrology<br />
Club (WEMC).<br />
The transfer standards employed in the DKD calibration facility are checked<br />
regularly (recalibrated) by the PTB.<br />
Factory Calibration<br />
Factory calibrations are run with standards which have not been calibrated<br />
directly at the PTB; instead the transfer standards of the DKD calibration<br />
service are used. Thus traceability to national standards is ensured in<br />
both cases.<br />
Other Calibrations<br />
NIST Calibration available upon request. Call for pricing and availability.<br />
Ordering Information<br />
Calibration range<br />
to 10 -3 mbar/Torr<br />
to 10 -5 mbar/Torr<br />
to 10 -9 mbar/Torr<br />
DKD Calibration<br />
Factory Calibration<br />
398-900 398-910<br />
398-901 398-911<br />
398-902 398-912<br />
B6.28
B7<br />
Vacuum Feedthroughs
Vacuum Feedthroughs<br />
Contents<br />
Products and Accessories<br />
Rotary Feedthroughs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B7.3<br />
ISO-KF . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B7.3<br />
CF . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B7.4<br />
Rotary/Linear Motion Feedthroughs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B7.5<br />
Linear Motion Feedthroughs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B7.6<br />
Viewports. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B7.7<br />
ISO-KF . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B7.7<br />
ISO-K . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B7.8<br />
ISO-F. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B7.9<br />
CF . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B7.10<br />
Electrical Feedthroughs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B7.11<br />
16 ISO-KF . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B7.11<br />
40 ISO-KF . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B7.12<br />
CF . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B7.13<br />
High Current Feedthroughs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B7.15<br />
Coaxial Feedthroughs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B7.16<br />
Metal-Ceramic Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B7.17<br />
Liquid Feedthroughs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B7.18<br />
Vacuum Ball Bearings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B7.19<br />
Lubricants and Sealing Materials . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B7.20<br />
Thread Lubricant . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B7.20<br />
Vacuum Grease/Oil . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B7.20<br />
Sealing Material . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B7.21<br />
B7.2
Rotary Feedthroughs<br />
Vacuum Feedthroughs<br />
Rotary Feedthroughs<br />
ISO-KF<br />
♦ For transmitting high torque<br />
♦ With FPM shaft seal and ball bearings<br />
Technical Data<br />
ISO-KF<br />
Vacuum connection DN 16 ISO-KF DN 25 ISO-KF DN 40 ISO-KF DN 63 ISO-K<br />
Feedthrough/seal FPM FPM FPM FPM<br />
Shaft connection mm ¿ 5 ¿ 8 ¿ 12 ¿ 20<br />
Type FRH016-H FRH025-H FRH040-H FRH063-H<br />
Ordering Information<br />
214-300 214-302 214-304 214-306 2)<br />
Transferable torque Nm 1.5 6 25 100<br />
Rotational speed 1) 1/min 1500 1000 750 500<br />
Shaft load<br />
Radial N 60 150 250 500<br />
Axial N 30 50 60 100<br />
Service life (revolutions) 20 000 000 20 000 000 20 000 000 10 000 000<br />
Tightness, static mbar l/s 1 x 10 -9 1 x 10 -9 mbar l/s 1 x 10 -9 mbar l/s 1 x 10 -9 mbar l/s<br />
Pressure (absolute) 1 x 10 -9 mbar Ð 1 bar 1 x 10 -9 mbar Ð 1 bar 1 x 10 -9 mbar Ð 1 bar 1 x 10 -9 mbar Ð 1 bar<br />
Operating temperature ¡C 50 50 50 50<br />
Bakeout temperature ¡C 110 110 110 110<br />
Materials exposed to process media stainless steel, stainless steel, stainless steel, stainless steel,<br />
aluminum, FPM aluminum, FPM aluminum, FPM aluminum, FPM<br />
Weight kg 0.1 0.2 0.6 2<br />
B7<br />
1) When a reduced service life is acceptable, the rotational<br />
speed can be increased by up to a factor of two<br />
2) Centering ring<br />
CR/aluminum Ordering information 212-251<br />
FPM/stainless steel Ordering information 212-281<br />
B7.3
Vacuum Feedthroughs<br />
Rotary Feedthroughs<br />
CF<br />
♦ Bellow sealed<br />
♦ All-metal version<br />
♦ For very demanding vacuum requirements<br />
Technical Data<br />
Vacuum connection DN 16 CF-F DN 40 CF-F DN 40 CF-F<br />
Feedthrough/seal bellow bellow bellow<br />
Shaft connection mm ¿ 4 ¿ 8 ¿ 12<br />
Type FRU016-H FRU040-N FRU040-L<br />
Ordering Information<br />
214-310 214-312 214-314<br />
Transferable torque<br />
Dynamic Nm 0.4 4 10<br />
Dynamic, at 300 ¡C Nm 0.2 2 2<br />
Static Nm 0.2 3 5<br />
Rotational speed 1/min 200 1000 500<br />
at max. torque 1/min Ñ 500 300<br />
Shaft load<br />
Radial N 10 60 100<br />
Axial N 5 20 30<br />
Service life (revolutions) 1 000 000 2 000 000 1 000 000<br />
Scale division 10¡ Ñ Ñ<br />
Tightness mbar l/s 1 x 10 -10 1 x 10 -10 1 x 10 -10<br />
Pressure (absolute) 1 x á10 -9 mbar Ð 2 bar 1 x á10 -9 mbar Ð 2 bar 1 x 10 -9 mbar Ð 2 bar<br />
Operating temperature ¡C 300 300 300<br />
Bakeout temperature ¡C 300 300 300<br />
Materials exposed to process media stainless steel stainless steel stainless steel<br />
Weight kg 0.3 1.5 3.0<br />
B7.4
Rotary/Linear Motion Feedthroughs<br />
Vacuum Feedthroughs<br />
Rotary/Linear Motion Feedthroughs<br />
♦ Two FPM shaft seals<br />
♦ Direct push/pull and rotary actuation<br />
♦ With locking ring and optional anti-rotation device<br />
Technical Data<br />
Vacuum connection DN 16 ISO-KF DN 25 ISO-KF DN 40 ISO-KF<br />
Feedthrough/seal FPM FPM FPM<br />
Shaft connection mm M 3 / ¿ 5 M 4 / ¿ 8 M 6 / ¿ 12<br />
Stroke mm 50 100 150<br />
Type FCH016-H FCH025-H FCH040-H<br />
Ordering Information<br />
Rotary/linear feedthrough 214-320 214-322 214-324<br />
Anti-rotation device 214-072 214-073 214-074<br />
Shaft load<br />
Radial, at max. displacement N 10 15 30<br />
Torsion Nm 2 8 20<br />
Tightness, static mbar l/s 1 x 10 -9 1 x 10 -9 1 x 10 -9<br />
Pressure (absolute) 1 x 10 -8 mbar Ð 1 bar 1 x 10 -8 mbar Ð 1 bar 1 x 10 -8 mbar Ð 1 bar<br />
Operating temperature ¡C 50 50 50<br />
Bakeout temperature ¡C 110 110 110<br />
Materials exposed to process media stainless steel, stainless steel, stainless steel,<br />
aluminum, FPM aluminum, FPM aluminum, FPM<br />
Weight kg 0.1 0.2 0.3<br />
B7<br />
Feedthrough<br />
Anti-rotation device<br />
B7.5
Vacuum Feedthroughs<br />
Linear Motion Feedthroughs<br />
Linear Motion Feedthroughs<br />
♦ With bellows for more demanding vacuum requirements<br />
♦ Direct push and pull actuation<br />
♦ High accuracy adjustment using micrometer screw<br />
♦ Equipped with set screw for positioning<br />
Technical Data<br />
Vacuum connection DN 16 CF-R DN 40 CF-R DN 16 CF-R DN 40 CF-R<br />
Feedthrough/seal bellow bellow bellow bellow<br />
Shaft connection mm M 4 x 16 M 6 x 10, ¿ 10 M 4 x 16 M 6 x 10, ¿ 10<br />
Actuator manually manually micrometer micrometer<br />
Stroke mm 25 50 20 50<br />
Type FPU016-H FPU040-H FPU016-Z FPU040-Z<br />
Ordering Information 214-330 214-332 214-334 214-336<br />
Stroke per revolution mm Ñ Ñ 0.5 1<br />
Scale division mm 5 10 0.01 0.005<br />
Shaft load<br />
Radial at max. displacement N 20 100 20 100<br />
Axial, against vacuum N 85 140 185 440<br />
Axial, against atmosphere N 100 200 200 500<br />
Torsion Nm 0.2 0.5 0.2 0.5<br />
Tightness mbar l/s 1 x 10 -10 1 x 10 -10 1 x 10 -10 1 x 10 -10<br />
Pressure (absolute) 1 x 10 -9 mbar Ð 2 bar 1 x 10 -9 mbar Ð 2 bar 1 x 10 -9 mbar Ð 2 bar 1 x 10 -9 mbar Ð 2 bar<br />
Bakeout temperature<br />
Feedthrough ¡C 300 300 300 300<br />
Micrometer screw ¡C Ñ Ñ 100 100<br />
Materials exposed to process media stainless steel stainless steel stainless steel stainless steel<br />
Weight kg 0.15 0.75 0.25 1<br />
B7.6
Viewports<br />
Vacuum Feedthroughs<br />
Viewports<br />
ISO-KF<br />
♦ Wide viewing angle<br />
Average transmittance curve<br />
ÐÐÐÐÐÐ Sapphire<br />
- Ñ - Ñ Kodial<br />
- - - - - - Borosilicate<br />
Technical Data<br />
Vacuum connection DN 25 ISO-KF DN 40 ISO-KF DN 50 ISO-KF<br />
Window borosilicate borosilicate borosilicate<br />
Seal FPM FPM FPM<br />
Flange aluminum aluminum aluminum<br />
Bakeout temperature ¡C 150 150 150<br />
Ordering Information 1) 214-003 214-004 214-005<br />
Tightness mbar l/s 1 x 10 -9 1 x 10 -9 1 x 10 -9<br />
Pressure (absolute) 1 x 10 -8 mbar Ð 4 bar 1 x 10 -8 mbar Ð 4 bar 1 x 10 -8 mbar Ð 4 bar<br />
Max. at 150 ¡C bar 3 3 3<br />
Window thickness mm 3.8 3.8 3.8<br />
Weight g 20 30 40<br />
B7<br />
1) Claws and clamping ring not included<br />
Mounting<br />
2.5<br />
2.5<br />
Ø 40<br />
Ø 55<br />
Ø 75<br />
B7.7
Vacuum Feedthroughs<br />
Viewports<br />
ISO-K<br />
Technical Data<br />
Vacuum connection DN 63 ISO-K DN 100 ISO-K DN 160 ISO-K<br />
Window borosilicate borosilicate borosilicate<br />
Seal FPM FPM FPM<br />
Flange aluminum aluminum aluminum<br />
Bakeout temperature ¡C 150 150 150<br />
Ordering Information 1) 214-006 214-007 214-008<br />
Tightness mbar l/s 1 x 10 -9 1 x 10 -9 1 x 10 -9<br />
Pressure (absolute) 1 x 10 -8 mbar Ð 2 bar 1 x 10 -8 mbar Ð 2 bar 1 x 10 -8 mbar Ð 2 bar<br />
max. at 150 ¡C bar 1 1 1<br />
Window thickness mm 6 8 10<br />
Weight kg 0.2 0.3 0.4<br />
1) Claws not included<br />
Mounting<br />
Transmittance curve see page 7<br />
B7.8
Viewports<br />
Vacuum Feedthroughs<br />
ISO-F<br />
♦ Window and protective glass replaceable<br />
Technical Data<br />
Vacuum connection DN 63 ISO-F DN 100 ISO-F DN 160 ISO-F<br />
Window borosilicate borosilicate borosilicate<br />
Seal FPM FPM FPM<br />
Flange anodized aluminum, black anodized aluminum, black anodized aluminum, black<br />
Bakeout temperature ¡C 150 150 150<br />
Ordering Information 1)<br />
Viewport 214-016 214-017 214-018<br />
Protective glass, 5 pcs. 214-046 214-047 214-048<br />
Tightness mbar l/s 1 x 10 -9 1 x 10 -9 1 x 10 -9<br />
Pressure (absolute) 1 x 10 -8 mbar Ð 2 bar 1 x 10 -8 mbar Ð 2 bar 1 x 10 -8 mbar Ð 2 bar<br />
max. at 150 ¡C bar 1 1 1<br />
Window thickness mm 7.5 11 15<br />
Protective glass thickness mm 2.5 2.5 2.5<br />
Weight kg 0.8 1.4 3<br />
1) Claws, screws, washers and nuts included<br />
Mounting<br />
B7<br />
Transmittance curve see page 7<br />
B7.9
Vacuum Feedthroughs<br />
Viewports<br />
CF<br />
♦ Window is protected<br />
♦ With Fe-Ni alloy as transitional material<br />
Technical Data<br />
Vacuum connection DN 16 CF-F DN 40 CF-F DN 40 CF-F DN 63 CF-F DN 100 CF-F DN 160 CF-F<br />
Window kodial kodial sapphire kodial kodial kodial<br />
Seal metal metal metal metal metal metal<br />
Flange stainless steel stainless steel stainless steel stainless steel stainless steel stainless steel<br />
Bakeout temperature ¡C 400 400 400 400 400 400<br />
Ordering Information 1)<br />
Viewport 214-021 214-022 214-032 214-023 214-024 214-025<br />
Set of hexagon bolts and nuts 213-416 standard standard standard standard Standard<br />
Tightness mbar l/s 1 x 10 -10 1 x á10 -10 1 x 10 -10 1 x á10 -10 1 x 10 -10 1 x 10 -10<br />
Pressure (absolute)<br />
min. mbar 1 x 10 -10 1 x 10 -10 1 x 10 -10 1 x 10 1 x 10 -10 1 x 10 -10<br />
max. bar 2 2 2 2 2 2<br />
max. at 400 ¡C bar 1 1 1 1 1 1<br />
Window thickness mm 1.5 3 3 4 6 8<br />
Weight 40 g 240 g 350 g 850 g 1.4 kg 2.8 kg<br />
1) Screw set and seal not included<br />
Mounting<br />
Transmittance curve see page 7<br />
B7.10
Electrical Feedthroughs<br />
Vacuum Feedthroughs<br />
Electrical Feedthroughs<br />
16 ISO-KF<br />
Technical Data<br />
Vacuum connection DN 16 ISO-KF DN 16 ISO-KF DN 16 ISO-KF<br />
Number of feedthroughs 4 9 9<br />
Voltage per pole 1) V 50 50 50<br />
Current per pole 1) A 1 2 2<br />
Ordering Information<br />
Feedthrough 214-111 214-112 214-113<br />
Connector: vacuum side Ñ Ñ 214-191<br />
Connector: air side 214-171 214-172 214-172<br />
Connection<br />
Vacuum side solder connection solder connection connector<br />
Air side connector connector connector<br />
Diameter of connecting wire mm 0.6 1.2 1.2<br />
Test voltage V / Hz 500 / 50 500 / 50 500 / 50<br />
Tightness mbar l/s 1 x 10 -9 1 x 10 -9 1 x 10 -9<br />
Pressure (absolute) 2) 1 x 10 -8 mbar Ð 2.5 bar 1 x 10 -8 mbar Ð 2.5 mbar 1 x 10 -8 mbar Ð 2.5 mbar<br />
Bakeout temp. (feedthrough, connector) ¡C 130 130 130<br />
Housing nickel-plated steel nickel-plated steel nickel-plated steel<br />
Insulator PEEK / Araldit PEEK / Araldit PEEK / Araldit<br />
Seal FPM FPM FPM<br />
Contact (feedthrough, connector) gold-plated bronze gold-plated bronze gold-plated bronze<br />
1) Local regulations concerning use must be followed<br />
2) Pressure max. 10 bar with external centering ring<br />
B7<br />
Connector: vacuum side<br />
Feedthrough<br />
Connector: air side<br />
B7.11
Vacuum Feedthroughs<br />
Electrical Feedthroughs<br />
40 ISO-KF<br />
Technical Data<br />
Vacuum connection DN 40 ISO-KF DN 40 ISO-KF DN 40 ISO-KF DN 40 ISO-KF<br />
Number of feedthroughs 7 7 4 1<br />
Voltage per pole 1) V 380 380 800 6000<br />
Current per pole 1) A 16 16 16 25<br />
Ordering Information<br />
Feedthrough 214-121 214-122 214-123 214-131<br />
Connector: vacuum side Ñ 214-193 214-194 Ñ<br />
Connector: air side 214-174 214-174 214-175 214-180<br />
Connection<br />
Vacuum side solder connection connector connector screw coupling<br />
Air side connector connector connector connector<br />
Diameter of connecting wire mm 1.8 1.8 2.5 5<br />
Test voltage kV / Hz Ñ Ñ Ñ 15 / 50<br />
Tightness mbar l/s 1 x 10 -9 1 x 10 -9 1 x 10 -9 1 x 10 -9<br />
Pressure (absolute) 2) 1 x 10 -8 mbar l/s Ð 2.5 bar 1 x 10 -8 mbar l/s Ð 2.5 bar 1 x 10 -8 mbar l/s Ð 2.5 bar 1 x 10 -8 mbar l/s Ð 2.5 bar<br />
Bakeout temp. (feedthrough, connector) ¡C 130 130 130 130<br />
Housing chrome-plated steel chrome-plated steel chrome-plated steel chrome-plated steel<br />
Insulator PTFE / Araldit PTFE / Araldit PTFE / Araldit PTFE / Araldit<br />
Seal FPM FPM FPM FPM<br />
Contact (feedthrough, connector) gold-plated bronze gold-plated bronze gold-plated bronze nickel-plated brass<br />
1) Local regulations concerning use must be followed<br />
2) Pressure max. 10 bar with external centering ring<br />
Connector: vacuum side<br />
Feedthrough<br />
Connector: air side<br />
B7.12
Electrical Feedthroughs<br />
Vacuum Feedthroughs<br />
CF<br />
Technical Data<br />
Vacuum connection DN 40 CF-F DN 40 CF-F DN 16 CF-F<br />
Number of feedthroughs 4 9 1<br />
Voltage per pole 1) kV 1 1 4<br />
Current per pole 1) A 8 8 150<br />
Ordering Information<br />
Feedthrough 214-116 214-117 214-126<br />
Connection piece: vacuum side 214-192 214-198 214-195<br />
Connector: atmospheric side 214-173 214-181 214-176<br />
Bakeout temperature ¡C 400 400 400<br />
Temperature rise at max. current ¡C 40 40 50<br />
Tightness mbar l/s 1 x 10 -10 1 x 10 -10 1 x 10 -10<br />
Pressure (absolute) 1 x 10 -10 mbar Ð 2 bar 1 x 10 -10 mbar Ð 2 bar 1 x 10 -10 mbar Ð 2 bar<br />
Flange stainless steel stainless steel stainless steel<br />
Conductor stainless steel stainless steel copper<br />
Insulator Al 2 O 3 Al 2 O 3 Al 2 O 3<br />
Weight kg 0.3 0.4 0.15<br />
Connection piece: vacuum side 1) pcs. 5 10 2<br />
Current max. A 12 12 90<br />
Bakeout temperature ¡C 400 400 400<br />
Material stainless steel stainless steel stainless steel<br />
Feedthrough<br />
B7<br />
Connector: atmospheric side 1) pcs. 5 10 2<br />
Current max. A 12 12 A 90<br />
Not insulated, for use up to V Ñ 50 V 50<br />
Insulated, for use up to V 100 Ñ Ñ<br />
Bakeout temperature ¡C 50 50 150<br />
Contact gold-plated brass gold-plated brass silver-plated brass<br />
1) Local regulations concerning use must be followed<br />
B7.13
Vacuum Feedthroughs<br />
Electrical Feedthroughs<br />
Technical Data<br />
CF<br />
Vacuum connection DN 40 CF-F DN 40 CF-F DN 16 CF-F<br />
Number of feedthroughs 1 2 1<br />
Voltage per pole 1) kV 1 4 4<br />
Current per pole 2)) A 250/1000 150 150<br />
Ordering Information<br />
Feedthrough 214-127 214-128 214-136<br />
Connector: vacuum side 214-196 214-195 214-195<br />
Connector: atmospheric side 214-177 214-176 214-176<br />
Connector: atm. side, H 2 O cooled 214-178 Ñ Ñ<br />
Bakeout temperature ¡C 400 400 400<br />
Temperature rise at max. current ¡C 40 50 50<br />
Tightness mbar l/s 1 x 10 -10 1 x 10 -10 1 x 10 -10<br />
Pressure (absolute) 1 x 10 -10 mbar Ð 2 bar 1 x 10 -10 mbar Ð 2 bar 1 x 10 -10 mbar Ð 2 bar<br />
Flange stainless steel stainless steel stainless steel<br />
Conductor copper copper copper<br />
Insulator Al 2 O 3 Al 2 O 3 Al 2 O 3<br />
Weight kg 0.5 0.45 0.15<br />
Connection piece: vacuum side 1) pcs. 1 2 2<br />
Current max. A 1000 1000 90<br />
Bakeout temperature ¡C 400 400 400<br />
Material copper stainless steel stainless steel<br />
Feedthrough<br />
Connector: atmospheric side 1) pcs. 1 2 2<br />
Current max. A 250 90 90<br />
Not insulated, for use up to V 50 50 50<br />
Bakeout temperature ¡C 150 150 150<br />
Contact silver-plated brass silver-plated brass silver-plated brass<br />
1) Local regulations concerning use must be followed<br />
2) With water-cooling<br />
With water-cooling 1)<br />
Current max.<br />
1000 A<br />
Not insulated, for use up to 24 ¡C<br />
Bakeout temperature 120 ¡C<br />
Contact<br />
silver-plated brass<br />
B7.14
High Current Feedthroughs<br />
Vacuum Feedthroughs<br />
High Current Feedthroughs<br />
CF<br />
♦ Selection of electrodes<br />
♦ Slide into mounted feedthrough<br />
♦ Current connection with water cooling<br />
Vacuum connection<br />
Technical Data<br />
DN 40 ISO-KF<br />
Number of feedthroughs 1<br />
Voltage V 50<br />
Current, with water cooling A 5000<br />
Ordering Information<br />
Feedthrough 214-141<br />
Current connection with water cooling 214-145<br />
Straight electrode 214-142<br />
Angle electrode 214-143<br />
T-electrode 214-144<br />
Tightness mbar l/s 1 x 10 -9<br />
Pressure (absolute)<br />
1 x 10 -8 mbar Ð 2.5 bar<br />
(max. 10 bar with external centering ring)<br />
Bakeout temperature ¡C 110<br />
Housing<br />
aluminum<br />
Insulator<br />
thermoplast<br />
Seal<br />
FPM<br />
B7<br />
Feedthrough<br />
Current connection with water cooling<br />
brass, copper<br />
Electrodes<br />
copper<br />
straight electrode<br />
angle electrode<br />
T-electrode<br />
B7.15
Vacuum Feedthroughs<br />
Coaxial Feedthroughs<br />
Coaxial Feedthroughs<br />
♦ Based on MIL-C-39012A<br />
♦ Voltage up to 5 kV DC<br />
♦ With atmospheric connector<br />
Technical Data<br />
Vacuum connection DN 16 ISO-KF DN 16 ISO-KF DN 16 CF-F DN 16 CF-F DN 40 CF-F<br />
Number of feedthroughs 1 1 1 1 3<br />
Type BNC MHV BNC MHV MHV<br />
Ordering Information<br />
214-151 214-152 214-155 214-156 214-157<br />
Voltage<br />
AC, 50 Hz kV 0.35 3.5 0.35 3.5 3.5<br />
DC kV 0.5 5 0.5 5 5<br />
Current A 3 3 3 3 3<br />
Frequency MHz 150 Ñ 150 Ñ Ñ<br />
Impedance ½ 50 Ð 60 Ñ 50 Ð 60 Ñ Ñ<br />
Insulation resistance at 20 ¡C ½ 10 10 10 10 10 10 10 10 10 10<br />
Tightness mbar l/s 1 x 10 -9 1 x 10-9 1 x 10 -10 1 x 10 -10 1 x 10 -10<br />
Pressure (absolute) 1 x 10 -8 mbar Ð 2.5 bar 1) 1 x 10 -8 mbar Ð 2.5 bar 1) 1 x 10 -8 mbar Ð 10 bar 1 x 10 -8 mbar Ð 10 bar 1 x 10 -8 bar Ð 10 bar<br />
Housing, flange, conductor stainless steel stainless steel stainless steel stainless steel stainless steel<br />
Feedthrough, seal Al 2 O 3 Al 2 O 3 Al 2 O 3 Al 2 O 3 Al 2 O 3<br />
Bakeout temperature<br />
With connector ¡C 50 50 50 50 50<br />
Without connector 2) ¡C 200 200 400 400 400<br />
Standard connection<br />
Atmospheric connector UG 88/U UG 932/U UG 88/U UG 932/U UG 932/U<br />
Cable RG 58/U RG 59/U RB 58/U RG 59/U RG 59/U<br />
Weight kg 0.1 0.1 0.14 0.14 0.5<br />
1) Max. 10 bar with external centering ring<br />
2) With elastomer seal up to 150 ¡C<br />
B7.16
Metal-Ceramic Connections<br />
Vacuum Feedthroughs<br />
Metal-Ceramic Connections<br />
♦ High grade materials allow repeated bakings at 400 ¡C<br />
Technical Data<br />
Voltage 1) 12 kV 10 kV 20 kV 30 kV<br />
Ordering Information<br />
214-161 214-162 214-163 214-164<br />
Insulator Al 2 O 3 Al 2 O 3 Al 2 O 3 Al 2 O 3<br />
Connection<br />
a Fe-Ni Fe-Ni Fe-Ni Fe-Ni<br />
b Fe-Ni stainless steel stainless steel stainless steel<br />
Bakeout temperature ¡C 400 400 400 400<br />
Tightness mbar l/s 1 x 10 -10 1 x 10 -10 1 x 10 -10 1 x 10 -10<br />
Weight g 5 12 25 90<br />
1) Permissible operating voltage (50 Hz) as a function of the<br />
surface-leakage path under normal conditions (1000 mbar,<br />
50% relative air humidity) at which arcs do not yet occur.<br />
In vacuums lower than 10-4 mbar, these values can be<br />
increased by 80%. The absolute value for welded-in<br />
electrodes depends on the electrode geometry.<br />
B7<br />
B7.17
Vacuum Feedthroughs<br />
Liquid Feedthroughs<br />
Liquid Feedthroughs<br />
♦ For H 2 O and LN 2<br />
♦ Thermically insulated<br />
♦ Especially suited for very hot and very cold applications<br />
Technical Data<br />
Vacuum connection DN 40 ISO-KF DN 40 CF-F<br />
Feedthrough/seal welded welded<br />
Connection mm ¿ 8 x 1 ¿ 8 x 1<br />
Number of tubes 2 2<br />
Ordering Information 1) 214-101 214-102<br />
Tightness mbar l/s 1 x 10 -9 1 x 10 -10<br />
Pressure (absolute) 10 -8 mbar Ð 2.5 bar 1) 10 -9 mbar Ð 10 bar (at 400 ¡C max. 2 bar)<br />
Temperature range ¡C -200 Ð +150 -200 Ð +400<br />
Material stainless steel stainless steel<br />
Weight kg 0.3 0.4<br />
1) Max. 10 bar with external centering ring<br />
B7.18
Vacuum Ball Bearings<br />
Vacuum Feedthroughs<br />
Vacuum Ball Bearings<br />
Especially suited for clean vacuum applications and extreme residual<br />
gas requirements.<br />
Technical Data<br />
Service life 1) (revolutions) > 20 Mio. > 20 Mio. > 20 Mio. > 20 Mio. > 20 Mio.<br />
Pressure (absolute) mbar 1 x 10 -12 Ð 1 x 10 -2 1 x 10 -12 Ð 1 x 10 -2 1 x 10 -12 Ð 1 x 10 -2 1 x 10 -12 Ð 1 x 10 -2 1 x 10 -12 Ð 1 x 10 -2<br />
Operating temperature 2) ¡C -200 Ð +300 -200 Ð +300 -200 Ð +300 -200 Ð +300 -200 Ð +300<br />
Material stainless steel stainless steel stainless steel stainless steel stainless steel<br />
1.3543/1.4301 1.3543/1.4301 1.3543/1.4301 1.3543/1.4301 1.3543/1.4301<br />
Type 624 605 626 608 6000<br />
Ordering Information 1)<br />
214-211 214-212 214-213 214-214 214-215<br />
Rotational speed at<br />
20 ¡C U/min 5000 4000 3000 2500 2000<br />
300 ¡C U/min 1500 1500 1000 800 500<br />
Load capacity 3)<br />
Static Co N 400 400 800 1000 1500<br />
Dynamic C N 50 50 100 150 200<br />
Axial load
Vacuum Feedthroughs<br />
Lubricants and Sealing Materials<br />
Lubricants and Sealing Materials<br />
Thread Lubricant<br />
♦ Prevents seizing of stainless steel screw connections at atmosphere<br />
even at high temperatures<br />
♦ Remains fully effective for at least 10 bakeout cycles<br />
Technical Data<br />
Temperature resistance 1000 ¡C<br />
In packages of<br />
28 g<br />
Type C 100<br />
Ordering Information 214-231<br />
Vacuum Grease/Oil<br />
♦ For sliding elastomer seals<br />
♦ Low vapor pressure<br />
♦ Good adhesiveness<br />
Technical Data<br />
Temperature resistance 10 Ð 30 ¡C -40 Ð 200 ¡C -20 Ð 200 ¡C -60 Ð 300 ¡C -60 Ð 300 ¡C<br />
Vapor pressure at<br />
20¡C mbar < 10 -7 < 10 -7 < 10 -12
Lubricants and Sealing Materials<br />
Vacuum Feedthroughs<br />
Sealing Material<br />
♦ For sealing small leaks<br />
Technical Data<br />
Temperature resistance -40 Ð 200 ¡C 350 ¡C<br />
Version Paste Spray<br />
Solvent Axarel 6100/9100 Axarel 6100/9100<br />
In packages of 200 g 170 g<br />
Type Rhodosil 340 Sprayseal<br />
Ordering Information 214-233 214-234<br />
B7<br />
B7.21
Vacuum Valves<br />
B8
Vacuum Valves<br />
Contents<br />
Products and Accessories<br />
Angle and Inline Valves. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.3<br />
DN 5 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.3<br />
DN 16 - 160 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.6<br />
Angle Valves<br />
DN 16-63 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.12<br />
DN 250 - 1000 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.14<br />
Butterfly Valves. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.16<br />
Gate Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.20<br />
Gas Dosing Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.21<br />
Manually Actuated Coarse Gas Dosing Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.21<br />
Manually Actuated Dosing and Shut-off Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.22<br />
Manually Actuated All-metal Dosing Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.23<br />
Gas Dosing Systems . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.24<br />
Control Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.25<br />
Controllers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.26<br />
Interface Module VCA200-Z . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.28<br />
Venting Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.29<br />
Manually Actuated. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.29<br />
Solenoid Actuated . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.30<br />
Safety Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.31<br />
Vacuum Safety Valves. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.31<br />
Power Failure Venting Valve . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.32<br />
High Pressure Relief Valve . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.32<br />
Vacuum Locks and Sealing Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.33<br />
Ball Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.34<br />
B8.2
Angle and Inline Valves<br />
Vacuum Valves<br />
Angle and Inline Valves<br />
DN 5<br />
Manually Actuated<br />
♦ Spindle drive<br />
♦ Angle valve<br />
Pneumatically Actuated<br />
♦ Extremely high service life of 5 million cycles<br />
♦ Angle valves<br />
♦ With and without pilot valve<br />
Solenoid Actuated<br />
♦ Extremely high service life > 2 million cycles<br />
♦ Angle and inline valves<br />
B8<br />
Connections<br />
B8.3
Vacuum Valves<br />
Angle and Inline Valves<br />
DN 5<br />
Technical Data<br />
Actuation manual pneumatic electropneumatic solenoid solenoid solenoid<br />
Feedthrough bellows bellows bellows without without without<br />
Nominal diameter mm 5 / M 14 x 1 5 / M 14 x 1 5 / M 14 x 1 5 / M 14 x 1 5 / M 14 x 1 5 / M 14 x 1<br />
Service life cycles Ñ 5 million 5 million 2 million 2 million 2 million<br />
Attribute angle valve angle valve angle valve angle valve inline valve inline valve<br />
without pilot valve with pilot valve<br />
Ordering Information<br />
Type VAH005-X VAP005-X VAP005-X VAM005-X VIM005-X VIM005-Z<br />
Valve 250-070 250-040 Ñ Ñ Ñ Ñ<br />
normally closed Ñ Ñ 250-050 250-000 250-010 Ñ<br />
normally open Ñ Ñ Ñ Ñ Ñ 250-020<br />
Tightness mbar l/s 1 x 10 -9 1 x 10 -9 1 x 10 -9 1 x 10 -9 1 x 10 -9 1 x 10 -9<br />
Conductance for<br />
molecular flow l/s 0.4 0.4 0.4 0.3 0.2 0.2<br />
laminar flow l/s 4 4 4 3 2 2<br />
Pressure, min. / max. mbar / bar 10 -8 / 4 10 -8 / 4 10 -8 / 4 10 -8 / 10 10 -8 / 10 10 -8 / 10<br />
Differential pressure in<br />
closing / opening direction bar 4 / 4 3 / 3 3 / 3 5 / 1.5 5 / 1.5 5 / 1.5<br />
Can be opened to a differential pressure bar 4 3 3 1 1 1<br />
Ambient temperature ¡C 5 Ð 70 5 Ð 80 5 Ð 40 5 Ð 40 5 Ð 40 5 Ð 40<br />
Bakeout temperature housing / actuator ¡C 150 / 70 150 / 80 150 / 80 150 150 150<br />
Closing / opening time ms Ñ 35 / 35 35 / 35 7 / 30 7 / 30 7 / 30<br />
Switching frequency 1/min Ñ 150 150 300 300 300<br />
Protection acc. to DIN 40050 Ñ IP 65 IP 65 IP 65 IP 65 IP 65<br />
Supply / power consumption V DC / W Ñ Ñ 24 / 1 24 / 10 24 / 10 24 / 10<br />
Housing, stainless steel 1.4301 1.4301 1.4301 1.4301 1.4301 1.4301<br />
Actuator, stainless steel 1.4301 1.4301 1.4301 Ñ Ñ Ñ<br />
Bellows, valve plate, stainless steel 1.4301 1.4301 1.4301 Ñ Ñ Ñ<br />
Guiding tube, armature, stainless steel Ñ Ñ Ñ 1.4105 1.4105 1.4105<br />
Seal FPM FPM FPM FPM FPM FPM<br />
Weight kg 0.15 0.18 0.20 0.26 0.28 0.28<br />
Spare parts<br />
Seal set 215-373 215-372 215-372 215-371 215-371 215-371<br />
Spare parts set 215-369 215-368 215-368 215-365 215-366 215-367<br />
Ordering Information<br />
Connection<br />
DN 10 ISO-KF Tube OD 1/4“ Tube 6 mm<br />
250-080 250-085 250-086<br />
B8.4
Angle and Inline Valves<br />
Vacuum Valves<br />
DN 5<br />
VAH005-X VAP005-X VAP005-X<br />
VAM005-X<br />
VIM005-X/-Z<br />
Compressed air connection<br />
Power connection<br />
B8<br />
B8.5
Vacuum Valves<br />
Angle and Inline Valves<br />
DN 16 – 160<br />
Manually Actuated DN 16 – 40<br />
♦ Multi-functional rotary knob<br />
♦ Quick opening with 130¡ turn<br />
♦ Soft start in four steps<br />
Manually Actuated DN 63, 100<br />
♦ Spindle drive with hand wheel<br />
♦ Smooth opening<br />
Pneumatically Actuated DN 16 – 160<br />
♦ Visual indication of the open and closed position<br />
♦ Electrical position indicator for open and closed valve<br />
♦ Can be used as normally closed or normally open valve<br />
B8.6
Angle and Inline Valves<br />
Vacuum Valves<br />
Manually Actuated with CF Flanges<br />
♦ For UHV applications<br />
♦ Extremely high safety standard for high-purity or toxic gases<br />
♦ Bakeable at up to 180 ¡C in open and closed position<br />
♦ FPM sealed<br />
♦ Maintenance-free<br />
Solenoid Actuated<br />
♦ High conductance<br />
♦ Compact design<br />
♦ Visual position indicator (LED)<br />
♦ Selectable operating mode<br />
Remote control via PLC or PC<br />
Local operation<br />
B8<br />
B8.7
Vacuum Valves<br />
Angle and Inline Valves<br />
DN 16 - 160<br />
Angle valve DN 16 ISO-KF 16 ISO-KF Ñ 25 ISO-KF 25 ISO-KF Ñ<br />
Inline valve DN Ñ Ñ 16 ISO-KF Ñ Ñ 25 ISO-KF<br />
Housing material aluminum stainless steel stainless steel aluminum stainless steel stainless steel<br />
Service life, cycles million 10 10 10 10 10 10<br />
Conductance for molecular flow l/s 4.5 4.5 2.5 16 16 8<br />
Tightness mbar l/s 1 x 10 -9 1 x 10 -9 1 x 10 -9 1 x 10 -9 1 x 10 -9 1 x 10 -9<br />
Pressure, absolute, min. / max. mbar / bar 10 -8 / 4 10 -8 / 4 10 -8 / 4 10 -8 / 4 10 -8 / 4 10 -8 / 4<br />
Differential pressure in<br />
closing / opening direction bar 2 / 2 2 / 2 2 / 2 2 / 2 2 / 2 2 / 2<br />
Opens to a pressure difference of bar 2 2 2 3 3 3<br />
Mounting orientation any any any any any any<br />
Bakeout temperature<br />
housing / actuator, pilot valve ¡C 80 / 50 150 / 50 150 / 50 80 / 50 150 / 50 150 / 50<br />
Seal FPM FPM FPM FPM FPM FPM<br />
Manually Actuated<br />
Weight kg 0.3 0.4 0.55 0.43 0.75 1.35<br />
Type VAH016-A VAH016-X VIH016-X VAH025-A VAH025-X VIH025-X<br />
Ordering Information<br />
Angle valve 250-260 250-265 Ñ 250-270 250-275 Ñ<br />
Inline valve Ñ Ñ 250-365 Ñ Ñ 250-375<br />
Pneumatically Actuated<br />
Closing time ms 200 200 200 290 290 290<br />
Opening time ms 100 100 100 110 110 110<br />
Electrical position indicator,<br />
load capacity V AC / A 250 / 0.125 250 / 0.125 250 / 0.125 250 / 0.125 250 / 0.125 250 / 0.125<br />
V DC / A 50 / 0.25 50 / 0.25 50 / 0.25 50 / 0.25 50 / 0.25 50 / 0.25<br />
Compressed air, overpressure bar 3 Ð 7 3 Ð 7 3 Ð 7 3 Ð 7 3 Ð 7 3 Ð 7<br />
Air cylinder volume cm 3 5.5 5.5 5.5 12.1 12.1 12.1<br />
Weight with pilot valve kg 0.3 0.4 0.54 0.44 0.75 0.73<br />
Type VAP016-A VAP016-X VIP016-X VAP025-A VAP025-X VIP025-X<br />
Ordering Information<br />
Angle valve without pilot valve 250-204 250-214 Ñ 250-224 250-234 Ñ<br />
Inline valve without pilot valve Ñ Ñ 250-314 Ñ Ñ 250-334<br />
Angle valve with pilot valve<br />
24 V DC 250-200 250-210 Ñ 250-220 250-230 Ñ<br />
24 V AC 250-201 250-211 Ñ 250-221 250-231 Ñ<br />
100 Ð 115 V AC 250-202 250-212 Ñ 250-222 250-232 Ñ<br />
200 Ð 240 V AC 250-203 250-213 Ñ 250-223 250-233 Ñ<br />
Inline valve with pilot valve<br />
24 V DC Ñ Ñ 250-310 Ñ Ñ 250-330<br />
24 V AC Ñ Ñ 250-311 Ñ Ñ 250-331<br />
100 Ð 115 V AC Ñ Ñ 250-312 Ñ Ñ 250-332<br />
200 Ð 240 V AC Ñ Ñ 250-313 Ñ Ñ 250-333<br />
Spare parts<br />
Seal set 215-025 215-025 215-025 215-075 215-075 215-075<br />
Bellows set for manually actuated valves 215-042 215-042 215-042 215-092 215-092 215-092<br />
Bellows set for pneumatically actuated valves 215-027 215-027 215-027 215-077 215-077 215-077<br />
B8.8
Angle and Inline Valves<br />
Vacuum Valves<br />
40 ISO-KF 40 ISO-KF Ñ 63 ISO-K 63 ISO-K 100 ISO-K 100 ISO-K 160 ISO-K<br />
Ñ Ñ 40 ISO-KF Ñ Ñ Ñ Ñ Ñ<br />
aluminum stainless steel stainless steel aluminum stainless steel aluminum stainless steel aluminum<br />
10 10 10 1.5 1.5 1.5 1.5 1.5<br />
40 40 20 140 140 330 330 800<br />
1 x 10 -9 1 x 10 -9 1 x 10 -9 1 x 10 -9 1 x 10 -9 1 x 10 -9 1 x 10 -9 1 x 10 -9<br />
10 -8 / 2.5 10 -8 / 2.5 10 -8 / 2.5 10 -8 / 4 10 -8 / 4 10 -8 / 4 10 -8 / 4 10 -8 / 4<br />
2 / 1.5 2 / 1.5 2 / 1.5 1.5 / 1.5 1.5 / 1.5 1.5 / 1.5 1.5 / 1.5 1.5 / 1.5<br />
2 2 2 1.5 1.5 1.5 1.5 1.5<br />
any any any any any any any any<br />
80 / 50 150 / 50 150 / 50 150 / 60 150 / 60 150 / 60 150 / 60 150 / 60<br />
FPM FPM FPM FPM FPM FPM FPM FPM<br />
0.48 0.85 1.4 3.6 6.5 6.1 11.1 Ñ<br />
VAH040-A VAH040-X VIH040-X VAH063-A VAH063-X VAH100-A VAH100-X Ñ<br />
250-280 250-285 Ñ 250-470 250-475 250-480 250-485 Ñ<br />
Ñ Ñ 250-385 Ñ Ñ Ñ Ñ Ñ<br />
500 500 500 250 250 300 300 550<br />
250 250 250 300 300 450 450 450<br />
250 / 0.125 250 / 0.125 250 / 0.125 250 / 0.125 250 / 0.125 250 / 0.125 250 / 0.125 250 / 0.125<br />
50 / 0.25 50 / 0.25 50 / 0.25 50 / 0.25 50 / 0.25 50 / 0.25 50 / 0.25 50 / 0.25<br />
3 Ð 7 3 Ð 7 3 Ð 7 4 Ð 8 4 Ð 8 4 Ð 8 4 Ð 8 4 Ð 8<br />
26.2 26.2 26.2 75 75 195 195 570<br />
0.9 1.6 1.5 4.0 6.8 6.7 11.7 11.4<br />
VAP040-A VAP040-X VIP040-X VAP063-A VAP063-X VAP100-A VAP100-X VAP160-A<br />
250-244 250-254 Ñ 250-404 250-414 250-424 250-434 250-444<br />
Ñ Ñ 250-354 Ñ Ñ Ñ Ñ Ñ<br />
250-240 250-250 Ñ 250-400 250-410 250-420 250-430 250-440<br />
250-241 250-251 Ñ 250-401 250-411 250-421 250-431 250-441<br />
250-242 250-252 Ñ 250-402 250-412 250-422 250-432 250-442<br />
250-243 250-253 Ñ 250-403 250-413 250-423 250-433 250-443<br />
B8<br />
Ñ Ñ 250-350 Ñ Ñ Ñ Ñ Ñ<br />
Ñ Ñ 250-351 Ñ Ñ Ñ Ñ Ñ<br />
Ñ Ñ 250-352 Ñ Ñ Ñ Ñ Ñ<br />
Ñ Ñ 250-353 Ñ Ñ Ñ Ñ Ñ<br />
215-125 215-125 215-125 215-251 215-251 215-271 215-271 215-291<br />
215-142 215-142 215-142 215-254 215-254 215-274 215-274 Ñ<br />
215-127 215-127 215-127 215-253 215-253 215-273 215-273 215-293<br />
B8.9
Vacuum Valves<br />
Angle and Inline Valves<br />
Manually Actuated<br />
Angle valves<br />
ISO-KF<br />
Position indicator<br />
DN A B C D E<br />
DN 16 ISO-KF 118.3 44 62 40 5<br />
DN 25 ISO-KF 154.5 58 79 50 10<br />
DN 40 ISO-KF 173.8 82 106 65 12<br />
Inline valves<br />
ISO-KF<br />
Angle valves<br />
ISO-K<br />
DN A B C D E F<br />
DN 16 ISO-KF 100.3 44 44 80 22 5<br />
DN 25 ISO-KF 136 58 58 100 31.5 10<br />
DN 40 ISO-KF 154.3 82 82 130 45.5 12<br />
DN A B C D E<br />
DN 63 ISO-K 266 124 150 88 20<br />
DN 100 ISO-K 345 164 190 108 25<br />
B8.10
Angle and Inline Valves<br />
Vacuum Valves<br />
Pneumatically Actuated<br />
Angle valves<br />
ISO-KF<br />
Compressed air connection<br />
Power connection<br />
Position indicator connection<br />
Position indicator<br />
DN A B C D E<br />
DN 16 ISO-KF 154 51 60 40 100 ¿ 4+6<br />
DN 25 ISO-KF 176 63 74 50 108 ¿ 4+6<br />
DN 40 ISO-KF 196.5 83 98 65 120 ¿ 4+6<br />
Inline valves<br />
ISO-K<br />
Angle valves<br />
ISO-K<br />
B8<br />
DN A B C D E F<br />
DN 16 ISO-KF 139.5 51 60 80 100 22 ¿ 4+6<br />
DN 25 ISO-KF 157.4 63 74 100 108 31.5 ¿ 4+6<br />
DN 40 ISO-KF 177 83 98 130 120 45.5 ¿ 4+6<br />
DN A B C D E<br />
DN 63 ISO-K 250 130 168 88 14 ¿ 6<br />
DN 100 ISO-K 282 170 208 108 14 ¿ 6<br />
DN 160 ISO-K 380 221 264 138 14 ¿ 6<br />
B8.11
Vacuum Valves<br />
Angle Valves<br />
Angle Valves<br />
DN 16 - 63<br />
Manually Actuated with CF Flanges<br />
Technical Data<br />
Vacuum connection DN 16 CF-R DN 40 CF-R DN 63 CF-R<br />
Actuation manual manual manual<br />
Type VAH016-Z VAH040-Z VAH063-Z<br />
Ordering Information 250-731 250-736 250-741<br />
Service life cycles 50 000 50 000 50 000<br />
Tightness mbar l/s 10 -10 10 -10 10 -10<br />
Conductance for molecular flow l/s 3 34 100<br />
Pressure (absolute) min. / max. mbar / bar 1 x 10 -10 / 4 1 x 10 -10 / 4 1 x 10 -10 / 4<br />
Mounting orientation any any any<br />
Spindle turns 10 12 30<br />
Bakeout temperature<br />
without hand wheel 1) ¡C 180 180 180<br />
with hand wheel ¡C 80 80 80<br />
Heating and cooling rate ¡C/h 240 240 240<br />
Bellows stainless steel 1.4541 stainless steel 1.4541 stainless steel 1.4541<br />
Housing stainless steel 1.4301 stainless steel 1.4301 stainless steel 1.4301<br />
Housing with actuator welded welded welded<br />
Valve plate seal FPM FPM FPM<br />
Valve plate stainless steel stainless steel stainless steel<br />
Weight kg 0.5 2 6.2<br />
Spare parts<br />
FPM seal, 10 pcs. 215-341 215-342 215-343<br />
1) Valves for 300 ¡C please ask for more information<br />
DN A B C SW<br />
DN 16 CF-R 86.1 38 15.5 8<br />
DN 40 CF-R 138 63 20 17<br />
DN 63 CF-R 210 105 34.2 22<br />
B8.12
Angle Valves<br />
Vacuum Valves<br />
Solenoid Actuated<br />
Technical Data<br />
Vacuum connection DN 16 ISO-KF DN 16 ISO-KF DN 25 ISO-KF DN 25 ISO-KF DN 40 ISO-KF DN 40 ISO-KF<br />
Housing material aluminum stainless steel aluminum stainless steel aluminum stainless steel<br />
Type VAM016-A VAM016-X VAM025-A VAM025-X VAM040-A VAM040-X<br />
Ordering Information<br />
100 Ð 230 V, 50/60 Hz 250-661 250-666 250-671 250-676 250-681 250-686<br />
Service life cycles 2 000 000 2 000 000 2 000 000 2 000 000 2 000 000 2 000 000<br />
Tightness mbar l/s 1 x 10 -9 1 x 10 -9 1 x 10 -9 1 x 10 -9 1 x 10 -9 1 x 10 -9<br />
Conductance for molecular flow l/s 3 3 12 12 32 32<br />
Mounting orientation any any any any any any<br />
Pressure (absolute) min. / max. mbar 10 -9 / 1300 10 -9 / 1300 10 -9 / 1300 10 -9 / 1300 10 -9 / 1300 10 -9 / 1300<br />
Differential pressure<br />
in closing, opening direction bar 1.3 1.3 1.3 1.3 1.3 1.3<br />
Opens to a pressure difference of bar 1.3 1.3 1.3 1.3 1.3 1.3<br />
Bakeout temperature<br />
Housing ¡C 120 120 120 120 120 120<br />
Actuator, powerless ¡C 50 50 50 50 50 50<br />
Pickup / holding current A 5.2 / 0.7 5.2 / 0.7 5.3 / 0.7 5.3 / 0.7 4.8 / 0.7 4.8 / 0.7<br />
Load rating of position feedback switches V DC / mA 15 Ð 30 / 100 15 Ð 30 / 100 15 Ð 30 / 100 15 Ð 30 / 100 15 Ð 30 / 100 15 Ð 30 / 100<br />
Closing / opening time ms 100 / 100 100 / 100 120 / 240 120 / 140 230 / 700 230 / 700<br />
Closing delay ms 50 50 170 170 500 500<br />
Switching frequency at<br />
40¡C 1/min 30 30 30 30 30 30<br />
50¡C 1/min 20 20 20 20 20 20<br />
Supply V DC / mA 15 Ð 30 / 3 Ð 5 15 Ð 30 / 3 Ð 5 15 Ð 30 / 3 Ð 5 15 Ð 30 / 3 Ð 5 15 Ð 30 / 3 Ð 5 15 Ð 30 / 3 Ð 5<br />
Pickup power W 400 400 400 400 400 400<br />
Protection IP54 IP54 IP54 IP54 IP54 IP54<br />
Bellows stainless steel stainless steel stainless steel stainless steel stainless steel stainless steel<br />
Seal FPM FPM FPM FPM FPM FPM<br />
Weight kg 1.3 1.45 2.2 2.9 4 5.4<br />
Spare parts Ð Seal set 215-029 215-029 215-079 215-079 215-129 215-129<br />
Ð Bellows set 215-032 215-032 215-082 215-082 215-122 215-122<br />
B8<br />
DN A B C D<br />
DN 16 ISO-KF 160 40 84.5 59<br />
DN 40 ISO-KF 194 50 96.5 75<br />
DN 63 ISO-KF 230 65 119.5 96<br />
B8.13
Vacuum Valves<br />
Angle Valves<br />
DN 250 - 1000<br />
♦ High conductance<br />
♦ Electrical position indicators<br />
DN 250 – 630<br />
♦ With bellows feedthrough<br />
DN 800 and 1000<br />
♦ With elastomer shaft feedthrough<br />
Pneumatically Actuated<br />
Vacuum connection DN 250 ISO-K DN 320 ISO-K DN 400 ISO-K<br />
Conductance for molecular flow l/s 2 700 5 100 7 700<br />
Type VAP250-X VAP320-X VAP400-X<br />
Ordering Information<br />
Valve without coil 250-800 250-805 250-810<br />
Coil<br />
230 V, 50 Hz 215-804 215-804 215-804<br />
115 V, 60 Hz 215-809 215-809 215-809<br />
24 V, 50 Hz 215-814 215-814 215-814<br />
24 V DC 215-819 215-819 215-819<br />
Service life cycles 1 000 000 1 000 000 800 000<br />
Tightness mbar l/s 1 x 10 -9 1 x 10 -9 1 x 10 -9<br />
Pressure min. / max. mbar / bar 10 -7 / 2 10 -7 / 2 10 -7 / 2<br />
Differential pressure in either direction bar 1 1 1<br />
Opening / closing time s 6 / 6 7 / 7 8 / 8<br />
Compressed air, overpressure bar 4 Ð 8 4 Ð 8 4 Ð 8<br />
Compressed air<br />
cylinder volume cm 3 2 100 2 700 3 300<br />
Bakeout temperature<br />
Housing ¡C 120 120 120<br />
Actuator ¡C 60 60 60<br />
Housing stainless steel stainless steel stainless steel<br />
Valve plate stainless steel stainless steel stainless steel<br />
Seal FPM FPM FPM<br />
Weight kg 66 128 148<br />
Spare parts<br />
Seal set 215-375 215-376 215-377<br />
Bellows set 215-385 215-386 215-386<br />
B8.14
Angle Valves<br />
Vacuum Valves<br />
Type DN DN1 A B C D E F<br />
VAP250-X DN 250 ISO-K DN 50 ISO-KF 650 200 250 163 205 208<br />
VAP320-X DN 320 ISO-K DN 63 ISO-K 753 250 275 173 318 244<br />
VAP400-X DN 400 ISO-K DN 63 ISO-K 843 300 350 212 365 312<br />
VAP500-X DN 500 ISO-K DN 100 ISO-K 965 330 370 168 405 332<br />
VAP630-X DN 630 ISO-K DN 160 ISO-K 1231 500 570 317 568 496<br />
Type DN DN1 A B C D E F G<br />
VAP800-S DN 800 ISO-F DN 160 ISO-K 1823 550 200 440 550 490 435<br />
VAP999-S DN 1000 ISO-F DN 160 ISO-K 2240 650 200 440 560 620 575<br />
DN 500 ISO-K DN 630 ISO-K DN 800 ISO-F DN 1000 ISO-F<br />
12 000 20 000 40 000 62 000<br />
VAP500-X VAP630-X VAP800-S VAP999-S<br />
250-815 250-820 250-825 250-830<br />
215-804 215-804 215-804 215-804<br />
215-809 215-809 215-809 215-809<br />
215-814 215-814 215-814 215-814<br />
215-819 215-819 215-819 215-819<br />
800 000 600 000 20 000 20 000<br />
1 x 10 -9 1 x 10 -9 1 x 10 -8 1 x 10 -8<br />
10 -7 / 2 10 -7 / 2 10 -7 / 1 10 -7 / 1<br />
0.5 0.5 0.25 0.25<br />
9 / 9 11 / 11 8 / 8 10 / 10<br />
4 Ð 8 4 Ð 8 5.5 Ð 8 5.5 Ð 8<br />
4 200 5 200 8 100 9 800<br />
B8<br />
120 120 150 150<br />
60 60 60 60<br />
stainless steel stainless steel stainless steel stainless steel<br />
stainless steel stainless steel stainless steel stainless steel<br />
FPM FPM FPM FPM<br />
180 310 430 520<br />
215-378 215-379 215-380 215-381<br />
215-387 215-388 Ñ Ñ<br />
B8.15
Vacuum Valves<br />
Butterfly Valves<br />
Butterfly Valves<br />
DN 63 - 250<br />
♦ High conductance<br />
♦ Compact design, low installation height<br />
♦ With bypass, gauge and valve connections<br />
Housing<br />
with lateral connection flanges DN 63 ISO-F Ñ DN 100 ISO-F<br />
without lateral connection flanges Ñ DN 63 ISO-F Ñ<br />
Bypass connection DN 16 ISO-KF Ñ DN 25 ISO-KF<br />
Gauge, valve connection DN 10 ISO-KF Ñ 2 x DN 10 ISO-KF<br />
Ñ Ñ Ñ<br />
Service life cycles 100 000 100 000 100 000<br />
Tightness mbar l/s 1 x 10 -9 1 x 10 -9 1 x 10 -9<br />
Conductance for air for molecular flow l/s 350 400 1000<br />
Pressure min. / max. mbar / bar 10 -8 / 10 10 -8 / 10 10 -8 / 10<br />
Differential pressure in either direction bar 4 4 4<br />
Housing, valve plate, valve shaft / seal stainless steel / FPM stainless steel / FPM stainless steel / FPM<br />
Manually Actuated<br />
Bakeout temperature: housing ¡C 150 Ñ 150<br />
Weight kg 3.1 Ñ 5.2<br />
Type VBH063-X Ñ VBH100-X<br />
Ordering Information<br />
250-560 Ñ 250-570<br />
Pneumatically Actuated<br />
Bakeout temperature: housing / actuator ¡C 150 / 80 150 / 80 150 / 80<br />
Closing / opening time s 0.5 / 0.5 0.5 / 0.5 0.5 / 0.5<br />
Pickup / holding power VA 10 / 6 10 / 6 10 / 6<br />
Compressed air, overpressure bar 5 Ð 9 5 Ð 9 5 Ð 9<br />
Air cylinder volume cm 3 50 50 130<br />
Weight kg 3.8 3.5 6.5<br />
Type VBP063-X VBP063-Z VBP100-X<br />
Ordering Information<br />
Valve without pilot valve and position indicator 250-600 250-605 250-610<br />
Position indicator 215-135 215-135 215-136<br />
Pilot valve<br />
230 V / 50 Hz 215-131 215-131 215-131<br />
115 V / 60 Hz 215-132 215-132 215-132<br />
24 V / 50 Hz 215-133 215-133 215-133<br />
24 V DC 215-134 215-134 215-134<br />
Accessories Set of connection elements 1) 215-212 215-213 215-214<br />
Claw grips Ñ Ñ Ñ<br />
Spare parts Seal set 215-143 215-144 215-145<br />
1) Comprising 4 threaded pins and 8 claw grips with nuts<br />
B8.16
Butterfly Valves<br />
Vacuum Valves<br />
Connection Elements<br />
1 ISO-K-flange<br />
2 Valve housing<br />
3 ISO seal (not included)<br />
3a O-ring (included)<br />
4 Claw grip<br />
5 Threaded pin<br />
6 Nut<br />
A1<br />
VBH063-X VBP063-X 100<br />
VBH100-X VBP100-X 110<br />
VBH160-X VBP160-X 115<br />
A<br />
VBP063-Z 100<br />
VBP100-Z 100<br />
VBP160-Z 102<br />
Ñ DN 160 ISO-F Ñ DN 250 ISO-K<br />
DN 100 ISO-F Ñ DN 160 ISO-F Ñ<br />
Ñ DN 25 ISO-KF Ñ DN 40 ISO-KF<br />
Ñ 2 x DN 10 ISO-KF Ñ 2 x DN 10 ISO-KF<br />
Ñ Ñ Ñ DN 25 ISO-KF<br />
100 000 100 000 100 000 100 000<br />
1 x 10 -9 1 x 10 -9 1 x 10 -9 1 x 10 -9<br />
1400 3400 4000 8200<br />
10 -8 / 10 10 -8 / 10 10 -8 / 10 10 -8 / 10<br />
4 4 4 4<br />
stainless steel / FPM stainless steel / FPM stainless steel / FPM stainless steel / FPM<br />
Ñ 150 Ñ Ñ<br />
Ñ 10.6 Ñ Ñ<br />
Ñ VBH160-X Ñ Ñ<br />
Ñ 250-580 Ñ Ñ<br />
150 / 80 150 / 80 150 / 80 150 / 80<br />
0.5 / 0.5 0.5 / 0.5 0.5 / 0.5 2 / 5<br />
10 / 6 10 / 6 10 / 6 10 / 6<br />
5 Ð 9 5 Ð 9 5 Ð 9 5 Ð 9<br />
130 130 130 700<br />
4.9 11.6 9.5 15.7<br />
VBP100-Z VBP160-X VBP160-Z VBP250-X<br />
250-615 250-620 250-625 250-630<br />
215-136 215-136 215-136 215-137<br />
B8<br />
215-131 215-131 215-131 215-131<br />
215-132 215-132 215-132 215-132<br />
215-133 215-133 215-133 215-133<br />
215-134 215-134 215-134 215-134<br />
215-215 215-216 215-217 Ñ<br />
Ñ Ñ Ñ 3 x 212-225<br />
215-146 215-147 215-148 215-149<br />
B8.17
Vacuum Valves<br />
Butterfly Valves<br />
VBH063-X VBH100-X VBH160-X<br />
VBP063-X<br />
VBP100-X<br />
VBP063-Z<br />
VBP100-Z<br />
Compressed air connection<br />
Power connection<br />
1 Pilot valve<br />
2 Electrical position indicator<br />
B8.18
Butterfly Valves<br />
Vacuum Valves<br />
VBP160-X<br />
VBP250-X<br />
VBP160-Z<br />
B8<br />
B8.19
Vacuum Valves<br />
Gate Valves<br />
Gate Valves<br />
DN 16 – 400<br />
We cooperate with VAT!<br />
The following products are available from us:<br />
Mini Gate Valves<br />
♦ Small and light-weight for universal applications<br />
♦ Aluminum housing with shaft seal DN 16 Ð 50 ISO-KF<br />
♦ Stainless steel housing with bellows feedthrough DN 40 CF<br />
♦ Manual actuator with toggle lever or hand wheel<br />
♦ Pneumatic actuator with position indicator and pilot valve<br />
Low Cost Vacuum Gate Valves<br />
♦ With shaft feedthrough<br />
♦ Aluminum housing DN 63 Ð 320 ISO-F<br />
♦ Manual or pneumatic actuator with position indicators and pilot valve<br />
UHV Gate Valves<br />
♦ With bellows feedthrough<br />
♦ Stainless steel housing DN 63 Ð 250 CF<br />
♦ Manual or pneumatic actuator with position indicators and pilot valve<br />
Vacuum Gate Valves for Production Systems<br />
♦ Compact, long service life Ð 200 000 cycles<br />
♦ With rotary feedthrough<br />
♦ Stainless steel housing DN 63 Ð 400 ISO-F<br />
♦ Manual or pneumatic actuator with position indicators and pilot valve<br />
B8.20
Gas Dosing Valves<br />
Vacuum Valves<br />
Gas Dosing Valves<br />
Manually Actuated Coarse Gas<br />
Dosing Valves<br />
♦ For admitting a reproducible flow of gas into the vacuum chamber<br />
and for slow venting<br />
Vacuum connection<br />
Technical Data<br />
DN 10 ISO-KF<br />
Gas flow controllable<br />
min. mbar l/s 600<br />
max. mbar l/s 1700<br />
Type<br />
VDH010-A<br />
Ordering Information 250-520<br />
Tightness mbar l/s 1 x 10 -9<br />
Bakeout temperature ¡C 100<br />
Housing<br />
Seal<br />
aluminum<br />
FPM<br />
Weight kg 0.2<br />
Spare parts<br />
Seal set 215-207<br />
B8<br />
B8.21
Vacuum Valves<br />
Gas Dosing Valves<br />
Manually Actuated Dosing and<br />
Shut-off Valves<br />
♦ Very wide control range<br />
♦ Optimal control characteristics<br />
♦ Digital display<br />
♦ Excellent reproducibility<br />
♦ Extremely small dead volume<br />
♦ integrated shut-off valve<br />
♦ Closing without change of flow setting<br />
Technical Data<br />
Vacuum connection<br />
DN 16 ISO-KF<br />
Gas flow controllable<br />
min. mbar l/s 5 x 10 -6<br />
max. mbar l/s 1000<br />
Type<br />
VDH016-X<br />
Ordering Information<br />
250-500<br />
Tightness mbar l/s 1 x 10-9<br />
Differential pressure bar 2.5<br />
Dead volume cm3 0.032<br />
Operating temperature ¡C 80<br />
Bakeout temperature, flanges ¡C 150<br />
Housing, needle, filter<br />
Dosing sleeve<br />
Seal<br />
Weight<br />
kg<br />
stainless steel<br />
fluorplastomer<br />
FPM<br />
Filter, vacuum side<br />
590 mbar l/s 215-462<br />
1250 mbar l/s 215-463<br />
B8.22
Gas Dosing Valves<br />
Vacuum Valves<br />
Manually Actuated All-metal Dosing Valves<br />
♦ Minimal dead volume<br />
♦ Controlled routing of the gas flow using capillaries<br />
♦ 200 ¡C operating temperature<br />
Technical Data<br />
Connection flange<br />
Input<br />
DN 16 CF-R<br />
Output<br />
DN 40 CF-F<br />
Gas flow min. for<br />
Pure gases mbar l/s 1 x 10 -10<br />
Air mbar l/s 1 x 10 -9<br />
Gas flow<br />
max. mbar l/s 600<br />
adjustable max. mbar l/s 100<br />
Type<br />
VDH040-U<br />
Ordering Information<br />
250-700<br />
Tightness mbar l/s 1 x 10 -11<br />
Pressure absolute min. / max. mbar / bar 1 x 10 -11 / 30<br />
Conductance for molecular flow l/s 0.7<br />
Operating temperature ¡C 200<br />
Bakeout temperature ¡C 450<br />
Valve plate<br />
sapphire<br />
Valve seat<br />
copper alloy<br />
Housing<br />
stainless steel<br />
Weight kg 1.4<br />
Accessories<br />
Capillary complete, vacuum side, 1 m 215-708<br />
Heater, 200 ¡C 215-706<br />
Adapter DN 40/16 CF 213-071<br />
Option<br />
Tool kit 215-707<br />
Spare parts<br />
Valve plate, sapphire 215-715<br />
Valve seat Ð standard 215-716<br />
Ð gold plated 215-717<br />
B8<br />
B8.23
Vacuum Valves<br />
Gas Dosing Systems<br />
Gas Dosing Systems<br />
Upstream<br />
control<br />
Downstream<br />
control for<br />
small gas flow<br />
VDM005-X<br />
VCC500-Z<br />
or<br />
VDE016-X<br />
VCC500-Z<br />
or<br />
VCA200-Z<br />
e.g. PC<br />
IPC<br />
PLC<br />
MC<br />
Pressure<br />
gauges<br />
Process Chambers<br />
B8.24
Control Valves<br />
Vacuum Valves<br />
Control Valve VDM005-X<br />
♦ Fast pressure control in a vacuum system<br />
♦ Wide control range at low cost<br />
♦ Withstands corrosive gases Ð stainless steel / FPM<br />
♦ Valve closes automatically in case of a power failure<br />
Technical Data<br />
Vacuum connection DN 5 mm / M 14 x 1<br />
Gas flow, controllable<br />
min. mbar l/s 1 x 10 -5<br />
max. mbar l/s 100<br />
Pressure, absolute<br />
min. mbar 1 x 10 -8<br />
max. bar 1.5<br />
Closing / opening time ms 150 / 100<br />
Type<br />
VDM005-X<br />
Ordering Information 1)<br />
250-515<br />
Tightness mbar l/s 1 x 10 -9<br />
Actuator<br />
solenoid<br />
Controller<br />
VCC500-Z<br />
Bakeout temperature<br />
Housing / actuator ¡C 80 / 60<br />
Ambient temperature ¡C 5 Ð 40<br />
Supply V DC / W 24 / 2<br />
Housing<br />
stainless steel<br />
Seal<br />
FPM<br />
Weight 1) g 80<br />
Cable VCC Ð VDM<br />
3 m 216-160<br />
5 m 216-161<br />
10 m 216-162<br />
15 m 216-163<br />
20 m 216-164<br />
25 m 216-165<br />
Connection<br />
DN 10 ISO-KF 250-080<br />
Tube OD 1/4″ 250-085<br />
Tube OD 6 mm 250-086<br />
B8<br />
1) Flag receptacles included<br />
B8.25
Vacuum Valves<br />
Controllers<br />
Controller<br />
Control Valve VDE016-X<br />
♦ Very wide control range<br />
♦ Large gas throughput<br />
♦ Withstands corrosive gases Ð stainless steel / FPM<br />
♦ In combination with the VCC500-Z controller, the valve closes<br />
automatically in the event of a power failure<br />
Technical Data<br />
Vacuum connection<br />
DN 16 ISO-KF<br />
Gas flow, controllable<br />
min. mbar l/s 5 x 10 -6<br />
max. mbar l/s 1200<br />
Pressure, absolute<br />
min. mbar 1 x 10 -8<br />
max. bar 1.5<br />
Closing / opening time s 3 / 4<br />
Type<br />
VDE016-X<br />
Ordering Information 1)<br />
250-505<br />
Tightness mbar l/s 1 x 10 -9<br />
Actuator<br />
electric motor<br />
Controller<br />
VCC500-Z, VCA200-Z 0 Ð 10 V DC<br />
Bakeout temperature<br />
Housing / actuator ¡C 80 / 60<br />
Ambient temperature ¡C 5 Ð 40<br />
Supply V DC / VA 24 / 24<br />
Housing<br />
stainless steel<br />
Dosing sleeve<br />
fluorplastomer<br />
Seal<br />
FPM<br />
Weight 1) kg 0.7<br />
Cable VCC Ð VDE<br />
03 m 216-150<br />
05 m 216-151<br />
10 m 216-152<br />
15 m 216-153<br />
20 m 216-154<br />
25 m 216-155<br />
1) Connector included<br />
B8.26
Controllers<br />
Vacuum Valves<br />
Controller VCC500-Z<br />
♦ Easy operation Ð self-explaining LCD and function keys<br />
♦ Analog/digital in-/outputs and interfaces<br />
♦ Adjustable PID control algorithms<br />
Technical Data<br />
Analog input V DC / mA 0 Ð 10 / 0 Ð 20<br />
mA 4 Ð 20<br />
Analog output V DC 0 Ð 10<br />
pressure, valve position<br />
Type<br />
VCC500-Z<br />
Ordering Information 1)<br />
250-900<br />
Operating modes<br />
Digital input<br />
Digital output<br />
local / remote<br />
valve to be opened, closed, closed asap, opened asap,<br />
selection: pressure / gas flow control<br />
valve open, closed, in position,<br />
defective, sensor defective<br />
Selection<br />
Functions<br />
pressure control, flow control, test mode<br />
Units<br />
mbar, Pa, Torr<br />
Languages<br />
English, German<br />
LCD<br />
contrast<br />
Interfaces RS 232C, RS 485<br />
Control speed selectable steps 1 Ð 99<br />
Control accuracy % FS sensor 1<br />
Display accuracy % FS sensor 0.2<br />
Supply<br />
Voltage V AC 90 Ð 250<br />
Consumption VA 50<br />
Weight kg 2.5<br />
B8<br />
B8.27
Vacuum Valves<br />
Interface Module VCA200-Z<br />
Interface Module VCA200-Z<br />
♦ Easy and cost effective integration into systems<br />
♦ Pressure signal conditioned by the system controller<br />
♦ Operation only in combination with control valve VDE016-X<br />
Technical Data<br />
Interface<br />
RS 232C<br />
Supply V DC / A 24 / 0.5<br />
Type<br />
VCA200-Z<br />
Ordering Information<br />
250-915<br />
Installation<br />
DIN mounting rail<br />
Connection<br />
terminals<br />
Safety EN 61010-1, EN 60950<br />
Weight g 40<br />
B8.28
Venting Valves<br />
Vacuum Valves<br />
Venting Valves<br />
Manually Actuated Venting Valve<br />
♦ Simple opening and closing of the valve by loosening or tightening the<br />
screw cap<br />
Technical Data<br />
Vacuum connection DN 10 ISO-KF DN 10 ISO-KF<br />
Housing aluminum stainless steel<br />
Type VVH010-A VVH010-X<br />
Ordering Information<br />
250-840 250-841<br />
Tightness mbar l/s 1 x 10 -9 1 x 10 -9<br />
Pressure abs. min. / max. mbar / bar 1 x 10 -8 / 8 1 x 10 -8 / 8<br />
Valve plate aluminum stainless steel<br />
Screw cap brass brass<br />
nickel plated<br />
nickel plated<br />
Seal FPM FPM<br />
Weight kg 0.1 0.15<br />
Spare parts<br />
O-ring B 4070 207 PV B 4070 207 PV<br />
B8<br />
B8.29
Vacuum Valves<br />
Venting Valves<br />
Solenoid Actuated Venting Valve<br />
♦ No vacuum feedthrough<br />
♦ Long service live<br />
♦ Mountable in any position<br />
Technical Data<br />
Vacuum connection<br />
Type<br />
DN 10 ISO-KF<br />
VVM010-A<br />
Ordering Information<br />
230 V AC, 50/60 Hz 250-533<br />
115 V AC, 50/60 Hz 250-532<br />
24 V AC, 50/60 Hz 250-531<br />
24 V DC 250-530<br />
Service life cycles 1 500 000<br />
Tightness mbar l/s 1 x 10 -9<br />
Conductance for molecular flow l/s 1<br />
Pressure absolute min. / max. mbar / bar 1 x 10 -8 / 10<br />
Differential pressure in<br />
closing / opening direction bar 10 / 1<br />
Can be opened to a pressure difference of bar 2<br />
Bakeout temperature<br />
housing / actuator ¡C 150 / 80<br />
Pickup / holding power VA 35 / 15<br />
Closing / opening time ms 60 / 45<br />
Switching frequency 1/min 50<br />
Housing<br />
aluminum<br />
Seal<br />
FPM<br />
Weight kg 0.46<br />
Options<br />
Filter with port, centering ring and clamping ring 215-152<br />
Spare parts<br />
Seal set 215-208<br />
Filter<br />
B 4161 210 4F<br />
B8.30
Safety Valves<br />
Vacuum Valves<br />
Safety Valves<br />
Vacuum Safety Valves<br />
♦ Fast-closing high vacuum isolation valve for separating the vacuum<br />
chamber from the backing pump<br />
♦ Venting valve for roughing pumps<br />
♦ Immediate closing action upon power failure<br />
♦ Opening action only after the intake line has been evacuated<br />
Technical Data<br />
Vacuum connection DN 16 ISO-KF DN 25 ISO-KF DN 40 ISO-KF DN 63 ISO-KF DN 100 ISO-KF<br />
Type VSM016-A VSM025-A VSM040-A VSM063-A VSM100-A<br />
Ordering Information<br />
200 Ð 230 V AC 250-754 250-764 250-774 250-784 250-794<br />
100 Ð 115 V AC 250-752 250-762 250-772 250-782 250-792<br />
24 V DC 250-750 250-760 250-770 250-780 250-790<br />
230 V AC Eex e II T4, incl. 5 m cable 250-756 250-766 250-776 250-786 250-796<br />
24 V DC Eex e II T4, incl. 5 m cable 250-755 250-765 250-775 250-785 250-795<br />
Tightness mbar l/s 1 x 10 -9 1 x 10 -9 1 x 10 -9 1 x 10 -9 1 x 10 -9<br />
Conductance for molecular flow l/s 2.8 11 30.5 126 400<br />
Can be opened to a pressure difference of mbar 700 700 700 700 700<br />
Bakeout temperature<br />
Housing, actuator ¡C 80 80 80 80 80<br />
Mounting orientation any any any any any<br />
Housing aluminum aluminum aluminum aluminum aluminum<br />
Seal FPM FPM FPM FPM FPM<br />
Weight kg 0.42 0.8 1.3 2.85 4.8<br />
Spare parts<br />
Seal set 215-036 215-086 215-156 215-256 215-276<br />
B8<br />
DN A B C<br />
DN 16 ISO-KF 154 40 36<br />
DN 25 ISO-KF 152 50 60<br />
DN 40 ISO-KF 173 65 80<br />
DN A B C<br />
DN 63 ISO-K 226 88 128<br />
DN 100 ISO-K 265 108 172<br />
B8.31
Vacuum Valves<br />
Safety Valves<br />
Power Failure Venting Valve<br />
♦ For automatic venting of pumps, systems or vacuum chambers in the<br />
event of a power failure.<br />
Technical Data<br />
Vacuum connection<br />
DN 10 ISO-KF<br />
Venting time for a 50 l vessel s 50<br />
Type<br />
VIM010-A<br />
Ordering Information<br />
200 Ð 230 V, 50/60 Hz 250-851<br />
24 V DC 250-850<br />
Tightness mbar l/s 1 x 10 -7<br />
Ambient temperature ¡C 50<br />
Switching frequency 1/min 60<br />
Housing<br />
aluminum<br />
Seal<br />
FPM<br />
Weight kg 0.25<br />
High Pressure Relief Valve<br />
♦ Relief trigger point 1.2 to 1.5 bar absolute<br />
Technical Data<br />
Vacuum connection<br />
Type<br />
DN 16 ISO-KF<br />
VSA016-X<br />
Ordering Information<br />
250-555<br />
Tightness mbar l/s 1 x 10 -9<br />
Pressure absolute min. / max. mbar / bar 1 x 10 -8 / 1.2<br />
Gas flow l/min 6<br />
Operating temperature ¡C 150<br />
Bakeout temperature ¡C 50<br />
Housing<br />
stainless steel<br />
Seal<br />
FPM<br />
Weight kg 0.1<br />
B8.32
Vacuum Locks and Sealing Valves<br />
Vacuum Valves<br />
Vacuum Locks and Sealing Valves<br />
♦ Simple to use, handy knob<br />
♦ Compact, low weight<br />
♦ High conductance, short pumpdown times<br />
♦ Spindle can be locked in end position<br />
Technical Data<br />
Vacuum connection DN 16 ISO-KF DN 25 ISO-KF DN 40 ISO-KF<br />
Type VAC016-A VAC025-A VAC040-A<br />
Ordering Information<br />
Vacuum lock 250-870 250-871 250-872<br />
Clamping ring 211-001 211-002 211-003<br />
Centering ring 211-066 211-068 211-070<br />
Sealing valve with KF flange 250-877 250-878 250-879<br />
Sealing valve with tubing 250-874 250-875 250-876<br />
Tightness mbar l/s 1 x 10 -9 1 x 10 -9 1 x 10 -9<br />
Conductance for molecular flow<br />
Vacuum lock l/s 3 8 13<br />
Sealing valve l/s 0.03 0.2 0.5<br />
Pressure absolute min. / max.mbar / bar 10 -8 / 5 10 -8 / 5 10 -8 / 5<br />
Travel of the vacuum lock mm 56 76 105<br />
Bakeout temperature<br />
Vacuum lock ¡C 60 60 60<br />
Sealing valve ¡C 100 100 100<br />
Housing of vacuum lock aluminum aluminum aluminum<br />
Seal FPM FPM FPM<br />
Sealing valve stainless steel stainless steel stainless steel<br />
Weight<br />
Vacuum lock kg 0.5 0.98 1.8<br />
Sealing valve kg 0.04 0.1 0.12<br />
Repair kit for<br />
Vacuum lock 215-048 215-088 215-158<br />
Sealing valve 215-049 215-089 215-159<br />
1 Vacuum lock<br />
2 Centering ring<br />
3 Clamping ring<br />
4 Sealing valve with KF flange<br />
5 Sealing valve with tubing<br />
DN A B C D E<br />
DN 16 ISO-KF 124 40 25 16 30<br />
DN 25 ISO-KF 160 50 31 25 30<br />
DN 40 ISO-KF 190 65 40 38 40<br />
B8<br />
B8.33
Vacuum Valves<br />
Ball Valves<br />
Ball Valves<br />
♦ Rugged and cost effective<br />
♦ Simple opening and closing by lever<br />
♦ High conductance<br />
♦ Unobstructed passage<br />
Technical Data<br />
Vacuum connection DN 10 ISO-KF DN 16 ISO-KF DN 25 ISO-KF DN 40 ISO-KF<br />
Ordering Information<br />
215-860 215-861 215-862 215-863<br />
Tightness mbar l/s 1 x 10 -6 1 x 10 -6 1 x 10 -6 1 x 10 -6<br />
Conductance for molecular flow l/s 60 130 350 550<br />
Pressure absolute min. / max. mbar / bar 10 -5 / 5 1) 10 -5 / 5 1) 10 -5 / 5 1) 10 -5 / 5 1)<br />
Bakeout temperature<br />
Housing, lever ¡C 80 80 80 80<br />
Housing brass brass brass brass<br />
nickel plated nickel-plated nickel-plated nickel-plated<br />
Seal PTFE PTFE PTFE PTFE<br />
Weight kg 0.35 0.4 0.75 2.6<br />
1) With outer centering ring and clamping element or chain clamp<br />
DN A B C<br />
DN 10 ISO-KF 75 80 68<br />
DN 16 ISO-KF 100 80 70<br />
DN 25 ISO-KF 130 110 83<br />
DN 40 ISO-KF 160 138 120<br />
B8.34
Vacuum Fittings<br />
Fittings and Ultra-High Components<br />
B9
Vacuum Fittings<br />
Contents<br />
Components<br />
Seals . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B9.3<br />
Pressure Range . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B9.3<br />
Stainless Steel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B9.3<br />
ISO-KF Ð Small Flange Components. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B9.4<br />
Connection Elements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B9.4<br />
Seals . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B9.6<br />
Flanges. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B9.8<br />
Pipe Fittings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B9.9<br />
Bellows / Hose with Flanges . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B9.11<br />
Transition Pieces. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B9.12<br />
Hose, Hose Connection. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B9.14<br />
Protective Lids . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B9.15<br />
ISO-K Ð Clamp Flange Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B9.16<br />
Connection Elements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B9.17<br />
Seals . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B9.17<br />
Flanges. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B9.19<br />
Pipe Fittings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B9.20<br />
Bellows / Hose with Flanges . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B9.21<br />
Transition Pieces. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B9.22<br />
Protective Lids . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B9.23<br />
ISO-F Ð Fixed Flange Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B9.24<br />
UHV Ð CF Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B9.26<br />
Connection Elements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B9.26<br />
Seals . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B9.27<br />
Flanges. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B9.29<br />
Pipe Fittings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B9.32<br />
Bellows / Hose with Flanges, Compensator . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B9.33<br />
Transition Pieces. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B9.34<br />
Protective Lids . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B9.35<br />
B9.2
General<br />
Vacuum Fittings<br />
Seals<br />
Seal Material<br />
Temperature<br />
Reusable<br />
Elastomer<br />
NBR ¡C -30 Ð +90 Yes<br />
CR ¡C -40 Ð +100 Yes<br />
FPM ¡C -15 Ð +150 / +200 * Yes<br />
Metal<br />
Indium ¡C -196 Ð +60 Yes<br />
Aluminum ¡C -196 Ð +200 No<br />
Copper ¡C -196 Ð +200 No<br />
Silver-plated copper ¡C -270 Ð +450 No<br />
Gold-plated copper ¡C -270 Ð +450 No<br />
* Not guaranteed<br />
Code Designation<br />
Chemical Designation<br />
Typical Trade Name<br />
NBR Acrylonitrile-butadiene rubber Perbunan¨<br />
CR Neoprene¨ Ñ<br />
FPM Fluorcaoutchouc Viton¨<br />
Pressure Range<br />
Code Designation<br />
Pressure Range Tightness<br />
[mbar – bar] [mbar l/s] Centering Connection<br />
ISO-KF Aluminum 10 -7 Ð 2.5 10 -8 inside Clamping ring/rapid clamping ring<br />
10 -7 Ð 5 10 -8 outside Clamping ring/rapid clamping ring<br />
10 -7 Ð 10 10 -8 outside Clamping element/chain clamp<br />
Stainless steel 10 -8 Ð 2.5 10 -9 inside Clamping ring/rapid clamping ring<br />
10 -8 Ð 5 10 -9 outside Clamping ring/rapid clamping ring<br />
10 -8 Ð 10 10 -9 outside Clamping element/chain clamp<br />
ISO-K Stainless steel 10 -8 Ð 2.5 10 -9 inside Clamping screw, claw grips<br />
CF-F/R Stainless steel 10 -12 Ð 1 10 -9 Ñ Screws<br />
Stainless Steel<br />
German Material No.<br />
AISI<br />
SAE<br />
DIN Designation<br />
1.4301 304 X5CrNi 18 10<br />
1.4429 316 LN X2CrNiMoN 17 13 3<br />
1.4435 316 L X2CrNiMo 18 14 3<br />
1.4571 316 Ti X6CrNiMoTi 17 12 2<br />
B9<br />
B9.3
Vacuum Fittings<br />
ISO-KF Small Flange Components<br />
ISO-KF Small<br />
Flange Components<br />
♦ Small flange fittings conform to Pneurop 6606/1981 and DIN 28403<br />
♦ Stainless steel fittings comply with the published specifications<br />
1 Small flange port<br />
2 Housing wall with threaded tap<br />
3 Claw grip<br />
4 Centering ring<br />
Nominal<br />
Diameter<br />
Number of<br />
A B C D Claw Grips<br />
DN 10 ISO-KF 30 12.2 12.2 45 4<br />
DN 16 ISO-KF 30 17.2 17.2 45 4<br />
DN 25 ISO-KF 40 26.2 26.2 55 4<br />
DN 40 ISO-KF 55 41.2 41.2 71 4<br />
DN 50 ISO-KF 75 52.4 52.4 91 4<br />
Connection Elements<br />
Clip<br />
Clamping Ring<br />
DN ... ISO-KF Ordering No. A B C<br />
Stainless steel, plastic 10 Ð 16 211-012 38 47 12<br />
20 Ð 25 211-013 48 57 12<br />
32 Ð 40 211-014 63 70 12<br />
Set of 5 pcs.<br />
For elastomer seal<br />
Clamping Ring<br />
DN ... ISO-KF Ordering No. A B C<br />
Aluminum 10 Ð 16 211-001 45 61 16<br />
20 Ð 25 211-002 55 72 16<br />
32 Ð 40 211-003 70 90 18<br />
50 211-004 95 123 25<br />
For elastomer seal<br />
Rapid<br />
Fastening Clamp<br />
DN ... ISO-KF Ordering No. A B C<br />
Aluminum, plastic, steel 10 Ð 16 211-005 52 70 16<br />
20 Ð 25 211-006 61 81 16<br />
32 Ð 40 211-007 75 98 18<br />
B9.4
ISO-KF Small Flange Components<br />
Vacuum Fittings<br />
Connection Elements<br />
Hose Clip<br />
Clamping Ring DN ... ISO-KF Ordering No. A B C<br />
Aluminum, steel 10 Ð 16 211-016 42 54 16<br />
20 Ð 25 211-017 52 64 16<br />
32 Ð 40 211-018 67 79 16<br />
Installation with tool<br />
For elastomer seal<br />
Clamping<br />
Element DN ... ISO-KF Ordering No. A B C<br />
Aluminum 10 Ð 16 211-008 52 Ð 18<br />
20 Ð 25 211-009 75 Ð 20<br />
32 Ð 40 211-010 90 Ð 23<br />
50 211-011 115 Ð 28<br />
Installation with tool<br />
For aluminum and elastomer seal<br />
Chain Clamp DN ... ISO-KF Ordering No. A B C<br />
Aluminum, stainless steel 10 Ð 16 211-021 71 52.5 18<br />
20 Ð 25 211-022 82 65 18<br />
32 Ð 40 211-023 98 79 18<br />
50 211-024 117 97.5 20<br />
For aluminum and elastomer seal<br />
Claw Grip<br />
DN ... ISO-KF Ordering No. A B C D E<br />
Aluminum, stainless steel 10 Ð 50 211-015 19.5 11.5 12.5 20 14<br />
Set of 4 pcs.<br />
B9<br />
B9.5
Vacuum Fittings<br />
ISO-KF Small Flange Components<br />
Seals<br />
Centering Ring<br />
DN ... ISO-KF Ordering No. A B C D<br />
CR / aluminum 10 211-051 12 10 8 3.9<br />
16 211-052 17 16 8 3.9<br />
20 211-053 22 20 8 3.9<br />
25 211-054 26 25 8 3.9<br />
32 211-055 34 32 8 3.9<br />
40 211-056 41 40 8 3.9<br />
50 211-057 52 50 8 3.9<br />
FPM / aluminum 10 211-058 12 10 8 3.9<br />
16 211-059 17 16 8 3.9<br />
20 211-060 22 20 8 3.9<br />
25 211-061 26 25 8 3.9<br />
32 211-062 34 32 8 3.9<br />
40 211-063 41 40 8 3.9<br />
50 211-064 52 50 8 3.9<br />
FPM / stainless steel 10 211-065 12 10 8 3.9<br />
16 211-066 17 16 8 3.9<br />
20 211-067 22 20 8 3.9<br />
25 211-068 26 25 8 3.9<br />
32 211-069 34 32 8 3.9<br />
40 211-070 41 40 8 3.9<br />
50 211-071 52 50 8 3.9<br />
External<br />
Centering Ring DN ... ISO-KF Ordering No. A B C D<br />
CR / aluminum 10 Ð 16 211-081 32 30.2 7 3.9<br />
20 Ð 25 211-082 42 40.2 7 3.9<br />
32 Ð 40 211-083 57 55.2 7 3.9<br />
50 211-084 77 75.2 7 3.9<br />
FPM / aluminum 10 Ð 16 211-085 32 30.2 7 3.9<br />
20 Ð 25 211-086 42 40.2 7 3.9<br />
32 Ð 40 211-087 57 55.2 7 3.9<br />
50 211-088 77 75.2 7 3.9<br />
Reducing<br />
Centering Ring<br />
DN ... ISO-KF/<br />
DN ... ISO-KF Ordering No. A B C D E<br />
CR / aluminum 10 / 16 211-072 17 10 12 8 3.9<br />
20 / 25 211-073 26 20 22 8 3.9<br />
32 / 40 211-074 41 32 34 8 3.9<br />
FPM / aluminum 10 / 16 211-075 17 10 12 8 3.9<br />
20 / 25 211-076 26 20 22 8 3.9<br />
32 / 40 211-077 41 32 34 8 3.9<br />
FPM / stainless steel 10 / 16 211-078 17 10 12 8 3.9<br />
20 / 25 211-079 26 20 22 8 3.9<br />
32 / 40 211-080 41 32 34 8 3.9<br />
B9.6
ISO-KF Small Flange Components<br />
Vacuum Fittings<br />
Seals<br />
Centering Ring<br />
with Filter<br />
DN ... ISO-KF Ordering No. A B C D Throughput *<br />
FPM / stainless steel 10 211-089 12 8 8 3.9 0.5 m 3 /h<br />
16 211-090 17 14 8 3.9 1.2 m 3 /h<br />
25 211-092 26 23 8 3.9 4.2 m 3 /h<br />
40 211-094 41 38 8 3.9 11.3 m 3 /h<br />
Filter: stainless steel,<br />
pore size 0.02 mm<br />
* Air at 20 ¡C, 200 mbar<br />
differential pressure<br />
50 211-095 52 48 8 3.9 18.1 m 3 /h<br />
Centering Ring<br />
with Fine Filter DN ... ISO-KF Ordering No. A B C D<br />
FPM / stainless steel 10 211-096 12 9 8 3.9<br />
16 211-097 17 13 8 3.9<br />
25 211-098 26 22 8 3.9<br />
40 211-099 41 35.5 8 3.9<br />
Filter: stainless steel,<br />
pore size 0.004 mm<br />
Degree of separation at 0.001 mm<br />
up to 98%<br />
50 211-100 52 45.7 8 3.9<br />
O-Ring DN ... ISO-KF Ordering No. A B<br />
CR 10 211-131 15 5<br />
16 211-132 18 5<br />
20 211-133 25 5<br />
25 211-134 28 5<br />
32 211-135 40 5<br />
40 211-136 42 5<br />
50 211-137 55 5<br />
FPM 10 211-138 15 5<br />
16 211-139 18 5<br />
20 211-140 25 5<br />
25 211-141 28 5<br />
32 211-142 40 5<br />
40 211-143 42 5<br />
50 211-144 55 5<br />
Indium Seal<br />
DN ... ISO-KF Ordering No. A B C D E<br />
Stainless steel, aluminum 10 Ð 16 211-162 32 18 30 3.9 7<br />
20 Ð 25 211-163 42 28 40 3.9 7<br />
32 Ð 40 211-164 57 43 55 3.9 7<br />
50 211-165 77 63 75 3.9 7<br />
Indium: -196 Ð +60 ¡C<br />
B9<br />
B9.7
Vacuum Fittings<br />
ISO-KF Small Flange Components<br />
Seals<br />
Aluminum Seal<br />
Set of 3 pcs.<br />
With chain clamp, clamping element<br />
With<br />
DN ... ISO-KF Ordering No. A B C D Support Ring<br />
10 Ð 16 211-167 25.6 19.6 4.5 22.6 211-171<br />
20 Ð 25 211-168 35.6 29.6 4.5 32.6 211-172<br />
32 Ð 40 211-169 50.6 44.6 4.5 47.6 211-173<br />
50 211-170 65.6 59.6 4.5 62.6 211-174<br />
Support Ring for<br />
Aluminum Seal<br />
For<br />
DN ... ISO-KF Ordering No. A B Aluminum Seal<br />
Stainless steel 10 Ð 16 211-171 32 7 211-167<br />
20 Ð 25 211-172 42 7 211-168<br />
32 Ð 40 211-173 57 7 211-169<br />
50 211-174 77 7 211-170<br />
Reusable<br />
Flanges<br />
Blank Flange DN ... ISO-KF Ordering No. A<br />
Aluminum 10 211-176 5<br />
16 211-177 5<br />
25 211-178 5<br />
40 211-179 5<br />
50 211-180 6<br />
Stainless steel 10 211-181 5<br />
16 211-182 5<br />
25 211-183 5<br />
40 211-184 5<br />
50 211-185 6<br />
Flange with<br />
Tube, Short<br />
DN ... ISO-KF Ordering No. A B C<br />
Steel 10 211-201 20 12 16<br />
16 211-202 20 16 20<br />
25 211-203 20 26 30<br />
40 211-204 20 41 45<br />
50 211-205 20 51 55<br />
Stainless steel 10 211-211 20 12 16<br />
16 211-212 20 16 20<br />
25 211-213 20 26 30<br />
40 211-214 20 41 45<br />
50 211-215 20 50 54<br />
B9.8
ISO-KF Small Flange Components<br />
Vacuum Fittings<br />
Flanges<br />
Flange with<br />
Tube, Long DN ... ISO-KF Ordering No. A B C<br />
Steel 10 211-206 70 12 16<br />
16 211-207 70 16 20<br />
25 211-208 70 26 30<br />
40 211-209 70 41 45<br />
50 211-210 70 51 55<br />
Stainless steel 10 211-216 70 12 16<br />
16 211-217 70 16 20<br />
25 211-218 70 26 30<br />
40 211-219 70 41 45<br />
50 211-220 70 50 54<br />
Pipe Fittings<br />
Elbow 90°<br />
DN ... ISO-KF Ordering No. A B<br />
Aluminum 10 211-251 30 12<br />
16 211-252 40 16<br />
25 211-253 50 25<br />
40 211-254 65 39<br />
Stainless steel 10 211-286 30 9<br />
16 211-287 40 15<br />
25 211-288 50 25<br />
40 211-289 65 40.5<br />
50 211-290 70 49<br />
Elbow 135° DN ... ISO-KF Ordering No. A B C<br />
Stainless steel 16 211-307 26 55 15<br />
25 211-308 32 68.8 25<br />
40 211-309 40 87.7 37<br />
Tee DN ... ISO-KF Ordering No. A B C<br />
Aluminum 10 211-261 30 60 12<br />
16 211-262 40 80 16<br />
25 211-263 50 100 25<br />
40 211-264 65 130 39<br />
Stainless steel 10 211-291 30 60 12<br />
16 211-292 40 80 16<br />
25 211-293 50 100 25<br />
40 211-294 65 130 40.5<br />
50 211-295 70 140 53<br />
B9<br />
B9.9
Vacuum Fittings<br />
ISO-KF Small Flange Components<br />
Pipe Fittings<br />
Cross DN ... ISO-KF Ordering No. A B C<br />
Aluminum 10 211-266 30 60 12<br />
16 211-267 40 80 16<br />
25 211-268 50 100 25<br />
40 211-269 65 130 39<br />
Stainless steel 10 211-296 30 60 12<br />
16 211-297 40 80 16<br />
25 211-298 50 100 25<br />
40 211-299 65 130 40.5<br />
50 211-300 70 140 53<br />
Reducing Cross<br />
DN ... ISO-KF Ordering No. A B C D E F<br />
Aluminum 25 211-271 35 70 35 70 25 16<br />
40 211-272 40 80 45 90 39 16<br />
Stainless steel 25 211-301 35 70 35 70 25 17<br />
40 211-302 40 80 45 90 40.5 16<br />
50 211-303 50 100 50 100 53 16<br />
Intermediate<br />
Piece<br />
DN ... ISO-KF Ordering No. A B<br />
Aluminum 16 211-227 80 16<br />
25 211-228 100 25<br />
40 211-229 130 40<br />
Stainless steel 16 211-277 80 16<br />
25 211-278 100 25<br />
40 211-279 130 40.5<br />
50 211-280 140 53<br />
Reducer ISO-KF / ISO-KF Ordering No. A B<br />
Aluminum 25 / 16 211-231 40 16<br />
40 / 16 211-232 40 16<br />
40 / 25 211-233 40 25<br />
50 / 40 211-234 40 40<br />
Stainless steel 25 / 16 211-281 40 16<br />
40 / 16 211-282 40 16<br />
40 / 25 211-283 40 26<br />
50 / 40 211-284 40 40<br />
B9.10
ISO-KF Small Flange Components<br />
Vacuum Fittings<br />
Bellows /Hose with Flanges<br />
Bellows<br />
Deviation from<br />
DN ... ISO-KF Ordering No. A B C axis max.<br />
Stainless steel 10 211-326 70 3.5 3 23¡<br />
16 211-327 70 6.4 4.1 21¡<br />
25 211-328 80 8 5 17¡<br />
40 211-329 100 11 7 15¡<br />
50 211-330 100 10 6 15¡<br />
A = unstressed length<br />
Metal Hose DN ... ISO-KF Ordering No. A B C<br />
Stainless steel 10 211-331 250 70 32<br />
10 211-332 500 70 32<br />
10 211-333 750 70 32<br />
10 211-334 1000 70 32<br />
16 211-335 250 70 50<br />
16 211-336 500 70 50<br />
16 211-337 750 70 50<br />
16 211-338 1000 70 50<br />
25 211-339 250 100 60<br />
25 211-340 500 100 60<br />
25 211-341 750 100 60<br />
25 211-342 1000 100 60<br />
40 211-343 250 130 100<br />
40 211-344 500 130 100<br />
40 211-345 750 130 100<br />
40 211-346 1000 130 100<br />
50 211-347 250 200 130<br />
50 211-348 500 200 130<br />
50 211-349 750 200 130<br />
50 211-350 1000 200 130<br />
B = radius for multiple bending<br />
C = radius for single bend<br />
Metal Hose,<br />
High Flexible DN ... ISO-KF Ordering No. A B C<br />
Stainless steel 16 211-515 250 40 25<br />
16 211-516 500 40 25<br />
25 211-519 250 55 36<br />
25 211-520 500 55 36<br />
40 211-523 250 90 60<br />
40 211-524 500 90 60<br />
50 211-527 250 100 65<br />
50 211-528 500 100 65<br />
B = radius for multiple bending<br />
C = radius for single bend<br />
B9<br />
B9.11
Vacuum Fittings<br />
ISO-KF Small Flange Components<br />
Bellows /Hose with Flanges<br />
PVC Hose<br />
With steel spiral,<br />
aluminum hose nipple<br />
Temperature: -10 Ð +60 ¡C<br />
DN ... ISO-KF Ordering No. A B C<br />
16 211-406 500 65 130<br />
16 211-407 1000 65 130<br />
25 211-408 500 100 200<br />
25 211-409 1000 100 200<br />
40 211-410 500 130 260<br />
40 211-411 1000 130 260<br />
B = radius for multiple bending<br />
C = radius for single bend<br />
Transition Pieces<br />
Adaptor<br />
ISO-KF / ISO-K ISO-KF / ISO-K Ordering No. A<br />
Aluminum 40 / 63 212-171 40<br />
50 / 63 212-172 45<br />
Stainless steel 40 / 63 212-173 40<br />
50 / 63 212-174 45<br />
40 / 100 212-175 40<br />
Adaptor<br />
ISO-KF / CF ISO-KF / CF Ordering No. A B<br />
Stainless steel 16 / 16 213-251 35 16<br />
25 / 16 213-252 35 16<br />
16 / 40 213-254 30 16<br />
25 / 40 213-255 30 26<br />
40 / 40 213-256 50 37<br />
40 / 63 213-259 35 41<br />
Adaptor ISO-KF /<br />
VRC-Female<br />
ISO-KF / VCR Ordering No. A<br />
Stainless steel 16 / 1/4" 211-359 35.8<br />
25 / 1/4" 211-480 35.8<br />
25 / 1/2" 211-360 40.6<br />
40 / 3/4" 211-361 53.3<br />
B9.12
ISO-KF Small Flange Components<br />
Vacuum Fittings<br />
Transition Pieces<br />
Adaptor ISO-KF /<br />
VRC-male<br />
ISO-KF / VCR Ordering No. A<br />
Stainless steel 16 / 1/4" 211-362 35.8<br />
25 / 1/4" 211-481 35.8<br />
25 / 1/2" 211-363 40.6<br />
40 / 3/4" 211-364 53.3<br />
Adaptor ISO-KF/<br />
Swagelok<br />
ISO-KF / DN Ordering No. A B<br />
Stainless steel 16 / 6 mm 211-356 37 15.3<br />
25 / 10 mm 211-357 45 17.2<br />
40 / 16 mm 211-358 53 24.4<br />
16 / 1/8" 211-476 34.5 12.7<br />
25 / 1/4" 211-477 37 15.3<br />
40 / 1/4" 211-478 37 15.3<br />
40 / 1/2" 211-479 47.5 22.8<br />
Glass Tube<br />
Connection DN ... ISO-KF Ordering No. A B C D<br />
Aluminum, FPM 10 211-351 50 8 10 30<br />
40 211-353 65 22 26 45<br />
Glass = Pyrex<br />
Screw-in<br />
Flange ISO-KF / DN Ordering No. A B C D<br />
Stainless steel, FPM 10 / G 3/8" 211-366 35 15 G 3/8" 12<br />
16 / G 1/2" 211-367 35 15 G 1/2" 16<br />
25 / G 1" 211-368 45 25 G 1" 25<br />
40 / G 1 1/2" 211-369 50 30 G 1 1/2" 41<br />
Screw-on<br />
Flange ISO-KF / DN Ordering No. A B C D<br />
Stainless steel, FPM 10 / G 3/8" 211-376 35 15 G 3/8" 10<br />
16 / G 1/2" 211-377 35 15 G 1/2" 15<br />
25 / G 1" 211-378 45 25 G 1" 24<br />
40 / G 1 1/2" 211-379 50 30 G 1 1/2" 38<br />
B9<br />
B9.13
Vacuum Fittings<br />
ISO-KF Small Flange Components<br />
Hose, Hose Connection<br />
Hose Adaptor<br />
90°<br />
DN ... ISO-KF Ordering No. A B C D<br />
Aluminum 16 211-257 40 40 16 13<br />
25 211-258 50 50 25 22<br />
40 211-259 65 65 40 37<br />
C = nominal connection<br />
for sleeve / hose<br />
Hose Adaptor<br />
for Rubber Hose<br />
DN ... ISO-KF Ordering No. A B C<br />
Aluminum 16 211-387 40 7 12<br />
25 211-388 40 7 12<br />
40 211-389 40 7 12<br />
Stainless steel 16 211-392 40 7 12<br />
25 211-393 40 7 12<br />
40 211-394 40 7 12<br />
C = nominal connection for hose<br />
Hose<br />
Connection DN ... ISO-KF Ordering No. A B C<br />
Aluminum 25 211-401 40 13 16<br />
16 211-402 40 13 16<br />
25 211-403 40 22 25<br />
40 211-404 40 37 40<br />
C = nominal connection<br />
for sleeve / hose<br />
Sleeve with<br />
Hose Clamp<br />
DN Ordering No. A B C D E<br />
CR, stainless steel 16 211-417 58 7 14 16 44<br />
25 211-418 60 9 16 25 50<br />
40 211-419 64 13 20 40 68<br />
Hose Clamp DN Ordering No. A B<br />
Stainless steel 16 211-461 13 32<br />
25 211-462 19 44<br />
40 211-463 29 76<br />
B9.14
ISO-KF Small Flange Components<br />
Vacuum Fittings<br />
Hose, Hose Connection<br />
PVC Hose DN Ordering No. A B C<br />
Without spiral 12 211-441 21 10 Ð<br />
With spiral 16 211-442 23 16 130<br />
25 211-443 33 25 200<br />
40 211-444 53 40 260<br />
For vacuum application<br />
Give length in meters<br />
Rubber Hose DN Ordering No. A B<br />
For vacuum application<br />
Give length in meters<br />
Hardness: 55 ± 5 Shore A<br />
Temperature: -30 Ð +85 ¡C<br />
10 211-451 17 7<br />
16 211-452 25 10<br />
20 211-453 32 16<br />
Protective Lids<br />
Protective Lid DN ... ISO-KF Ordering No. A B C<br />
Polyethylene 10 - 16 211-427 32 29 7.5<br />
20 - 25 211-428 42 39 7.5<br />
32 - 40 211-429 57 54 7.5<br />
50 211-430 77 74 7.5<br />
B9<br />
B9.15
Vacuum Fittings<br />
ISO-K Clamp Flange Components<br />
ISO-K Clamp<br />
Flange Components<br />
♦ Clamping flange fittings conform to Pneurop 6606/1981 and DIN 28404<br />
♦ Stainless steel fittings comply with the published specifications<br />
Nominal Diameter<br />
Number of Screws of Number of<br />
A B C Clamping Screws D Claw Grip Claw Grip<br />
DN 63 ISO-K 95 70 12 4 110 M 8 x 35 4<br />
DN 80 ISO-K 110 83 12 4 125 M 8 x 35 8<br />
DN 100 ISO-K 130 102 12 4 145 M 8 x 35 8<br />
DN 160 ISO-K 180 153 12 4 200 M 10 x 35 8<br />
DN 200 ISO-K 240 213 12 6 260 M 10 x 35 12<br />
DN 250 ISO-K 290 261 12 6 310 M 10 x 35 12<br />
DN 320 ISO-K 370 318 17 8 395 M 12 x 50 12<br />
DN 400 ISO-K 450 400 17 8 480 M 12 x 50 16<br />
DN 500 ISO-K 550 501 17 12 580 M 12 x 50 16<br />
DN 630 ISO-K 690 651 22 12 720 M 12 x 55 20<br />
1 Clamp flange<br />
2 Claw grip<br />
3 Base plate<br />
4 Claw grip<br />
Connection Elements<br />
Clamp DN ... ISO-K Ordering No. A B C<br />
Steel zinc plated 63 Ð 250 212-225 60 17 27<br />
320 Ð 500 212-226 78 27 39<br />
630 212-227 88 31 49<br />
Stainless steel 63 Ð 250 212-228 60 17 27<br />
320 Ð 500 212-229 78 27 39<br />
630 212-230 88 31 49<br />
Set of 4 pcs.<br />
B9.16
ISO-K Clamp Flange Components<br />
Vacuum Fittings<br />
Connection Elements<br />
Claw DN ... ISO-K Ordering No. A B C<br />
Clamping flange / base plate 63 Ð 100 212-231 22.5 35 13.9<br />
160 Ð 250 212-232 23 35 13.9<br />
320 Ð 500 212-233 36.5 50 20.6<br />
630 212-234 41.5 55 25.6<br />
Clamping flange / 63 Ð 100 212-235 18.6 30 10<br />
base plate with groove 160 Ð 250 212-236 19 35 10<br />
320 Ð 500 212-237 31 45 15<br />
630 212-233 36.5 50 20.6<br />
Clamping flange with 63 Ð 100 212-247 20.6 30 12<br />
groove / base plate 160 Ð 250 212-248 21.1 35 12<br />
320 Ð 500 212-249 33.9 45 18<br />
630 212-233 36.5 50 20.6<br />
Steel zinc plated<br />
Set of 4 pcs.<br />
Seals<br />
Centering Ring<br />
DN ... ISO-K Ordering No. A B C D<br />
CR / aluminum 63 212-251 96 70 3.9 8<br />
80 212-091 109 83 3.9 8<br />
100 212-252 128 102 3.9 8<br />
160 212-253 179 153 3.9 8<br />
200 212-254 239 213 3.9 8<br />
250 212-255 287 261 3.9 8<br />
320 212-256 358 318 5.6 14<br />
400 212-257 440 400 5.6 14<br />
500 212-258 541 501 5.6 14<br />
630 212-259 691 651 5.6 14<br />
FPM / aluminum 63 212-261 96 70 3.9 8<br />
80 212-092 109 83 3.9 8<br />
100 212-262 128 102 3.9 8<br />
160 212-263 179 153 3.9 8<br />
200 212-264 239 213 3.9 8<br />
250 212-265 287 261 3.9 8<br />
320 212-266 358 318 5.6 14<br />
400 212-267 440 400 5.6 14<br />
500 212-268 541 501 5.6 14<br />
630 212-269 691 651 5.6 14<br />
800 212-270 840 800 5.6 14<br />
1000 212-271 1040 1000 5.6 14<br />
FPM / stainless steel 63 212-281 96 70 3.9 8<br />
80 212-093 109 83 3.9 8<br />
100 212-282 128 102 3.9 8<br />
160 212-283 179 153 3.9 8<br />
200 212-284 239 213 3.9 8<br />
250 212-285 287 261 3.9 8<br />
Outer ring aluminum<br />
B9<br />
B9.17
Vacuum Fittings<br />
ISO-K Clamp Flange Components<br />
Seals<br />
Centering Ring<br />
with Fine Filter DN ... ISO-K Ordering No. A B C D<br />
FPM / stainless steel 63 212-291 62 69.8 3.9 8<br />
100 212-292 94 101.8 3.9 8<br />
Filter: Stainless steel<br />
Pore size 0.004 mm<br />
Degree of separation at<br />
0.001 mm up to 98%<br />
O-Ring DN ... ISO-K Ordering No. A B<br />
CR 63 212-351 75.6 5.3<br />
80 212-097 88.3 5.3<br />
100 212-352 107.3 5.3<br />
160 212-353 158.1 5.3<br />
200 212-354 208.9 5.3<br />
250 212-355 253.4 5.3<br />
320 212-356 329.6 7<br />
400 212-357 405.3 7<br />
500 212-358 506.9 7<br />
630 212-359 658.9 7<br />
FPM 63 212-361 75.6 5.3<br />
80 212-098 88.3 5.3<br />
100 212-362 107.3 5.3<br />
160 212-363 158.1 5.3<br />
200 212-364 208.9 5.3<br />
250 212-365 253.4 5.3<br />
320 212-366 329.6 7<br />
400 212-367 405.3 7<br />
500 212-368 506.9 7<br />
630 212-369 658.9 7<br />
800 212-370 808 7<br />
1000 212-371 1006 7<br />
Aluminum Seal<br />
DN ... ISO-K Ordering No. A B C D E<br />
63 212-301 85.6 83 69.8 2.6 4.5<br />
100 212-302 116.6 114 101.8 2.6 4.5<br />
160 212-303 166.6 164 152.8 2.6 4.5<br />
250 212-305 276.6 274 260.8 2.6 4.5<br />
B9.18
ISO-K Clamp Flange Components<br />
Vacuum Fittings<br />
Flanges<br />
Blank Flange DN ... ISO-K Ordering No. A B<br />
Steel nickel plated 63 212-001 95 12<br />
100 212-002 130 12<br />
160 212-003 180 12<br />
250 212-005 290 12<br />
320 212-006 370 17<br />
400 212-007 450 17<br />
500 212-008 550 17<br />
630 212-009 690 22<br />
Stainless steel 63 212-011 95 12<br />
80 212-076 110 12<br />
100 212-012 130 12<br />
160 212-013 180 12<br />
200 212-014 240 12<br />
250 212-015 290 12<br />
320 212-016 370 17<br />
400 212-017 450 17<br />
500 212-018 550 17<br />
630 212-019 690 22<br />
Welding Flange<br />
DN ... ISO-K Ordering No. A B C D E<br />
Steel 63 212-021 95 76.1 70.3 12 6<br />
100 212-022 130 108 102.2 12 6<br />
160 212-023 180 159 153.2 12 6<br />
250 212-025 290 267 261 12 6<br />
Stainless steel 63 212-031 95 76.1 71.5 12 6<br />
80 212-078 110 88.9 84.9 12 6<br />
100 212-032 130 108 102 12 6<br />
160 212-033 180 159 155 12 6<br />
200 212-034 240 219.1 213.9 12 6<br />
250 212-035 290 267 261 12 6<br />
B9<br />
B9.19
Vacuum Fittings<br />
ISO-K Clamp Flange Components<br />
Flanges<br />
Flange<br />
with Tube<br />
DN ... ISO-K Ordering No. A B C<br />
Steel 63 212-041 100 76.1 70.3<br />
100 212-042 100 108 102.2<br />
160 212-043 100 159 153.2<br />
250 212-045 100 267 261<br />
320 212-046 100 324 318<br />
400 212-047 100 406 400<br />
500 212-048 100 508 500<br />
630 212-049 100 660 650<br />
Stainless steel 63 212-051 100 76.1 71.5<br />
100 212-052 100 108 104<br />
160 212-053 100 159 155<br />
200 212-054 100 219.1 213.1<br />
250 212-055 100 267 261<br />
320 212-056 100 324 318<br />
400 212-057 100 406 400<br />
500 212-058 100 508 500<br />
630 212-059 100 660 650<br />
Pipe Fittings<br />
Elbow 90°<br />
DN ... ISO-K Ordering No. A B<br />
Stainless steel 63 212-101 88 66<br />
100 212-102 108 100<br />
160 212-103 138 150<br />
250 212-105 208 250<br />
Tee<br />
DN ... ISO-K Ordering No. A B<br />
Stainless steel 63 212-111 88 66<br />
100 212-112 108 100<br />
160 212-113 138 150<br />
250 212-115 208 250<br />
Reducer DN ... ISO-K Ordering No. A<br />
Stainless steel 80 / 63 212-084 50<br />
100 / 63 212-161 50<br />
250 / 200 212-170 50<br />
B9.20
ISO-K Clamp Flange Components<br />
Vacuum Fittings<br />
Pipe Fittings<br />
Cross<br />
DN ... ISO-K Ordering No. A B<br />
Stainless steel 63 212-121 88 66<br />
100 212-122 108 100<br />
160 212-123 138 150<br />
250 212-125 208 250<br />
Reducing Cross<br />
DN ... ISO-K Ordering No. A B C D E<br />
Stainless steel 63 212-131 88 44 66 64 59<br />
100 212-132 100 50 82 80 77<br />
160 212-133 100 50 107 107 105<br />
Bellows /Hose with Flanges<br />
Bellows<br />
Deviation from<br />
DN ... ISO-K Ordering No. A B C D Axis Max.<br />
Stainless steel 63 212-201 132 20 20 66 30¡<br />
100 212-202 132 28 28 95 30¡<br />
160 212-203 150 22 22 153 14¡<br />
250 212-205 200 30 30 261 13¡<br />
A = unstressed length<br />
Metal Hose DN ... ISO-K Ordering No. A B C<br />
Stainless steel 63 212-211 250 250 160<br />
63 212-212 500 250 160<br />
63 212-213 750 250 160<br />
63 212-214 1000 250 160<br />
100 212-215 250 370 240<br />
100 212-216 500 370 240<br />
100 212-217 750 370 240<br />
100 212-218 1000 370 240<br />
B = radius for multiple bending<br />
C = radius for single bending<br />
B9<br />
B9.21
Vacuum Fittings<br />
ISO-K Clamp Flange Components<br />
Transition Pieces<br />
Adaptor Flange ISO-K / ISO-F Ordering No. A<br />
Stainless steel 160 / 63 212-152 22<br />
160 / 100 212-153 25<br />
200 / 100 212-155 20<br />
200 / 160 212-156 25<br />
250 / 160 212-159 22<br />
Adaptor ISO-K / ISO-KF Ordering No. A<br />
Aluminum 63 / 40 212-171 40<br />
63 / 50 212-172 45<br />
Stainless steel 63 / 40 212-173 40<br />
63 / 50 212-174 45<br />
100 / 40 212-175 40<br />
Adaptor<br />
ISO-K / CF-F Ordering No. A B C<br />
Stainless steel 63 / 63 213-271 90 1 1<br />
100 / 100 213-272 90 1 1<br />
160 / 160 213-273 90 1.5 1.5<br />
Sleeve<br />
Connection<br />
DN ... ISO-K Ordering No. A B<br />
Aluminum 63 212-181 51 76<br />
100 212-182 56 107<br />
160 212-183 56 156<br />
Sleeve with<br />
Hose Clamp<br />
DN ... ISO-K Ordering No. A B C D E<br />
CR, stainless steel 63 212-186 70 14 24 75 120<br />
100 212-187 72 8 26 106 150<br />
160 212-188 72 8 26 155 200<br />
B9.22
ISO-K Clamp Flange Components<br />
Vacuum Fittings<br />
Protective Lids<br />
Protective Lids<br />
DN ... ISO-K Ordering No. A B C<br />
Polyethylene 63 212-311 102 95 18<br />
100 212-312 137 130 18<br />
160 212-313 187 180 18<br />
200 212-314 248 240 18.5<br />
250 212-315 297.5 290 18.5<br />
320 212-316 380 370 23.5<br />
400 212-317 461 450 23.5<br />
500 212-318 557 550 24<br />
630 212-319 697 690 29<br />
B9<br />
B9.23
Vacuum Fittings<br />
ISO-F Fixed Flange Components<br />
ISO-F Fixed<br />
Flange Components<br />
1 Clamp flange<br />
2 Collar flange<br />
3 Fixed flange<br />
Nominal Diameter<br />
A B C Number of Holes Screws for Fixed Flange<br />
DN 63 ISO-F 70 130 110 4 M 8 x 40<br />
DN 100 ISO-F 102 165 145 8 M 8 x 40<br />
DN 160 ISO-F 153 225 200 8 M 10 x 50<br />
DN 200 ISO-F 213 285 260 12 M 10 x 50<br />
DN 250 ISO-F 261 335 310 12 M 10 x 50<br />
DN 320 ISO-F 318 425 395 12 M 12 x 65<br />
DN 400 ISO-F 400 510 480 16 M 12 x 65<br />
DN 500 ISO-F 501 610 580 16 M 12 x 65<br />
DN 630 ISO-F 651 750 720 20 M 12 x 80<br />
DN 800 ISO-F 800 920 890 24 M 12 x 70<br />
DN 1000 ISO-F 1000 1120 1090 32 M 12 x 70<br />
Collar Flange<br />
with<br />
Retaining Ring DN ... ISO-F Ordering No. A B C<br />
Steel nickel plated 63 212-061 12 95.5 130<br />
100 212-062 12 130.5 165<br />
160 212-063 16 180.7 225<br />
200 212-064 16 240.7 285<br />
250 212-065 16 290.7 335<br />
320 212-066 20 370.8 425<br />
400 212-067 20 450.8 510<br />
500 212-068 20 550.8 610<br />
630 212-069 24 691 750<br />
Adaptor Flange<br />
ISO-K / ISO-F<br />
ISO-K / ISO-F Ordering No. A<br />
Stainless steel 160 / 63 212-152 22<br />
160 / 100 212-153 25<br />
200 / 100 212-155 20<br />
200 / 160 212-156 25<br />
250 / 160 212-159 22<br />
B9.24
ISO-F Fixed Flange Components<br />
Vacuum Fittings<br />
Measurement<br />
Flange<br />
DN ... ISO-F Ordering No. A B C<br />
Aluminum 100 212-142 30 165 M 8<br />
160 212-143 30 225 M 10<br />
Stainless steel 63 212-146 30 130 M 8<br />
100 212-147 30 165 M 8<br />
160 212-148 30 225 M 10<br />
* Claw grip DN 16 ISO-KF included<br />
Set of<br />
Hexagon Bolts<br />
DN ... ISO-F Ordering No. A B Set of<br />
Steel zinc plated 63 Ð 100 212-241 40 8 8 pcs.<br />
160 Ð 250 212-242 50 10 12 pcs.<br />
320 Ð 500 212-243 70 12 16 pcs.<br />
630 212-244 80 12 20 pcs.<br />
Sealing Disk DN ... ISO-F Ordering No. A B<br />
Aluminum / CR 63 212-321 73 3.9<br />
100 212-322 107 3.9<br />
160 212-323 160 3.9<br />
250 212-325 270 3.9<br />
320 212-326 330 5.6<br />
400 212-327 415 5.6<br />
500 212-328 515 5.6<br />
630 212-329 656 5.6<br />
800 212-330 825 5.6<br />
1000 212-331 1025 5.6<br />
O-Ring DN ... ISO-F Ordering No. A B<br />
CR 63 212-333 80 5<br />
100 212-334 110 5<br />
160 212-335 165 5<br />
250 212-337 265 5<br />
320 212-338 325 8<br />
400 212-339 412 8<br />
500 212-340 510 8<br />
630 212-341 640 8<br />
800 212-342 820 8<br />
1000 212-343 1023 8<br />
B9<br />
B9.25
Vacuum Fittings<br />
UHV CF Components<br />
UHV CF Components<br />
♦ CF flanges conform to Conflat¨ flange specifications and conform to<br />
the international standard<br />
♦ Stainless steel fittings comply with the published specifications<br />
Nominal Diameter<br />
A O.D. B C D E Number of Holes<br />
DN 16 CF 34 1 1/3" 27 Ð 4.3 1.2 6<br />
DN 40 CF 69.5 2 3/4" 58.7 Ð 6.6 1.2 6<br />
DN 63 CF 113.5 4 1/2" Ð 92.2 8.4 1.2 8<br />
DN 100 CF 152 6" Ð 130.3 8.4 1.2 16<br />
DN 160 CF 202.5 8" Ð 181 8.4 1.2 20<br />
DN 200 CF 253 10" Ð 231.8 8.4 1.2 24<br />
DN 250 CF 305 12" Ð 284 8.4 1.2 32<br />
DN 300 CF 368 14 1/2" Ð 338.1 10.5 1.2 32<br />
DN 350 CF 419 16 1/2" Ð 388.9 10.5 1.2 36<br />
Connection Elements<br />
Hexagonal Bolts<br />
with Nuts<br />
Required Torque<br />
DN ... CF Ordering No. A B Set of (lubricated)<br />
16 213-401 20 3.2 25 x M 4 4 Nm<br />
40 213-402 35 5 25 x M 6 10 Nm<br />
63 213-403 45 6.5 25 x M 8 20 Nm<br />
100 213-404 50 6.5 25 x M 8 20 Nm<br />
160 213-405 55 6.5 25 x M 8 20 Nm<br />
200 Ð 250 213-406 60 6.5 25 x M 8 20 Nm<br />
300 213-408 70 8 34 x M 10 30 Nm<br />
350 213-409 70 8 38 x M 10 30 Nm<br />
B9.26
UHV CF Components<br />
Vacuum Fittings<br />
Connection Elements<br />
Hexagon Bolts<br />
without Nuts<br />
Required Torque<br />
DN ... CF Ordering No. A Set of (lubricated)<br />
16 213-411 16 25 x M 4 4 Nm<br />
40 213-412 25 25 x M 6 10 Nm<br />
63 Ð 160 213-413 35 25 x M 8 20 Nm<br />
Hexagon Bolts<br />
with Duo Nuts<br />
Screws/ Required Torque<br />
DN ... CF Ordering No. A B C Duo Nuts (lubricated)<br />
16 213-421 20 7 4 6 x M 4 / 3 4 Nm<br />
40 213-422 35 10 5 6 x M 6 / 3 10 Nm<br />
63 213-423 45 12 8 8 x M 8 / 3 20 Nm<br />
100 213-424 50 12 8 16 x M 8 / 8 20 Nm<br />
160 213-425 55 12 8 20 x M 8 / 10 20 Nm<br />
Set of<br />
Stud Screws<br />
Required Torque<br />
DN ... CF Ordering No. A Set of (lubricated)<br />
16 213-431 20 6 x M 4 4 Nm<br />
40 213-432 35 6 x M 6 10 Nm<br />
63 Ð 100 213-433 45 16 x M 8 20 Nm<br />
Thread<br />
Lubricant<br />
Ordering No. Temperature Resistant<br />
C100 28 g 214-231 1000 ¡C<br />
Remains fully effective for at<br />
least 10 bakeout cycles<br />
Seals<br />
Copper Gasket<br />
DN ... CF Ordering No. A B C Number<br />
Premium quality 16 213-371 2 21.3 16.2 10 pcs.<br />
Diamond surface finish 40 213-372 2 48.1 36.8 10 pcs.<br />
Individual packaging 63 213-373 2 82.4 63.6 10 pcs.<br />
100 213-374 2 120.5 101.7 10 pcs.<br />
160 213-375 2 171.3 152.5 10 pcs.<br />
200 213-376 2 222.1 203.3 10 pcs.<br />
250 213-377 2 272.7 254 5 pcs.<br />
Standard quality 16 213-451 2.1 21.3 16.2 10 pcs.<br />
40 213-452 2.1 48.1 39 10 pcs.<br />
63 213-453 2.1 82.4 63.6 10 pcs.<br />
100 213-454 2.1 120.5 101.8 10 pcs.<br />
160 213-455 2.1 171.3 152.6 10 pcs.<br />
200 213-456 2.1 222.1 203.4 10 pcs.<br />
300 213-458 2.1 326.2 307 1 pcs.<br />
350 213-459 2.1 376.5 357 1 pcs.<br />
B9<br />
B9.27
Vacuum Fittings<br />
UHV CF Components<br />
Seals<br />
Copper Gasket,<br />
Silver Plated<br />
DN ... CF Ordering No. A B C Number<br />
Premium quality 16 213-381 2 21.3 16.2 10 pcs.<br />
Diamond surface finish 40 213-382 2 48.1 36.8 10 pcs.<br />
Individual packaging 63 213-383 2 82.4 63.6 10 pcs.<br />
100 213-384 2 120.5 101.7 10 pcs.<br />
160 213-385 2 171.3 152.5 5 pcs.<br />
200 213-386 2 222.1 203.3 5 pcs.<br />
250 213-387 2 272.7 254 5 pcs.<br />
Copper Gasket,<br />
Gold Plated<br />
DN ... CF Ordering No. A B C Number<br />
Premium quality 16 213-471 2 21.3 16.2 5 pcs.<br />
Diamond surface finish 40 213-472 2 48.1 36.8 5 pcs.<br />
Individual packaging<br />
FPM Seal<br />
DN ... CF Ordering No. A B C D Number<br />
16 213-391 2 21 16 Ð 5 pcs.<br />
40 213-392 2.5 48.2 42 Ð 5 pcs.<br />
63 213-393 3.2 82.7 69.7 2.5 2 pcs.<br />
100 213-394 3.2 119.8 107.8 2.5 2 pcs.<br />
160 213-395 3.2 171.7 156 2.5 2 pcs.<br />
200 213-396 3.2 222.5 206 2.5 2 pcs.<br />
FPM Seal with<br />
Support Ring<br />
DN ... CF Ordering No. A B C D Number<br />
250 213-397 5 266.5 248.3 256.2 1 pcs.<br />
B9.28
UHV CF Components<br />
Vacuum Fittings<br />
Flanges<br />
Blank Flange<br />
DN ... CF-F Ordering No. A B C<br />
1.4301 (AISI 304) 16 213-001 7.5 14 1.4<br />
40 213-002 13 38 1.4<br />
63 213-003 17.5 66 1.4<br />
100 213-004 20 104 1.4<br />
160 213-005 22 155 1.4<br />
200 213-006 24.5 205 1.4<br />
250 213-007 24.5 256 1.4<br />
1.4435 (AISI 316L) 300 213-008 28.5 306 1.4<br />
350 213-009 28.5 356 1.4<br />
1.4429 (AISI 316LN) 16 213-101 7.5 14 1.4<br />
40 213-102 13 38 1.4<br />
63 213-103 17.5 66 1.4<br />
100 213-104 20 104 1.4<br />
160 213-105 22 155 1.4<br />
200 213-106 24.5 205 1.4<br />
250 213-107 24.5 256 1.4<br />
Blank Flange,<br />
Rotatable<br />
DN ... CF-R Ordering No. A B C D E<br />
1.4301 (AISI 304) 16 213-011 7.5 5.8 18.6 14 1.4<br />
40 213-012 13 7.6 41 38 1.4<br />
63 213-013 17.5 12.6 71 66 1.4<br />
100 213-014 20 14.3 109 104 1.4<br />
160 213-015 22 15.8 160 155 1.4<br />
200 213-016 24.5 17.1 206 205 1.4<br />
250 213-017 24.5 18 257 256 1.4<br />
1.4429 (AISI 316LN) 16 213-111 7.5 5.8 18.6 14 1.4<br />
40 213-112 13 7.6 41 38 1.4<br />
63 213-113 17.5 12.6 71 66 1.4<br />
100 213-114 20 14.3 109 104 1.4<br />
160 213-115 22 15.8 160 155 1.4<br />
200 213-116 24.5 17.1 206 205 1.4<br />
250 213-117 24.5 18 257 256 1.4<br />
Outer ring 1.4301 (AISI 304)<br />
B9<br />
B9.29
Vacuum Fittings<br />
UHV CF Components<br />
Flanges<br />
Welding Flange<br />
DN ... CF-F Ordering No. A B C D E<br />
1.4301 (AISI 304) 16 213-021 7.5 3.3 17.2 18 1<br />
40 213-022 13 7.5 39.5 40 1.5<br />
63 213-023 17.5 8 66 70 2<br />
100 213-024 20 9 104 108 2<br />
160 213-025 22 10 155 159 2<br />
200 213-026 24.5 12 205 205 2.5<br />
250 213-027 24.5 12 256 256 3<br />
1.4435 (AISI 316L) 300 213-028 28.5 15.8 306 306 3<br />
350 213-029 28.5 15.8 356 356 3<br />
1.4429 (AISI 316LN) 16 213-121 7.5 3.3 17.2 18 1<br />
40 213-122 13 7.5 39.5 40 1.5<br />
63 213-123 17.5 8 66 70 2<br />
100 213-124 20 9 104 108 2<br />
160 213-125 22 10 155 159 2<br />
200 213-126 24.5 12 205 205 2.5<br />
250 213-127 24.5 12 256 256 3<br />
Welding Flange,<br />
Rotatable<br />
DN ... CF-R Ordering No. A B C D E<br />
1.4301 (AISI 304) 16 213-041 7.5 3.3 17.2 18 1<br />
40 213-042 13 7.5 39.5 40 1.5<br />
63 213-043 17.5 8 66 70 2<br />
100 213-044 20 9 104 108 2<br />
160 213-045 22 10 155 159 2<br />
200 213-046 24.5 12 205 205 2.5<br />
250 213-047 24.5 12 256 256 3<br />
1.4429 (AISI 316LN) 16 213-141 7.5 3.3 17.2 18 1<br />
40 213-142 13 7.5 39.5 40 1.5<br />
63 213-143 17.5 8 66 70 2<br />
100 213-144 20 9 104 108 2<br />
160 213-145 22 10 155 159 2<br />
200 213-146 24.5 12 205 205 2.5<br />
250 213-147 24.5 12 256 256 3<br />
Outer ring 1.4301 (AISI 304)<br />
Welding Flange<br />
with<br />
Tapped Holes<br />
DN ... CF-F Ordering No. A B C D E<br />
1.4301 (AISI 304) 16 213-031 7.5 3.3 17.2 18 1 6 x M 4<br />
40 213-032 13 7.5 39.5 40 1.5 6 x M 6<br />
63 213-033 17.5 8 66 70 2 8 x M 8<br />
100 213-034 20 9 104 108 2 16 x M 8<br />
160 213-035 22 10 155 159 2 20 x M 8<br />
B9.30
UHV CF Components<br />
Vacuum Fittings<br />
Flanges<br />
Welding Flange<br />
for Gauge<br />
DN ... CF-F Ordering No. A B C D E F G H<br />
1.4301 (AISI 304) 40 213-092 24 17 38 69.5 1.75 48 10 4<br />
Flange with Tube<br />
DN ... CF-F Ordering No. A B C D<br />
1.4301 (AISI 304) 16 213-051 38 17.2 18 1<br />
40 213-052 63 39.5 40 1.6<br />
63 213-053 105 66 70 2<br />
100 213-054 135 104 108 2<br />
160 213-055 167 155 159 2<br />
Flange with<br />
Tube, Rotatable<br />
DN ... CF-R Ordering No. A B C D<br />
1.4301 (AISI 304) 16 213-061 38 17.2 18 1<br />
40 213-062 63 39.5 40 1.6<br />
63 213-063 105 66 70 2<br />
100 213-064 135 104 108 2<br />
160 213-065 167 155 159 2<br />
Reducing Flange<br />
CF / CF<br />
DN ... CF-F Ordering No. A B C D<br />
1.4301 (AISI 304) 40 / 16 213-071 13 16 22 5.5 6 x M 4<br />
63 / 40 213-073 17.5 39 50 9 6 x M 6<br />
100 / 40 213-075 20 39 55 9 6 x M 6<br />
100 / 63 213-076 20 66 85 11 8 x M 8<br />
160 / 40 213-078 22 39 60 9 6 x M 6<br />
160 / 63 213-079 24 66 85 13 8 x M 8<br />
160 / 100 213-080 22 104 120 11 16 x M 8<br />
1.4429 (AISI 316LN) 40 / 16 213-171 13 16 22 5.5 6 x M 4<br />
63 / 40 213-173 17.5 39 50 9 6 x M 6<br />
100 / 40 213-175 20 39 55 9 6 x M 6<br />
100 / 63 213-176 20 66 85 11 8 x M 8<br />
160 / 40 213-178 22 39 60 9 6 x M 6<br />
160 / 100 213-180 22 104 120 11 16 x M 8<br />
B9<br />
B9.31
Vacuum Fittings<br />
UHV CF Components<br />
Pipe Fittings<br />
Intermediate<br />
Piece<br />
DN ... CF Ordering No. A B C D<br />
1.4301 (AISI 304) 16 213-201 76 0.5 0.5 16<br />
40 213-202 126 1 1 37<br />
63 213-203 210 1 1 66<br />
100 213-204 270 1 1 104<br />
160 213-205 334 1.5 1.5 155<br />
Intermediate<br />
Piece, Insulated<br />
Surface<br />
DN ... CF Ordering No. A B C D E F Leakage*<br />
1.4301 (AISI 304 ) 40 213-212 70 1 1 25 30 34.5 44 mm<br />
Al 2 O 3 63 213-213 90 1 1 53 45 66 65 mm<br />
Bakeout temperature: 350 ¡C<br />
Transition insulator/flange: FeNi<br />
* 20 kV at 10 -4 mbar<br />
Reducer<br />
CF / CF<br />
DN ... CF Ordering No. A B C D<br />
1.4301 (AISI 304) 40 / 16 213-221 45 1 1 16<br />
63 / 40 213-223 75 1 1 37<br />
100 / 40 213-225 75 1 1 37<br />
100 / 63 213-226 95 1 1 66<br />
160 / 100 213-230 105 1.5 1.5 104<br />
Elbow 90°<br />
DN ... CF Ordering No. A B C D<br />
1.4301 (AISI 304) 16 213-301 38 0.5 0.5 15<br />
40 213-302 63 0.5 0.5 38<br />
63 213-303 105 1 1 66<br />
100 213-304 135 1 1 100<br />
160 213-305 167 1.5 1.5 150<br />
Tee DN ... CF Ordering No. A B C D<br />
1.4301 (AISI 304) 16 213-311 38 0.5 0.5 15<br />
40 213-312 63 0.5 0.5 38<br />
63 213-313 105 1 1 66<br />
100 213-314 135 1 1 100<br />
160 213-315 167 1.5 1.5 150<br />
B9.32
UHV CF Components<br />
Vacuum Fittings<br />
Pipe Fittings<br />
Cross DN ... CF Ordering No. A B C D<br />
1.4301 (AISI 304) 16 213-321 38 0.5 0.5 15<br />
40 213-322 63 0.5 0.5 38<br />
63 213-323 105 1 1 66<br />
100 213-324 135 1 1 100<br />
160 213-325 167 1.5 1.5 150<br />
Double<br />
Cross-Piece<br />
DN ... CF Ordering No. A B C D<br />
1.4301 (AISI 304) 40 213-332 63 0.5 0.5 38<br />
3 rotatable 63 213-333 105 1 1 66<br />
3 fix 100 213-334 135 1 1 100<br />
160 213-335 167 1.5 1.5 150<br />
Reducing<br />
Cross<br />
DN ... CF Ordering No. A B C D E F<br />
1.4301 (AISI 304) 100 213-342 135 1 1 67.5 106 84<br />
Bellows /Hose With Flanges, Compensator<br />
Compensator<br />
Angular<br />
Deviation<br />
DN...CF-F OrderingNo. A B C D E F Max.<br />
Flange 40 213-346 120 10 0 36.8 100 10 10¡<br />
1.4301 (AISI 304) 63 213-347 130 20 0 62 154 13 12¡<br />
Bellow 100 213-348 127 30 0 92 192 13 12¡<br />
1.4571 (AISI 316Ti)<br />
Pressure max. (absolute) 5 bar<br />
Bellow<br />
Deviation<br />
From Axis<br />
DN ... CF Ordering No. A B C D E F Max.<br />
Flange 16 213-351 76 1.5 1.5 15 22 16 21¡<br />
1.4301 (AISI 304) 40 213-352 126 2 2 40 55 36.8 7.5¡<br />
Bellow 63 213-353 139 2 2 62 80 66 37¡<br />
1.4571 (AISI 316Ti) 100 213-354 142 2 2 92 116 102.5 28¡<br />
160 213-355 250 3 3 154 187 153 16¡<br />
A = unstressed length<br />
Pressure max. (absolute) 5 bar<br />
B9<br />
B9.33
Vacuum Fittings<br />
UHV CF Components<br />
Bellows /Hose with Flanges, Compensator<br />
Flexible<br />
Metal Hose<br />
DN ... CF Ordering No. A B C D E F G<br />
Flange 16 213-361 250 23 16 15 22.5 70 50<br />
1.4301 (AISI 304) 16 213-362 500 23 16 15 22.5 70 50<br />
Bellow 16 213-363 750 23 16 15 22.5 70 50<br />
1.4571 (AISI 316Ti) 16 213-364 1000 23 16 15 22.5 70 50<br />
40 213-365 250 46 36.8 40.5 53 130 100<br />
40 213-366 500 46 36.8 40.5 53 130 100<br />
40 213-367 750 46 36.8 40.5 53 130 100<br />
40 213-368 1000 46 36.8 40.5 53 130 100<br />
F = radius for multiple bending<br />
G = radius for single bend<br />
Pressure max. (absolute) 5 bar<br />
Transition Pieces<br />
Adaptor CF-F / ISO-KF Ordering No. A B<br />
1.401 (AISI 304) 16 / 16 213-251 35 16<br />
16 / 25 213-252 35 16<br />
40 / 16 213-254 30 16<br />
40 / 25 213-255 30 26<br />
40 / 40 213-256 50 37<br />
63 / 40 213-259 35 41<br />
100 / 40 213-262 50 41<br />
Adaptor CF-F / ISO-K Ordering No. A B C D<br />
1.4301 (AISI 304) 63 / 63 213-271 90 1 1 66<br />
100 / 100 213-272 90 1 1 104<br />
160 / 160 213-273 90 1.5 1.5 153<br />
Glass Metal<br />
Connection<br />
DN ... Ordering No. A B C D E F<br />
1.4301 (AISI 304) 20 213-276 121 19.05 0.9 19.05 1.25 41<br />
Pyrex 36 213-277 121 38.1 1.65 38.1 2.3 39<br />
Glass Metal<br />
Connection<br />
with Flange<br />
DN ... CF-F Ordering No. A B C D<br />
1.4301 (AISI 304) 16 213-281 124 17.25 19.05 1.25<br />
Pyrex 40 213-282 124 34.8 38.1 2.3<br />
B9.34
UHV CF Components<br />
Vacuum Fittings<br />
Protective Lids<br />
Protective Lids DN ... CF Ordering No. A B C<br />
Polyethylene 16 213-441 36 34 9.5<br />
40 213-442 71.5 69.5 17.5<br />
63 213-443 115.5 113.5 22<br />
100 213-444 154 152 24.5<br />
160 213-445 205 202.5 27<br />
200 213-446 263 254 36<br />
250 213-447 315 306 36<br />
B9<br />
B9.35
Oil Diffusion Pumps<br />
Titanium, Sublimator, Catalyzer Trap<br />
B10
Oil Diffusion Pumps<br />
Contents<br />
Products and Accessories<br />
Diffusion Pumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B10.3<br />
Integrated Baffle. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B10.3<br />
Cold Cap or Baffle Cap . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B10.5<br />
Pump Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B10.8<br />
Thermal Switch . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B10.8<br />
Flow Monitor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B10.8<br />
Pump Fluid Replenishing Device . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B10.9<br />
Thermostatic Cut-Out . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B10.9<br />
Baffle . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B10.10<br />
Water Baffle . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B10.10<br />
Combination Baffle . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B10.11<br />
Refrigerator . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B10.12<br />
LN 2<br />
Supply. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B10.13<br />
Automatic LN 2<br />
Supply . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B10.13<br />
Individual Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B10.14<br />
Automatic LN 2<br />
Level Control System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B10.15<br />
Automatic LN 2<br />
Level Valve . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B10.15<br />
Pumping System Controller . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B10.16<br />
Pump Fluids . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B10.17<br />
Titanium Sublimator and Controller . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B10.18<br />
Titanium Sublimator . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B10.18<br />
Specific Pumping Speed . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B10.19<br />
Controller . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B10.19<br />
Integrated Timer. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B10.19<br />
Pumping Body . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B10.20<br />
LN 2<br />
Supply System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B10.21<br />
Catalyzer Trap . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B10.22<br />
B10.2
Diffusion Pumps<br />
Oil Diffusion Pumps<br />
Diffusion Pumps<br />
Integrated Baffle<br />
♦ Built-in water baffle<br />
♦ Suitable for mineral oils, silicone oils and pentaphenylether<br />
♦ High vacuum stability due to integrated booster stage<br />
♦ Pump unit and pumping system on request<br />
Technical Data<br />
Vacuum Connection<br />
DN 63 ISO-K DN 100 ISO-K DN 160 ISO-K DN 250 ISO-K<br />
Pumping speed 1) for air at 10 -4 mbar l/s 150 300 650 1750<br />
Type PDI063-W PDI100-W PDI160-W PDI250-W<br />
Ordering Information<br />
2) 3)<br />
230 V 260-022 260-032 260-042 260-052<br />
115 V 260-023 260-033 260-043 Ñ<br />
Fore vacuum, max. mbar 0.8 0.8 0.8 0.8<br />
Pump fluid charge, min. / max. cm 3 50 / 70 80 / 120 150 / 300 450 / 1000<br />
Power consumption W 400 650 1275 2400<br />
Heating / cooling time, typical min 10 / 10 12 / 10 15 / 15 17 / 60<br />
Recommended pumping speed<br />
for roughing pump at working<br />
pressure > 10 -4 / < 10 -4 mbar m 3 /h 4 / 4 8 / 4 16 / 8 60 / 30<br />
Housing stainless steel stainless steel stainless steel stainless steel<br />
Jet system aluminum aluminum aluminum aluminum<br />
Weight kg 4 8.5 14.5 30<br />
Spare parts<br />
Seal set BN 841 180-T BN 841 181-T BN 841 182-T BN 841 193-T<br />
Heating ring<br />
230 V B 5170 218 QG B 5170 028 QG B 5170 004 QG B 5170 038 QG<br />
+ B 5170 057 QG + B 5170 089 QG 2)<br />
115 V B 5170 217 QG B 5170 027 QG B 5170 003 QG Ñ<br />
+ B 5170 056 QG Ñ<br />
Accessories<br />
Thermal switch 216-058 216-058 216-058 216-058<br />
Cooling water monitor without fittings 216-059 216-060 216-060 B 4747 111 SE<br />
Orifice for flow monitor Ñ Ñ Ñ B 4747 308 SE<br />
1) Values measured according DIN 28427, gauge head calibrated with spinning rotor gauge.<br />
Experiments have shown that with other vacuum gauges and/or measuring methods<br />
(e.g. AVS) the values are up to 40% higher.<br />
2) Pump fluids to be ordered separately<br />
3) Seal on high vacuum side included in scope of delivery<br />
4) 230/208 V<br />
B10.3<br />
B10
Oil Diffusion Pumps<br />
Diffusion Pumps<br />
Minimum cooling<br />
water requirements<br />
A PDB040-G + PDB040-W<br />
B PDI063-W<br />
C PDI100-W<br />
D PDI160-W<br />
E PDI250-W<br />
The minimum inlet water pressure can be calculated:<br />
P required = 1 bar + ∆p DIF complete + ∆p supply line + ∆p return line<br />
Example:<br />
PDI100-W with 4 m each supply and return lines (1/2" hose)<br />
operated with cooling water of 20 ¡C.<br />
Min. water requirement = 50 l/h<br />
P required = 1 + 0.3 + 0.025 + 0.025 = 1.35 bar<br />
Power connection<br />
Water connection<br />
Pump fluid refilling port<br />
DN A B C D E F G H J<br />
PDI063-W DN 63 ISO-K 360 150 100 169 46 72 115 101 120<br />
PDI100-W DN 100 ISO-K 412 194 128 184 42 82 145 120 135<br />
PDI160-W DN 160 ISO-K 570 290 172 269 53 106 192 185 160<br />
PDI250-W DN 250 ISO-K 690 450 272 330 60 150 295 Ð 212<br />
Technical Data<br />
Vacuum Connection<br />
DN 40 ISO-KF<br />
DN 40 ISO-KF<br />
PDB040-G<br />
PDB040-W<br />
Cooling air water<br />
Pumping speed for air at 10 -4 mbar 1)<br />
Without baffle l/s 38 40<br />
With baffle l/s 22 22<br />
Built-in thermal protection switch Ñ yes<br />
Type PDB040-G PDB040-W<br />
Ordering<br />
Information 2)<br />
230 V 260-002 260-012<br />
115 V 260-003 260-013<br />
Vacuum stability mbar 0.3 0.3<br />
Pump fluid charge, min. / max. cm 3 10 / 15 10 / 15<br />
Heating / cooling time min 10 / 6 10 / 10<br />
Recommended pumping speed<br />
of the roughing pump m 3 /h 1.5 1.5<br />
Weight kg 3 1.5<br />
Spare parts<br />
Seal set BN 841 151-T BN 841 151-T<br />
Heating plate<br />
230 V 216-275 216-275<br />
115 V 216-277 216-277<br />
1) Measured with 66A or DC 704 according to DIN 28427<br />
2) Without pump fluid<br />
Power connection<br />
Water connection<br />
B10.4
Diffusion Pumps<br />
Oil Diffusion Pumps<br />
Cold Cap or Baffle Cap<br />
♦ Rugged design<br />
♦ Low ultimate pressure<br />
♦ Integrated cold cap reduces oil backstreaming<br />
♦ Low pump fluid consumption due to built-in fore vacuum baffle<br />
♦ Suitable for mineral oils, silicone oils or pentaphenylether<br />
(e.g. Santovac)<br />
PDA320-W PDA400-W PDA500-W *<br />
PDA630-W * + PDB630-W * PDA800-W + PDB800-W PDA999-W + PDB999-W<br />
* Without groove for retaining ring<br />
Power connection<br />
Water connection<br />
Viewport<br />
B10.5<br />
B10
Oil Diffusion Pumps<br />
Diffusion Pumps<br />
The natural aging process in the cooling water circuit (not including<br />
mineral deposits, algae deposits, etc.) is taken into account in the<br />
calculation of the minimum water requirements. We recommend<br />
operating the pumps with sufficient throughput so that the temperature<br />
of the water at the outlet does not exceed 30 ¡C. ∆p of the complete<br />
diffusion pump is the pressure drop across the pump, including the cold<br />
cap, internal connection lines and connection nipple, but not including the<br />
supply and return lines. The pressure can be calculated as follows:<br />
Required = 1 bar + ∆p DIF complete<br />
+ ∆p supply line<br />
+ ∆p return line<br />
Minimum cooling<br />
water requirements<br />
A PDA320-W<br />
B PDA400-W<br />
C PDA500-W<br />
D PDA630-W +<br />
PDB630-W<br />
E PDA800-W +<br />
PDB800-W<br />
Technical Data<br />
Vacuum Connection<br />
DN 320 ISO-K DN 400 ISO-K DN 500 ISO-K<br />
Pumping speed for air at 10 -4 mbar 1) l/s 3 500 5 000 7 500<br />
With cold cap PDA320-W PDA400-W PDA500-W<br />
With baffle cap Ñ Ñ Ñ<br />
Ordering Information 5)<br />
3 x 400 V Ñ Ñ Ñ<br />
3 x 400 V / 3 x 230 V 260-071 260-081 260-090<br />
Fore vacuum, max. mbar 0.5 0.5 0.5<br />
Pump fluid charge, min. / max. cm 3 1 200 / 1 800 2 000 / 3 000 3 000 / 5 000<br />
Power consumption kW 4.4 5.4 7.2<br />
Heating / cooling time min 17 / 50 28 / 50 25 / 80<br />
Recommended pumping speed for roughing pump 2)<br />
at working pressure 3)<br />
> 10 -4 mbar m 3 /h 120 240 250 Ð 500<br />
< 10 -4 mbar m 3 /h 60 120 120<br />
Weight kg 55 75 180<br />
Spare parts<br />
Seal set BN 841 071-T BN 841 070-T BN 841 076-T<br />
Heating plate<br />
3 x 400 V Ñ Ñ Ñ<br />
Ñ Ñ Ñ<br />
3 x 400 V / 3 x 230 V 216-280 3 x 216-282 3 x 216-284<br />
Accessories<br />
Pump fluid replenishing device 216-061 216-061 216-061<br />
Temperature switch 216-056 216-056 216-056<br />
Thermostatic cut-out 216-057 216-057 216-057<br />
Flow monitor B 4747 111 SE B 4747 111 SE B 4747 111 SE<br />
Orifice for flow monitor B 4747 308 SE B 4747 311 SE B 4747 311 SE<br />
1) Values measured according DIN 28427, gauge head calibrated with spinning rotor gauge.<br />
Experiments have shown that with other vacuum gauges and/or measuring methods (e.g. AVS) the values are up to 40% higher.<br />
2) Two-stage rotary vane vacuum pumps, or pump combinations of one or two-stage rotary vane vacuum pump and roots pumps, are used as roughing pumps.<br />
3) In continuous operation<br />
4) <strong>Inc</strong>l. baffle cap<br />
5) Seal on high and fore vacuum side included<br />
B10.6
Diffusion Pumps<br />
Oil Diffusion Pumps<br />
Minimum cooling water requirements<br />
PDA999-W + PDB999-W<br />
O upper circuit<br />
U lower circuit<br />
DN 630 ISO-K DN 800 ISO-F DN 1000 ISO-F<br />
15 000 13 000 4) 23 000 20 000 4) 40 000 34 000 4)<br />
PDA630-W Ñ PDA800-W Ñ PDA999-W Ñ<br />
Ñ PDB630-W Ñ PDB800-W Ñ PDB999-W<br />
Ñ Ñ 260-111 260-116 260-121 260-126<br />
260-101 260-106 Ñ Ñ Ñ Ñ<br />
0.5 0.5 0.4 0.4 0.4 0.4<br />
6 000 / 8 000 6 000 / 8 000 7 000 / 13 000 7 000 / 13 000 16 000 / 24 000 16 000 / 24 000<br />
10.5 10.5 17.4 17.4 25.2 25.2<br />
50 / 90 50 / 90 50 / 100 50 / 100 45 / 200 45 / 200<br />
240 Ð 1 000 240 Ð 1 000 500 Ð 1 000 500 Ð 1 000 1 000 Ð 2 000 1 000 Ð 2 000<br />
170 170 240 240 500 Ð 1 000 500 Ð 1 000<br />
250 260 480 480 700 721<br />
BN 841 077-T BN 841 077-T BN 841 236-T BN 841 236-T BN 841 237-T BN 841 237-T<br />
Ñ Ñ 1 x 216-290 1 x 216-290 7 x 216-290 7 x 216-290<br />
Ñ Ñ + 6 x 216-288 + 6 x 216-288 Ñ Ñ<br />
7 x 216-286 7 x 216-286 Ñ Ñ Ñ Ñ<br />
216-061 216-061 216-061 216-061 216-061 216-061<br />
216-056 216-056 216-056 216-056 216-056 216-056<br />
216-057 216-057 216-057 216-057 216-057 216-057<br />
B 4747 111 SE B 4747 111 SE B 4747 111 SE B 4747 111 SE B 4747 111 SE B 4747 111 SE<br />
B 4747 311 SE B 4747 311 SE B 4747 326 SE B 4747 326 SE B 4747 326 SE B 4747 326 SE<br />
B10.7<br />
B10
Oil Diffusion Pumps<br />
Pump Accessories<br />
Pump Accessories<br />
Thermal Switch<br />
♦ For interlocking or controlling the pumping system peripheral equipment<br />
♦ The thermal relay closes when the diffusion pump is ready for operation<br />
Technical Data<br />
PDI063-250-W<br />
PDA320-999-W PDB800-999-W<br />
Adjustment range ¡C Ñ 45 Ð 180 ±5<br />
Switching difference ¡C Ñ 15<br />
Switching point ¡C 70 Ñ<br />
Ordering Information<br />
216-058 216-056<br />
Power V / A 250 / 16 250 / 10<br />
Contact Closes at rising temperature Closes at rising temperature<br />
Flow Monitor<br />
♦ For monitoring the cooling water flow<br />
♦ Flow monitors are installed at the outlet of the cooling water circuit of<br />
the diffusion pump<br />
Technical Data<br />
Connection<br />
G 3/8“ G 1/2“<br />
Closing rate, min. / max. l/min 2.2 / 2.9 Depending on the orifice<br />
Ordering Information<br />
B 4747 434 SS<br />
B 4747 111 SE<br />
Switching<br />
Voltage, V AC / V DC 230 / 30 250 / 30<br />
Current, V AC / V DC A 1 / 1 10 / 5<br />
Consumption, V AC / V DC VA / W 26 / 20 Ñ<br />
Pressure (absolute) bar 25 16<br />
Weight kg 0.8 3.1<br />
Orifice<br />
4 Ð 08 l/min Ñ B 4747 308 SE<br />
8 Ð 16 l/min Ñ B 4747 311 SE<br />
16 Ð 32 l/min Ñ B 4747 326 SE<br />
B10.8
Pump Accessories<br />
Oil Diffusion Pumps<br />
Pump Fluid Replenishing Device<br />
♦ For replenishing pump fluid in processes with high gas throughput<br />
♦ Refilling is possible while pump is running<br />
♦ Visual level control on viewport<br />
Ordering Information 216-061<br />
Thermostatic Cut-Out<br />
♦ Protects DIF from overheating<br />
♦ Manual resetting<br />
Technical Data<br />
Cut-off temperature 190 ¡C<br />
Ordering Information 216-057<br />
Current A 10<br />
Contact<br />
Opens at rising temperature<br />
Mounting 2 x M 4<br />
Weight g 225<br />
B10<br />
B10.9
Oil Diffusion Pumps<br />
Baffle<br />
Baffle<br />
Water Baffle<br />
Technical Data<br />
Vacuum Connection<br />
DN 320 ISO-K DN 400 ISO-K DN 500 ISO-K DN 630 ISO-K DN 800 ISO-F DN 1000 ISO-F<br />
Conductance for molecular flow l/s 4 300 7 000 9 000 16 000 24 500 42 500<br />
Type PBW320-S PBW400-S PBW500-S PBW630-S PBW800-S PBW999-S<br />
Ordering Information 260-260 260-270 260-280 260-290 260-300 260-310<br />
Cooling water consumption 1) l/h 20 25 32 42 52 65<br />
Weight kg 15.7 21.8 55 60 152 205<br />
1) These values are valid for a 3 ¡C increase in cooling<br />
water temperature. In the presence of heat radiation<br />
from the high vacuum side, the values increase by a<br />
factor of up to 5.<br />
Water connection<br />
Baffle DN A B<br />
PBW320-S DN 320 ISO-K 460 220<br />
PBW400-S DN 400 ISO-K 546 245<br />
Baffle DN A B<br />
PBW500-S* DN 500 ISO-K 688 260<br />
PBW630-S* DN 630 ISO-K 840 300<br />
PBW800-S DN 800 ISO-F 1016 340<br />
PBW999-S DN 1000 ISO-F 1212 340<br />
* Without groove for retaining ring<br />
B10.10
Baffle<br />
Oil Diffusion Pumps<br />
Combination Baffle<br />
Technical Data<br />
Vacuum Connection<br />
DN 320 ISO-K DN 400 ISO-K DN 500 ISO-K DN 630 ISO-K DN 800 ISO-F DN 1000 ISO-F<br />
Pumping speed for water vapor with LN 2 cooling l/s 11 000 17 500 24 000 47 000 71 000 110 000<br />
Conductance 2) for molecular flow l/s 3 500 5 500 6 500 12 500 16 500 33 000<br />
Type PBC320-X PBC400-X PBC500-X PBC630-X PBC800-X PBC999-X<br />
Refrigerator<br />
Ordering Information 260-265 260-275 260-285 260-295 260-305 260-315<br />
Refrigerant charge (R134a) g 95 120 140 250 300 380<br />
Cooling time to +10 ¡C / ultimate temp. min 2 / 15 3 / 18 5 / 20 7 / 25 8 / 30 10 / 40<br />
Attainable ultimate temperature 3) ¡C -17 Ð -20 -13 Ð -17 -12 Ð -14 -8 Ð -10 -4 Ð -6 +1 Ð +4<br />
Bakeout temperature with R134a ¡C 90 90 90 90 90 90<br />
LN 2 consumption<br />
Cooling to -180 ¡C kg 3 4.5 6 8 12 25<br />
Continuous operation kg/h 1.6 2.4 3.6 5.7 7.2 11<br />
Weight kg 21 26.5 98 117 225 300<br />
Accessories<br />
Refrigerator 260-420 260-420 260-420 260-420 260-420 260-420<br />
2) Measured acc. to PNEUROP<br />
3) Without additional heat radiation from external sources<br />
Water connection<br />
LN 2 connection<br />
Refrigerant connection<br />
Cooling connection (also H 2 O)<br />
Connection for temperature sensor<br />
Baffle DN A B<br />
PBC320-X DN 320 ISO-K 460 220<br />
PBC400-X DN 400 ISO-K 546 245<br />
Baffle DN A B<br />
PBC500-X* DN 500 ISO-K 688 260<br />
PBC630-X* DN 630 ISO-K 840 300<br />
PBC800-X DN 800 ISO-F 1016 340<br />
PBC999-X DN 1000 ISO-F 1212 340<br />
* Without groove for retaining ring<br />
B10<br />
B10.11
Oil Diffusion Pumps<br />
Refrigerator<br />
Refrigerator<br />
♦ For baffles with a nominal width of DN 320 to DN 1000<br />
♦ Ultimate baffle temperatures of -25 ¡C to +5 ¡C are achieved, depending<br />
on the size<br />
Refrigerant<br />
R134a<br />
Refrigeration capacity at<br />
+15 ¡C W 385<br />
-10 ¡C W 140<br />
Type<br />
Technical Data<br />
PCF145-Z<br />
Ordering Information 260-420<br />
Power requirements<br />
Voltage V 240<br />
Frequency Hz 50/60<br />
Power consumption W 145<br />
Motor starting current A 8<br />
Cooling water<br />
Consumption l/h 3 Ð 8<br />
Pressure (overpressure) bar 11<br />
Noise level dB(A) 39<br />
Connections<br />
Refrigerant G 3/8"<br />
Water ¿14<br />
Weight kg 15<br />
B10.12
LN 2 Supply<br />
Oil Diffusion Pumps<br />
LN 2 Supply<br />
Automatic LN 2 Supply<br />
Technical Data<br />
With compressed air compressed air central supply central supply<br />
(Dewar vessel)<br />
(Dewar vessel)<br />
For baffle PBC320-400-X Ñ PBC320-400-X Ñ<br />
Ñ PBC500-999-X Ñ PBC500-999-X<br />
Ordering Information 216-062 216-063 216-064 216-065<br />
A PCB100-A, LN 2 filling device 1) , 220 V / 50 Hz ● ● Ñ Ñ<br />
C PCF200-Z, LN 2 control module ● ● ● ●<br />
D LN 2 sensor<br />
PCF190-Z ● Ñ ● Ñ<br />
PCF220-Z Ñ ● Ñ ●<br />
G Solenoid valve for LN 2 , 24 V, 50/60 Hz,<br />
with fitting for pipe diameter 8/10 ● ● ● ●<br />
H LN 2 line, diameter 8/10 with insulating hose, 1.8 m ● ● ● ●<br />
J Dewar vessel Ñ Ñ Ñ Ñ<br />
1) DN 50 ISO-KF clamping ring and<br />
centering ring to be ordered separately<br />
Water connection<br />
Compressed air connection<br />
B10.13<br />
B10
Oil Diffusion Pumps<br />
LN 2 Supply<br />
Individual Components<br />
♦ For feeding LN 2 to the point of use<br />
♦ The LN 2 admission is regulated by means of a pressure reducing valve<br />
Technical Data<br />
LN 2 filling Automatically Manually<br />
Type PCB100-A PCB100-H<br />
Ordering Information<br />
260-355<br />
230 V / 50 Hz 260-350 Ñ<br />
115 V / 60 Hz 260-351 Ñ<br />
24 V / 50 Hz 260-352 Ñ<br />
Air pressure in the supply line 1) bar 1 / 8 1 / 8<br />
Adjustable pressure in Dewar 1) bar 0 Ð 1 0 Ð 1<br />
Bursting pressure of the rupture disc 1) bar 1.7 1.7<br />
LN 2 throughput l/h 0 Ð 300 0 Ð 300<br />
Power consumption W 8 Ñ<br />
Weight kg 1.6 1.6<br />
1) Overpressure<br />
PCB100-A<br />
PCB100-H<br />
B10.14
LN 2 Supply<br />
Oil Diffusion Pumps<br />
Automatic LN 2 Level Control System<br />
♦ Switching function for controlling a combination baffle<br />
♦ One- or two- point level control operation<br />
♦ Alarm in case of sensor or cable failure<br />
♦ Sensor especially reliable due to patented sensor principle<br />
♦ PTC resistor for emergency cooling<br />
♦ Customized tailored sensors possible<br />
Technical Data<br />
For Baffle<br />
— PBC320-400-X PBC500-999-X<br />
Type PCF200-Z PCF190-Z PCF220-Z<br />
Ordering Information<br />
Control module 260-410 Ñ Ñ<br />
Sensor Ñ 260-412 260-413<br />
Control module Ð Voltage, selectable 24 V AC or 24 V DC Ñ Ñ<br />
Current consumption with closed valve mA 100 Ñ Ñ<br />
Contact rating A at 48 V 2 Ð 4 Ñ Ñ<br />
DIN standard housing EN 50022-35 Ñ Ñ<br />
For mounting rails EN 500035-G32 Ñ Ñ<br />
Operating temperature ¡C Ñ -196 Ð +50 -196 Ð +50<br />
Automatic LN 2 Level Valve<br />
♦ For controlling a constant LN 2 level in reservoir cold trap<br />
♦ LN 2 flow control on Meissner or port traps<br />
♦ Automatic vent valve in large, central LN 2 supply system<br />
♦ No power supply required<br />
Technical Data<br />
Type<br />
PBF101-Z<br />
Ordering Information 260-360<br />
Flow rate l/h 180<br />
Pressure indication on the pressure<br />
gauge with - Warm probe kp/cm 2 4<br />
- Cold probe (vacuum) kp/cm 2 0<br />
Mounting position (pressure gauge on top)<br />
vertical<br />
Weight g 350<br />
LN 2 connection<br />
B10.15<br />
B10
Oil Diffusion Pumps<br />
Pumping System Controller<br />
Pumping System Controller<br />
♦ Remote control and monitoring via digital inputs and outputs<br />
♦ Communication with standard phrases<br />
♦ Switching functions programmable over the whole range<br />
♦ Error indication, time and reason stated<br />
Pressure display: The main display indicates the pressure relevant in the<br />
actual operating mode. The secondary display indicates the pressure of one<br />
of the vacuum gauges selected at will.<br />
Programmable parameters: Upper and lower switching point of all four<br />
vacuum gauges as well as the system times, e.g. maximum roughing time,<br />
heat-up and cool down time of the diffusion pump.<br />
Front and mimic panel can be mounted up to 15 m from the unit.<br />
Software and mimic panel according to customer specifications possible.<br />
Technical Data<br />
Pressure range mbar 2 á 10 -9 Ð 1000<br />
Type<br />
PCA600-Z<br />
Ordering Information 1)<br />
Pumping system controller<br />
1) The exact configuration of the PCA600-Z depends on the<br />
pumping unit and has to be defined.<br />
2) Pumping systems over 7 kW are controlled by the PCA600-Z<br />
with external relays for motors and diffusion pump heater.<br />
3) Other voltages on request<br />
on request<br />
Mimic display for two valves 260-401<br />
Input<br />
Analog<br />
4 compact gauges<br />
Digital 16<br />
Interface<br />
Integrated<br />
RS 232C<br />
Optional RS 485<br />
Output<br />
Analog V 4 x 0 Ð 10<br />
Digital V DC / A 16 x 24 / 1<br />
Power unit, integrated kW 2) 7<br />
Supply<br />
Voltage V / Hz 3) 230 / 50<br />
Consumption kVA 8<br />
Weight kg 13.6<br />
B10.16
Pump Fluids<br />
Oil Diffusion Pumps<br />
Pump Fluids<br />
Typical Applications:<br />
♦ Vacuum metallurgy<br />
♦ Vacuum tube industry<br />
♦ Electron beam welding<br />
♦ Vacuum chemistry<br />
Attainable ultimate pressure: The ultimate pressures indicated in the table<br />
can be attained with correct conditioning of the high vacuum pumping<br />
system. They refer to blanked off groups of pumps with an appropriate<br />
pumping fluid/baffle combination. The ultimate pressure values shown may<br />
be decreased if the gas sources are further reduced.<br />
Technical Data Mineral oil Silicon oil Silicon oil Pentaphenylether<br />
Vapor pressure at 20 ¡C mbar 4 á 10 -8 2 á 10 -8 4 á 10 -10 1 á 10 -10<br />
Chemical resistance good better better very good<br />
Oxidation resistance good better better very good<br />
Thermal resistance good better better very good<br />
Type 66 A DC 704 AN 175 Santovac 5<br />
Ordering Information<br />
500 cm 3 260-390 260-387 260-394 B 0480 559<br />
2000 cm 3 260-391 260-388 260-395 Ñ<br />
5000 cm 3 260-392 260-389 260-396 Ñ<br />
Viscosity at<br />
20 ¡C mm 2 /s 25 Ñ Ñ Ñ<br />
25 ¡C mm 2 /s Ñ 39 175 1000<br />
70 ¡C mm 2 /s Ñ Ñ Ñ 12<br />
100 ¡C mm 2 /s Ñ Ñ Ñ 12<br />
Preferred pressure range mbar 5 á 10 -7 Ð 10 -3 10 -7 Ð 10 -3 10 -8 Ð 10 -5 10 -7 Ð 10 -3<br />
Ultimate pressure with<br />
LN 2 cooling mbar < 6 á 10 -9 < 6 á 10 -9 < 6 á 10 -9 < 6 á 10 -9<br />
Machine cooling -20 ¡C mbar < 6 á 10 -8 < 3 á 10 -8 < 3 á 10 -8 < 3 á 10 -8<br />
Water cooling 20 ¡C mbar < 4 á 10 -7 < 6 á 10 -8 < 3 á 10 -8 < 3 á 10 -8<br />
Air cooling 25 ¡C mbar < 1 á 10 -6 < 5 á 10 -7 < 2 á 10 -7 < 2 á 10 -7<br />
B10<br />
B10.17
Oil Diffusion Pumps<br />
Titanium Sublimator and Controller<br />
Titanium Sublimator and Controller<br />
♦ Base pressure in the 10 -12 mbar range<br />
♦ High pumping speed for chemically active gases<br />
When switching on the filament a ramp integrator is activated. This feature<br />
increases the lifetime of the filament and prevents an undesirable<br />
pressure rise. The current rise time is 30 s.<br />
For interval pumping a timer is available as an option.<br />
Titanium Sublimator<br />
Sublimation filaments 3<br />
Titanium sublimator<br />
Ti-Mo<br />
Type<br />
Technical Data<br />
Connection Flange<br />
DN 40 CF-F<br />
PSU040-T<br />
Ordering Information 260-430<br />
Usable titanium quantity g 3 x 1.2<br />
Sublimation rate, max. g/h 0.2<br />
Operating data<br />
Voltage V 3 Ð 6<br />
Current A 30 Ð 50<br />
Connected load, max. kVA 0.3<br />
Bakeout temperature, max. ¡C 400<br />
Weight kg 0.6<br />
B10.18
Titanium Sublimator and Controller<br />
Oil Diffusion Pumps<br />
Specific Pumping Speed<br />
(Approximate value of a freshly coated surface < 10 -6 mbar) In UHV<br />
systems titanium sublimation pumps are used as supplementary pumps<br />
for gases which react chemically with titanium.<br />
Pumping body<br />
Titanium sublimator<br />
Catalyzer trap<br />
Technical Data<br />
Gas Type<br />
H2 N2 O2 CO CO2 H2O<br />
Getter layer temperature of 20 ¡C l/s cm 3 3 5 9 9 8 3<br />
195 ¡C l/s cm 3 9 9 11 11 9 14<br />
Controller<br />
Technical Data<br />
Heating voltage V 0 Ð 6<br />
Heating current, max. A 50<br />
Run-up time s 30<br />
Type<br />
PCU300-T<br />
Ordering Information<br />
Controller<br />
230 V 260-365<br />
115 V 260-366<br />
Cable PSU Ð PCU (2 pcs. required)<br />
02 m B 4564 491 AD<br />
05 m B 4564 491 AC<br />
12 m B 4564 491 AF<br />
Voltage V 115/230<br />
Frequency Hz 50 Ð 60<br />
Power consumption VA 0 Ð 350<br />
Protection<br />
IP23<br />
Weight kg 16.5<br />
Integrated Timer<br />
Option<br />
Technical Data<br />
Time ranges 7<br />
Programmable<br />
0.05 s Ð 10 h<br />
Ordering Information<br />
B 4779 251 GM<br />
Weight kg 0.15<br />
B10.19<br />
B10
Oil Diffusion Pumps<br />
Pumping Body<br />
Pumping Body<br />
♦ Additional pumping speed for turbo or ion getter pumping units<br />
♦ Effective water vapor condenser<br />
Technical Data<br />
Connection Flange<br />
Vacuum chamber DN 160 CF-F DN 160 CF-F<br />
High vacuum pump DN 100 CF-F DN 160 CF-F<br />
Titanium sublimator DN 40 CF-F DN 40 CF-F<br />
Type PSU100-T PSU160-T<br />
Ordering Information 260-440 260-445<br />
Conductance l/s 500 600<br />
Mounting orientation any any<br />
Pumping speed on vacuum chamber for<br />
H 2 O vapor (LN 2 cooling) l/s 1 500 1 500<br />
N 2 /H 2 (titanium sublimation, LN 2 cooling) l/s 1 300/3 600 1 300/3 600<br />
Bakeout temperature ¡C 400 400<br />
Consumption of liquid nitrogen for initial<br />
charge at room temperature, approx. kg 2 2<br />
Per hour of continuous cooling, approx. kg 1.4 1.4<br />
Cooling time from room temperature<br />
to 77K at o.4 bar min 8 8<br />
Materials<br />
Housing, flanges stainless steel stainless steel<br />
Getter surfaces copper copper<br />
Weight kg 14 15<br />
B10.20
Pumping Body<br />
Oil Diffusion Pumps<br />
LN 2 Supply System<br />
♦ Current-less automatic LN 2 supply<br />
♦ Maintenance liquid level constant with phase separator<br />
Ordering Information<br />
LN 2 Filling Device<br />
PCB100-H<br />
LN 2 Control Valve<br />
With Phase Separator PSU101-Z<br />
260-355 260-361<br />
Compressed air in the supply line,<br />
overpressure, min. bar 1 1<br />
Operating pressure,<br />
adjustable/recommended bar 0.1 - 1 0.4<br />
Sensor length m 2 2<br />
Weight PCB + PSU kg 2.3<br />
PSU101-Z<br />
Phase separator<br />
LN 2 connection<br />
B10.21<br />
B10
Oil Diffusion Pumps<br />
Catalyzer Trap<br />
Catalyzer Trap<br />
♦ Eliminates hydrocarbon backstreaming from rotary vane pumps<br />
♦ Catalytic combustion technology reduces hydrocarbon levels by a factor<br />
of at least 1000<br />
♦ Continuous maintenance-free operation Ñ costs less to operate than a<br />
zeolite trap<br />
♦ No regeneration required due to self-regeneration during venting and<br />
pump down<br />
♦ Over two years of operation with one filling<br />
Eliminate back streaming hydrocarbons in your vacuum system with the<br />
catalyzer traps. Just place the trap between your roughing pump and the<br />
vacuum chamber or the high vacuum pump.<br />
Potentially damaging and contaminating oil vapors are eliminated by<br />
catalytic combustion into the gases CO 2<br />
and H 2<br />
O which are harmlessly<br />
pumped down.<br />
The catalyzer operates at elevated temperatures of approx. 250 ¡C and<br />
automatically regenerates itself with the oxygen in the air each time the<br />
vacuum system is vented and pumped down.<br />
The traps do not adsorb gases so they have a very short uptime, unlike<br />
zeolite traps which require frequent, time consuming regeneration.<br />
The catalyzer trap can not to be used for synthetic oils.<br />
After about 12 months of use, the cost of ownership for<br />
a catalyzer trap is less than for a zeolite trap.<br />
B10.22
Catalyzer Trap<br />
Oil Diffusion Pumps<br />
Technical Data<br />
Connection Flange<br />
DN 25 ISO-KF<br />
DN 40 ISO-KF<br />
Cooling Ñ water<br />
Type PTR025-U PTR040-U<br />
Ordering Information<br />
100 V 260-373 Ñ<br />
110/115 V 260-372 260-382<br />
230/240 V 260-370 260-380<br />
208 V 260-371 260-381<br />
1 catalyzer filling 216-106 216-107<br />
Mounting orientation<br />
Normal operation any any<br />
With water cooling A Ñ vertical<br />
Conductance at 1 á 10 -2 / 1 mbar l/s 3 / 9 9 / 45<br />
Power consumption W 25 50<br />
Lifetime of one filling, normal operation years 2 2<br />
Cooling water consumption, approx. l/h Ñ 5<br />
Weight incl. catalyzer filling kg 1.8 3.6<br />
Power connection<br />
Water connection<br />
B10<br />
B10.23
Product Index<br />
Instrumentation Catalog 2000 - 2001<br />
A<br />
Accessories for UL200 dry and Modul 200 . . . . . . . . . . . . . . . . . . . . B5.36<br />
Accessories for UL500 and UL500 dry . . . . . . . . . . . . . . . . . . . . . . . B5.35<br />
Accessories, General for Helium Leak Detectors . . . . . . . . . . . . . . . . B5.37<br />
Angle Valves. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.3<br />
Applications and Accessories<br />
Gas Analyzers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . <strong>B2</strong>.2<br />
Leak Detectors. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B5.3<br />
Thin Film Deposition Controllers and Monitors . . . . . . . . . . . . . B4.2<br />
B<br />
Baffle Cap or Cold Cap, Diffusion Pumps . . . . . . . . . . . . . . . . . . . . . B10.5<br />
Baffle, Combination . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B10.11<br />
Baffle, Water . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B10.10<br />
Ball Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.34<br />
Bayard-Alpert Pirani Gauge, BPG400 . . . . . . . . . . . . . . . . . . . . . . . . B6.12<br />
Binary Gas Composition Controller, Composer . . . . . . . . . . . . . . . . . <strong>B2</strong>.28<br />
Butterfly Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.16<br />
C<br />
Cables, Vacuum Gauge . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B6.24<br />
Calibrated Leaks. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B5.30<br />
Calibration Service, Vacuum Gauges. . . . . . . . . . . . . . . . . . . . . . . . . B6.28<br />
Capacitance Diaphragm Gauge . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B6.6<br />
CART 200, Mobile Leak Detection System . . . . . . . . . . . . . . . . . . . . B5.14<br />
Catalyzer Trap, Diffusion Pumps . . . . . . . . . . . . . . . . . . . . . . . . . . . B10.22<br />
Coaxial Feedthroughs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B7.16<br />
Cold Cap or Baffle Cap, Diffusion Pumps . . . . . . . . . . . . . . . . . . . . . B10.5<br />
Components<br />
ISO-F - Fixed Flange Components . . . . . . . . . . . . . . . . . . . . . B9.24<br />
ISO-K - Clamp Flange Components . . . . . . . . . . . . . . . . . . . . B9.16<br />
ISO-KF - Small Flange Components. . . . . . . . . . . . . . . . . . . . . B9.4<br />
UHV - CF Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B9.26<br />
Composer Gas Composition Controller . . . . . . . . . . . . . . . . . . . . . . . <strong>B2</strong>.28<br />
Connection Components for Leak Testing Instruments. . . . . . . . . . . . B5.38<br />
Control Valves. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.25<br />
Controllers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.26<br />
CONTURA Z Helium Leak Detector. . . . . . . . . . . . . . . . . . . . . . . . . . B5.28<br />
Crystals, Quartz . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B4.17<br />
CrystalSix Sensor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B4.13<br />
D<br />
Diffusion Pumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B10.3<br />
E<br />
Ecotec II Sniffer Leak Detector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B5.24<br />
EIES Sensor and Feedthrough Packages, Rigid or Fiber Optics . . . . B4.21<br />
Electrical Feedthroughs. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B7.11<br />
F<br />
FabGuard Sensor Integration and Analysis System . . . . . . . . . . . . . . . B1.3<br />
FabStar Gas Analysis System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . <strong>B2</strong>.26<br />
Feedthroughs<br />
Coaxial . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B7.16<br />
Electrical . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B7.11<br />
High Current . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B7.15<br />
Liquid. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B7.18<br />
Rotary . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B7.3<br />
Flow Monitor, Pump Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . B10.8<br />
G<br />
Gas Analyzers<br />
FabStar Gas Analysis System . . . . . . . . . . . . . . . . . . . . . . . . <strong>B2</strong>.26<br />
Transpector 2 Gas Analysis System . . . . . . . . . . . . . . . . . . . . . <strong>B2</strong>.4<br />
Transpector 2 Gas Analysis System Upgrade Package. . . . . . <strong>B2</strong>.12<br />
Transpector XPR2 Gas Analysis System . . . . . . . . . . . . . . . . <strong>B2</strong>.14<br />
Transpector CIS2 Gas Analysis System . . . . . . . . . . . . . . . . . <strong>B2</strong>.20<br />
Gas Composition Controller, Composer. . . . . . . . . . . . . . . . . . . . . . . <strong>B2</strong>.28<br />
Gas Dosing Systems. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.24<br />
Gas Dosing Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.21<br />
Gate Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.20<br />
Gauge Controller. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B6.24<br />
H<br />
Helium Leak Detector Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . B5.37<br />
Helium Leak Detector Connection Components. . . . . . . . . . . . . . . . . B5.38<br />
Helium Leak Detector<br />
CONTURA Z . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B5.28<br />
LDS1000 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B5.16<br />
Modul 200 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B5.12<br />
ULTRATEST UL200 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B5.10<br />
ULTRATEST UL200 dry . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B5.11<br />
ULTRATEST UL500 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B5.18<br />
ULTRATEST UL500 dry . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B5.20<br />
Helium Sample Probes, Sniffers . . . . . . . . . . . . . . . . . . . . . . . . . . . . B5.34<br />
Helium Sniffer Leak Detector, Protec . . . . . . . . . . . . . . . . . . . . . . . . . B5.22<br />
High Current Feedthroughs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B7.15<br />
HLD4000A Leak Detector for Refrigerant 134a and Others . . . . . . . . B5.26<br />
I<br />
IC/5 Thin Film Deposition Controller . . . . . . . . . . . . . . . . . . . . . . . . . . B4.8<br />
Inline Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.3<br />
Integrated Baffle, Diffusion Pumps. . . . . . . . . . . . . . . . . . . . . . . . . . . B10.3<br />
Interface Module, VCA200-Z . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.28<br />
IPC400 Pumping Packages. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . <strong>B2</strong>.37<br />
ISO-F - Fixed Flange Components . . . . . . . . . . . . . . . . . . . . . . . . . . B9.24<br />
ISO-K - Clamp Flange Components . . . . . . . . . . . . . . . . . . . . . . . . . B9.16<br />
ISO-KF - Small Flange Components . . . . . . . . . . . . . . . . . . . . . . . . . . B9.4<br />
D<br />
D.1
Instrumentation Catalog 2000 - 2001<br />
Product Index<br />
L<br />
LDS1000 Modular Leak Detection System. . . . . . . . . . . . . . . . . . . . . B5.16<br />
Leak Detectors<br />
Helium Leak Detector, LDS1000. . . . . . . . . . . . . . . . . . . . . . . B5.16<br />
Helium Leak Detector, Modul 200. . . . . . . . . . . . . . . . . . . . . . B5.12<br />
Helium Leak Detector, ULTRATEST UL200 . . . . . . . . . . . . . . B5.10<br />
Helium Leak Detector, ULTRATEST UL200 dry. . . . . . . . . . . . B5.11<br />
Helium Leak Detector, ULTRATEST UL500 . . . . . . . . . . . . . . B5.18<br />
Helium Leak Detector, ULTRATEST UL500 dry. . . . . . . . . . . . B5.20<br />
Modular Leak Detection System, LDS1000 . . . . . . . . . . . . . . B5.16<br />
Refrigerant Leak Detector, HLD4000A . . . . . . . . . . . . . . . . . . B5.26<br />
Sniffer Leak Detector, Ecotec II . . . . . . . . . . . . . . . . . . . . . . . B5.24<br />
LES1200 Thin Film Metrology Sensor System. . . . . . . . . . . . . . . . . . . B3.3<br />
Linear Motion Feedthroughs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B7.6<br />
Liquid Feedthroughs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B7.18<br />
LN2 Supply, Diffusion Pumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B10.13<br />
Lubricants and Sealing Materials, Vacuum Feedthroughs . . . . . . . . . B7.20<br />
M<br />
Mass Spectrometers, Transpector 2 . . . . . . . . . . . . . . . . . . . . . . . . . . <strong>B2</strong>.4<br />
Metal-Ceramic Connections, Vacuum Feedthroughs . . . . . . . . . . . . . B7.17<br />
Mobile Helium Leak Detector, Modul 200. . . . . . . . . . . . . . . . . . . . . . B5.12<br />
Modul 200 Helium Leak Detector. . . . . . . . . . . . . . . . . . . . . . . . . . . . B5.12<br />
Modular Leak Detection System, LDS1000 . . . . . . . . . . . . . . . . . . . . B5.16<br />
N<br />
Narrowband Filters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B4.23<br />
O<br />
OES1200 Optical Emission Sensor . . . . . . . . . . . . . . . . . . . . . . . . . . . B3.7<br />
Optical Emission Sensor, OES1200 . . . . . . . . . . . . . . . . . . . . . . . . . . B3.7<br />
Oscillators. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B4.12<br />
P<br />
Penning Gauge, PEG100 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B6.22<br />
Photoresist Detector, Preclude . . . . . . . . . . . . . . . . . . . . . . . . . . . . . <strong>B2</strong>.17<br />
Pirani Gauge, Bayard-Alpert, BPG-400 . . . . . . . . . . . . . . . . . . . . . . . B6.12<br />
Pirani Standard Gauge, PSG400, PSG400-S, PSG100-S,<br />
PSG101-S . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B6.15<br />
Plasma Process Monitor, PPM422. . . . . . . . . . . . . . . . . . . . . . . . . . . <strong>B2</strong>.27<br />
Portable, Dry Helium Leak Detector, UL200 dry . . . . . . . . . . . . . . . . . B5.11<br />
Portable, Dry Helium Leak Detector, UL500 dry. . . . . . . . . . . . . . . . . B5.20<br />
PPM422 Plasma Process Monitor . . . . . . . . . . . . . . . . . . . . . . . . . . . <strong>B2</strong>.27<br />
Preclude Photoresist Detector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . <strong>B2</strong>.17<br />
Pressure Converters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . <strong>B2</strong>.36<br />
Pressure Range, Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B9.3<br />
Protec Helium Sniffer Leak Detector . . . . . . . . . . . . . . . . . . . . . . . . . B5.22<br />
Pump Accessories, Diffusion Pumps . . . . . . . . . . . . . . . . . . . . . . . . . B10.8<br />
Pump Fluid Replenishing Device, Pump Accessories. . . . . . . . . . . . . B10.9<br />
Pump Fluids . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B10.17<br />
Pumping Body, Diffusion Pumps . . . . . . . . . . . . . . . . . . . . . . . . . . . B10.20<br />
Pumping Packages, IPC400 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . <strong>B2</strong>.37<br />
Pumping System Controller, Diffusion Pumps . . . . . . . . . . . . . . . . . B10.16<br />
Q<br />
Quartz Crystals . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B4.17<br />
R<br />
Refrigerant Leak Detectors<br />
Ecotec II Sniffer Leak Detector . . . . . . . . . . . . . . . . . . . . . . . . B5.24<br />
HLD4000A Refrigerant Leak Detector. . . . . . . . . . . . . . . . . . . B5.26<br />
Refrigerator, Diffusion Pumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B10.12<br />
Residual Gas Analyzers (RGA)<br />
Transpector 2 Gas Analysis System . . . . . . . . . . . . . . . . . . . . . <strong>B2</strong>.4<br />
Transpector 2 Gas Analysis System Upgrade Package. . . . . . <strong>B2</strong>.12<br />
Transpector XPR2 Gas Analysis System . . . . . . . . . . . . . . . . <strong>B2</strong>.14<br />
Transpector CIS2 Gas Analysis System . . . . . . . . . . . . . . . . . <strong>B2</strong>.20<br />
Rotary Feedthroughs, ISO-KF . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B7.3<br />
Rotary Feedthroughs, CF . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B7.4<br />
Rotary/Linear Motion Feedthroughs. . . . . . . . . . . . . . . . . . . . . . . . . . . B7.5<br />
S<br />
Safety Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.31<br />
Sealing Material, Vacuum Feedthroughs . . . . . . . . . . . . . . . . . . . . . . B7.21<br />
Sealing Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.33<br />
Seals, Components. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B9.3<br />
Sensor Integration and Analysis System, FabGuard . . . . . . . . . . . . . . B1.3<br />
Sensors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B4.13<br />
Sentinel III Thin Film Deposition Controller . . . . . . . . . . . . . . . . . . . . B4.18<br />
Sky Capacitance Diaphragm Gauge, CDG025, CDG045,<br />
CDG045-SD. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B6.6<br />
Sniffer Leak Detectors<br />
Ecotec II Sniffer Leak Detector . . . . . . . . . . . . . . . . . . . . . . . . B5.24<br />
HLD4000A Refrigerant Leak Detector. . . . . . . . . . . . . . . . . . . B5.26<br />
Sniffer Probes, Helium . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B5.34<br />
Software, TranspectorWare . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . <strong>B2</strong>.10<br />
Software, TWare32 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . <strong>B2</strong>.31<br />
Stainless Steel, Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B9.3<br />
Stationary Helium Leak Detector<br />
ULTRATEST UL500 Helium Leak Detector . . . . . . . . . . . . . . . B5.18<br />
ULTRATEST UL500 dry Helium Leak Detector . . . . . . . . . . . . B5.20<br />
T<br />
Thermal Switch, Pump Accessories. . . . . . . . . . . . . . . . . . . . . . . . . . B10.8<br />
Thin Film Deposition Controller<br />
IC/5 Thin Film Deposition Controller . . . . . . . . . . . . . . . . . . . . . B4.8<br />
Sentinel III Thin Film Deposition Controller . . . . . . . . . . . . . . . B4.18<br />
XTC/2 and XTC/C Thin Film Deposition Controllers . . . . . . . . . B4.4<br />
Thin Film Deposition Monitor XTM/2 . . . . . . . . . . . . . . . . . . . . . . . . . . B4.6<br />
Thin Film Metrology Sensor System, LES1200 . . . . . . . . . . . . . . . . . . B3.3<br />
Thermostatic Cut-Out, Pump Accessories . . . . . . . . . . . . . . . . . . . . . B10.9<br />
Thread Lubricant, Vacuum Feedthroughs . . . . . . . . . . . . . . . . . . . . . B7.20<br />
Titanium Sublimator and Controller . . . . . . . . . . . . . . . . . . . . . . . . . B10.18<br />
Transpector 2 Gas Analysis System . . . . . . . . . . . . . . . . . . . . . . . . . . <strong>B2</strong>.4<br />
Transpector 2 Gas Analysis System Upgrade Package . . . . . . . . . . . <strong>B2</strong>.12<br />
Transpector XPR2 Gas Analysis System . . . . . . . . . . . . . . . . . . . . . . <strong>B2</strong>.14<br />
Transpector CIS2 Gas Analysis System. . . . . . . . . . . . . . . . . . . . . . . <strong>B2</strong>.20<br />
TranspectorWare Software . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . <strong>B2</strong>.10<br />
TWare32 Software . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . <strong>B2</strong>.31<br />
D.2
Product Index<br />
Instrumentation Catalog 2000 - 2001<br />
U<br />
UHV - CF Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B9.26<br />
ULTRATEST UL200 Helium Leak Detector . . . . . . . . . . . . . . . . . . . . B5.10<br />
ULTRATEST UL200 dry Helium Leak Detector . . . . . . . . . . . . . . . . . B5.11<br />
ULTRATEST UL500 Helium Leak Detector . . . . . . . . . . . . . . . . . . . . B5.18<br />
ULTRATEST UL500 dry Helium Leak Detector . . . . . . . . . . . . . . . . . B5.20<br />
Upgrade Package for Transpector 2 Gas Analysis System. . . . . . . . . <strong>B2</strong>.12<br />
V<br />
Vacuum Ball Bearings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B7.19<br />
Vacuum Gauge Controller, VGC103 . . . . . . . . . . . . . . . . . . . . . . . . . B6.24<br />
Vacuum Grease/Oil, Vacuum Feedthroughs. . . . . . . . . . . . . . . . . . . . B7.20<br />
Vacuum Locks . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.33<br />
Vacuum Switch, VSA100. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B6.27<br />
Valves<br />
Angle Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.3<br />
Ball Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.34<br />
Butterfly Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.16<br />
Control Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.25<br />
Gas Dosing Valves. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.21<br />
Gate Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.20<br />
Safety Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.31<br />
Sealing Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.33<br />
Venting Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.29<br />
Venting Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.29<br />
Viewports, Vacuum Feedthroughs . . . . . . . . . . . . . . . . . . . . . . . . . . . . B7.7<br />
D<br />
X<br />
XTC/2 Thin Film Deposition Controller. . . . . . . . . . . . . . . . . . . . . . . . . B4.4<br />
XTC/C Thin Film Deposition Controller . . . . . . . . . . . . . . . . . . . . . . . . B4.4<br />
XTM/2 Thin Film Deposition Monitor . . . . . . . . . . . . . . . . . . . . . . . . . . B4.6<br />
D.3
®<br />
®<br />
Instrumentation Catalog 2000-2001<br />
Quick Reference<br />
To Place An Order<br />
By Telephone<br />
In the U.S., our Customer Service Representatives are available to take your orders by telephone Monday through Friday from<br />
8:15 am to 5:00 pm Eastern Time. Call 315-434-1129. In other locations, contact the INFICON sales office nearest you.<br />
By Fax<br />
In the U.S., place your orders by fax at 315-437-3803. For other locations, refer to the listing of sales and service offices on the<br />
back cover.<br />
By Mail<br />
In the U.S., address your orders to:<br />
INFICON <strong>Inc</strong>.<br />
Two Technology Place<br />
East Syracuse, NY 13057-9714<br />
To order by mail outside the U.S., refer to the listing of sales and service offices on the back cover.<br />
For Price and Availability Information<br />
Simply complete the form in the Appendix and fax it to the sales office nearest you.<br />
By E-mail<br />
http://www.reachus@inficon.com or refer to the listing of sales and service offices on the back cover.<br />
Terms<br />
In the U.S., terms of payment are net 30 days. Minimum order is $50.<br />
, , and are accepted.<br />
For terms in other locations, please contact the sales office nearest you.<br />
A.2
Inquiry Form Instrumentation Catalog 2000 - 2001<br />
TELEFAX INQUIRY<br />
Name<br />
Title<br />
Company<br />
Street<br />
To<br />
INFICON <strong>Inc</strong>.<br />
See back cover for the<br />
sales office nearest you.<br />
City/State,Zip/Postal Code<br />
Phone<br />
Fax<br />
E-mail<br />
Please fill in your request for quote and we will fax back pricing information.<br />
For Office<br />
Use Only<br />
Part No. Quantity Brief Description Price<br />
Place/Date<br />
Signature
UNITED STATES<br />
Sales and Service Offices<br />
CALIFORNIA<br />
6878 Santa Teresa Boulevard<br />
San Jose, CA 95119<br />
Sales:<br />
Tel: 408-436-2828<br />
Fax: 408-361-1274<br />
Email: reachus@inficon.com<br />
Service:<br />
Tel: 408-436-1120<br />
Fax: 408-361-1274<br />
Email: service.usa@inficon.com<br />
17932 Sky Park Circle, Ste. C<br />
Irvine, CA 92614<br />
Tel: 949-261-2956<br />
Fax: 949-261-2959<br />
COLORADO<br />
Prima West Sales<br />
33 Castle Peak Lane<br />
Edwards, CO 81632<br />
Tel: 970-926-9240<br />
Fax: 970-926-9241<br />
GEORGIA<br />
<strong>Schoonover</strong>, <strong>Inc</strong>.<br />
5490 Crossroads Dr. Ste. 5<br />
Acworth, GA 30102<br />
Tel: 800-331-2808<br />
Fax: 770-924-5441<br />
ILLINOIS<br />
1339 W. Byron Street<br />
Chicago, IL 60613<br />
Tel: 773-935-0521<br />
Fax: 773-935-0626<br />
Vacuum One<br />
2502 N. Clark Street, Suite 207<br />
Chicago, IL 60614<br />
Tel: 773-244-3102<br />
Fax: 773-244-3975<br />
MASSACHUSETTS<br />
154 Hickory Hills Road<br />
N. Andover, MA 01845<br />
Tel: 978-725-4933<br />
Fax: 978-725-3280<br />
MINNESOTA<br />
Vacuum One<br />
9757 W. 208th Street<br />
Lakeville, MN 55044<br />
Tel: 612-469-5340<br />
Fax: 617-924-2234<br />
NEW YORK<br />
Hudson Valley High Vacuum<br />
9 Mill Creek Drive<br />
E. Greenbush, NY 12061<br />
Tel: 518-477-6964<br />
Fax: 518-477-7480<br />
Email: hv2@worldnet.att.net<br />
Service<br />
Two Technology Place<br />
East Syracuse, NY 13053<br />
Tel: 315-434-1167<br />
Fax: 315-434-2551<br />
Email: service.usa@inficon.com<br />
OHIO<br />
One Corporate Exchange #100<br />
25825 Science Park Drive<br />
Cleveland, OH 44122<br />
Tel: 216-766-5735<br />
Fax: 216-766-5749<br />
OREGON<br />
Alpha & Omega Ent.<br />
2925 Ascot Circle<br />
West Linn, OR 97068<br />
Tel: 503-657-6244<br />
Fax: 503-212-0134<br />
PENNSYLVANIA<br />
AOTA-VAC<br />
747 Hunt Club Lane<br />
Chester Springs, PA 19425<br />
Tel: 610-363-0545<br />
Fax: 610-363-3830<br />
Email: aotavac@aol.com<br />
TEXAS<br />
4020 S. Industrial Drive, Ste. 145<br />
Austin, TX 78744<br />
Sales and Service:<br />
Tel: 512-448-0488<br />
Fax: 512-448-0398<br />
Email: service.usa@inficon.com<br />
WASHINGTON<br />
7544 Delaware<br />
Vancouver, WA 98663<br />
Tel: 360-696-0946<br />
Fax: 360-696-0962<br />
ASIA<br />
CHINA<br />
Sales & Service:<br />
12/F, Belgian Bank Tower<br />
77 Gloucester Road<br />
Wanchai, Hong Kong<br />
Tel: 852-2520-2880<br />
Fax: 852-2865-6883<br />
Email: reach.china@inficon.com<br />
1/F, East Office Building<br />
Shanghai Yangtze New World Hotel<br />
2099 Yanan Road West<br />
Shanghai 200336, P.R. China<br />
Tel: 86-21-6209-3094<br />
Fax: 86-21-6295-2852<br />
1608, Landmark Tower<br />
8 North Dongsanhuan Road<br />
Chaoyang District<br />
Beijing 100004<br />
Tel: 86-10-6590-0165<br />
Fax: 86-10-6590-0521<br />
CHINA<br />
Service:<br />
Rm B08 Weicheng Business Bldg.<br />
No. 35 Xiaoyn Road<br />
Beijing 100027<br />
Tel: 86-10-6460-4920<br />
Fax: 86-10-6460-6140<br />
TAIWAN<br />
No. 416, Section 3<br />
Chung Hsin Road<br />
Hsinchu 300<br />
Tel: 88-635-933-988<br />
Fax: 88-635-833-999<br />
Email: reach.taiwan@inficon.com<br />
Sales:<br />
Tel: 88-635-933-988<br />
Fax: 88-635-833-999<br />
Service:<br />
Tel: 88-635-829-077<br />
Fax: 88-635-829-340<br />
JAPAN<br />
Tobu A.K. Bldg. 4th Floor<br />
23-3, Shin-Yokohama 3-chome<br />
Kohoku-ku, Yokohama 222<br />
Tel: 81-45-471-3330<br />
Fax: 81-45-471-3323<br />
Email: reach.japan@inficon.com<br />
Central Shin-Osaka Bldg. 9th Floor<br />
5-36, Miyahara 4-chome<br />
Yodogawa-ku, Osaka 532<br />
Tel: 81-6-393-5211<br />
Fax: 81-6-393-5215<br />
Service:<br />
Tsukuba Minami Daiichi Kogyo<br />
Danchi<br />
21 Kasumi-no-Sato Ami-machi<br />
Inashiki-gun<br />
Ibaraki-ken 300-03<br />
Tel: 81-298-89-2841<br />
Fax: 81-298-89-2838<br />
KOREA<br />
Shinahn Building 3rd Floor<br />
173-1, 2-ga Changchoong-Dang<br />
Choong-ku, Seoul 100-392<br />
Tel: 82-2-2270-1330<br />
Fax: 82-2-2271-1568<br />
Email: reach.korea@inficon.com<br />
SINGAPORE<br />
1 Tuas South Street 3<br />
Singapore 638043<br />
Tel: 65-865-1861<br />
Fax: 65-862-3349<br />
Email: reach.singapore@inficon.com.sg<br />
EUROPE<br />
FRANCE<br />
7, Avenue du Quebec<br />
Z.A. de Courtaboeuf B.P. 42<br />
F-91942<br />
Tel: 33-1-6982-4800<br />
Fax: 33-1-6907-5738<br />
Email: reach.france@inficon.com<br />
Agence Rohone Alpes<br />
1 D Traverse les Aubepines<br />
Lotissement les Aubepines<br />
38450 VIF<br />
Tel: 33-4-7672-5215<br />
Fax: 33-4-7672-5235<br />
GERMANY<br />
Sales:<br />
Fliederstr. 12<br />
63486 Bruchkobel<br />
Tel: 49-61-81-78852<br />
Fax: 49-61-81-78843<br />
Email: reach.germany@inficon.com<br />
Nadistrasse 32<br />
D-80809 Munich<br />
Tel: 49-89357-09220<br />
Fax: 49-8935-709-219<br />
GERMANY<br />
Service:<br />
Bonner Strasse 498<br />
D-50968 Cologne<br />
Tel: 49-221-347-2222<br />
Fax: 49-221-347-1082<br />
Email: service.leakdetection@inficon.com<br />
UNITED KINGDOM<br />
Waterside Way<br />
Plough Lane<br />
London SW17 OHB<br />
Tel: 44-208-971-7000<br />
Fax: 44-208-971-7001<br />
Email: reach.unitedkingdom@inficon.com<br />
LIECHTENSTEIN<br />
Service:<br />
FL-9496 Balzers<br />
Principality of Liechtenstein<br />
Tel: 423-388-3222<br />
Fax: 423-388-3726<br />
Email:<br />
service.europe@inficon.com<br />
CORPORATE OFFICE:<br />
Two Technology Place, East Syracuse, NY 13057 USA<br />
Tel: +315.434.1100 Fax: +315.437.3803 Email: reachus@inficon.com<br />
UNITED STATES TAIWAN JAPAN KOREA SINGAPORE GERMANY FRANCE UNITED KINGDOM CHINA<br />
Visit our website for contact information and other sales offices worldwide. www.inficon.com<br />
Due to INFICON’s continuing program of product improvements, specifications are subject to change without notice.<br />
ylla67a1(ooo8) ©2000 INFICON <strong>Inc</strong>.