Products & Services Catalog - PTB Sales
Products & Services Catalog - PTB Sales
Products & Services Catalog - PTB Sales
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<strong>Products</strong> & <strong>Services</strong> <strong>Catalog</strong><br />
“What YOU need, when YOU need it!” SM<br />
Cryopumps & Compressors • Mechanical Pumps • Dry Pumps • Turbo Pumps • Power Generators • Valves • Leak Detectors
About <strong>PTB</strong> <strong>Sales</strong><br />
<strong>PTB</strong> <strong>Sales</strong> was established in 1995 and is a leading North American provider of key services to the<br />
Semiconductor Fabrication, PV Solar, Nano-Technology, MEMS, Vacuum Coating, Aerospace and<br />
Defense, Research and Development and General Industrial markets. Founded on our guiding principle<br />
of “What YOU need, when YOU need it!” SM we have established a track record of being there when our<br />
customers need support in a timely manner and at affordable prices.<br />
Based in Azusa, CA we provide Equipment Refurbishment and Sale, Repairs and Exchanges and<br />
manufacture and the new GreenChip SM Service Programs across a variety of critical components such<br />
as cryogenic vacuum pumps, turbomolecular vacuum pumps, roughing pumps, power generators and<br />
related electronics, valves and others. Because of our commitment to quality and superior customer<br />
relations, the portfolio of products we serve continues to expand.<br />
<strong>PTB</strong> <strong>Sales</strong> operates multiple remanufacturing lines out of 3 facilities with a combined capacity of 40,000<br />
ft 2 , which also store a very significant inventory stock. We have a highly technically competent staff that is<br />
focused on customer service and getting it right the first time.<br />
We have an extensive and growing network of partners throughout the supply chain and have solid<br />
relationships with many equipment OEMs. As a result we can deliver services to our customers that are<br />
equivalent to those they could receive from an OEM but at a much more affordable price level. Almost<br />
two decades after being founded our focus remains on reliable, timely and high quality servicing of our<br />
customers needs!<br />
Main Facility<br />
Cryogenic Pump Facility<br />
Power Generator Facility
TABLE OF CONTENTS<br />
SERVICES OFFERED<br />
REFURBISHED EQUIPMENT<br />
SYSTEMS & SPARES<br />
Table of Contents<br />
<strong>Services</strong> Offered<br />
Refurbished Equipment <strong>Sales</strong> .......................................................................................................................................................................................... 01<br />
Repairs & Exchanges ...................................................................................................................................................................................................... 03<br />
GreenChip SM <strong>Services</strong> ...................................................................................................................................................................................................... 13<br />
Refurbished Equipment<br />
Cryopumps ..................................................................................................................................................................................................................... 19<br />
Cryo Compressors & Arrays .............................................................................................................................................................................................. 21<br />
Polycold Cryogenerators .................................................................................................................................................................................................. 23<br />
Dry & Scroll Pumps ........................................................................................................................................................................................................ 25<br />
Rotary Vane & Piston Pumps .......................................................................................................................................................................................... 29<br />
Rotary Lobe Blowers ....................................................................................................................................................................................................... 35<br />
Diffusion Pumps .............................................................................................................................................................................................................. 37<br />
Traps & Baffles ................................................................................................................................................................................................................ 39<br />
Ion Pumps & Controllers .................................................................................................................................................................................................. 41<br />
Turbomolecular Pumps ................................................................................................................................................................................................... 43<br />
Turbo Pumping Stations .................................................................................................................................................................................................. 47<br />
Turbo Controllers ............................................................................................................................................................................................................. 49<br />
Power Generators ........................................................................................................................................................................................................... 53<br />
E-Beam Power Generators & Guns .................................................................................................................................................................................. 61<br />
Systems & Spares<br />
Leak Detectors & Rentals ................................................................................................................................................................................................. 63<br />
Aerospace Equipment ..................................................................................................................................................................................................... 65<br />
Gate Valves ..................................................................................................................................................................................................................... 67<br />
Angle Valves .................................................................................................................................................................................................................... 71<br />
Throttle Valves ................................................................................................................................................................................................................. 75<br />
Throttle & System Valve Controllers ................................................................................................................................................................................. 77<br />
Vacuum & Deposition Gauges ......................................................................................................................................................................................... 79<br />
Deposition Rate Monitors ................................................................................................................................................................................................ 81<br />
Thin Film Systems .......................................................................................................................................................................................................... 83<br />
Schreiber Chillers ........................................................................................................................................................................................................... 87<br />
Inland Vacuum Oils & Greases ........................................................................................................................................................................................ 89
<strong>Services</strong> Offered<br />
Refurbished Equipment <strong>Sales</strong><br />
At <strong>PTB</strong> <strong>Sales</strong> we are dedicated to a philosophy of “What YOU need, When YOU need it!” SM and our<br />
refurbished equipment sales exemplifies this belief. We have a core competency in sourcing material<br />
critical to our customers operations and production needs. Over the years we have developed the<br />
capability to refurbish a wide range of vacuum pumps used in high tech manufacturing and provide the<br />
highest quality refurbishment to new conditions in the North American market.<br />
Our customers range from semiconductor fabrication facilities, to aerospace companies, to research and<br />
development laboratories, to small industrial coating firms. We are able to meet the equipment needs<br />
of this diversified and demanding base of customers because of our focus on servicing our customers<br />
needs and capability to refurbish a very wide range of critical components.<br />
We have a large inventory of equipment and components to serve high tech manufacturing industries in<br />
our 3 facilities of over 40,000 ft 2 . Our competency is in locating, refurbishing and having readily available<br />
the equipment our customers need to support their manufacturing operations.<br />
Asset Management<br />
We buy your excess vacuum related equipment.<br />
Visit www.ptbsales.com,<br />
or call toll free 866-332-0500 option 3.
REFURBISHED EQUIPMENT SALES<br />
02<br />
VACUUM PUMPS<br />
POWER GENERATORS<br />
VACUUM SYSTEMS & SPARES<br />
Vacuum Pumps<br />
Equipment Manufacturers Models<br />
Cryopumps CTI, Oerlikon Leybold, SHI-APD, Ricor Cryo-Torr, On-Board, On-Board IS<br />
Cryo Compressors CTI, Polycold 8510, 9600, 9700, PFC<br />
Dry Pumps Edwards, Adixen/Alcatel, EBARA iQDP, iH, iL, IPX, EPX, ACP, AA<br />
Dry Scroll Pumps Agilent/Varian, Edwards, ANEST IWATA, Leybold DS, PTS, SH, ESDP, GVSP, XDS, ISP, SC<br />
Rotary Vane Pumps Adixen, Agilent/Varian, Oerlikon Leybold, Stokes, Welch DS, SD, Trivac, Microvane<br />
Rotary Piston Pumps Kinney/Tuthill, Oerlikon Leybold, Stokes KTC, KT, E, DK, H11<br />
Rotary Lobe Blowers Adixen, Edwards, Kinney, Oerlikon Leybold, Stokes RSV, EH, KMBD, WA/WAU, WS/WSU<br />
Diffusion Pumps Agilent/Varian, Edwards, CVC HS, M, VHS, Diffstak, PMC<br />
Ion Pumps & Controllers Agilent/Varian, Perkin-Elmer StarCell VacIon, PE, Multicell, Digitel<br />
Turbo Pumps Seiko Seiki, Adixen, Agilent/Varian, Oerlikon Leybold STP, ATP, ATH, MDP, TV, TMP, TW, MAG<br />
Turbo Pumping Stations Agilent/Varian, Adixen/Alcatel, Pfeiffer <strong>PTB</strong> <strong>Sales</strong> Custom, Drytel, TSH/TSU, Turbo Dry<br />
Turbo Controllers Adixen, EBARA, Leybold, Seiko Seiki, Agilent/Varian CFF, CFV, ACT, ET, NT, SCU, V<br />
Power Generators<br />
Equipment Manufacturers Models<br />
DC Magnetron Advanced Energy, MKS ENI, Ametek-Sorensen MDX, Pinnacle, DCG, RPG, DCS, DCR, XTQ, DHP<br />
Ion Implant/Beam HiTek Power, Advanced Energy, Commonwealth MH, OL, ID, IBS<br />
RF Plasma Advanced Energy, MKS ENI, RFPP, Comdel RFG, RFX, OEM, Spectrum, LF, RF, CPS, CX<br />
E-Beam Advanced Energy, Telemark, Temescal ID, TT, CV, Guns<br />
Vacuum Systems & Spares<br />
Equipment Manufacturers Models<br />
Leak Detectors Agilent/Varian, Adixen/Alcatel, Edwards, Veeco VS, ASM, Spectron, MS<br />
Valves & Controllers Edwards, Oerlikon Leybold, MKS ENI, VAT Angle, Gate, Throttle, Transfer<br />
Vacuum & Deposition Gauges Granville-Phillips, Oerlikon Leybold, MKS ENI Cold cathode, Thermocouple T/C, Convection<br />
Deposition Rate Monitors Temescal, Oerlikon Leybold, Maxtek, Sycon FDC, IC, XMS, XTC, XTM. MDC, STM, STC<br />
Thin Film Systems Applied Materials, Brooks Automation, Electroglas AMAT Endura, MagnaTran, 2001X<br />
Chillers Schreiber Chillers 300, 500, 750, 1000, 1250, 5000<br />
Oils & Greases Inland Vacuum Fomblin, Galden, Halovac, Invoil
Repairs & Exchanges<br />
We are an independent service provider whose quality standards meet or exceed the OEMs in the area of<br />
repair. We are focused on providing full support for your product once it leaves its original warranty.<br />
Cryopump Rebuild Service<br />
• <strong>PTB</strong> <strong>Sales</strong> has a decade of cryopump rebuild service.<br />
• Is the only independent that can fully rebuild the CTI On-Board IS series of cryopump.<br />
• Our average cycle time is 5 days.<br />
• All sub assemblies are individually tested prior to final assembly.<br />
• Rebuilt over 2,200 units in the last three years.<br />
• 400 units in stock.<br />
Turbo Pump Rebuild Service<br />
• <strong>PTB</strong> <strong>Sales</strong> can exchange out 10 different manufacturers of turbo pumps.<br />
• Utilizes many qualified independent repair houses to meet your needs.<br />
• Rebuilt over 600 units in the last 3 years.<br />
• 500 units in stock.<br />
Vacuum Pump Rebuild service<br />
• <strong>PTB</strong> <strong>Sales</strong> will meet or exceed manufacturers’ specifications.<br />
• Has factory trained technicians for scroll pumps, dry and wet pumps.<br />
• Rebuilt over 3,000 units in the last 3 years.<br />
• 1,000 units in stock.<br />
Power Generator Repair Service<br />
• <strong>PTB</strong> <strong>Sales</strong> has 6 years of experience refurbishing power generators.<br />
• Repaired over 800 units in the last 3 years.<br />
• 1,500 units in stock.<br />
• Return material authorization numbers<br />
• Contamination declaration report
REPAIRS & EXCHANGES 04<br />
CRYOPUMP REBUILD SERVICE<br />
CRYO COMPRESSOR REBUILD SERVICE<br />
Cryopump Rebuild Service<br />
<strong>PTB</strong> <strong>Sales</strong> has become the industry leader in rebuilding cryopumps and cryo compressors. We back this claim by offering a up to one year parts and labor<br />
warranty (for most items), the longest standard warranty in the industry. Our OEM trained technicians rebuild cryopumps and compressors to meet or exceed<br />
the manufacturer’s specifications for performance. <strong>PTB</strong> <strong>Sales</strong> cryopump rebuilds are the most thorough in the industry. Our final test covers complete<br />
cycles as close to the production environment as possible.<br />
<strong>PTB</strong> <strong>Sales</strong> employs OEM trained operational and technical talent and provides equivalent quality and service levels associated with the OEM but at much<br />
more affordable pricing. We have the most robust BOM parts replacement in each rebuild, which is a full overhaul tested to OEM equipment specifications.<br />
Cryopump rebuild service includes:<br />
Vacuum Side<br />
Cryo Test<br />
• Replacement of charcoal array.<br />
• Replacement of all indium.<br />
• 80K array is given new nickel plating.<br />
• Parts are cleaned and baked out.<br />
• He leak checked to 1x10 -8 cc/s.<br />
• Pump is fully charged with 99.999% ultra pure helium.<br />
• Pump is tested over a 24 hour period.<br />
• Cryo is put through two full regens.<br />
• All electronics are tested on On-Board and IS cryopumps.<br />
• Pumps are tagged to reflect work done and test data.<br />
Helium Circuit<br />
• Replacement of all bearings on the pump and motor.<br />
• Replacement of all O-rings, valves, Teflon seals and springs.<br />
• Valve timing set for perfect seal.<br />
• 1 st and 2 nd stage displacers cleaned and baked out.<br />
Cryo Compressor Rebuild Service<br />
Cryo compressor rebuild service includes:<br />
• Replacement of valve plate, valves and adsorber (new).<br />
• Recharge with 99.999% ultra pure helium.<br />
• Clean and purge helium lines.<br />
• Leak check.<br />
• Replacement of marginal mechanical and electronic parts (extra charge, requires customer approval).
05<br />
REPAIRS & EXCHANGES<br />
CTI CRYO-TORR LINE<br />
CTI ON-BOARD LINE<br />
CTI ON-BOARD IS LINE<br />
CTI ON-BOARD WATERPUMPS<br />
CTI COMPRESSORS<br />
CTI Cryo-Torr Line<br />
CTI On-Board Line<br />
Model<br />
Warranty<br />
Model<br />
Warranty<br />
100 6 months<br />
7 6 months<br />
8 1 year<br />
8F<br />
1 year<br />
250F<br />
1 year<br />
10 1 year<br />
400 1 year<br />
500 6 months<br />
6 1 year<br />
8 1 year<br />
8F<br />
1 year<br />
10 1 year<br />
250 1 year<br />
P300<br />
1 year<br />
400 1 year<br />
CTI On-Board IS Line<br />
CTI Compressors<br />
Model<br />
Warranty<br />
Model<br />
Warranty<br />
IS-8<br />
IS-8F<br />
IS-250F<br />
IS-320FE<br />
CTI On-Board Waterpumps<br />
Model<br />
1 year<br />
1 year<br />
1 year<br />
1 year<br />
Warranty<br />
8200 1 year<br />
8300 1 year<br />
8500 1 year<br />
8510 1 year<br />
9600 1 year<br />
9700 1 year<br />
1020R<br />
1 year<br />
IS-1000<br />
1 year<br />
8F<br />
1 year<br />
10 1 year<br />
Visit www.ptbsales.com for rebuild and repair service,<br />
or call toll free 866-332-0500 option 1.
REPAIRS & EXCHANGES 06<br />
CRYOPUMP TESTING<br />
Cryopump Testing<br />
• Pump is fully charged with 99.999% ultra pure helium.<br />
• Pump is tested over a 24 hour period.<br />
• Cryo is put through two full regens.<br />
• All electronics are tested on On-Board and IS cryopumps.<br />
• Pumps are tagged to reflect work done and test data.
07<br />
REPAIRS & EXCHANGES<br />
TURBO PUMP REBUILD SERVICE<br />
Turbo Pump Rebuild Service<br />
<strong>PTB</strong> <strong>Sales</strong> does not rebuild turbo pumps or repair controllers organically; however, the company has successfully offered this service dating back to 2002.<br />
We have a robust network of partners who perform these rebuilds and repairs as well as an equally strong network of suppliers providing new equipment. In<br />
addition, our experience over the last decade gives us a thorough knowledge of which companies provide the best workmanship and quality on the different<br />
turbo pump types by OEM. The warranty period is up to twelve months on all rebuilds/repairs.<br />
Quality and reliability standards to comply with customers requirements:<br />
• All products delivered are free from defects in design, materials, workmanship and fabrication.<br />
• All services performed will be performed at OEM service levels and tested to OEM standards.<br />
• The rebuilt turbo pumps will conform fully to applicable specifications, drawings and other criteria specified by OEM and/or customer.<br />
Turbo pump rebuild service includes:<br />
• Diagnostic check of motor, electromagnets, sensors and memory prior to tear down.<br />
• Complete decontamination of internal and external parts.<br />
• Disposition of toxic material in accordance with environmental regulations.<br />
• Inspection of critical stress points on all major and minor components.<br />
• All stainless bolts, seals, and O-rings replaced with new.<br />
• Use of new OEM bearings.<br />
• A report of any replacement of parts required that are not included in a standard repair (i.e. broken blades, bent shaft, damaged rotor, etc).<br />
• Motor balancing to meet or exceed OEM specifications.<br />
• Vibration analysis.<br />
• Leak check.<br />
• Extended testing in customer specified orientation.<br />
• Pumps cleaned and polished for clean room application.<br />
• All labeled with instructions for safety and 100% startup.<br />
• Custom crating and packaging.<br />
• Complete failure analysis report upon request.<br />
We buy your excess vacuum related equipment.<br />
Visit www.ptbsales.com, or call toll free 866-332-0500 option 3.
REPAIRS & EXCHANGES 08<br />
TURBO CONTROLLER REPAIR SERVICE<br />
DRY SCROLL PUMP REBUILD SERVICE<br />
DRY PUMP REBUILD SERVICE<br />
Turbo Controller Repair Service<br />
Turbo controller repair service includes:<br />
• Run diagnostic check.<br />
• Repair and replace all bad components.<br />
• Repair trace and board damage.<br />
• Replace batteries.<br />
• Run test on subassemblies to ensure OEM specifications are met.<br />
• Test for tuning and levitation for magnetically levitated pump types.<br />
• Test under maximum load.<br />
• Tune and match to pump and cable set.<br />
• Test interface operation.<br />
Dry Scroll Pump Rebuild Service<br />
We rebuild the popular brands of dry scroll pumps. Dry scroll pump rebuilds come with up to a one year parts and labor warranty. All dry scroll pumps are<br />
completely torn down and inspected for OEM tolerances. Dry Scroll pump rebuild service includes:<br />
• All seals and tip seals are replaced, new.<br />
• All O-rings and gaskets are replaced, new.<br />
• All bearings are replaced, new.<br />
• Parts are cleaned and inspected to meet OEM specifications for proper clearances.<br />
• Pumps are tested overnight.<br />
• Pumps are painted and tagged with appropriate labels.<br />
Dry Pump Rebuild Service<br />
We rebuild the popular brands of dry pumps. Dry pump rebuilds come with up to a one year parts and labor warranty. All dry pumps are completely torn<br />
down and inspected for OEM tolerances. Dry pump rebuild service includes:<br />
• All seals and sleeves are replaced, new.<br />
• All O-rings and gaskets are replaced, new.<br />
• All bearings are replaced, new.<br />
• All claws and spacers are Teflon coated (for rotary lobe blowers).<br />
• Parts are cleaned and inspected to meet OEM specifications for proper clearances.<br />
• Pumps are tested overnight.<br />
• Pumps are painted and tagged with appropriate labels.<br />
• iQDP electronics are tested and the maintenance hours reset.
09<br />
REPAIRS & EXCHANGES<br />
DIFFUSION PUMP REBUILD SERVICE<br />
ION PUMP REBUILD SERVICE<br />
Diffusion Pump Rebuild Service<br />
We rebuild Agilent/Varian VHS, HS and NHS diffusion pumps. Diffusion pump rebuilds come with up to a one year parts and labor warranty. All diffusion<br />
pumps are completely torn down and inspected for OEM tolerances.<br />
Diffusion pump rebuild service includes:<br />
• Washing and bead blasting of the internal parts and body.<br />
• Waterflow check of the cooling lines after descaling and flushing.<br />
• Helium leak check of the body.<br />
• Heater elements are replaced with the customers specified voltage.<br />
• Thermal switch and plug are replaced.<br />
• Pump exterior is refinished.<br />
Ion Pump Rebuild Service<br />
We rebuild Agilent/Varian and Perkin-Elmer ion pumps. Ion pump rebuilds come with up to a one year parts and labor warranty. Service requires only the<br />
pump chamber and not the exterior magnets to be sent in to us.<br />
Ion pump rebuild service includes:<br />
• Remove, disassemble and clean the elements and pump.<br />
• Replace titanium and tantalum parts.<br />
• Reassemble, helium leak check, bake out and seal off pump.<br />
• Qualify with known ion pump controller.<br />
Visit www.ptbsales.com for rebuild and repair service,<br />
or call toll free 866-332-0500 option 1.
REPAIRS & EXCHANGES 10<br />
ROTARY LOBE BLOWER REBUILD SERVICE<br />
ROTARY PISTON PUMP REBUILD SERVICE<br />
Rotary Lobe Blower Rebuild Service<br />
We rebuild the popular brands of rotary lobe blowers (roots, boosters). Rotary lobe blower rebuilds come with up to a one year parts and labor warranty. All<br />
rotary lobe blowers are completely torn down and inspected for OEM tolerances.<br />
Rotary lobe blower rebuild service includes:<br />
• All bearings are replaced, new.<br />
• All seals are replaced, new.<br />
• All sleeves are replaced, new (Edwards only).<br />
• All O-rings are replaced, new.<br />
• Timing of gears is reset.<br />
• Impellers are shimmed for proper clearances.<br />
• Parts are cleaned and blower is painted and tagged with appropriate labels.<br />
Rotary Piston Pump Rebuild Service<br />
We rebuild the popular brands of rotary piston pumps. Rotary piston pump rebuilds come with up to a one year parts and labor warranty. All rotary piston<br />
pumps are completely torn down and inspected for OEM tolerances.<br />
Rotary piston pump rebuild service includes:<br />
• All seals are replaced, new.<br />
• All valves and valve springs replaced, new.<br />
• All O-rings and gaskets are replaced, new.<br />
• All bearings are replaced, new.<br />
• Parts are cleaned and inspected to meet OEM specifications for proper clearances.<br />
• Pumps are tested for 48 hours.<br />
• Pumps are painted and tagged with appropriate labels.<br />
• Stokes freeze plugs are replaced.<br />
We buy your excess vacuum related equipment.<br />
Visit www.ptbsales.com, or call toll free 866-332-0500 option 3.
11<br />
REPAIRS & EXCHANGES<br />
ROTARY VANE PUMP REBUILD SERVICE<br />
VALVE REBUILD SERVICE<br />
Rotary Vane Pump Rebuild Service<br />
• A decade of rebuilding experience.<br />
• Largest inventory of pumps and spare parts.<br />
• Factory trained technicians.<br />
• Midway point and end point quality inspection to root out sub-quality parts.<br />
Minor Rebuild Service<br />
In a minor rebuild the outer shaft seal, sleeve, O-rings and gaskets are replaced. However, the module is flushed with oil, but not rebuilt. This rebuild is less<br />
costly and may be appropriate depending on the condition of the pump.<br />
Most manufacturers recommend a minor rebuild every six months to extend the life of your pump (more often if there is process related buildup). A minor<br />
rebuild comes with a 90 day parts and labor warranty.<br />
Major Rebuild Service<br />
• Complete teardown.<br />
• Chrome oxide coating of worn shaft surfaces (increases life of seals).<br />
• Complete cleaning and degreasing of parts.<br />
• Replacement of marginal parts (extra charge, requires customer approval).<br />
• Use of only highest quality components.<br />
• Total replacement of seals, gaskets, valves, O-rings, springs and vanes.<br />
• Pump is tested overnight.<br />
• Painting and tagging to reflect work done and test data (base pressure, temperature, motor amps and time tested).<br />
The procedure for single and two stage oil sealed rotary vane pumps is the same.<br />
Valve Rebuild Service<br />
We rebuild the major name brand gate, angle and throttle valves: VAT, MKS, HVA and Edwards. Rebuilt valves are shipped boxed and strapped to a pallet<br />
with instapak foam, for heavy items.<br />
Valve rebuild service includes:<br />
• Replace seals.<br />
• Clean/replace bearings, clean to high vacuum specification.<br />
• Tune-up actuation alignment.<br />
• Leak test.
REPAIRS & EXCHANGES 12<br />
<br />
<br />
POWER GENERATOR REPAIR SERVICE<br />
EXCHANGE PROGRAM<br />
PICK-UP & DELIVERY SERVICES<br />
Power Generator Repair Service<br />
We repair the major name brand RF and DC power generators: Advanced Energy, Comdel, HiTek Power, MKS ENI and RFPP. Power generators are shipped<br />
boxed and strapped to a pallet with instapak foam, for heavy items. We have a dedicated power generator repair facility located in Irwindale, CA.<br />
• Largest inventory of spare parts for trouble shooting and repair.<br />
• Power generators are repaired tested and calibrated.<br />
• Thoroughly tested under load before shipping.<br />
• 90 day parts and labor warranty.<br />
• Test report included.<br />
Exchange Program<br />
Pick-Up & Delivery <strong>Services</strong><br />
<strong>PTB</strong> <strong>Sales</strong> offers an exchange program from our extensive inventory for<br />
those who do not wish to wait while their equipment is being refurbished.<br />
If we have an identical model in inventory, we will exchange it for a rebuildable<br />
core. Please call for pricing and pump/compressor availability.<br />
<strong>PTB</strong> <strong>Sales</strong> will pick up your used equipment, bring it back to OEM specification,<br />
and return it to your facility anywhere in Southern California. We<br />
cover an area ranging as far north as Santa Barbara and as far south as<br />
San Diego.
GreenChip SM <strong>Services</strong><br />
Expect the high quality, responsiveness, and attention to your needs that you would expect from a Blue<br />
Chip sized company, but with significantly better economic value, reducing your operating costs! Since<br />
we recognize each customer is different, <strong>PTB</strong>’s GreenChip SM Service Programs are highly customizable to<br />
fit the specific needs of your operating style and installed base.<br />
You can incorporate, to name just a few options:<br />
• Repair and exchange services across multiple product types.<br />
• Consignment inventory and logistics management.<br />
• On-site labor services and technical support.<br />
Our Goal: To take our “What YOU need, when YOU need it!” SM approach right into your site and to<br />
partner with you to deliver the same installed base services you could receive from an OEM, but at a<br />
much more affordable cost to you! <strong>PTB</strong> <strong>Sales</strong> uses the following approach to customize our GreenChip SM<br />
Service Programs to meet our customer’s needs:<br />
• We review with you the type of service option you need in the categories of repairs, consignment and<br />
technical support.<br />
• We evaluate the types of equipment needed for this service such as power generators and turbos<br />
• We assemble the service program that is right for you.<br />
Contact us to inquire as to how we can work with you today to set up the GreenChip SM Service Program<br />
that is right for you.<br />
Asset Management<br />
We buy your excess vacuum related equipment.<br />
Visit www.ptbsales.com,<br />
or call toll free 866-332-0500 option 3.
GREENCHIP SM SERVICES<br />
14<br />
GREENCHIP SM SERVICE MATRIX<br />
REPAIR & EXCHANGE SERVICES<br />
GreenChip SM Service Matrix<br />
Equipment Cryos Turbos Rough Pumps Power Generators Valves Compressors<br />
Refurbishment<br />
Repairs<br />
Exchanges<br />
Logistics<br />
Consignment<br />
Logistics Management<br />
E & O Disposition<br />
Remote Purchasing<br />
Labor<br />
On-Site Support<br />
Technical Support<br />
Installation & Removal<br />
Training<br />
Repair & Exchange <strong>Services</strong><br />
<strong>PTB</strong> <strong>Sales</strong> offers a customizable approach to structure our repair services into a GreenChip SM Service Program for our customers. We can provide these<br />
repair services on as needed basis or in periodic manner that evaluates the needs of your installed base size and specific configuration. Our approach is to<br />
offer our customers the flexibility and value they need to incorporate our repair services into their operating model. These repair programs can also include<br />
our logistics service to take advantage of our extensive inventory and maximize both your time and cost savings bringing our philosophy of “What YOU<br />
need, when YOU need it!” SM right into your site.<br />
Additionally, we can also structure exchange programs where the replacement components are either staged on-site with our customers, taking advantage<br />
of our logistics expertise or located at our facility and allocated specifically for you. We can combine the repairs and exchange approach and customize it<br />
for our customers as well in the event that some replacements are more critical than others. Our objective is to remove your concerns about down time or<br />
unavailable manufacturing capacity by applying our repair and exchange programs to protect you.
15<br />
GREENCHIP SM SERVICES<br />
CONSIGNMENT<br />
LOGISTICS MANAGEMENT<br />
EXCESS & OBSOLETE<br />
REMOTE PURCHASING<br />
Consignment<br />
We realize that in order to ensure our customers’ down time is as low as possible and has a minimum impact on productivity we can structure a managed<br />
pool of inventory consigned at your location to minimize the impact to your operating model. This can be seeded with both customer material, <strong>PTB</strong> stocked<br />
material as well as items from other suppliers and we offer to manage this jointly with our customers to ensure that there is complete alignment on balance<br />
levels to protect your manufacturing operations. We take our “What YOU need, when YOU need it!” SM approach right into your site!<br />
Logistics Management<br />
In addition to our consignment services we offer logistics service integration, one key example is our turbomolecular pump support offering. As there are<br />
many manufacturers and models, <strong>PTB</strong> <strong>Sales</strong> recognizes as well as it’s customers do that serving the turbo pump support needs across an installed base<br />
can be very challenging and require the customer to source material from multiple suppliers. <strong>PTB</strong> <strong>Sales</strong> has developed a proprietary database over the<br />
years that removes the questions and quality variance. We know which suppliers provide the most reliable and best priced repairs and refurbishment for<br />
turbos in North America. With this knowledge we are able to integrate their services and deliver to you seamless support from one vendor to meet your<br />
repair and spares needs. If there is a consignment aspect to the service program, one of the value added services we can offer, is the management of the<br />
on site consignment. This becomes especially beneficial to a customer if we are providing services across more than just one type of equipment.<br />
Excess & Obsolete<br />
<strong>PTB</strong> <strong>Sales</strong> has served multiple manufacturing industries in North America for almost two decades and we understand that companies frequently have<br />
needs to dispose of excess and obsolete equipment. Most companies seek the services of a scrapper to do this. For our equipment partners we offer a<br />
much more useful program whereby <strong>PTB</strong> <strong>Sales</strong> will manage the disposition of your E & O on a quarterly basis. Because of our core competency in material<br />
acquisition, reconditioning and disposition, we have a much broader view of the marketplace and where material may be needed by other companies. This<br />
not only allows you a more consistent outlet for E & O equipment and parts but also allows the partner to achieve a better economic return.<br />
Remote Purchasing<br />
<strong>PTB</strong> <strong>Sales</strong> knows where to get the components, spares and repairs you need. Typically offered to our international customers we can organize a program for<br />
you where you provide us with the equipment, conditioning specs, pricing threshold and volume you need on a periodic basis. We source the material for<br />
you and can combine this with our other logistics or support programs to reduce your supplier base and save you both time and money.
GREENCHIP SM SERVICES<br />
16<br />
ON-SITE SUPPORT<br />
TECHNICAL SUPPORT<br />
EQUIPMENT INSTALLATION & REMOVAL<br />
TRAINING<br />
PREVENTIVE MAINTENANCE<br />
On-Site Support<br />
<strong>PTB</strong> <strong>Sales</strong> Service Engineer conducts routine periodic on-site visits to check status of existing installed base products covered under the program with the<br />
customer. The frequency and scope of the visits are determined by the scope of work and adjustable as the customer sees fit.<br />
Technical Support<br />
<strong>PTB</strong> <strong>Sales</strong> Service Engineer serves as the first point of contact for troubleshooting/technical support of the supported installed base equipment. This can be<br />
performed at the customer site or remotely.<br />
Equipment Installation & Removal<br />
<strong>PTB</strong> <strong>Sales</strong> Service Engineer coordinates with customer maintenance team to schedule removal, exchange and installation of new components as defined<br />
in the scope of work and the contract can be structured as well for the <strong>PTB</strong> <strong>Sales</strong> Service Engineer to do the removal, installation as well as logistics and<br />
shipping coordination.<br />
Training<br />
<strong>PTB</strong> <strong>Sales</strong> offers technical training for cryogenic vacuum pumps and systems. This training can be performed on-site for multiple days as a separate and<br />
distinct event and can also be performed as part of an ongoing service program with multiple training sessions spread throughout the term of the contract.<br />
Preventative Maintenance Management<br />
This is our premier Labor service and encompasses part or all of the items mentioned above. <strong>PTB</strong> <strong>Sales</strong> Service Engineer provides a monthly status report<br />
to the customer on the installed base equipment condition. This report identifies equipment recommended for PM, itemizes the installations and repairs<br />
that have been conducted during the period. The report also details all tech support diagnostics escalations that have occurred during the month.
17<br />
GREENCHIP SM SERVICES<br />
CASE STUDY 1<br />
Case Study 1<br />
Existing cryopump and compressor repair customer was experiencing an increase in production volume and needed a solution that went beyond transactional<br />
repair of their core units. This problem affected three different fab locations and was causing them unwanted down time in repair cycle time and the<br />
added expense of buying more spare units from the OEM was not attractive. <strong>PTB</strong> <strong>Sales</strong> assessed the needs of this customer and proposed a GreenChip SM<br />
Program that would minimize their time loss and remove their need to expend valuable funds to purchase spares. We implemented a multi-site consignment<br />
and logistics management program where <strong>PTB</strong> <strong>Sales</strong> manages the entire cryopump repair loop for the installed base at all three sites. In this program<br />
we rapidly filled their minimum stocking levels and also added significant material beyond this as a safety buffer. As a result the customer’s unscheduled<br />
downtime was dramatically reduced as pumps were consistently on hand per the required stocking level. Additionally, the management of Preventative<br />
Maintenance cycles was greatly improved because of <strong>PTB</strong>’s industry leading
GREENCHIP SM SERVICES 18<br />
CASE STUDY 2<br />
Case Study 2<br />
International customer was experiencing loss of sales to competitors for refurbished equipment sales due to sourcing time and shipping time from multiple<br />
suppliers of cores and refurbished equipment. This customer was certain they could outperform competition if they could overcome these delays. <strong>PTB</strong><br />
<strong>Sales</strong> worked closely with the customer to understand the market needs they had for both cryogenic vacuum pumps and associated compressors and<br />
power supplies. In the past the customer had sourced from <strong>PTB</strong> <strong>Sales</strong> as well as other providers and there was both quality and delivery variance as a<br />
result. We established an advanced exchange and consignment program with this customer that allows them to forecast their future demand with one<br />
supplier and have the needed equipment staged and ready to serve the end user customer. As a result of this program, within just a couple of months the<br />
customer was able to double the previous years sales on equipment supported by <strong>PTB</strong> <strong>Sales</strong> as part of this program.<br />
Equipment Cryos Turbos Rough Pumps Power Generators Valves Compressors<br />
Refurbishment<br />
X<br />
X<br />
X<br />
Repairs<br />
X<br />
Exchanges<br />
Logistics<br />
Consignment<br />
X<br />
X<br />
X<br />
Logistics Management<br />
E & O Disposition<br />
Remote Purchasing<br />
X<br />
X<br />
Labor<br />
On-Site Support<br />
Technical Support<br />
Installation & Removal<br />
Training<br />
We buy your excess vacuum related equipment.<br />
Visit www.ptbsales.com or call toll free 866-332-0500 option 3.
Refurbished Equipment<br />
Cryopumps<br />
Cryogenic pumps are the most widely used high vacuum pumps in PVD processes. This is due to high<br />
pumping speed, dry operation and low maintenance requirements. Cryopumps work by cooling internal<br />
arrays down to cryogenic temperatures. The first stage array is cooled to approximately 77° Kelvin,<br />
condensing the water vapor and nitrogen while the other, colder array, cooled to approximately 15° Kelvin<br />
and coated with activated carbon, condenses and adsorbs the other gases. When the activated carbon<br />
reaches saturation, the pump needs to be regenerated. This cycle typically takes three hours. Regen<br />
times vary depending on the type of pump and if it has a heated purge. (Note: CTI On-Board/IS pumps<br />
have the shortest regen cycle).<br />
Cryopumps are considered hearty because they are not as susceptible to damage caused by<br />
overpressure or accidental venting of the pump to atmosphere. All that normally happens when the<br />
pressure gets too high is that the pump warms, temporarily losing its ability to pump and goes into<br />
regeneration. Cryopumps do not pump helium well and do create vibrations that may interfere with some<br />
experiments. 3 phase low vibration cryopumps are available when vibration is an issue. Cryopumps have<br />
become the pumps of choice for the semiconductor and aerospace industries.<br />
<strong>PTB</strong> <strong>Sales</strong> has the largest inventory of remanufactured cryopumps and compressors in the US.<br />
Cryopumps and compressors come with up to a one year parts and labor warranty. <strong>PTB</strong> <strong>Sales</strong> rebuilds<br />
are exclusively remanufactured in-house. <strong>PTB</strong> <strong>Sales</strong> has the most compressive rebuilding procedures of<br />
any third party rebuilder. All of our rebuilds meet or exceed OEM specifications. Please refer to our cryo<br />
rebuilding section in this catalog (page 4) for information on the rebuilding and testing procedures.<br />
• Flange type and orientation<br />
• Single or three phase power<br />
• Standard or enhanced arrays<br />
• Software version – system interface<br />
• Maintenance logging of hours run – temperature readings
CRYOPUMPS<br />
20<br />
CTI CRYO-TORR LINE<br />
CTI ON-BOARD LINE<br />
CTI ON-BOARD IS LINE<br />
CTI ON-BOARD WATERPUMPS<br />
HELIUM LINES & DRIVE CABLES<br />
CTI Cryo-Torr Line<br />
CTI On-Board Line<br />
Model Inlet Flange Air Pumping Speed<br />
Model Inlet Flange Air Pumping Speed<br />
100 6” CF, ISO-100 350 l/s<br />
7 10” CF, 6” ASA 1,000 l/s<br />
8 10” CF, 6” ASA, ISO-200 1,500 l/s<br />
8F 10” CF, 6” ASA, ISO-200 1,500 l/s<br />
250F 12” CF, ISO-250 2,000 l/s<br />
10 14” CF, 10” ASA, ISO-320 3,000 l/s<br />
400 16” CVC, 16” ASA, ISO-400 6,000 l/s<br />
500 20” ASA, ISO-500 10,000 l/s<br />
4, 4F 6” CF, ISO-100 370 l/s<br />
8, 8F 10” CF, 6” ASA, ISO-200 1,500 l/s<br />
8F Enhanced 10” CF, 6” ASA, ISO-200 1,500 l/s<br />
250F 12” CF, ISO-250 2,000 l/s<br />
10 14” CF, 10” ASA, ISO-320 3,000l/s<br />
10F 14” CF, 10” ASA, ISO-320 3,000 l/s<br />
400 16” CVC, 16” ASA, ISO-400 6,000 l/s<br />
P300 10” CF, ISO-200 2,000 l/s<br />
CTI On-Board IS Line<br />
CTI On-Board Line<br />
Model Inlet Flange Air Pumping Speed<br />
IS-8, 8F 10” CF 1,500 l/s<br />
IS-250F ISO-250 2,200 l/s<br />
IS-320FE ISO-320 3,300 l/s<br />
Temperature Monitors<br />
Temperature Monitor Cables<br />
Splitter Boxes<br />
On-Board Keypad Displays<br />
On-Board Network<br />
Note: Please specify software revision for the model number for all<br />
network models<br />
CTI On-Board Waterpumps<br />
Helium Lines & Drive Cables - NEW<br />
Model Inlet Flange Water Pumping Speed<br />
4” WP 6” CF, ISO-100 1,100 l/s<br />
6” WP 8” CF, ISO-160 2,500 l/s<br />
8” WP 10” CF, ISO-200 4,000 l/s<br />
10” WP 12” CF, ISO-250 7,000 l/s<br />
16” WP 10” ASA 16,000 l/s<br />
<strong>PTB</strong> <strong>Sales</strong> sells new helium lines and drive cables. Standard lines are<br />
sold in 10 foot lengths. <strong>PTB</strong> <strong>Sales</strong> will build custom lines to fit your individual<br />
needs upon request.<br />
Helium Line (Standard 10 ft /$10 per additional ft)<br />
Drive Cable (Standard 10 ft /$1 per additional ft)<br />
Helium Manifold (2 port)<br />
Helium Manifold (3 port)<br />
Note: Inline or apendage configurations available<br />
Call for more information on in situ pump flanges & pumping speeds
Cryo Compressors & Arrays<br />
Cryo compressors are necessary for cryopumps to function. They supply compressed room temperature<br />
helium to the cryopump where it is expanded to complete the refrigeration cycle. Helium compressors<br />
can supply enough compressed helium for one or multiple cryopumps, depending on the compressor or<br />
cryopump used. <strong>PTB</strong> <strong>Sales</strong> sells reconditioned compressors that have been rebuilt and recharged with<br />
new 99.999% ultra pure helium. These compressors will meet manufactures’ specifications for helium<br />
flow and performance.<br />
Arrays are the parts of the cryopump that do the work in creating high vacuum. <strong>PTB</strong> <strong>Sales</strong> sells<br />
new charcoal and condensing arrays that meet manufactures’ specifications for appearance and<br />
performance. Replacement arrays are easily changed out and may improve performance in cryopump<br />
temperature, ultimate pressure and capacity.<br />
Cryo compressor rebuild service includes:<br />
• Replacement of valve plate, valves and adsorber (new).<br />
• Recharge with 99.999% ultra pure helium.<br />
• Clean and purge helium lines.<br />
• Leak check.<br />
• Replacement of marginal mechanical and electronic parts (extra charge, requires customer approval).<br />
• Air or water cooled<br />
• Single or three phase power<br />
• Single or multiple pump capacity<br />
• Control of On-Board or IS pumps
CRYO COMPRESSORS & ARRAYS<br />
22<br />
CTI COMPRESSORS<br />
CTI 15K CHARCOAL ARRAYS<br />
CTI 80K CONDENSING ARRAYS<br />
CTI Compressors<br />
Model Cooling Type Compressor Capacity Cooling Type (No. of cryos and models)<br />
1020R Air or Water 1 Cryo-Torr series pump (10, 400, 500) or up to<br />
3 Cryo-Torr series pumps (100, 7, 8, 8F)<br />
8200 Air or Water 1 On-Board/Cryo-Torr series pump (100, 7, 8, 8F)<br />
8300 Water 1 On-Board/Cryo-Torr series pump (100, 7, 8, 8F)<br />
8500 Water 1 Cryo-Torr series pump (10, 400, 500) or up to<br />
3 Cryo-Torr series pumps (100, 7, 8, 8F)<br />
8510 Water 1 On-Board/Cryo-Torr series pump (10, 400, 500) or up to<br />
3 On-Board/Cryo-Torr series pumps (4F, 8, 8F, 250F)<br />
9600* Water 1 On-Board/Cryo-Torr series pump (10, 400, 500)<br />
or up to 3 On-Board/Cryo-Torr series pumps (4F, 7, 8, 8F, 250F)<br />
9700* Water Ideal for multiple On-Board or Cryo-Torr cryopumps<br />
IS-1000* Water IS series On-Board pumps<br />
* Capable of running 3 phase motors.<br />
CTI 15K Charcoal Arrays<br />
CTI 80K Condensing Arrays<br />
Model <strong>PTB</strong> <strong>Sales</strong> Part #<br />
Model <strong>PTB</strong> <strong>Sales</strong> Part #<br />
CT/OB-8<br />
00815K<strong>PTB</strong><br />
CT/OB-8<br />
00880K<strong>PTB</strong><br />
CT-8F<br />
CT8F15K<strong>PTB</strong><br />
CT-8F<br />
CT8F80K<strong>PTB</strong><br />
OB-8F<br />
OB8F15K<strong>PTB</strong><br />
OB-8F<br />
OB8F80K<strong>PTB</strong><br />
CT-250F<br />
CT250F15K<strong>PTB</strong><br />
CT-250F<br />
CT250F80K<strong>PTB</strong><br />
OB-250F<br />
OB250F15K<strong>PTB</strong><br />
OB-250F<br />
OB250F80K<strong>PTB</strong><br />
OB-8F Enhanced<br />
OB8FE15K<strong>PTB</strong><br />
OB-8F Enhanced<br />
OB8FE80K<strong>PTB</strong><br />
CT/OB-10<br />
001015K<strong>PTB</strong><br />
CT/OB-10<br />
001080K<strong>PTB</strong><br />
CT/OB-400 Inner<br />
0040015IN<strong>PTB</strong><br />
CT/OB-400<br />
0040080K<strong>PTB</strong><br />
CT/OB-400 Outer<br />
00400150T<strong>PTB</strong><br />
Array models include 15K condensing top, except for the CT/OB-400s
Polycold Cryogenerators<br />
The Polycold water vapor cryogenerator effectively captures water vapor, which comprises 65% to 95% of<br />
the residual gas in high-vacuum systems. Water vapor is typically the most reactive contaminant present.<br />
The advantages of cryogenerators are:<br />
• -100°C to -150°C coil temperature.<br />
• Fast start, fast defrost (PFC only).<br />
• High-vacuum pumpdown time cut by 25% to 75%.<br />
• High-speed pumping of water vapor: 10,000 to 200,000 l/s in the workspace.<br />
• Increased product throughput of 20% to 100%.<br />
• Typical payback time is less than 1 year.<br />
• Lower water vapor partial pressure during processing for higher quality, better adhesion and more<br />
reproducible deposition.<br />
<strong>PTB</strong> <strong>Sales</strong> sells used Polycold cryogenerators rebuilt. These units come with up to a 120 day parts and<br />
labor warranty and are guaranteed to meet all factory performance specs. Call us to see if a Polycold will<br />
work for your application.<br />
• Fast defrost<br />
• Power line voltage<br />
• Capacity
POLYCOLD CRYOGENERATORS<br />
24<br />
PFC<br />
PFC REFRIGERANT CHARGES<br />
PFC<br />
Model<br />
Description<br />
PFC-100<br />
100 watt maximum load, 14,900 l/s max. pumping speed, 5x10 -8 Torr ultimate operating pressure, 4 minute defrost time, air<br />
cooled condenser and 1ø power.<br />
PFC-550<br />
1,000 watt maximum load, 74,500 l/s max pumping speed, 6x10 -10 Torr ultimate operating pressure, 4 minute defrost time,<br />
requires water for cooling condenser and 3ø power.<br />
PFC-660<br />
1,500 watt maximum load, 104,300 l/s max. pumping speed, 6x10 -10 Torr ultimate operating pressure, 4 minute defrost time,<br />
requires water for cooling condenser and 3ø power.<br />
PFC-1100<br />
1,500 watt maximum load, 149,000 l/s max. pumping speed, 5x10 -9 Torr ultimate operating pressure, 4 minute defrost time,<br />
requires water for cooling condenser and 3ø power.<br />
PFC-1103<br />
1,500 watt maximum load, 149,000 l/s max. pumping speed, 5x10 -9 Torr ultimate operating pressure, 4 minute<br />
defrost time, requires water for cooling condenser and 3ø power.<br />
PFC Refrigerant Charges<br />
P-20<br />
P-75<br />
PGC-100<br />
PFC-100<br />
P-100<br />
PGC-150<br />
PFC, P-200A<br />
PFC, P-200<br />
PCT-200A<br />
PCT-200<br />
PFC, P-200HC<br />
PFC, P-200AHC<br />
PFC-330, 340ST<br />
PFC, P-400LT<br />
PFC, P-400ST<br />
PFC, P-500 & 550ST<br />
PCT-500 & 550<br />
PFC, P-500 & 550HC<br />
PFC, P-550LT<br />
PFC, P-650ST<br />
PFC, P-650TUV & 660ST<br />
PCT-650<br />
PCT-660<br />
PFC, P-650HT/HC<br />
PFC, P-650TUV & 660, 670HC<br />
PFC-1000 & 1100ST<br />
PFC-1000 & 1100HT<br />
PFC-1000 & 1100LT<br />
PFC-1100HC
Dry Pumps<br />
We have a robust stock of EBARA, Edwards iH, IPX, iQ and scroll, ANEST IWATA ISP and Agilent/Varian<br />
scroll pumps. We also have limited quantity of Adixen/Alcatel and Oerlikon Leybold DryVac pumps.<br />
Dry lobe pumps or hook and claw pumps are essentially multi-stage rotary lobe pumps that utilize<br />
elaborate techniques to isolate the oil-lubricated gears from the pumping surfaces. These pumps are<br />
ideal for “dry” applications that require higher pumping speed and throughput. Dry lobe and hook and<br />
claw pumps have pumping speeds up to 200 cfm and reach ultimate pressures of up to 5x10 -4 Torr.<br />
Dry lobe and hook and claw pumps work well when used in conjunction with rotary lobe pumps. These<br />
pumps are normally sold prepared for corrosive and oxygen service.<br />
Dry diaphragm pumps are used for small scale vacuum applications where there is a need for<br />
contamination free “dry” vacuum. Dry diaphragm pumps use the suction of a membrane, which is<br />
elastically distorted to move the gas from the inlet to another diaphragm stage or the exhaust. There is<br />
no oil used anywhere on the vacuum side. Dry diaphragm pumps can reach a pressure of 1x10 -1 Torr at<br />
pumping speeds of up to 4 cfm. Dry diaphragm pumps work well in conjunction with molecular drag and<br />
turbo drag hybrid high vacuum pumps. Dry pump rebuild service includes:<br />
• All seals and sleeves are replaced, new.<br />
• All O-rings and gaskets are replaced, new.<br />
• All bearings are replaced, new.<br />
• All claws and spacers are Teflon coated (for rotary lobe blowers).<br />
• Parts are cleaned and inspected to meet OEM specifications for proper clearances.<br />
• Pumps are tested overnight.<br />
• Pumps are painted and tagged with appropriate labels.<br />
• iQDP electronics are tested and the maintenance hours reset.<br />
• Line voltage and phase<br />
• Ultimate pressure<br />
• Pumping speed<br />
• Water or air cooled
DRY PUMPS<br />
26<br />
ADIXEN/ALCATEL<br />
EBARA<br />
EDWARDS<br />
DRY PUMP & BLOWER PACKAGES<br />
Adixen/Alcatel<br />
Edwards<br />
Model Inlet Flange CFM<br />
Model Inlet Flange CFM<br />
ACP-15 KF-25 8.2<br />
ACP-28 KF-25 16<br />
ACP-40 KF-40 22<br />
ACP-120/G KF-50 66<br />
IPUP-A100L KF-50 55.8<br />
EBARA<br />
Model Inlet Flange CFM<br />
50x20 N/A 8.8<br />
80x25 N/A 17.6<br />
A70 N/A 17.6<br />
A07/V/V-B KF-40 29<br />
A10S KF-40 42<br />
A25S KF-40 106<br />
A30W KF-50 127<br />
A70W KF-50 297<br />
A150W KF-100 636<br />
AAL10 KF-40 46<br />
AA10/H/N-H KF-40 46<br />
AA20/H/N-H KF-40 71<br />
AA30/H/N-H KF-50 106<br />
AA40/W/N-H KF-50 148<br />
AA70/W/N-H KF-50 247<br />
AA100/W/-H ISO-100 353<br />
AA200/W ISO-100 636<br />
AA10S/N KF-40 46<br />
AA20S/ N KF-40 71<br />
AA40SWN KF-50 148<br />
AA70SWN KF-50 247<br />
AA100SWN ISO-100 353<br />
AAS200WN ISO-100 636<br />
DP-40 KF-40/63 8.8<br />
QDP-40 KF-40/63 17.6<br />
iQDP-40 KF-40/63 17.6<br />
DP-80 KF-40/63 8.8<br />
QDP-80 KF-40/63 8.8<br />
iQDP-80 KF-40/63 8<br />
EPX-180/L/NE ISO-63 105<br />
EPX-500/L/NE ISO-160 295<br />
GV-80 NW-40 57<br />
GV-160 ISO-63 106<br />
GV-250 ISO-100 186<br />
GV-400 ISO-100 252<br />
GV-600 ISO-100 318<br />
IPUP-E100/L KF-40 59<br />
IPX-100/A KF-40 59<br />
IPX-180/A ISO-63 106<br />
IPX-500/A ISO-160 295<br />
iH-80 ISO-63 61<br />
iH-600 ISO-100 353<br />
iH-1000 ISO-100 589<br />
iH-1800 ISO-160 1,061<br />
iH-160 ISO-63 97<br />
iF-1800 ISO-160 1,060<br />
L-70 ISO-63 49<br />
iL/N-70 ISO-63 49<br />
iL/N-600 ISO-100 353<br />
Dry Pump & Blower Packages<br />
Most pumps and blowers are rebuilt and prepped for hydrocarbon fluid<br />
use. Please call for pricing of “as-is” pumps and blowers and PFPE<br />
prepped rebuilds.
Dry Scroll Pumps<br />
Dry scroll pumps are used for small-scale vacuum applications where there is a need for contamination<br />
free “dry” vacuum. Dry scroll pumps use a tight tolerance, rotating scroll to squeeze gas from the inlet<br />
to another stage or an exhaust. There is absolutely no oil used anywhere in this pump. Dry scroll pumps<br />
can reach a pressure of 7x10 -3 Torr at a pumping speed of up to 20 cfm. Dry scroll pumps can be used<br />
for corrosive and oxygen service. Dry scroll pumps are not recommended for applications where a lot of<br />
water vapor is pumped.<br />
The scroll pump is unique in design from other dry pumps so <strong>PTB</strong> <strong>Sales</strong> has developed independent<br />
procedures with these pumps to insure that our refurbishment meets or excedes OEM specifications.<br />
• Factory specified tooling for precise alignment.<br />
• Factory training for proper refurbishment techniques.<br />
• OEM consumable parts are used in reassembly.<br />
• PFPE grease for bearings insures no hydrocarbon contamination.<br />
• Pumps are run overnight and cleaned and re-greased as part of the re-break-in period.<br />
• The ultimate pressure is re-tested and adjustments made.<br />
• Type of oil<br />
• Line voltage and phase<br />
• Ultimate pressure<br />
• Pumping speed<br />
• Water or air cooled<br />
• Belt driven or direct drive
DRY SCROLL PUMPS 28<br />
AGILENT/VARIAN<br />
ANEST IWATA<br />
EDWARDS<br />
OERLIKON LEYBOLD<br />
Agilent/Varian<br />
Model Inlet Flange CFM<br />
DS-300 KF-25 8.8<br />
DS-600 KF-40 17.6<br />
PTS-300 KF-25 8.8<br />
PTS-600 KF-40 17.7<br />
SH-100 KF-25 3.5<br />
SH-110 KF-25 4<br />
ANEST IWATA<br />
Model Inlet Flange CFM<br />
ISP-250B KF-25 8.8<br />
ISP-500B KF-40 17.6<br />
Edwards<br />
Model Inlet Flange CFM<br />
ESDP-12 KF-25 8.8<br />
ESDP-30/GVSP KF-40 17.6<br />
XDS-5/C KF-25 3.5<br />
XDS-10/C KF-25 6.5<br />
XDS-35i KF-40 21<br />
Oerlikon Leybold<br />
Model Inlet Flange CFM<br />
SC-5D KF-25 3.8<br />
SC-15D KF-25 10.6<br />
SC-30D KF-40 21.2<br />
SC-60D KF-40 42.4
Rotary Vane Pumps<br />
Rotary vane pumps are used for most basic vacuum applications that require high pumping speeds<br />
and throughput. Rotary vane pumps use an eccentrically mounted rotor to sweep the gas through an<br />
ever-decreasing volume to either another stage or an exhaust. Oil is used as both the lubricant and the<br />
sealant. Pumping speeds for a rotary vane pump range from .5 cfm to 300 cfm and the pumps can<br />
reach as low as 1x10 -4 Torr. Rotary vane pumps can be prepared for corrosive and oxygen service.<br />
We have been selling and servicing rotary vane and piston vacuum pumps for a decade to build<br />
our reputation for reasonable lead times and costs for the highest quality rebuilt pump. This is done<br />
with factory trained technicians utilizing the proper tools and our own time tested quality standards:<br />
manufacturers’ specifications are met during inspection, assembly and test.<br />
Major Rebuild Service<br />
• Complete teardown.<br />
• Chrome oxide coating of worn shaft surfaces (increases life of seals).<br />
• Complete cleaning and degreasing of parts.<br />
• Replacement of marginal parts (extra charge, requires customer approval).<br />
• Use of only highest quality components.<br />
• Total replacement of seals, gaskets, valves, O-rings, springs and vanes.<br />
• Pump is tested overnight.<br />
• Painting and tagging to reflect work done and test data (base pressure, temperature, motor amps and<br />
time tested).<br />
The procedure for single and two stage oil sealed rotary vane pumps is the same.<br />
• Type of oil<br />
• Line voltage and phase<br />
• Ultimate pressure<br />
• Pumping speed<br />
• Belt driven or direct drive
ROTARY VANE PUMPS 30<br />
ADIXEN/ALCATEL<br />
EDWARDS<br />
Adixen/Alcatel<br />
Model Type Stage CFM<br />
2002A Direct drive 2 2<br />
2004A Direct drive 2 3.2<br />
2008A Direct drive 2 7<br />
2008AC Direct drive 2 7<br />
2010SD Direct drive 2 7<br />
2012AC Direct drive 2 11<br />
2020A Direct drive 2 16<br />
2021 Direct drive 2 14.6<br />
2030 Direct drive 2 17.7<br />
2033 Direct drive 2 27<br />
2033C Direct drive 2 27<br />
2060C Direct drive 2 35<br />
2063A Direct drive 2 50<br />
2063C Direct drive 2 50<br />
2100A Direct drive 2 90<br />
Edwards<br />
Model Type Stage CFM<br />
E2M1.5 Direct drive 2 1.3<br />
E1M8 Direct drive 1 15<br />
E2M8 Direct drive 2 6.7<br />
E1M18 Direct drive 1 14.7<br />
E2M18 Direct drive 2 14.7<br />
E2M30 Direct drive 2 23<br />
E2M40 Direct drive 2 30<br />
E2M80 Direct drive 2 57<br />
E2M175 Direct drive 2 125<br />
E2M275 Direct drive 2 210<br />
RV3 Direct drive 2 2<br />
RV5 Direct drive 2 4<br />
RV8 Direct drive 2 7<br />
RV12 Direct drive 2 10
31<br />
ROTARY VANE PUMPS<br />
OERLIKON LEYBOLD<br />
Oerlikon Leybold<br />
Model Type Stage CFM<br />
D2A Direct drive 2 2.2<br />
D4A Direct drive 2 4.5<br />
D4B Direct drive 2 4.5<br />
D8A Direct drive 2 7<br />
D8B Direct drive 2 7<br />
D10E Direct drive 2 9.3<br />
D16A Direct drive 2 14.1<br />
D16B Direct drive 2 14.1<br />
D16BCS Direct drive 2 14.1<br />
TI16B Direct drive 2 14.1<br />
D25B Direct drive 2 20.9<br />
D25BCS Direct drive 2 20.9<br />
TI25B Direct drive 2 20.9<br />
D30A Direct drive 2 20.9<br />
D40B Direct drive 2 32.5<br />
D40BCS Direct drive 2 32.5<br />
TI40B Direct drive 2 32.5<br />
D60A Direct drive 2 36.7<br />
D65B Direct drive 2 36.7<br />
D65BCS Direct drive 2 53<br />
D90A Direct drive 2 55<br />
SV16 Direct drive 1 11<br />
SV25B Direct drive 1 18<br />
SV40 Direct drive 1 28<br />
SV40B Direct drive 1 28<br />
SV40BI Direct drive 1 28<br />
SV65 Direct drive 1 36<br />
SV100 Direct drive 1 54<br />
SV160 Direct drive 1 100<br />
SV200 Direct drive 1 127<br />
SV250 Direct drive 1 150<br />
SV300 Direct drive 1 200<br />
SV400 Direct drive 1 300<br />
SV630 Direct drive 1 495<br />
SV630F Direct drive 1 495
ROTARY VANE PUMPS<br />
32<br />
AGILENT/VARIAN<br />
WELCH<br />
Agilent/Varian<br />
Model Type Stage CFM<br />
DS-102 Direct drive 2 3.5<br />
DS-302 Direct drive 2 8.2<br />
DS-602 Direct drive 2 18.3<br />
DS-1002 Direct drive 2 31<br />
SD-40 Direct drive 2 1.2<br />
SD-90 Direct drive 2 3.2<br />
SD-91 Direct drive 2 4<br />
SD-200 Direct drive 2 7<br />
SD-201 Direct drive 2 6.8<br />
SD-300 Direct drive 2 11<br />
SD-450 Direct drive 2 16<br />
SD-451 Direct drive 2 17<br />
SD-700 Direct drive 2 27<br />
SD-1400 Direct drive 2 50<br />
SD-2500 Direct drive 2 85<br />
Welch<br />
Model Type Stage CFM<br />
1374 Belt drive 2 23<br />
1375 Belt drive 2 35.4<br />
1376 Belt drive 2 10.6<br />
1380 Belt drive 2 5.6<br />
1395 Belt drive 2 71<br />
1396 Belt drive 2 99.1<br />
1397 Belt drive 2 17.7<br />
1398 Belt drive 2 53.1<br />
1400 Belt drive 2 0.9<br />
1402 Belt drive 2 5.6<br />
1403 Belt drive 2 3.5<br />
1404 Belt drive 2 1.2<br />
1405 Belt drive 2 2.1<br />
1410 Belt drive 2 0.8
Rotary Piston Pumps<br />
Rotary piston pumps are used for most large-scale vacuum applications. Rotary piston pumps have a<br />
sliding sleeve through which the gas enters. The gas is then drawn into a cylindrical chamber and then<br />
squeezed out through an exhaust by a rocking piston plunger. These pumps are very hardy and have<br />
pumping speeds that range from 15 cfm to 2,000 cfm and the pumps can reach a pressure of 1x10 -4<br />
Torr. Rotary piston pumps can be prepared for corrosive and oxygen service.<br />
We have been selling and servicing rotary vane and piston vacuum pumps for a decade to build<br />
our reputation for reasonable lead times and costs for the highest quality rebuilt pump. This is done<br />
with factory trained technicians utilizing the proper tools and our own time tested quality standards:<br />
manufacturers’ specifications are met during inspection, assembly and test.<br />
We rebuild the popular brands of rotary piston pumps. Rotary piston pump rebuilds come with up to a<br />
one year parts and labor warranty. All rotary piston pumps are completely torn down and inspected for<br />
OEM tolerances. Rotary piston pump rebuild service includes:<br />
• All seals are replaced, new.<br />
• All valves and valve springs replaced, new.<br />
• All O-rings and gaskets are replaced, new.<br />
• All bearings are replaced, new.<br />
• Parts are cleaned and inspected to meet OEM specifications for proper clearances.<br />
• Pumps are tested overnight.<br />
• Pumps are painted and tagged with appropriate labels.<br />
• Stokes freeze plugs are replaced.<br />
• Type of oil<br />
• Line voltage and phase<br />
• Ultimate pressure<br />
• Pumping speed<br />
• Water or air cooled<br />
• Belt driven or direct drive
ROTARY PISTON PUMPS 34<br />
KINNEY/TUTHILL<br />
OERLIKON LEYBOLD<br />
STOKES<br />
Kinney/Tuthill<br />
Model Type Stage CFM<br />
KTC-60 Belt drive 2 60<br />
KTC-112 Belt drive 2 112<br />
KT-150 Belt drive 1 150<br />
KT-275 Belt drive 1 162<br />
KT-300 Belt drive 1 300<br />
KT-500 Belt drive 1 297<br />
KT-505 Belt drive 1 300<br />
KT-840 Belt drive 1 490<br />
KT-850 Belt drive 1 778<br />
KT-1350 Belt drive 1 780<br />
Oerlikon Leybold<br />
Model Type Stage CFM<br />
E75 Direct drive 1 75<br />
E150 Direct drive 1 100<br />
E225 Direct drive 1 160<br />
E250 Direct drive 1 171<br />
DK50 Direct drive 2 32<br />
DK100 Direct drive 2 68<br />
DK200 Direct drive 2 13<br />
Stokes<br />
Model Type Stage CFM<br />
146-H11 Belt drive 1 30<br />
148-H11 Belt drive 1 50<br />
149-H11 Belt drive 1 80<br />
212-H11 Belt drive 1 150<br />
412-H11 Belt drive 2 300<br />
612-H11 Belt drive 2 600<br />
912-H11 Belt drive 2 730
Rotary Lobe Blowers<br />
Rotary lobe blowers (Roots, boosters) are used to boost the pumping speed of most rough pumps. Rotary<br />
lobe blowers have two counter rotating lobes which essentially “dove tail” or mesh without touching.<br />
These lobes continuously transfer gas from the inlet to the exhaust at a rate of 50 cfm to 100,000 cfm<br />
at a pressure of .1 to 10 Torr. There is a certain clearance that must be gauged during refurbishing,<br />
between the rotors and between each rotor and the stator wall. This clearance allows the pump to<br />
operate without mechanical wear and without the need for lubrication inside the swept volume. A benefit<br />
of the rotary lobe blower is that it reduces back streaming of oil from the rough pump that it is boosting.<br />
A rotary lobe blower requires a backing pump that has a rating of at least 10% its pumping speed. Rotary<br />
lobe blowers can be prepared for corrosive and oxygen service. <strong>PTB</strong> <strong>Sales</strong> can configure most any pump<br />
and blower into a package. Please talk to our sales representative to have a blower package configured to<br />
meet your needs.<br />
We rebuild the popular brands of rotary lobe blowers. Rotary lobe blower rebuilds come with up to a one<br />
year parts and labor warranty. All rotary lobe blowers are completely torn down and inspected for OEM<br />
tolerances. Rotary lobe blower rebuild service includes:<br />
• All bearings are replaced, new.<br />
• All seals are replaced, new.<br />
• All sleeves are replaced, new (Edwards only).<br />
• All O-rings are replaced, new.<br />
• Timing of gears is reset.<br />
• Impellers are shimmed for proper clearances.<br />
• Parts are cleaned and blower is painted and tagged with appropriate labels.<br />
• Type of oil<br />
• Line voltage and phase<br />
• Ultimate pressure<br />
• Pumping speed<br />
• Water or air cooled<br />
• Belt, standard direct, canned or hydrokinetic drive
ROTARY LOBE BLOWERS<br />
36<br />
ADIXEN/ALCATEL<br />
EDWARDS<br />
KINNEY/TUTHILL<br />
OERLIKON LEYBOLD<br />
STOKES<br />
WET PUMP & BLOWER PACKAGES<br />
Adixen/Alcatel<br />
Oerlikon Leybold<br />
Model Inlet Flange CFM<br />
Model Inlet Flange CFM<br />
RSV-150 ISO-63 180<br />
RSV-151 ISO-63 180<br />
RSV-300 ISO-63 360<br />
RSV-301 ISO-63 360<br />
RSV-600 ISO-100 720<br />
RSV-601 ISO-100 720<br />
Edwards<br />
Model Inlet Flange CFM<br />
EH-250 ISO-40, ISO-63 220<br />
EH-500 ISO-63, ISO-100 355<br />
EH-1200 ISO-100, ISO-160 845<br />
EH-2600 ISO-100, ISO-160 1,830<br />
Kinney/Tuthill<br />
Model Inlet Flange CFM<br />
WA-150/151 3” ASA 104<br />
WA-250/251 3” ASA 169<br />
WA-500/501 3” ASA 341<br />
WA-1000/1001 4” ASA 665<br />
WA-2000/2001 6” ASA 1,342<br />
WAU-150/151 3” ASA 104<br />
WAU-250/251 3” ASA 169<br />
WAU-500/501 3” ASA 341<br />
WAU-1000/1001 4” ASA 665<br />
WAU-2000/2001 6” ASA 1,342<br />
WS-150/151 3” ASA 104<br />
WS-250/251 3” ASA 169<br />
WS-500/5011 3” ASA 341<br />
WS-1000/1001 4” ASA 665<br />
WS-2000/2001 6” ASA 1,342<br />
WSU-150/151 3” ASA 104<br />
WSU-250/251 3” ASA 169<br />
WSU-500/5011 3” ASA 341<br />
WSU-1000/1001 4” ASA 665<br />
WSU-2000/2001 6” ASA 1,342<br />
KMBD-200 3” ASA 200<br />
KMBD-400 4” ASA 400<br />
KMBD-540 4” ASA 540<br />
KMBD-720 4” ASA 720<br />
KMBD-850 6” ASA 850<br />
KMBD-1600 6” ASA 1,600<br />
KMBD-2000 8” ASA 2,000<br />
Wet Pump & Blower Packages<br />
Most pumps and blowers are rebuilt and prepped for hydrocarbon fluid<br />
use. Please call for pricing of “as-is” pumps and blowers and PFPE<br />
prepped rebuilds.<br />
Stokes<br />
Model Inlet Flange CFM<br />
306 3” ASA 245<br />
310 4” ASA 400<br />
607 6” ASA 600<br />
615 8” ASA 1,300<br />
622 8” ASA 2,000
Diffusion Pumps<br />
Diffusion pumps are the most economical high vacuum pumps available. They offer the highest pumping<br />
speed of any high vacuum pump. For that reason, they are common pumps for large chambers and<br />
coating processes that do not require an ultra clean environment.<br />
Diffusion pumps are passive (no moving parts) throughput high vacuum pumps. They work by heating<br />
oil in the boiler section and sending this stream of heated oil vapor through jets aimed down toward the<br />
foreline exhaust. Gas molecules enter the inlet randomly and the imparted momentum from the oil vapor<br />
stream towards the exhaust. The pressure at the exhaust is typically 10 to 200 microns. A mechanical<br />
pump, commonly referred to as a backing pump, maintains the low pressure and pumps the molecules<br />
out of its exhaust.<br />
We rebuild Agilent/Varian VHS, HS and NHS diffusion pumps. Diffusion pump rebuilds come with up to<br />
a one year parts and labor warranty. Refer to page 91 of this catalog for diffusion pump oil. All diffusion<br />
pumps are completely torn down and inspected for OEM tolerances.<br />
Diffusion pump rebuild service includes:<br />
• Washing and bead blasting of the internal parts and body.<br />
• Waterflow check of the cooling lines after descaling and flushing.<br />
• Helium leak check of the body.<br />
• Heater elements are replaced with the customers specified voltage.<br />
• Thermal switch and plug are replaced.<br />
• Pump exterior is refinished.<br />
• Pumping speed<br />
• Fluids<br />
• Input voltage
DIFFUSION PUMPS<br />
38<br />
AGILENT/VARIAN<br />
EDWARDS<br />
CVC<br />
Agilent/Varian<br />
Model Inlet Flange Cooling Type Pumping Speed<br />
HS-2 2” ASA water 175 l/s<br />
HS-10 10” ASA water 4,000 l/s<br />
HS-16 16” ASA water 10,000 l/s<br />
HS-20 20” ASA water 17,500 l/s<br />
HS-32 32” ASA water 32,000 l/s<br />
M2 2” ASA water 285 l/s<br />
M4 4” ASA water 800 l/s<br />
M6 6” ASA water 1,500 l/s<br />
NHS-35 35” ASA water 50,000 l/s<br />
VHS-4 4” ASA water 1,200 l/s<br />
VHS-6 6” ASA water 2,400 l/s<br />
VHS-10 10” ASA water 5,300 l/s<br />
VHS-250 ISO-250 water 3,700 l/s<br />
VHS-400 16” CVC water 8,000 l/s<br />
Edwards<br />
Model Inlet Flange Cooling Type Pumping Speed<br />
Diffstak 100 ISO-100 water 500 l/s<br />
Diffstak 160 ISO-160 water 1,410 l/s<br />
CVC<br />
Model Inlet Flange Cooling Type Pumping Speed<br />
PMCS-2V 2” ASA water 100 l/s<br />
PMC-4 4” ASA water 700 l/s<br />
PMC-6 6” ASA water 1,400 l/s<br />
PMC-10 10” ASA water 10,000 l/s<br />
PVM-16 16” ASA water 16,000 l/s<br />
PMC-20 20” ASA water 18,000 l/s<br />
PMC-32 35” ASA water 55,000 l/s
Traps & Baffles<br />
LN 2<br />
traps and baffles are used to prevent the backstreaming of oil from the diffusion pump to the<br />
vacuum chamber. The low temperature of LN 2<br />
maintains a vapor pressure below 1x10 -11 Torr for the<br />
diffusion pump oil trapped on the cold surface of the baffle. We recommend LN 2<br />
traps for the cleanest<br />
environment when using a diffusion pump.<br />
Water baffles have the same function as an LN 2<br />
trap but are less effective in trapping and condensing oil.<br />
Water baffles can also be used as a radiant shield for cryo and turbo pumps. Baffles and traps decrease<br />
conductance resulting in longer pumpdown times.<br />
Traps and baffles are leak checked and come with a 90 day warranty. Our stock changes daily; please<br />
check our website for current availability, and contact our sales department for sizing and type of baffle or<br />
trap for your application.<br />
• Conductance limitation<br />
• Safety considerations regarding LN 2
TRAPS & BAFFLES<br />
40<br />
AGILENT/VARIAN<br />
CVC<br />
GRANVILLE-PHILLIPS<br />
Agilent/Varian<br />
Model Flange Flange Construction Type<br />
332/M2 2” ASA stainless steel H 2<br />
O, Polycold<br />
325 2” ASA, 6” CF stainless steel LN 2<br />
316-4 4” ASA stainless steel LN 2<br />
334/M4 4” ASA stainless steel H 2<br />
O, Polycold<br />
362-4 4” ASA stainless steel LN 2<br />
316-6 6” ASA stainless steel LN 2<br />
336/M6 6” ASA stainless steel H 2<br />
O, Polycold<br />
362-6 6” ASA, 10” CF stainless steel LN 2<br />
330 10” ASA stainless steel H 2<br />
O, Polycold<br />
316-10 10” ASA stainless steel LN 2<br />
315-16 16” ASA stainless steel LN 2<br />
CVC<br />
Model Flange Flange Construction Type<br />
BC41 4” ASA stainless steel LN 2<br />
BCN61 6” ASA aluminum LN 2<br />
BC61 6” ASA stainless steel LN 2<br />
, H 2<br />
O, Polycold<br />
BC101 10” ASA stainless steel LN 2<br />
Granville-Phillips<br />
Model Flange Flange Construction Type<br />
278 6” ASA stainless steel LN 2<br />
Visit www.ptbsales.com for current inventory,<br />
or call toll free 866-332-0500 option 1.
Ion Pumps & Controllers<br />
Ion pumps are the mainstay for UHV applications (10 -11 Torr range). They are clean, bakeable, vibration<br />
free, use low power and have long operating lives. Ion pumps work on the principle of sputtering a<br />
reactive metal (normally Ti) from a cathode strip to an anode. The reactions which cause the pumping<br />
are chemical reactions, ion burial and neutral burial. Ion pump elements are available in diode, noble<br />
diode and triode configurations. To select the appropriate configuration please call a <strong>PTB</strong> sales engineer.<br />
<strong>PTB</strong> <strong>Sales</strong> sells used ion pumps and controllers. Our stock changes daily; please check our website at<br />
www.ptbsales.com for current availability or call our sales department if you are looking for a pump or<br />
controller that is not listed below.<br />
For Agilent/Varian and Perkin-Elmer ion pumps, service requires only the pump chamber and not the<br />
exterior magnets to be sent in to us.<br />
Ion pump rebuild service includes:<br />
• Remove, disassemble and clean the elements and pump.<br />
• Replace titanium and tantalum parts.<br />
• Reassemble, helium leak check, bake out and seal off pump.<br />
• Qualify with known ion pump controller.<br />
• Diode, noble diode or triode<br />
• Pumping speed<br />
• Flange size<br />
• Mounting and support
ION PUMPS & CONTROLLERS<br />
42<br />
AGILENT/VARIAN<br />
PERKIN-ELMER<br />
Agilent/Varian<br />
Model Pumping Speed Type Flange<br />
911-5005 8 l/s diode VacIon, 1 element 2 3/4 ” CF<br />
911-5030/6 20 l/s diode/ triode VacIon, 1 element 2 3/4 ” CF<br />
919-0235 20 l/s triode StarCell VacIon, 1 element 2 3/4 ” CF<br />
911-5032 30 l/s triode VacIon, 1 element 4 1/2 ” CF<br />
911-5033/7 30 l/s diode/ triode VacIon, 1 element 4 1/2 ” CF<br />
911-5034/8 60 l/s diode/ triode VacIon, 2 elements 6” CF<br />
912-7006 110 l/s triode VacIon, 1 element 8” CF<br />
912-7000 140 l/s diode VacIon, 1 element 8” CF<br />
912-7014 220 l/s triode VacIon, 2 elements 8” CF<br />
912-7008 270 l/s diode VacIon, 2 elements 8” CF<br />
912-7022 400 l/s triode VacIon, 4 elements 8” CF<br />
912-7016 500 l/s diode VacIon, 4 elements 8” CF<br />
Perkin-Elmer<br />
Model Pumping Speed Type Flange<br />
PE-60 60 l/s diode, 4 elements 6” CF<br />
PE-120 120 l/s diode, 4 elements 8” CF<br />
PE-220 220 l/s diode, 4 elements 8” CF<br />
PE-400 400 l/s diode, 4 elements 8” CF<br />
PE-500 500 l/s diode, 4 elements 8” CF<br />
PE-TNBX 220 l/s diode, 8 element 16” OD, 11” ID<br />
set up for 12” diameter bell jar or 16” CF inlet<br />
Agilent/Varian<br />
Perkin-Elmer<br />
Model<br />
Ion Pump Controlled<br />
Model<br />
Ion Pump Controlled<br />
921-0062 8, 20, 30, 60 l/s<br />
921-0066 120,140, 220, 270, 400, 500 l/ s<br />
Multicell<br />
StarCell pumps<br />
Digitel 500/G<br />
Digitel 1500<br />
25-270 l/s<br />
220-500 l/s
Turbomolecular Pumps<br />
Turbomolecular pumps are used for a myriad of high vacuum applications. Turbomolecular pumps utilize<br />
rapidly spinning rotors that are composed of angled blades. These blades impart momentum to gas<br />
molecules in the direction of the exhaust.<br />
Molecular drag pumps and hybrid pumps (a combination of molecular drag and turbo) are variations<br />
of turbomolecular pumps. These pumps use helical grooved rotors and stators to “drag” the molecules<br />
toward the exhaust. Molecular drag and hybrid pumps do not require low foreline pressure, therefore<br />
they are ideal pumps when used in conjunction with dry diaphragm or other higher pressure dry pumps.<br />
Another added benefit of the molecular drag and hybrid pumps is that they are capable of handling<br />
higher gas bursts at the inlet than the conventional turbomolecular pumps.<br />
An important thing to keep in mind when selecting turbomolecular pumps, molecular drag pumps and<br />
hybrid pumps is that there are different types of bearings and lubricants available, often for the same<br />
model pump. Please contact one of the <strong>PTB</strong>’s sales engineers to discuss your specific application so that<br />
the appropriate type of pump along with the appropriate type bearings and lubricants are selected.<br />
Our stock changes daily. Please check our website at www.ptbsales.com for current availability or contact<br />
our sales department.<br />
• Bearing type (mag lev, ceramic, steel)<br />
• Lubrication (hydrocarbon, fomblin, grease)<br />
• Pump orientation<br />
• Process conditions<br />
• Foreline pressure<br />
• Water or air cooling
TURBOMOLECULAR PUMPS<br />
44<br />
ADIXEN/ALCATEL<br />
PFEIFFER<br />
Adixen/Alcatel<br />
Pfeiffer<br />
Model Inlet Flange Pumping Speed<br />
Model Inlet Flange Pumping Speed<br />
ATP-80 ISO-63 80 l/s<br />
ATP-100 ISO-100 100 l/s<br />
ATP-150 ISO-100 140 l/s<br />
ATP-400 ISO-160 400 l/s<br />
ATP-900 ISO-200, 10” CF 900 l/s<br />
ATP-1500M/C ISO-250 1,500 l/s<br />
ATP-5400 ISO-100, ISO-160, 8” CF 400 l/s<br />
ATP-5400CP ISO-100, ISO-160, 8” CF 400 l/s<br />
ATP-5401 ISO-160 400 l/s<br />
ATP-5401CP ISO-160 400 l/s<br />
ATP-5900 ISO-200, 8” CF 880 l/s<br />
ATP-5900CP ISO-200, 8” CF 880 l/s<br />
ATS-200 ISO-100, 6” CF 200 l/s<br />
ATH-20/40 4 1/2 ” CF 20/40 l/s<br />
ATH-30+ 4 1/2 ” CF 30 l/s<br />
ATH-300 ISO-100, ISO-160 300 l/s<br />
ATH-400M ISO-100, ISO-160 410 l/s<br />
ATH-500M ISO-160 500 l/s<br />
ATH-1000M ISO-100, ISO-200 1,000 l/s<br />
ATH-1300M ISO-200, ISO-250 1,300 l/s<br />
ATH-1600M ISO-200, ISO-250 1,600 l/s<br />
ATH-2300M ISO-200, ISO-250 2,100 l/s<br />
ATH-2800M ISO-250 2,050 l/s<br />
ATH-3200M ISO-320 2,600 l/s<br />
MDP 5011 ISO-63 7.5 l/s<br />
MDP 5080 ISO-63, 4 1/2 ” CF 80 l/s<br />
MDP 5081 ISO-63, 4 1/2 ” CF 80 l/s<br />
MDP 5101 ISO-100, 6” CF 80 l/s<br />
MDP 5150 ISO-100 140 l/s<br />
MDP 5150CP ISO-100 140 l/s<br />
MDP 5400 ISO-160, 8” CF 400 l/s<br />
MDP 5400CIS ISO-160, 8” CF 400 l/s<br />
MDP 5401 ISO-160 400 l/s<br />
MDP 5401CP ISO-160 400 l/s<br />
MDP 5402CP ISO-160, 8” CF 400 l/s<br />
TPU/TPH-020 ISO-40, ISO-63, 4 1/2 ” CF 20 l/s<br />
TPU/TPH-035 ISO-40, ISO-63, 4 1/2 ” CF 32 l/s<br />
TPU/TPH-040 ISO-40, ISO-63, 4 1/2 ” CF 32 l/s<br />
TPU/TPH-050 ISO-63, 4 1/2 ” CF 50 l/s<br />
TPU/TPH-060 ISO-63, 4 1/2 ” CF 56 l/s<br />
TPU/TPH-062 ISO-63, 4 1/2 ” CF 62 l/s<br />
TPU/TPH-064 ISO-63, 4 1/2 ” CF 63 l/s<br />
HP-80 ISO-63, 4 1/2 ” CF 71 l/s<br />
TPU/TPH-170 ISO-100, 6” CF 170 l/s<br />
TPU/TPH-180HC ISO-100, 6” CF 180 l/s<br />
TPU/TPH-190 ISO-100, 6” CF 190 l/s<br />
TPU/TPH-240 ISO-100, 6” CF 230 l/s<br />
HP-300 ISO-100, 6” CF 250 l/s<br />
TPU/TPH-330 ISO-100, 6” CF 330 l/s<br />
HP-400 ISO-100, 6” CF 350 l/s<br />
TPU/TPH-510 ISO-160, 8” CF 500 l/s<br />
TPU/TPH-520M ISO-160, 8” CF 500 l/s<br />
HP-700 ISO-160, 8” CF 630 l/s<br />
TPU/TPH-1201 ISO-200, 10” CF 1,250 l/s<br />
TPU/TPH-1500 ISO-250, 12” CF 1,300 l/s<br />
TPU/TPH-2100 ISO-200, ISO-250, 10” CF, 12” CF 2,000 l/s<br />
TPU/TPH-2101PC ISO-200, ISO-250, 10” CF, 12” CF 1,900 l/s<br />
TPU/TPH-2200 ISO-200, ISO-250, 10” CF, 12” CF 2,100 l/s<br />
TPU/TPH-2301 ISO-250, 12” CF 1,900 l/s<br />
TPU/TPH-5000 ISO-400, ISO-500 5,500 l/s<br />
TMU/TMH-065 ISO-63, 4 1/2 ” CF 56 l/s<br />
TMU/TMH-071P ISO-63, 4 1/2 ” CF 60 l/s<br />
TMU/TMH-110 ISO-100, 6” CF 100 l/s<br />
TMU/TMH-200M ISO-100, 6” CF 180 l/s<br />
TMU/TMH-260 ISO-100, 6” CF 210 l/s<br />
TMU/TMH-261 ISO-100, 6” CF 230 l/s<br />
TMU/TMH-400M ISO-100, 6” CF 400 l/s<br />
TMU/TMH-520 ISO-160, 8” CF 500 l/s<br />
TMU/TMH-520M ISO-160, 8” CF 500 l/s<br />
TMU/TMH-521 ISO-160, 8” CF 500 l/s
45<br />
TURBOMOLECULAR PUMPS<br />
PFEIFFER<br />
EBARA<br />
EDWARDS<br />
OERLIKON LEYBOLD<br />
Pfeiffer<br />
Edwards<br />
Model Inlet Flange Pumping Speed<br />
Model Inlet Flange Pumping Speed<br />
TMU/TMH-521P ISO-160, 8” CF 500 l/s<br />
TMU/TMH-521SG ISO-160, 8” CF<br />
500 l/s<br />
TMU/TMH-521UP ISO-160, 8” CF<br />
500 l/s<br />
TMU/TMH-1000M ISO-200<br />
980 l/s<br />
TMU/TMH-1001P ISO-200, 10” CF<br />
1,000 l/s<br />
TMU/TMH-1600 ISO-200, ISO-250, 10” CF 1,500 l/s<br />
TMU/TMH-1600C ISO-200, 10” CF<br />
1,500 l/s<br />
TMU/TMH-1600PC ISO-200, 10” CF<br />
1,500 l/s<br />
TMU/TMH-1600M ISO-250<br />
1,400 l/s<br />
TMU/TMH-1601P ISO-250, 1” CF<br />
1,500 l/s<br />
HIMAG-2400 ISO-250 2,100 l/s<br />
EBARA<br />
Model Inlet Flange Pumping Speed<br />
ET-300WS ISO-100 270 l/s<br />
ET-300WS-A ISO-100 270 l/s<br />
ET-450WS ISO-160 460 l/s<br />
ET-600WS ISO-160 600 l/s<br />
ET-800WS ISO-200 800 l/s<br />
ET-1301WS ISO-200 1,300 l/s<br />
ET-1600WS ISO-250 1,500 l/s<br />
ET-2500WS ISO-320 2,500 l/s<br />
ET-3300WS ISO-400 3,300 l/s<br />
Edwards<br />
Model Inlet Flange Pumping Speed<br />
EXT75DX ISO-63 61 l/s<br />
EXT70/CF/H ISO-63 65 l/s<br />
EXT250/H/HI ISO-100 220 l/s<br />
EXT255H/HI/DX ISO-100 220 l/s<br />
EXT260 ISO-100 220 l/s<br />
EXT406PX ISO-100, ISO-160 380 l/s<br />
EXT556H ISO-160 540 l/s<br />
Oerlikon Leybold<br />
Model Inlet Flange Pumping Speed<br />
TMP-50 ISO-63, 4 1/2 ” CF 55 l/s<br />
TMP-55 ISO-63 30 l/s<br />
TMP-150/151 ISO-100, 6” CF 145 l/s<br />
TMP-340/341 ISO-100, ISO-160, 6” CF 220 l/s<br />
TMP-360/361 ISO-160, 6” CF 345 l/s<br />
TMP-1000/C ISO-200, ISO-250, 8” CF, 10” CF 1,100 l/s<br />
TMP-1100/C ISO-250 830 l/s<br />
TMP-1500 ISO-250 1,550 l/s<br />
TW-70H ISO-63, 4 1/2 ” CF 60 l/s<br />
TW-250 ISO-100, 6” CF 230 l/s<br />
TW-300 ISO-100, 6” CF 240 l/s<br />
TW-700/701 ISO-160, 8” CF 680 l/s<br />
TW-1600 ISO-200, ISO-250, 10” CF 1,420 l/s<br />
MAG W 400iP ISO-160, 8” CF 365 l/s<br />
MAG W 600iP ISO-160, 8” CF 570 l/s<br />
MAG W 830iP ISO-160, 8” CF 760 l/s<br />
MAG W 1200 ISO-200, 10” CF 1,200 l/s<br />
MAG W 1300/C ISO-200, ISO-250 1,220 l/s<br />
MAG W 1500/CT ISO-200, ISO-250 1,220 l/s<br />
MAG W 2000/CT ISO-250 1,550 l/s<br />
MAG W 2010C ISO-250 1,650 l/s<br />
MAG W 2200C ISO-200, ISO-250 2,000 l/s<br />
MAG W 2700 ISO-250 1,630 l/s<br />
MAG W 28OOC ISO-250 2,650 l/s<br />
MAG W 3200 ISO-320 3,200 l/s
TURBOMOLECULAR PUMPS<br />
46<br />
OSAKA<br />
SEIKO SEIKI<br />
SHIMADZU<br />
AGILENT/VARIAN<br />
Osaka<br />
Shimadzu<br />
Model Inlet Flange Pumping Speed<br />
Model Inlet Flange Pumping Speed<br />
TG56F ISO-63 44 l/s<br />
TG200 ISO-100 200 l/s<br />
TG220F ISO-100 200 l/s<br />
TG350F ISO-100 330 l/s<br />
TG450F ISO-160 450 l/s<br />
TH532 ISO-160 500 l/s<br />
TG550 ISO-160 500 l/s<br />
TG800F ISO-160 850 l/s<br />
TG1000 ISO-200 1,000 l/s<br />
TG1100F ISO-200 1,100 l/s<br />
TG1103M ISO-200 1,000 l/s<br />
TG1300M ISO-200 1,300 l/s<br />
TG2400M ISO-250 2,400 l/s<br />
Seiko Seiki<br />
Model Inlet Flange Pumping Speed<br />
STP-300/301CB1 ISO-100 290 l/s<br />
STP-400/C ISO-100 400 l/s<br />
STP-451/C ISO-160 480 l/s<br />
STPIX-455 ISO-100, ISO-160 450 l/s<br />
STP-600/C ISO-160 600 l/s<br />
STP-H600/C ISO-160 600 l/s<br />
STP-603/C ISO-160 600 l/s<br />
STP-A803/C ISO-200 800 l/s<br />
STP-1000/C ISO-200, 6” ASA 1,000 l/s<br />
STP-H1000/1001/C ISO-200, 6” ASA<br />
1,000 l/s<br />
STP-H2000/2001/C ISO-250<br />
2,000 l/s<br />
STP-H2002/C ISO-250 2,000 l/s<br />
STP-A2203PV ISO-250 2,000 l/s<br />
STP-F2203/C ISO-250 2,000 l/s<br />
STP-A2503PV ISO-320 2,500 l/s<br />
STP-XA2703/C ISO-250 2,650 l/s<br />
TMP-1003LM ISO-250 1,080 l/s<br />
TMP-2001 ISO-250 1,500 l/s<br />
TMP-2003 ISO-250 1,500 l/s<br />
TMP-3203LMC ISO-250 2,000 l/s<br />
TMP-3403LMC ISO-250 2,300 l/s<br />
TMP-3403LMTC ISO-250 2,300 l/s<br />
Agilent/Varian<br />
Model Inlet Flange Pumping Speed<br />
V60 ISO-63 58 l/s<br />
V70 ISO-63, 4 1/2 ” CF 68 l/s<br />
V70LP ISO-63, 4 1/2 ” CF 68 l/s<br />
V70D ISO-63, 4 1/2 ” CF 68 l/s<br />
V80A ISO-63, 4 1/2 ” CF 77 l/s<br />
V150HT ISO-100, 6” CF 150 l/s<br />
V200A ISO-100 220 l/s<br />
V250 ISO-100 250 l/s<br />
V300HT ISO-100, ISO-160, 8” CF 250 l/s<br />
V450 ISO-160 470 l/s<br />
V550 ISO-160, 8” CF 550 l/s<br />
V700HT ISO-200, 10” CF 690 l/s<br />
V1000HT ISO-200 1,000 l/s<br />
V1000 ICE ISO-200 1,000 l/s<br />
V1800 ISO-250 1,600 l/s<br />
V1800A ISO-250 1,600 l/s<br />
V2000HT ISO-250, 10” CF 2,000 l/s<br />
TV2KG ISO-250 1,600 l/s<br />
TV81 ISO-63 77 l/s<br />
TV301 ISO-100, 6” CF 250 l/s<br />
TV551 ISO-160, 8” CF 550 l/s<br />
TV701 ISO-160, 8” CF 700 l/s<br />
TV1001 ISO-200, 10” CF 1,000 l/s
Turbo Pumping Stations<br />
Turbo pumping stations are self-contained high vacuum pumping systems. They integrate a turbo pump,<br />
backing pump and controller into one easy to use high vacuum pumping package. They may also<br />
include gauging and valve control capability. Turbo stations can be equipped with a dry backing pump for<br />
clean operation.<br />
There are many combinations available. Please check our website for current availability of OEM systems<br />
or contact our sales department for a <strong>PTB</strong> <strong>Sales</strong> custom built system. <strong>PTB</strong> <strong>Sales</strong> has a large inventory of<br />
turbo pumps and can build a system for your specific needs.<br />
Typical Applications:<br />
• Gauge calibration<br />
• RGA differential pump<br />
• Dry regen of cryopump<br />
• Vacuum jacketing<br />
• General purpose high vacuum<br />
• Removable load lock<br />
• Line voltage<br />
• Pump size<br />
• Flange type<br />
• Valving<br />
• Gauging<br />
• Dry or wet
TURBO PUMPING STATIONS<br />
48<br />
AGILENT/VARIAN/<strong>PTB</strong> SALES CUSTOM<br />
ADIXEN/ALCATEL<br />
PFEIFFER<br />
Agilent/Varian/<strong>PTB</strong> <strong>Sales</strong> Custom<br />
Model Turbo Pump Backing Pump Controller<br />
Turbo Dry 65 V60 Dry Diaphragm OEM PCB Card<br />
Turbo Dry 70 V70D Dry Diaphragm OEM PCB Card<br />
<strong>PTB</strong> <strong>Sales</strong> V70 Custom Package V70D, HT, LP Scroll, Diaphragm or Rotary Vane V70<br />
<strong>PTB</strong> <strong>Sales</strong> V150 Custom Package V150HT Scroll, Diaphragm or Rotary Vane V150<br />
<strong>PTB</strong> <strong>Sales</strong> V250 Custom Package V250HT Scroll, Diaphragm or Rotary Vane V250<br />
<strong>PTB</strong> <strong>Sales</strong> V300 Custom Package V300HT Scroll, Diaphragm or Rotary Vane V300<br />
<strong>PTB</strong> <strong>Sales</strong> V550 Custom Package V550HT Scroll, Diaphragm or Rotary Vane V550<br />
<strong>PTB</strong> <strong>Sales</strong> V750 Custom Package V750HT Scroll, Diaphragm or Rotary Vane V750<br />
<strong>PTB</strong> <strong>Sales</strong> V1000 Custom Package V1000HT Scroll, Diaphragm or Rotary Vane V1000<br />
Adixen/Alcatel<br />
Model Turbo Pump Backing Pump Controller<br />
Drytel 25 MDP 5010, 715 l/s Dry Diaphragm OEM PCB Card<br />
Drytel 31 MDP 5011, 715 l/s Dry Diaphragm OEM PCB Card<br />
Drytel 32 MDP 5011, 715 l/s Dry Diaphragm OEM PCB Card<br />
Drytel 34 MDP 5011, 715 l/s Dry Diaphragm OEM PCB Card<br />
Drytel 34C MDP 5011, 715 l/s Dry Diaphragm OEM PCB Card<br />
Drytel 42 ATH-30, 715 l/s Dry Diaphragm OEM PCB Card<br />
Drytel 44 ATH-30, 30 l/s Dry Diaphragm OEM PCB Card<br />
Drytel 100 MDP 5030, 27 l/s Dry Diaphragm OEM PCB Card<br />
Drytel 100C MDP 5030, 27 l/s Dry Diaphragm OEM PCB Card<br />
Pfeiffer<br />
Model Turbo Pump Backing Pump Controller<br />
TSH/TSU-170 TPU/TPH-170 Rotary Vane TCP-380<br />
TSH/TSU-260 TMU/TMH-260 Rotary Vane or Dry Diaphragm TCP-380<br />
TSH/TSU-510 TPU/TPH-510 Rotary Vane TCP-380<br />
TSH/TSU-520 TMU/TMH-520 Rotary Vane or Dry Diaphragm TCP-380<br />
TSH/TSU-2200 TPU/TPH-2200 Rotary Vane TCP-600
Turbo Controllers<br />
Turbo controllers are essentially frequency converters which change the line voltage into a high frequency<br />
optimized for the specific turbo pump. Some controllers have additional functions such as interlocks,<br />
auto-venting and heater control.<br />
Turbo controllers are sold as repaired and come with a 90-day warranty. Our stock changes daily.<br />
Please check our website for current availability. Contact our sales department to ensure you have the<br />
appropriate controller for your turbo pump.<br />
Turbo controller repair service includes:<br />
• Run diagnostic check.<br />
• Repair and replace all bad components.<br />
• Repair trace and board damage.<br />
• Replace batteries.<br />
• Run test on subassemblies to insure OEM specifications.<br />
• Test for tuning and levitation for magnetically levitated pump types.<br />
• Test under maximum load.<br />
• Tune and match to pump and cable set.<br />
• Test interface operation.<br />
• Line voltage<br />
• Mounting
TURBO CONTROLLERS<br />
50<br />
ADIXEN/ALCATEL<br />
EBARA<br />
EDWARDS<br />
OERLIKON LEYBOLD<br />
OSAKA<br />
SHIMADZU<br />
Adixen/Alcatel<br />
Oerlikon Leybold<br />
Model<br />
Adixen/Alcatel Turbos Controlled<br />
Model<br />
Oerlikon Leybold Turbos Controlled<br />
CFF-100 MDP 5010, MDP 5080, MDP 5100<br />
CFF-450 MDP 5030, MDP 5150, MDP 5400, MDP 5402<br />
CFV-100 MDP 5011, MDP 5081, MDP 5101<br />
CFV-900 MDP 5900<br />
CFV-3000 ATP-1500M<br />
ACT-600M ATH-400<br />
ACT-1000M ATH-1000<br />
ACT-1300M ATH-1300, ATH-1600<br />
EBARA<br />
Model<br />
EBARA Turbos Controlled<br />
ET-300W ET-300WS<br />
ET-600W ET-600WS<br />
ET-804W ET-800WS<br />
ET-1604W ET-1600WS<br />
ET-1606W ET-1600WS<br />
NT-20 TMP-150, 151, 360, 361, 600, 1000, 1100<br />
NT-50 TMP-35, 50, 55<br />
NT-150/360 TMP-150, 151, 360, 361<br />
NT-151<br />
TMP-151<br />
NT-200<br />
TMP-200<br />
NT-340M 340 Mag-Lev, 400 Mag-Lev<br />
NT-341<br />
340 Mag-Lev, 400 Mag-Lev<br />
NT-450 TMP-360, 361, 450<br />
NT-1000/1500 TMP-600, 1000, 1500<br />
Mag Drive 1000/L Mag 1000, Mag 1200<br />
Fas Drive Digital Mag 2700<br />
Mag 2000 Mag 2000<br />
Turbo Drive S TW-250, 300, 700<br />
TC-300 SL-80, 300<br />
TD-400<br />
TW-220<br />
TC-700<br />
SL-700<br />
Osaka<br />
Edwards<br />
Model<br />
Edwards Turbos Controlled<br />
ETC-300 EXT-250/H/I, 255/H/I, 260<br />
EXC-100L EXT-70/H/CF<br />
Model<br />
TC200<br />
TC440<br />
TC550<br />
TC3500<br />
TD2001<br />
Osaka Turbos Controlled<br />
TG200<br />
TG440<br />
TG550<br />
TG3500<br />
TD2001<br />
Oerlikon Leybold<br />
Shimadzu<br />
Model<br />
Oerlikon Leybold Turbos Controlled<br />
Model<br />
Shimadzu Turbos Controlled<br />
NT-10<br />
TMP-50<br />
EI-2003M<br />
TMP-2003<br />
NT-12<br />
TMP-50<br />
EI-3203MD<br />
3203-LMC<br />
NT-13<br />
TMP-50<br />
EID-3403M<br />
3403-LMC/LMTC
51<br />
TURBO CONTROLLERS<br />
SEIKO SEIKI<br />
AGILENT/VARIAN<br />
Seiko Seiki<br />
Agilent/Varian<br />
Model<br />
Seiko Seiki Turbos Controlled<br />
Model<br />
Agilent/Varian Turbos Controlled<br />
SCU-21D<br />
SCU-301C<br />
SCU-H301C<br />
SCU-400<br />
SCU-600<br />
SCU-603<br />
SCU-750<br />
SCU-1000<br />
SCU-1000C<br />
SCU-1000L<br />
SCU-1000WA<br />
SCU-1003C<br />
SCU-1303C<br />
SCU-1500<br />
SCU-2000C<br />
SCU-2001C<br />
SCU-2002C<br />
SCU-A803C<br />
SCU-A1303CV2<br />
SCU-A1603C<br />
SCU-A2203C<br />
SCU-A2203P<br />
SCU-A2503PV<br />
SCU-XH2603P<br />
SCU-XA2703CV<br />
SCU-XA3203CV<br />
SCU-XH2603P<br />
SCU-XL800<br />
Universal<br />
STP-301C<br />
STP-H301C<br />
STP-400<br />
STP-600<br />
STP-603<br />
Universal<br />
STP-H1000<br />
STP-H1000C<br />
STP-H1000L<br />
STP-H1000WA<br />
STP-H1003C<br />
STP-H1303C<br />
Universal<br />
STP-H2000C<br />
STP-H2001C<br />
STP-H2002C<br />
STP-A803C<br />
STP-A1303CV2<br />
STP-A1603C<br />
STP-A2203C<br />
STP-A2203P<br />
STP-A2503PV<br />
STP-XH2603P<br />
STP-XA2703CV<br />
STP-XA3203CV<br />
STP-XH2603P<br />
STP-XL800<br />
V60<br />
V60<br />
V70<br />
V70<br />
V80<br />
V80<br />
V150<br />
V150<br />
V200<br />
V200<br />
V250<br />
V250<br />
V300 ICE V300 ICE<br />
V301/NAV V301/NAV<br />
V450<br />
V450<br />
V550<br />
V550<br />
V700 HT/ICE V700 HT/ICE<br />
V1000<br />
V1000<br />
V1800<br />
V1800<br />
V2000 HT/ICE V2000 HT/ICE<br />
The Turbo-V controllers are frequency converters with self diagnostic and<br />
protection features. The half rack unit has a multifunction alphanumeric<br />
display for pump status and error code diagnostics. It displays rotational<br />
speed as the pump starts up and indicates when full speed is reached. At<br />
any time during the operation of the pump, the speed, current, power and<br />
bearing temperature can be displayed. Its microprocessor acts as a pump<br />
cycle log, and can display the number of vacuum cycles, the cycle time for<br />
the current cycle and the total operating hours on the pump.<br />
The Navigator series, NAV on the tag, mounts directly onto the bottom of<br />
the turbo pump. It has no display since it is meant to be linked into your<br />
system's process control.<br />
We buy your excess vacuum related equipment.<br />
Visit www.ptbsales.com, or call toll free 866-332-0500 option 3.
Model<br />
020<br />
035<br />
040<br />
050<br />
060<br />
062<br />
064<br />
100<br />
110<br />
140<br />
170<br />
180H<br />
190<br />
200<br />
240<br />
260<br />
330<br />
450H<br />
510<br />
520<br />
520M<br />
1000<br />
1500<br />
1600<br />
2200<br />
5000<br />
010<br />
•<br />
•<br />
•<br />
015<br />
•<br />
•<br />
•<br />
•<br />
•<br />
020 035<br />
•<br />
•<br />
•<br />
040<br />
•<br />
•<br />
•<br />
•<br />
100<br />
•<br />
120<br />
•<br />
•<br />
•<br />
•<br />
•<br />
•<br />
•<br />
•<br />
•<br />
•<br />
•<br />
121<br />
•<br />
•<br />
•<br />
•<br />
•<br />
•<br />
•<br />
•<br />
•<br />
•<br />
•<br />
200<br />
•<br />
270<br />
•<br />
•<br />
•<br />
•<br />
•<br />
•<br />
•<br />
•<br />
300<br />
•<br />
•<br />
•<br />
•<br />
•<br />
•<br />
•<br />
•<br />
•<br />
305<br />
•<br />
•<br />
•<br />
•<br />
•<br />
•<br />
•<br />
•<br />
•<br />
310<br />
•<br />
•<br />
•<br />
•<br />
•<br />
•<br />
•<br />
•<br />
•<br />
•<br />
380<br />
•<br />
•<br />
•<br />
•<br />
•<br />
•<br />
•<br />
•<br />
•<br />
•<br />
•<br />
•<br />
•<br />
600<br />
•<br />
•<br />
•<br />
•<br />
•<br />
•<br />
•<br />
•<br />
•<br />
•<br />
•<br />
•<br />
•<br />
5000<br />
•<br />
•<br />
•<br />
52<br />
TURBO CONTROLLERS<br />
PFEIFFER COMPATIBILITY CHART<br />
Pfeiffer Compatibility Chart<br />
Pump<br />
Frequency Converter
Power Generators<br />
Power generators are used for many applications. <strong>PTB</strong> <strong>Sales</strong> sells deposition power generators for<br />
sputtering, electron beam evaporation, ion beam and ion beam assisted deposition. Sputtering is<br />
normally done using DC or RF power generators depending upon the material being deposited. Etching<br />
or ashing is normally done using RF power. The size of the cathode or the deposition/etch rates desired<br />
normally dictate the size of the power generator.<br />
<strong>PTB</strong> <strong>Sales</strong> carries three types of DC power generators for sputtering: DC magnetron, DC biased and DC<br />
pulsed. DC magnetrons are the most common power generators for depositing metals. DC pulsed are<br />
newer and more sophisticated power generators that work well on both dialectrics and metals. Both DC<br />
magnetron and DC pulsed range in power from 500 watts to 30 kW. Either can be equipped with remote<br />
interfaces or front panel displays.<br />
<strong>PTB</strong> <strong>Sales</strong> also carries RF power generators for RF sputtering, RF biased, RF etch/ashing and induction<br />
heating. RF sputtering generators are typically set at 13.56 mHz. They are an excellent source for<br />
sputtering dialectrics. Many are solid state; however less expensive tube types are available. Power<br />
ranges from 100 W to 5 kW for solid state generators and tube supplies can go to 40 kW. Some<br />
applications require low frequency power generators. Most run from 50 to 460 kHz. Induction heating<br />
power generators are available. They are high power (7.5 kW to 40 kW) and run at 450 kHz. Most are<br />
tube type.<br />
Power generators are sold with a 90 day warranty. Call our sales staff for the appropriate power generator<br />
for your application.<br />
• Input power<br />
• Water cooled or air cooled<br />
• Interface to system<br />
• Matching network
POWER GENERATORS<br />
54<br />
ADVANCED ENERGY<br />
MKS ENI<br />
DC Magnetron Power Generators<br />
Advanced Energy<br />
Model Output Front Panel Cooling<br />
MDXII-15K 15 kW active/passive air<br />
MDXII-30K 30 kW active/passive air<br />
MDX-1K 1 kW active/passive air<br />
MDX-5K 5 kW active/passive air<br />
MDX-10K 10 kW active/passive air<br />
MDX-20K 20 kW active/passive air<br />
MDX-30K 30 kW active/passive air<br />
MDX-L6 6 kW active/passive air<br />
MDX-L12 12 kW active/passive air<br />
MDX-L12M 12 kW active/passive air<br />
MDX-L12M-650 12 kW active/passive air<br />
Pinnacle 5 kW 5 kW dual/10 kW active/passive air<br />
Pinnacle 6 kW 6 kW active/passive air<br />
Pinnacle 6 kW/6 kW 6 kW dual/6 kW active/passive air<br />
Pinnacle 6 kW/10 kW 6 kW dual/10 kW active/passive air<br />
Pinnacle 10 kW 10 kW active/passive air<br />
Pinnacle 12 kW 12 kW active/passive air<br />
Pinnacle 20 kW 20 kW active/passive air<br />
Pinnacle Plus (DC pulsed) 6 kW dual/12 kW active/passive air<br />
MKS ENI<br />
Model Output Front Panel Cooling<br />
DCG-100 10 kW, 50-60 Hz active air<br />
DCG-100 20 kW, 50-60 Hz active air<br />
DCG-100 30 kW, 50-60 Hz active air<br />
DCG-200 20 kW, 50-60 Hz active air<br />
DCG-200 30 kW, 50-60 Hz active air<br />
DCG-200Z 40 kW, 50-60 Hz active air<br />
RPG-50 (DC pulsed) 5 kW, 25-50 kHz active air<br />
RPG-100 (DC pulsed) 10 kW, 25-50 kHz active air
55<br />
POWER GENERATORS<br />
AMETEK-SORENSEN<br />
Ametek-Sorensen<br />
Model Output Front Panel Cooling<br />
DCR 10-170B 0-10 V, 0-170 A active ambient<br />
DCR 15-18B 0-15 V, 0-18 A active ambient<br />
DCR 20-25B 0-25 V, 0-25 A active ambient<br />
DCR 20-25B2 0-25 V, 0-25 A active ambient<br />
DCR 32-155T 0-32 V, 0-155 A active ambient<br />
DCR 40-13B 0-40 V, 0-13 A active ambient<br />
DCR 40-13B2 0-40 V, 0-13 A active ambient<br />
DCR 40-25B2 0-40 V, 0-25 A active ambient<br />
DCR 60-45B 0-60 V, 0-45 A active ambient<br />
DCR 80-33B 0-80 V, 0-33 A active ambient<br />
DCR 150-6B 0-150 V, 0-6 A active ambient<br />
DCR 160-62T 0-160 V, 0-62 A active ambient<br />
DCR 300-1.5B 0-300 V, 0-1.5 A active ambient<br />
DCR 300-3B 0-300 V, 0-3 A active ambient<br />
DCR 300-6B2 0-300 V, 0-6 A active ambient<br />
DCR 600-.75B 0-600 V, 0-.75 A active ambient<br />
DCR 600-1.5B 0-600 V, 0-1.5 A active ambient<br />
DCR 600-1.5B2 0-600 V, 0-1.5 A active ambient<br />
DCS 8-25 0-8 V, 0-25 A active ambient<br />
DCS 8-350 0-8 V, 0-350 A active ambient<br />
DCS 20-50 0-20 V, 0-50 A active ambient<br />
DCS 20-150 0-20 V, 0-150 A active ambient<br />
DCS 32-125M86 0-32 V, 0-125 A active ambient<br />
DCS 33-33E 0-33 V, 0-33 A active ambient<br />
DCS 33-33EM13M9C 0-33 V, 0-33 A active ambient<br />
DCS 33-33EM47 0-33 V, 0-33 A active ambient<br />
DCS 40-25 0-40 V, 0-25 A active ambient<br />
DCS 40-25E 0-40 V, 0-25 A active ambient<br />
DCS 40-25M37 0-40 V, 0-25 A active ambient<br />
DCS 40-25M9A 0-40 V, 0-25 A active ambient<br />
DCS 55-55 0-55 V, 0-55 A active ambient<br />
DCS 55-55E 0-55 V, 0-55 A active ambient<br />
DCS 60-18 0-60 V, 0-18 A active ambient<br />
DCS 60-18E 0-60 V, 0-18 A active ambient<br />
DCS 60-50 0-60 V, 0-50 A active ambient
POWER GENERATORS<br />
56<br />
AMETEK-SORENSEN<br />
HITEK POWER<br />
ADVANCED ENERGY<br />
COMMONWEALTH<br />
Ametek-Sorensen<br />
Model Output Front Panel Cooling<br />
DCS 80-13E 0-80 V, 0-13 A active ambient<br />
DCS 300-3.5 0-300 V, 0-3.5 A active ambient<br />
DHP 150-166 0-150 V, 0-166 A active ambient<br />
DHP 200-50 0-200 V, 0-50 A active ambient<br />
DHP 300-6.6 M9D 0-300 V, 0-6.6 A active ambient<br />
SRL 20-25 0-20 V, 0-25 A active ambient<br />
SRL 60-8 0-60 V, 0-8 A active ambient<br />
SRL 60-17 0-60 V, 0-17 A active ambient<br />
SRL 40-50 0-40 V, 0-50 A active ambient<br />
XTD 30-2 0-30 V, 0-2 A active ambient<br />
XTQ 30-2 0-30 V, 0-2 A active ambient<br />
XTS 30-2 0-30 V, 0-2 A active ambient<br />
Ion Implant Power Generators<br />
HiTek Power<br />
Advanced Energy<br />
Commonwealth<br />
Model<br />
Output<br />
Model<br />
Ion Beam<br />
Model<br />
Ion Beam<br />
MH100<br />
OL400<br />
OL6000/HV<br />
OL8000/HV<br />
50 kV<br />
6 kV<br />
200 kV, 6 kW<br />
200 kV, 8 kW<br />
ID-2501<br />
ID-3500<br />
ID-3501<br />
IBS-250<br />
IBS-600<br />
Mark II<br />
PBES<br />
OL10K<br />
10 kW<br />
8542<br />
OLS10K/D<br />
10 kW<br />
OL20K<br />
20 kW<br />
Visit www.ptbsales.com for current inventory,<br />
or call toll free 866-332-0500 option 1.
57 POWER GENERATORS<br />
ADVANCED ENERGY<br />
RF Plasma Power Generators<br />
Advanced Energy<br />
Model Output Front Panel Cooling<br />
Apex 1513 1.5 kW, 13.56 mHz active water<br />
Apex 3013 3 kW, 13.56 mHz active water<br />
Apex 5513 5 kW, 13.56 mHz active water<br />
Apex 7 kW/13 7 kW, 13.56 mHz active water<br />
Apex 10 kW/13 10 kW, 13.56 mHz active water<br />
Atlas 2012 2 kW, 13.56 mHz active water<br />
PDX-500 .5 kW, 325-375 kHz active air<br />
PDX-900-2V .9 kW, 325-375 kHz active air<br />
PDX-1200 1.2 kW, 325-450 kHz active air<br />
PDX-1250 1.25 kW, 325-375 kHz active air<br />
PDX-1400 1.4 kW, 325-375 kHz active air<br />
PDX-2500 2.5 kW, 325-375 kHz active air<br />
PDX-5000 5 kW, 330-460 kHz active air<br />
PDX-8000 8 kW, 360-460 kHz active air<br />
PE-1000 1 kW, 40±1 kHz active air<br />
PE-2500 2.5 kW, 40±1 kHz active air<br />
PE-5000 5 kW, 40±1 kHz active air<br />
PE-10K 10 kW, 40±1 kHz active air<br />
PE-20K 20 kW, 40±1 kHz active air<br />
PDW-2200 2.2 kW, 400 kHz active air<br />
PDP-2500 2.5 kW, 450 kHz active air<br />
RFDS-1250-A 1.25 kW, 13.56 mHz passive water<br />
RFDS-2000-2V 2 kW, 13.56 mHz passive water<br />
RFG-1250 1.25 kW, 13.56 mHz passive water<br />
RFG-1250 HALO 1.25 kW, 13.56 mHz passive water<br />
RFG-1251 1.25 kW, 13.56 mHz passive water<br />
RFG-3000 3 kW, 13.56 mHz passive water<br />
RFG-3002 3 kW, 13.56 mHz passive water<br />
RFX-600 .6 kW, 13.56 mHz active water<br />
RFX-1250 1.25 kW, 13.56 mHz active water<br />
RFXII-1200 1.25 kW, 13.56 mHz active water<br />
RFX-2500 2.5 kW, 13.56 mHz active water<br />
RFXII-3000 3 kW, 13.56 mHz active water
POWER GENERATORS<br />
58<br />
COMDEL<br />
MKS ENI<br />
Comdel<br />
Model Output Front Panel Cooling<br />
CDX-2000 1 kW, 13.56 mHz, 2 mHz active water<br />
CLF-5000 5 kW, 350-450 kHz active water<br />
CLX-10 10 kW, 340-460 kHz active water<br />
CLX-2500 2.5 kW, 350 kHz active water<br />
CPS-500 .5 kW, 13.56 mHz active air<br />
CPS-1000 1 kW, 13.56 mHz active water<br />
CPS-1001 1 kW, 13.56 mHz active water<br />
CPS-1001S 1 kW, 13.56 mHz active water<br />
CPS-3000 3 kW, 13.56 mHz active air<br />
CX-10K 10 kW, 13.56 mHz active water<br />
CX-600/S/AS .6 kW, 13.56 mHz active water<br />
CX-1250S 1.25 kW, 13.56 mHz active water<br />
CX-2500 2.5 kW, 13.56 mHz active water<br />
CX-3500 3.5 kW, 13.56 mHz active water<br />
CX-5000 5 kW, 13.56 mHz active water<br />
MKS ENI<br />
Model Output Front Panel Cooling<br />
ACG-3/XL .3 kW, 13.56 mHz active air<br />
ACG-5/XL .5 kW, 13.56 mHz active air<br />
ACG-6/XL .6 kW, 13.56 mHz active air<br />
ACG-10 1 kW, 13.56 mHz active air<br />
ACG-10B 1 kW, 13.56 mHz active air<br />
DPGD-10 1.25 kW, 250 kHz active/passive water<br />
DPGS-10 1.25 kW, 250 kHz active/passive water<br />
HF-300 .3 kW, 250 kHz active air<br />
HF-650 .6 kW, 250 kHz active air<br />
GHW-12A 1.2 kW, 13.56 mHz active water<br />
GHW-25A 2.5 kW, 13.56 mHz active water<br />
GHW-50A 5 kW, 13.56 mHz active water<br />
GHW-55A 5.5 kW, 13.56 mHz active water<br />
GHW-58A 5.8 kW, 13.56 mHz active water
59<br />
POWER GENERATORS<br />
MKS ENI<br />
MKS ENI<br />
Model Output Front Panel Cooling<br />
GHW-85A 8.5 kW, 13.56 mHz active water<br />
GMW-25A 2.5 kW, 50-60 Hz active water<br />
GMW-25Z 2.5 kW, 50-60 Hz active water<br />
GMW-50A 5 kW, 50-60 Hz active water<br />
LPG-6A .6 kW, 90-460 kHz active water<br />
LPG-12A 1.2 kW, 90-460 kHz active water<br />
Nova-25A 2.5 kW, 2.0 mHz active water<br />
Nova-50A 5 kW, 2.0 mHz active water<br />
OEM-6 .650 kW, 13.56 mHz active water<br />
OEM-6A .650 kW, 13.56 mHz active water<br />
OEM-6B .650 kW, 13.56 mHz active water<br />
OEM-12 1.25 kW, 13.56 mHz active water<br />
OEM-12A 1.25 kW, 13.56 mHz active water<br />
OEM-12A XL 1.25 kW, 13.56 mHz active water<br />
OEM-12B 1.25 kW, 13.56 mHz active water<br />
OEM-12B3 1.25 kW, 13.56 mHz active water<br />
OEM-1250 1.25 kW, 13.56 mHz active water<br />
OEM-25 2.5 kW, 13.56 mHz active water<br />
OEM-25A 2.5 kW, 13.56 mHz active water<br />
OEM-25B 2.5 kW, 13.56 mHz active water<br />
OEM-25XL 2.5 kW, 13.56 mHz active water<br />
OEM-28B 2.8 kW, 13.56 mHz active water<br />
OEM-2000 2 kW, 13.56 mHz active water<br />
OEM-50 5 kW, 13.56 mHz active water<br />
OEM-50XL 5 kW, 13.56 mHz active water<br />
Plasmaloc 1-HF .75 kW, 90-460 kHz active air<br />
Plasmaloc 2-HF 2 kW, 90-460 kHz active air<br />
Plasmaloc 3-HF 3 kW, 90-460 kHz active air<br />
Quanta 10 .9 kW x2, 350 kHz active air<br />
Spectrum B-3013 3 kW, 1.8-2.17 mHz active air<br />
Spectrum B-5002-02 5 kW, 1.8-2.17 mHz active air<br />
Spectrum B-10513 10.5 kW, 1.8-2.17 mHz active air<br />
Spectrum 11002-00 11 kW, 1.8-2.17 mHz active air
POWER GENERATORS<br />
60<br />
RFPP<br />
MKS ENI<br />
RFPP<br />
Model Output Front Panel Cooling<br />
LF-5 .5 kW, 50-460 kHz active air<br />
LF-10 1 kW, 50-460 kHz active air/water<br />
LF-20 2 kW, 50-460 kHz active water<br />
LF-30 3 kW, 50-460 kHz active water<br />
RF-5S .5 kW, 13.56 mHz active air<br />
RF-10L 1 kW, 13.56 mHz active air<br />
RF-10M 1 kW, 13.56 mHz active air<br />
RF-10MWC 1 kW, 13.56 mHz active air<br />
RF-10S 1 kW, 13.56 mHz active air<br />
RF-20 2 kW, 13.56 mHz active water<br />
RF-20R 2 kW, 13.56 mHz active water<br />
RF-20RWC 2 kW, 13.56 mHz active water<br />
RF-20M 2 kW, 13.56 mHz active water<br />
RF-20S 2 kW, 13.56 mHz active water<br />
RF-25M 2.5 kW, 3.8-4.2 mHz active water<br />
RF-30S 3 kW, 13.56 mHz active water<br />
RF-50S 5 kW, 13.56 mHz active water<br />
Match Networks<br />
MKS ENI<br />
Model Power Cooling<br />
MWH-5 .5 kW air<br />
MW-5D .5 kW air<br />
MW-5D-01B .5 kW air<br />
MW-5D-M12 .5 kW air<br />
MW-10D 1.0 kW air<br />
MW-25D-05M1 2.5 kW water<br />
MW-25-LD 2.5 kW air<br />
MW-50 5.0 kW air<br />
MH-1001A 1.0 kW air<br />
MH-2002A 2.0 kW air
E-Beam Power Generators & Guns<br />
E-beam power generators are high voltage DC power generators which are used in conjunction with an<br />
E-beam gun for evaporation of materials. They range in power from two to 15 kW and run at voltages<br />
between six and 10 kV. Most can be equipped with a beam sweep which moves the beam in the pocket<br />
to distribute power evenly across the pocket. Sweeps are normally used for the evaporation of nonconductive<br />
materials. All power generators have interlocks for high voltage safety as well as an interface<br />
for control from a deposition monitor/controller. Some E-beam power generators can run more than one<br />
gun or system.<br />
<strong>PTB</strong> <strong>Sales</strong> carries 270° E-beam guns only. All E-beam guns are water cooled. Multi-pocket guns come in<br />
4- or 6-pocket configurations and range in pocket size from 7 to 30 ccs. Maximum power for a multipocket<br />
E-gun is 8 kW.<br />
E-beam power generators and guns are sold with a 90 day warranty. Please check our website for current<br />
availability and contact our sales department for the appropriate E-beam equipment for your application.<br />
• Input power<br />
• Water cooled or air cooled<br />
• Interface to system<br />
• Matching network and grounding
E-BEAM POWER GENERATORS & GUNS<br />
62<br />
TELEMARK<br />
TEMESCAL<br />
Telemark Power Generators<br />
Model Power Function Cooling<br />
TT-6 6 kW E-beam air<br />
TT-10 10 kW E-beam air<br />
TT-15 15 kW E-beam air<br />
Temescal Power Generators<br />
Model Power Function Cooling<br />
CL-2A/B 2 kW Glow discharge power supply air<br />
CV-8 8 kW XY sweep, gun control air<br />
CV-10 10 kW XY sweep, gun control water<br />
CV-14 14 kW XY sweep, gun control water<br />
Simba 2 15 kW XY sweep, gun control, interfacer air<br />
Filament Transformer<br />
Telemark Guns<br />
Model Type Pocket Size # of Pockets Power Rating<br />
271 270° rotary crucible 4-383 cc 1-8 10 kW<br />
295 270° rotary crucible 40-1,486 cc 1-10 15 kW<br />
Temescal Guns<br />
Model Type Pocket Size # of Pockets Power Rating<br />
STIH-1CK 270° rotary crucible 7 cc 4 8 kW<br />
STIH-2CK 270° rotary crucible 7–177 cc 4–6 8 kW<br />
SFIH-1 270° fixed pocket 7 cc 1 10 kW<br />
SFIH-2 270° fixed pocket 40 cc 1 14 kW<br />
SFIH-3 270° fixed pocket 156 cc 1 20 kW
Systems & Spares<br />
Leak Detectors & Rentals<br />
Leak detectors (helium mass spectrometers) are the tools of choice to detect leaks in vacuum systems,<br />
process piping, hermetically sealed packages and virtually any leak tight item. These devices detect the<br />
spectra of helium either from the inside out - sniffing - or from the outside in - standard leak detection.<br />
Leak detectors have their own self-contained vacuum system which can be either diffusion pumped or<br />
turbo pumped. Some leak detectors require LN 2<br />
to reduce system contaminants by trapping them on a<br />
cryo surface. Leak detectors can reveal leaks as small as 10 -12 atm ccs/sec. They are also available in<br />
dry versions where the roughing and holding pumps are either dry scroll or diaphragm pumps. Dry leak<br />
detectors are used extensively in semiconductor manufacturing and other applications where cleanliness<br />
is critical. Leak detectors come in portable models, convenient for field service or multiple system leak<br />
testing, as well as cabinet models which are primarily used for leak testing parts or components.<br />
<strong>PTB</strong> <strong>Sales</strong> has over a decade of experience in refurbishment and sales of leak detectors and now offers<br />
leak detector rentals in partnership with Agilent Technologies (Varian Vacuum acquired by Agilent).<br />
• Safe and affordable program if you need a leak detector but are not prepared to make the acquisition<br />
investment.<br />
• Convenient monthly rental program tailored to your specific needs.<br />
• High quality, industry leading Varian leak detectors.<br />
• 24x7 Technical Support available from Agilent Technologies.<br />
• Backed by our “What YOU need, When YOU need it!” SM philosophy.<br />
Agilent/Varian VS Series Rentals: VSPD031, VSMR151, VSMD301<br />
• Bench top or with a cart<br />
• Rough pump pumping speed<br />
• Rough pump: dry or wet
LEAK DETECTORS & RENTALS<br />
64<br />
AGILENT/VARIAN<br />
ADIXEN/ALCATEL<br />
OERLIKON LEYBOLD<br />
VEECO<br />
FLAPPER BOXES - NEW<br />
Agilent/Varian<br />
Adixen/Alcatel<br />
Model<br />
Description<br />
Model<br />
Description<br />
VSPD031<br />
VS Series Rentals<br />
VSMR151<br />
VS Series Rentals<br />
VSMD301<br />
VS Series Rentals<br />
938-41 Manual operation, turbo pumped, portable<br />
947 Fully automatic, diffusion pumped<br />
948 Fully automatic, diffusion pumped, LN 2<br />
956 Fully automatic, diffusion pumped<br />
959-50 Fully automatic, turbo pumped, portable<br />
ASM 10<br />
ASM 110 Turbo CL<br />
ASM 120 H<br />
ASM 121 H<br />
ASM 180 T/TD<br />
ASM 181 TD2<br />
ASM 182 TD+<br />
Manual, diffusion pumped, portable<br />
Manual, turbo pumped, portable<br />
Fully automatic, turbo pumped, portable<br />
Fully automatic, turbo pumped, portable<br />
Fully automatic, turbo pumped, portable<br />
Fully automatic, turbo pumped, portable<br />
Fully automatic, turbo pumped, portable<br />
960 Fully automatic, turbo pumped, LN 2<br />
979 Fully automatic, turbo pumped, portable<br />
990-dCLD<br />
Component-type spectrometer unit<br />
Oerlikon Leybold<br />
Veeco<br />
Model<br />
Description<br />
Model<br />
Description<br />
UL-200<br />
Fully automatic, turbo pumped, portable<br />
UL-500<br />
Fully automatic, turbo pumped, portable<br />
L-300 Fully automatic, turbo pumped, portable<br />
MS-17<br />
MS-40<br />
MS-50<br />
MS-90<br />
Fully automatic, turbo pumped, portable<br />
Fully automatic, turbo pumped, portable<br />
Fully automatic, turbo pumped, portable<br />
Fully automatic, turbo pumped, portable<br />
Rebuilt leak detectors come with a 90 day warranty. If it’s a major rebuild, the mechanical pump has up to a one year warranty.<br />
Flapper Boxes - NEW<br />
Flapper boxes speed up production on small and medium sized parts. Flapper boxes come in a variety of adapters to fit your leak detector. The main<br />
body is one piece for vacuum integrity and the hinge lid is spring loaded for quick and easy operation. Flapper boxes are made from 7075-T6 aluminum.<br />
Stainless steel is available at additional cost. They come with a variety of adapters to fit your leak detector. Custom flapper boxes available on request<br />
<strong>PTB</strong> <strong>Sales</strong> P/N<br />
FB 1704-4<br />
FB 1706-4<br />
Description<br />
4” ID x 3” tall<br />
6” ID x 4” tall
Aerospace Equipment<br />
Aerospace is a category that is as diverse as it is complex. <strong>PTB</strong> <strong>Sales</strong> supports most vacuum applications<br />
as they relate to and are used by the Aerospace Industry. Military, Commercial, Defense, Academic and<br />
Government institutions have trusted <strong>PTB</strong> <strong>Sales</strong> to save themselves valuable time and money for their<br />
projects and maintenance.<br />
<strong>PTB</strong> <strong>Sales</strong> sells and supports aerospace vacuum systems and components. From used and new vacuum<br />
and thermal vacuum systems to turbo and cryogenic pumping carts we offer:<br />
• Upgrades to older systems.<br />
• Avionics and electronics vacuum and thermal cycling systems.<br />
• Cryopump and cold head rebuilding service and sales.<br />
• Helium compressor service and sales.<br />
• Conversion to totally dry pumping.<br />
• Instrumentation upgrades.<br />
• System automation.<br />
• Leak detectors.<br />
• High vacuum bakeout systems.<br />
• New and reconditioned thermovac/cycling systems.<br />
• Support for existing systems.<br />
• TQCM and witness plates.<br />
Whether you need to update or reconfigure your existing facility or are considering replacing or adding to<br />
your capacity we have solutions large, small or in-between.<br />
• Chamber material: stainless steel, aluminum, mild steel<br />
• Ports and openings<br />
• Internal and external dimensions
AEROSPACE EQUIPMENT 66<br />
THERMOVAC SYSTEM<br />
VACUUM CHAMBERS<br />
Thermovac System<br />
• Stainless steel bell jar.<br />
• Mild steel frame with steel panels and formica top.<br />
• Hot/cold sample stage.<br />
• Watlow digital temperature controller.<br />
• Douglas type electrical feedthroughs.<br />
• Viewports.<br />
• CTI On-Board 10 cryopump with 8510 compressor.<br />
• CVC auto system pumpdown with system controller.<br />
Vacuum Chambers<br />
<strong>PTB</strong> <strong>Sales</strong> keeps an inventory of used vacuum chambers on hand. Normally made from stainless steel, carbon steel, aluminum or glass; vacuum chambers<br />
can range in size from several cubic inches to thousands of cubic feet. Interior and exterior finishes range from plate finish to mechanically polished, electrically<br />
polished or bead blast finishes. Smaller vacuum chambers are normally used in laboratory settings for vacuum outgassing or sample coating whereas<br />
large chambers are used for thermo-vac space simulation or production deposition. <strong>PTB</strong>’s used chambers can normally be modified to fit the customer’s<br />
specific need. <strong>PTB</strong> <strong>Sales</strong> also manufactures custom chambers built to the customer’s exact specifications. Call a <strong>PTB</strong> sales engineer for specifications on<br />
our used chambers or for a quote on a custom built chamber.<br />
Chamber Applications:<br />
• Vacuum bakeout.<br />
• Part degassing.<br />
• Environmental testing.<br />
• Ion etching.<br />
• Optical coating.<br />
• Metallizing.<br />
• Miscellaneous pharmaceutical applications.<br />
• Propulsion testing.<br />
• Semiconductor processing.<br />
• Space simulation.<br />
• Sputtering.<br />
Cryo Shrouds, LN 2<br />
Baffles & Cold Plates<br />
<strong>PTB</strong> <strong>Sales</strong> also has in inventory thermal cryo shrouds, LN 2<br />
traps, baffles and cold plates. We can also provide thermal conditioning units built to meet your<br />
heating and cooling requirements.
Gate Valves<br />
Gate valves are the most widely used valve style in the industry. They are the valve of choice for high<br />
vacuum pump isolation. They offer a low profile design minimizing conductance and optimizing pumping<br />
speed. There are many configurations of gate valves available. Most are of stainless steel construction.<br />
However, aluminum bodies are available and are an economical alternative. Gate valves typically range<br />
from 50 to 400 mm bore. Flange types can be ISO, ASA or conflat (stainless only). Gate valve activation<br />
can be manual, pneumatic or servostepper motor.<br />
Valves are sold rebuilt with a 90 day warranty. Please check our website for current availability and<br />
contact our sales department to ensure the valve is configured properly for your application.<br />
Gate valve rebuild service includes:<br />
• Replace seals.<br />
• Clean/replace bearings.<br />
• Clean to high vacuum specification.<br />
• Tune-up actuation alignment.<br />
• Leak test.<br />
• Flange type: ISO, ASA, conflat<br />
• Material: stainless steel or aluminum<br />
• Type of actuation: electric, pneumatic, manual<br />
• Overall valve dimension: Will the valve fit in the system?<br />
• Valve conductance: Will there be enough conductance for the application?
GATE VALVES<br />
68<br />
EDWARDS<br />
HVA<br />
Edwards<br />
Model Flange Construction Actuator<br />
GVA-040P 4” ASA stainless steel manual<br />
GVA-080P 6” ASA stainless steel manual<br />
GVA-120P 10” ASA stainless steel manual<br />
GVC-100P 10” CF stainless steel manual<br />
GVI-040 KF-40 stainless steel manual<br />
GVI-050M KF-50 stainless steel manual<br />
GVI-063M ISO-63 stainless steel manual<br />
GVI-063P ISO-63 stainless steel manual<br />
GVI-080 ISO-80 stainless steel manual<br />
GVI-100M ISO-100 stainless steel manual<br />
GVI-100P ISO-100 stainless steel manual<br />
GVI-160P ISO-160 stainless steel manual<br />
GVI-200P ISO-200 stainless steel manual<br />
GVI-250P ISO-250 stainless steel manual<br />
HVA<br />
Model Flange Construction Actuator<br />
122-0401 4” ASA stainless steel pneumatic<br />
123-0801 6” ASA stainless steel pneumatic<br />
122-0600 8” ASA stainless steel pneumatic<br />
11210-1201 10” ASA stainless steel pneumatic<br />
125-0400 4” CF stainless steel pneumatic<br />
95-35569 6” CF stainless steel pneumatic<br />
124-0800 8” CF stainless steel pneumatic<br />
11225-1070R 10 3/4 ” CF stainless steel pneumatic<br />
11210-0203R ISO-50 stainless steel pneumatic<br />
21250-0256Z ISO-63 stainless steel pneumatic<br />
11110-0406 ISO-100 stainless steel pneumatic<br />
21211-0803 ISO-200 stainless steel pneumatic<br />
21251-1003Z ISO-250 stainless steel pneumatic<br />
11210-1603R ISO-400 stainless steel pneumatic
69 GATE VALVES<br />
AGILENT/VARIAN<br />
MDC<br />
TEMESCAL<br />
VRC<br />
Agilent/Varian<br />
Model Flange Construction Actuator<br />
VGA6AEP 6” ASA aluminum pneumatic<br />
951-5212 6” ASA stainless steel pneumatic<br />
VGA250IEP ISO-250 aluminum pneumatic<br />
MDC<br />
Model Flange Construction Actuator<br />
GV-4000M 4” CF stainless steel pneumatic<br />
GV-6000V 6” CF stainless steel manual<br />
GV-8000M 8” CF stainless steel manual<br />
KGV-1500V KF-40 stainless steel pneumatic<br />
GV-4000V ISO-100 stainless steel pneumatic<br />
Temescal<br />
Model Flange Construction Actuator<br />
3” Fig 5030 3” ASA aluminum manual<br />
4” Fig 5030-R 4” ASA aluminum pneumatic<br />
6” Fig 5010-R-3 6” ASA aluminum manual<br />
6” Fig 5030-R 6” ASA aluminum pneumatic<br />
VRC<br />
Model Flange Construction Actuator<br />
VRCLP3 3” ASA aluminum manual<br />
VRCLP4 4” ASA aluminum pneumatic<br />
VRCLP6 6” ASA aluminum pneumatic<br />
VRCLP10 10” ASA aluminum pneumatic<br />
VRCLP12 12” ASA aluminum pneumatic
GATE VALVES<br />
70<br />
VAT<br />
VAT<br />
Model Flange Construction Actuator<br />
Series 10 6” ASA stainless steel pneumatic<br />
6” CF stainless steel pneumatic<br />
8” CF stainless steel pneumatic<br />
10” CF stainless steel pneumatic<br />
12” CF stainless steel pneumatic<br />
ISO-63 stainless steel pneumatic<br />
ISO-400 stainless steel pneumatic<br />
Series 12 ISO-100 aluminum manual<br />
ISO-160 aluminum pneumatic<br />
ISO-200 aluminum pneumatic<br />
Series 14 6” ASA stainless steel pneumatic<br />
10” ASA stainless steel pneumatic<br />
8” CF stainless steel pneumatic<br />
10” CF stainless steel pneumatic<br />
ISO-100 stainless steel pneumatic<br />
ISO-160 stainless steel pneumatic<br />
ISO-200 stainless steel pneumatic<br />
ISO-250 stainless steel pneumatic<br />
ISO-320 stainless steel pneumatic<br />
Series 20 10” CF stainless steel pneumatic<br />
ISO-63 aluminum pneumatic<br />
ISO-100 aluminum pneumatic<br />
ISO-160 aluminum pneumatic<br />
ISO-200 aluminum pneumatic<br />
Series 64 6” ASA stainless steel pneumatic/servo<br />
10” ASA stainless steel pneumatic/servo<br />
8” CF stainless steel pneumatic/servo<br />
10” CF stainless steel pneumatic/servo<br />
12” CF stainless steel pneumatic/servo<br />
14” CF stainless steel pneumatic/servo<br />
ISO-100 stainless steel pneumatic/servo<br />
ISO-160 stainless steel pneumatic/servo<br />
ISO-200 stainless steel pneumatic/servo<br />
ISO-250 stainless steel pneumatic/servo<br />
ISO-320 stainless steel pneumatic/servo
Angle Valves<br />
Angle valves are typically used as foreline valves, rough valves, purge valves and vent valves. Where<br />
conductance is not an issue, they are an inexpensive and practical alternative to gate valves. Angle valves<br />
normally have bellows seals, and are activated manually or pneumatically. Most smaller angle valves<br />
(25 to 100 mm) are made of stainless steel. They can be equipped with metal seals for UHV and high<br />
temperature applications.<br />
Larger angle valves, commonly called poppit valves, are also available for applications where gate valves<br />
are cost prohibitive. They are typically differentially pumped, O-ring sealed, and pneumatically actuated.<br />
They are generally available in aluminum and mild steel. Flange sizes range from 4” to 48” ID. Most use<br />
ASA type flanges. These large angle valves are commonly used on extremely large coating machines.<br />
Angle valves are sold rebuilt with a 90 day warranty. Please check our website at www.ptbsales.com for<br />
current availability and contact our sales department to ensure the angle valve is configured properly for<br />
your application.<br />
Angle valve rebuild service includes:<br />
• Replace seals.<br />
• Clean/replace bearings.<br />
• Clean to high vacuum specification.<br />
• Tune-up actuation alignment.<br />
• Leak test.<br />
• Flange type and size<br />
• Actuation method
ANGLE VALVES 72<br />
VAT<br />
MKS<br />
HVA<br />
VAT<br />
Model Flange Construction Actuation<br />
Series 24 ISO-63, 80, 100 aluminum air<br />
Series 26 KF-16, 25, 40, 50 aluminum air<br />
28332-GE21 2 3/4 ” CF stainless steel air<br />
26140-GE21 6” CF stainless steel air<br />
26328-KA11 KF-25 aluminum air<br />
26328-KE11 KF-25 stainless steel air<br />
26332-KA71 KF-40 aluminum air<br />
F28-70313 KF-40 stainless steel air<br />
24140-QA41 ISO-100 aluminum air<br />
MKS<br />
Model Flange Construction Actuation<br />
151-0016K KF-16 stainless steel pneumatic<br />
153-1025K KF-25 stainless steel pneumatic<br />
152-0040K KF-40 stainless steel pneumatic<br />
162-0040K KF-40 stainless steel pneumatic<br />
LPV-40-N1-COVS KF-40 stainless steel pneumatic<br />
LPV-50-TK-COKS KF-50 stainless steel pneumatic<br />
153-1063P ISO-63 stainless steel pneumatic<br />
155-0100P ISO-100 stainless steel pneumatic<br />
163-1063P-24VDC ISO-200 stainless steel pneumatic<br />
HVA<br />
Model Flange Construction Actuation<br />
200-150MSB 2 3/4 ” CF stainless steel pneumatic<br />
161-0103-2 KF-25 stainless steel pneumatic<br />
132-0200 KF-50 stainless steel pneumatic
73 ANGLE VALVES<br />
AGILENT/VARIAN<br />
EDWARDS<br />
HUNTINGTON<br />
Agilent/Varian<br />
Model Flange Construction Actuation<br />
NW25H/O<br />
3/4<br />
” pipe brass hand<br />
1254-3/4<br />
3/4<br />
” pipe brass air<br />
NW16H/O KF-25 stainless steel hand<br />
NW16A/O KF-25 aluminum air<br />
1252-85265-326 1 5/8 ” pipe brass air<br />
951-5013 2 3/4 ” CF stainless steel hand<br />
951-5090 2 3/4 ” CF stainless steel air<br />
NW40H/O KF-40 stainless steel hand<br />
NW40A/O KF-40 aluminum air<br />
NW80A/O KF-80 aluminum air<br />
Edwards<br />
Model Flange Construction Actuation<br />
283-41-V2 KF-16 aluminum pneumatic<br />
PV16MKS-ST/ST KF-16 aluminum pneumatic<br />
287-12-B3 KF-25 aluminum pneumatic<br />
288-00-B2 KF-25 aluminum pneumatic<br />
298-22-B2 KF-25 aluminum pneumatic<br />
PV40EKS KF-40 aluminum pneumatic<br />
Huntington<br />
Model Flange Construction Actuation<br />
EV-073 KF-16 stainless steel pneumatic<br />
EV-100-SF KF-16 stainless steel pneumatic<br />
PV-0370-SF KF-16 stainless steel pneumatic<br />
EVI-150 2 3/4 ” CF stainless steel pneumatic<br />
PV-150 2 3/4 ” CF stainless steel pneumatic<br />
PV-150-SF KF-40 stainless steel pneumatic<br />
PV-250-SF ISO-63 stainless steel pneumatic
ANGLE VALVES<br />
74<br />
MDC<br />
NOR-CAL/V-TEX<br />
SMC<br />
MDC<br />
Model Flange Construction Actuation<br />
KIV-075-P KF-16 stainless steel pneumatic<br />
KAV-050-SP KF-16 stainless steel pneumatic<br />
KAV-100 KF-25 stainless steel pneumatic<br />
KIV-100-P KF-25 stainless steel pneumatic<br />
KAV-100-P KF-25 stainless steel pneumatic<br />
AV-150M-P 2 3/4 ” CF stainless steel pneumatic<br />
IV-150-P 2 3/4 ” CF stainless steel pneumatic<br />
KAV-150-P KF-40 stainless steel pneumatic<br />
LAV-250-PAA ISO-63 stainless steel pneumatic<br />
KAV-600-P ISO-160 stainless steel pneumatic<br />
Nor-Cal/V-Tex<br />
Model Flange Construction Actuation<br />
XLAV-16G-M9BA-5LZ KF-16 aluminum pneumatic<br />
XLAV-40 KF-40 aluminum pneumatic<br />
AIVP-2002-NWB KF-50 aluminum pneumatic<br />
ESVP-1502-NW KF-40 aluminum pneumatic<br />
ESVP-2002-NWB KF-50 aluminum pneumatic<br />
ESVP-2502-CF 4 1/2 ” CF stainless steel pneumatic<br />
SMC<br />
Model Flange Construction Actuation<br />
XLH-16 KF-16 aluminum pneumatic<br />
XLAV-16G KF-16 aluminum pneumatic<br />
XLC-25 KF-25 aluminum pneumatic<br />
XLAV-40G KF-40 aluminum pneumatic<br />
XLA-80 KF-80 aluminum pneumatic<br />
XLA-100 KF-100 aluminum pneumatic<br />
XLA-160DA-F9BA KF-160 aluminum pneumatic
Throttle Valves<br />
Throttle valves are conductance plates and often work in conjunction with a gate valve. They are normally<br />
used in etching or sputtering systems where a process gas is introduced into the process chamber, and<br />
pumping speed and throughput need to be controlled. These valves can be louvered plates, rotating<br />
plates or servostepper gate valves.<br />
Throttle valves are sold rebuilt with a 90 day warranty. Please check our website at www.ptbsales.com for<br />
current availability and contact our sales department to ensure the throttle valve is configured properly for<br />
your application.<br />
Throttle valve rebuild service includes:<br />
• Replace seals.<br />
• Clean/replace bearings.<br />
• Clean to high vacuum specification.<br />
• Tune-up actuation alignment.<br />
• Leak test.<br />
• Flange type<br />
• Actuation method<br />
• Automatic or manual pressure control<br />
• Internal clearance
THROTTLE VALVES<br />
76<br />
VAT<br />
MKS<br />
EDWARDS<br />
VAT<br />
Model Flange Construction Actuation<br />
Series 17 ISO-63 stainless steel servo stepper<br />
Series 61 6” ASA stainless steel servo stepper<br />
64046-CE48 10” CF stainless steel stepper motor<br />
64248-UE52 12” CF stainless steel stepper motor<br />
64250-CE52 320 CF stainless steel stepper motor<br />
64250-UE52 320 CF stainless steel stepper motor<br />
MKS<br />
Model Flange Construction Actuation<br />
153D-14690 KF-40 stainless steel servo stepper<br />
253B-11020 KF-40 stainless steel servo stepper<br />
683A-2040 KF-40 stainless steel servo stepper<br />
653B-2-50-2 KF-50 stainless steel servo stepper<br />
153D-60-63-2 ISO-63 stainless steel servo stepper<br />
253B-11328 ISO-63 stainless steel servo stepper<br />
253B-3-80-2 ISO-80 stainless steel servo stepper<br />
683B-3008 ISO-80 stainless steel servo stepper<br />
253B-11326 ISO-100 stainless steel servo stepper<br />
253A-6-160-2 ISO-160 stainless steel servo stepper<br />
653B-13344 ISO-250 stainless steel servo stepper<br />
653B-14728 4 1/2 ” CF stainless steel servo stepper<br />
653B-16251 8” CF stainless steel servo stepper<br />
253A-6-6-2 6” ASA stainless steel servo stepper<br />
Edwards<br />
Model Flange Construction Actuation<br />
1850 ISO-250 stainless steel servo stepper<br />
250-05B ISO-250 stainless steel servo stepper
Throttle Valve Controllers<br />
Throttle valve controllers are used to control individual valves to adjust pumping speed throughput. These<br />
throttle valve controllers can also accept data from measuring devices to automatically control process<br />
chamber pressures.<br />
System Valve Controllers<br />
System valve controllers are easy-to-use centrally located vacuum system controllers. They allow<br />
automatic and manual control of all valves typically used in a vacuum system. Many include interlock<br />
capability to prevent improper operation.<br />
Many OEM valve controllers are specific to a particular system; <strong>PTB</strong> <strong>Sales</strong> carries remanufactured<br />
controllers as exact replacements. If no replacements are available, we can repair your controller.<br />
Controllers are sold repaired and come with a 90 day warranty. Please check our website at www.<br />
ptbsales.com for current availability and contact our sales department to ensure the controller is<br />
configured properly for your application.<br />
Asset Management<br />
We buy your excess vacuum related equipment.<br />
Visit www.ptbsales.com,<br />
or call toll free 866-332-0500 option 3.
THROTTLE & SYSTEM VALVE CONTROLLERS<br />
78<br />
THROTTLE VALVE CONTROLLERS<br />
SYSTEM VALVE CONTROLLERS<br />
Throttle Valve Controllers<br />
Manufacturer Model Features<br />
MKS 146A/B/C Controls MKS throttle valves, MFCs and pressure devices<br />
MKS 152 Controls MKS throttle valves, MFCs and pressure devices<br />
MKS 246/B Controls MKS throttle valves, MFCs and pressure devices<br />
MKS 247B/C Controls MKS throttle valves, MFCs and pressure devices<br />
MKS 250B/C/E Controls MKS throttle valves, MFCs and pressure devices<br />
MKS 252A/C Controls MKS throttle valves, MFCs and pressure devices<br />
MKS 260 Controls MKS throttle valves, MFCs and pressure devices<br />
MKS 651C Controls MKS throttle valves, MFCs and pressure devices<br />
MKS 655 Controls MKS throttle valves, MFCs and pressure devices<br />
VAT PM-2 Series 61 butterfly valve control, remote interface only<br />
VAT PM-3 Series 61 butterfly valve control, local and remote interface<br />
VAT PM-4 Series 64 gate valve control, remote interface only<br />
VAT PM-5 Series 64 gate valve control, local and remote interface<br />
VAT PM-6 Series 65 pendulum valve control, remote interface only<br />
VAT PM-7 Series 65 pendulum valve control, local and remote interface<br />
VAT PM-7E Series 65 pendulum valve control, remote interface only<br />
System Valve Controllers<br />
Models<br />
Agilent/Varian system valve controllers<br />
Temescal system valve controllers<br />
CHA system valve controllers<br />
CPA and D & W system valve controllers<br />
CVC system valve controllers<br />
Visit www.ptbsales.com for current inventory,<br />
or call toll free 866-332-0500 option 1.
Vacuum & Deposition Gauges<br />
<strong>PTB</strong> <strong>Sales</strong> carries a large inventory of rebuilt gauges. Although some gauges were originally designed<br />
many years ago, the technology is still applicable today. These older models make an easy drop-in<br />
replacement for your system. They are also an inexpensive alternative to new gauges. All gauges are<br />
rebuilt to exacting standards.<br />
<strong>PTB</strong> <strong>Sales</strong> also carries current catalog gauges for the user who desires the latest technology. These<br />
gauges offer current technology with faster delivery and lower prices. Below is a brief description of the<br />
most widely used gauges:<br />
• Bayard-Alpert hot filament gauges are broad range, dependable, inexpensive, easy to install, but can<br />
burn out at atmosphere. This popular ion gauge has a reasonably linear response from 1x10 -4 Torr to<br />
1x10 -9 Torr, with gauge sensitivities from 5 to 20 -1 Torr.<br />
• Cold Cathode gauges are very reliable and safe for flammable and explosive gasses, because there is<br />
no filament.<br />
• Capacitance Manometer gauges are the most accurate for measuring the differential or absolute<br />
pressure of all gases, and are typically used in sputtering, etching and CVD. Capacitance manometers<br />
are expensive and require frequent maintenance.<br />
• Thermocouples (T/Cs) are used to read from atmosphere to 10 -3 Torr. They measure the amount of heat<br />
convected to the thermocouple, which is proportional to the pressure. They are inexpensive, reliable<br />
and widely used.<br />
• Convection gauges are used to read pressures from atmosphere to 10 -4 Torr. They are more accurate<br />
that T/C gauges.<br />
There are other types of pressure gauges, but these are the most widely used today. Gauge controllers<br />
are sold with a 90 day warranty. Please check our website for current availability and contact our sales<br />
department for the appropriate gauge controller for your application.<br />
• Number of gauges per controller<br />
• Mounting<br />
• Set points<br />
• Pressure range
VACUUM & DEPOSITION GAUGES<br />
80<br />
AGILENT/VARIAN<br />
GRANVILLE-PHILLIPS<br />
MKS<br />
TEMESCAL<br />
Agilent/Varian<br />
MKS<br />
Model<br />
Specifications<br />
Model<br />
Specifications N/A<br />
810 Thermocouple T/C<br />
842 Ion, thermocouple T/C<br />
843 Ion, thermocouple T/C<br />
845 Ion, thermocouple T/C<br />
860 Cold cathode<br />
880RS<br />
Ion, thermocouple T/C<br />
Multigauge<br />
Ion, thermocouple T/C, cold cathode<br />
Sentorr<br />
Ion, thermocouple T/C, cold cathode<br />
Granville-Phillips<br />
Model<br />
Specifications<br />
260 Ion, thermocouple T/C<br />
270 Ion, thermocouple T/C<br />
271 Ion, thermocouple T/C<br />
274 Ion, Bayard-Alpert<br />
275 Mini-Convectron<br />
280 Ion, thermocouple T/C<br />
303 Ion, thermocouple T/C, Convectron<br />
307 Ion, T/C, Convectron , Bayard-Alpert<br />
316 Thermocouple T/C, Convectron<br />
330 Ion, electrometer<br />
340 Ion, Convectron, capacitance manometer<br />
347 Stabil-Ion<br />
350 Bayard-Alpert UHV, Convectron<br />
358 Micro-Ion, capacitance manometer<br />
360 Stabil-Ion, Convectron<br />
370 Stabil-Ion, capacitance manometer<br />
146A<br />
146B<br />
146C<br />
152<br />
246<br />
246B<br />
247C<br />
250B<br />
252A<br />
260 PS-3<br />
270A<br />
270B<br />
270C-4<br />
270C-5<br />
274<br />
286<br />
287A<br />
288<br />
290C-01<br />
647B<br />
651C<br />
652D<br />
655<br />
919<br />
PDR-C-1B/C<br />
Temescal<br />
Model<br />
Specifications<br />
Versavac 2<br />
Versavac 5<br />
Ion, thermocouple T/C<br />
Ion, thermocouple T/C
Deposition Rate Monitors<br />
Deposition rate monitors measure rate and final thickness for physical vapor deposition processes. They<br />
measure extremely thin films of material by using an in situ oscillating crystal sensor. The frequency of<br />
the oscillating crystal changes as the deposited material builds up on the crystal. Deposition monitors<br />
convert the change of frequency into rate and final thickness. Films and rates are measured in<br />
angstroms. Some programming is required to compensate for the location of the sensor relative to the<br />
substrate being coated and the type of material deposited.<br />
Deposition controllers have all the capabilities of a deposition monitor plus added control. Depending on<br />
the number of I/Os it can control power generators from ramp up to cool down, shutters, fixture rotation,<br />
E-gun rotation and other equipment. Some have co-deposition capabilities and process program storage.<br />
Monitors and controllers come with a 90 day warranty. Call <strong>PTB</strong> <strong>Sales</strong> to help you determine which<br />
controller is right for your application. Oscillators sold separately.<br />
• Number of I/Os<br />
• Co-deposition
DEPOSITION RATE MONITORS<br />
82<br />
OERLIKON LEYBOLD<br />
MAXTEK<br />
SYCON<br />
TEMESCAL<br />
Oerlikon Leybold<br />
Sycon<br />
Model<br />
Description<br />
Model<br />
Description<br />
IC-6000<br />
Controller, 8 process layers / 4 processes / 3 I/Os<br />
IC-4<br />
Controller<br />
IC-5 Controller, co-dep, 250 process layers / 50<br />
processes / 28 I/Os<br />
XMS-1<br />
Rate monitor<br />
XMS-3<br />
Rate monitor, 3 process layers / 1 process / 3 I/Os<br />
XTC<br />
Rate monitor, 2 process layers / 1 process / 2 I/Os<br />
XTM<br />
Rate monitor<br />
XTM/2<br />
Rate monitor<br />
STM-100<br />
STC-200<br />
Precision mass and film thickness measurement<br />
instrument for use in thin film deposition processes<br />
and other quartz crystal microbalance applications.<br />
Utilizes the time tested 6 MHz quartz crystal as the<br />
sensor device. It’s CRT display allows the clear presentation<br />
of data and deposition status. Both<br />
numeric and graphical data are used. The Run Time<br />
display is the main operating display. All the critical<br />
process information is shown on this display. A<br />
graphic portion of the screen allows either rate, rate<br />
deviation or deposition power to be displayed.<br />
Maxtek<br />
Temescal<br />
Model<br />
Description<br />
Model<br />
Description<br />
MDC-360<br />
The current model that is able to control up to four<br />
FDC-8000<br />
Thin film deposition controller that provides auto-<br />
single or multi-pocket sources, control and interface<br />
matic control of single or multi-layer film deposition<br />
with up to four single, dual or multi-crystal sensors.<br />
in either a production or development environment.<br />
It has up to 99 process layers, 999 layer definitions,<br />
16 I/Os and 32 complete material definitions, a list<br />
of material and system parameters including multiple<br />
rate ramps. It is fully programable with 2.5 to<br />
10 MHz sensor crystal support.<br />
We buy your excess vacuum related equipment.<br />
Visit www.ptbsales.com, or call toll free 866-332-0500 option 3.
Thin Film Systems<br />
In addition to pump refurbishment and component integration we also buy and sell system cores for:<br />
• Vapor deposition<br />
• Lithography<br />
• MEMS<br />
• Interconnect<br />
• Transistor<br />
<strong>PTB</strong> <strong>Sales</strong> carries a selection of inspection equipment. Profilometers are used to measure step profiles<br />
of metal films on a substrate. This type of measurement is a destructive process. Probers are used for<br />
analysis and characterization of wafers during production and in quality control.<br />
We carry various wafer handling robots, elevators and factory interface equipment.<br />
Lower your costs without affecting the deposition performance by having a backup. The listed systems<br />
give an idea of the breadth of our offerings.<br />
Asset Management<br />
We buy your excess vacuum related equipment.<br />
Visit www.ptbsales.com,<br />
or call toll free 866-332-0500 option 3.
THIN FILM SYSTEMS<br />
84<br />
VACUUM SYSTEMS<br />
Process Equipment<br />
Vacuum Systems<br />
Applied Materials AMAT Endura PVD chamber<br />
Applied Materials Centura 5200/5300<br />
Applied Materials Precision 5000 (P5000)<br />
Balzers BAK 1350 C<br />
Centrotherm E 1200 HT 260-3 furnace<br />
CHA Mark 50<br />
CHA SE-1000<br />
CHA SE-600<br />
CHA Vacuum deposition system 18” glass bell jar<br />
Cooks Vacuum CVE 301<br />
CVC 601 sputtering system w/ elect. towers<br />
Denton Integrity 26 system: 26” wide, 38” high, 30” deep chamber<br />
Edwards Auto 306<br />
Grieve CLD-500 cleanroom oven system<br />
Innotec VS24C sputter system<br />
Ion Tech ITAVS system & chamber<br />
KDF 603 sputter system<br />
March Instruments Jupiter III reactive ion etcher: O2, CF4<br />
MRC 822 sputter sphere<br />
MRC 903 sputter system<br />
MRL Cyclone 1224, two tube 300mm horizontal furnace<br />
Novellus Concept 2 Dual Altus mainframe<br />
Nuvac Galiso MRP-201 ELC hot gas sweep<br />
Oerlikon Leybold 1100 A evaporator<br />
Oerlikon Leybold deposition system<br />
Oxford ion beam deposition system<br />
Packard 9200 hydrogen generator<br />
Perkin-Elmer 4410 sputter system<br />
Perkin-Elmer Lambda 900<br />
Plasma-Therm 790 PECVD system<br />
Plasma-Therm System VII<br />
SFI Endeavor 8600<br />
Sonic Mill AP10-HCV<br />
SPI evaporator system with Vacu Prep II<br />
Stokes vacuum bakeout system<br />
Technics EMS Hummer Hu VI SEM sample sputtering system<br />
Technics PE IIA system<br />
Technics PE 500 II plasma cleaning system<br />
Temescal BJD-2400<br />
Temescal BJD-1800<br />
Temescal FC-1800 E-beam system<br />
Temescal FCE-3200<br />
Varian 980-1111<br />
Varian 3117 turbo pump option<br />
Varian 3120 horizontal chamber<br />
Veeco 776<br />
YES R1 plasma cleaner<br />
Xiron RC600M<br />
We also carry baseplates and reducers for custom system configurations.<br />
Visit www.ptbsales.com for current inventory,<br />
or call toll free 866-332-0500 option 1.
85<br />
THIN FILM SYSTEMS<br />
BROOKS AUTOMATION<br />
GENMARK AUTOMATION<br />
ASYST<br />
KENSINGTON<br />
RORZE<br />
YASKAWA<br />
Wafer Handling Robots & Controllers<br />
Brooks Automation<br />
ASYST<br />
Model<br />
Description<br />
Model<br />
Description<br />
FX-3000<br />
Factory interface<br />
GX-5000<br />
Factory interface<br />
MagnaTran 7<br />
Vacuum robot<br />
MagnaTran 8<br />
Vacuum robot<br />
Reliance<br />
Atmospheric robot<br />
VacuTran 5<br />
Atmospheric robot<br />
Series 8<br />
Robot controller<br />
002-8700-01 Wafer load port<br />
002-7200-21 Wafer load port<br />
003-9010-13 Wafer load port<br />
Hybridge-OC200<br />
Wafer load port<br />
Fixload 6<br />
Wafer load port<br />
Fixload 25<br />
Wafer load port<br />
IsoPort<br />
Wafer load port<br />
VersaPort 2200<br />
Wafer load port<br />
Kensington<br />
Model<br />
Description<br />
25-3700-1425-05 Vacuum robot<br />
25-3700-1725-50 Vacuum robot<br />
25-3780-6050-00 Vacuum robot<br />
35-3700-1725-50 Vacuum robot<br />
4000C-7/D<br />
Servo positioning controller<br />
Genmark Automation<br />
RORZE<br />
Model<br />
Description<br />
Model<br />
Description<br />
Gencobot 4P (GB4P)<br />
Vacuum robot<br />
RR701L90-Z20-011<br />
Vacuum robot<br />
Gencobot 7S (GB7S)<br />
Vacuum robot<br />
RR717L1521-3A6-211-1<br />
Vacuum robot<br />
Gencobot 8/3L (GB8/3L)<br />
Vacuum robot<br />
Gencobot 8-MT (GB8-MT)<br />
Large Series<br />
Vacuum robot<br />
Robot controller<br />
YASKAWA<br />
Small Series<br />
Robot controller<br />
L2P86R5GP<br />
Robot controller<br />
Model<br />
Description<br />
S08RP<br />
Robot controller<br />
S08R5GP.D<br />
Remote Pre-Aligner<br />
Robot controller<br />
RPA, robot add-on<br />
XU-RC400M-A00<br />
XU-AT152L-C10<br />
Vacuum robot<br />
Wafer load port<br />
RC/ELC1<br />
Robot controller<br />
Semistar-M TL1515<br />
Wafer load port
THIN FILM SYSTEMS 86<br />
VEECO<br />
ELECTROGLAS<br />
KLA TENCOR<br />
MICROMANIPULATOR<br />
RUCKER & KOLLS<br />
OTHER EQUIPMENT<br />
Profilometers & Probers<br />
Veeco<br />
Electroglas<br />
Model<br />
Description<br />
Model<br />
Description<br />
Dektak IIA<br />
CRT automatic control<br />
Dektak III<br />
PC automatic control<br />
Dektak 8<br />
PC automatic control<br />
Dektak V200Si<br />
PC stand alone unit<br />
FPP-5000<br />
Automatic calculation and display of sheet<br />
or slice resistivity, V/I, metallization thickness,<br />
and P-N type. Automatic geometric<br />
correction using two-probe configuration<br />
technique minimizes errors due to variation<br />
in probe tip spacing.<br />
KLA Tencor<br />
Model<br />
Description<br />
Alphastep 100<br />
Manual control (no CRT)<br />
Alphastep 200<br />
CRT automatic control<br />
FT-530e<br />
Film thickness mapping system<br />
P-1 Long Scan CRT automatic control<br />
P-12 Long Scan CRT automatic control<br />
SurfScan<br />
CRT automatic control<br />
Rucker & Kolls<br />
Model Microscope Description<br />
1034X<br />
3-6” wafer prober<br />
2001X<br />
3-6” automatic wafer prober<br />
4085X<br />
4-8” automatic wafer prober<br />
Micromanipulator<br />
Model<br />
Description<br />
MM6100<br />
An economical analytical probe station for<br />
wafers or packaged devices. Fast X-Y<br />
stage movement controls allows 5” wafers<br />
(6” optional) to be scanned. Conversation<br />
from a wafer prober to a packaged<br />
device prober or hot/cold stage (and back<br />
again) can be accomplished using the optional<br />
socket stage adapter. The vacuum<br />
stage is permanently planarized at the factory,<br />
so no adjustments are needed when<br />
it is replaced.<br />
Other Equipment<br />
<strong>PTB</strong> often receives equipment not related directly to the vacuum<br />
industry. We often purchase equipment in lots and as a result we end<br />
up with equipment not in our primary business. We offer these items at<br />
significantly discounted prices. Typical items in this category are:<br />
RK 250 Stereo Zoom 3” w/probe card<br />
RK 260 Stereo Zoom 4” w/probe card<br />
RK 680 Series Micro Zoom 5–6” semi-auto<br />
All probers have vacuum or magnetic platents.<br />
Oscilloscopes<br />
Analyzers<br />
Machine tools<br />
Amplifiers<br />
Ovens<br />
Variacs<br />
Power tubes<br />
Microwave wave guides<br />
Electronic test equipment<br />
Polishing equipment<br />
Capacitors
Schreiber Chillers<br />
Why invest in a Schreiber chiller? Because it pays for itself! When you calculate the difference between<br />
the cost of electricity compared to water, you realize that a chiller pays for itself in a short period of time.<br />
Moreover it provides solid protection for your processing equipment 24 hours a day, 7 days a week.<br />
It also helps reduce the number of rejected parts while increasing the number of parts produced. A<br />
Schreiber chiller is a self-sustaining source of properly chilled water, and maintains the required load.<br />
Its continuous closed loop system is contaminate free and constructed with non-ferrous components.<br />
By recycling the water, a significant reduction in water usage is made possible. The proper chiller must<br />
be matched to one’s load requirements. An undersized chiller will always be a problem and will never<br />
properly cool the process equipment.<br />
The following equation can be used to help calculate the load requirements:<br />
BTU = Constant (weight of water) x GPM x Temperature Differential<br />
Multiply the fluid flow (GPM) by 500. Multiply the result by the temperature differential or rise (return<br />
water temp. minus the input temp.). Divide the result by 12,000 and you have the required rating.<br />
Chiller Applications:<br />
• Hydraulic cooling<br />
• Inducted heating systems<br />
• Laser cooling equipment<br />
• Plasma cutting<br />
• Plastics<br />
• Process equipment<br />
• Seam welders<br />
• Spot welders<br />
• Load requirements<br />
• Air or water cooling<br />
• Options
SCHREIBER CHILLERS<br />
88<br />
SCHREIBER CHILLERS<br />
CHILLER OPTIONS<br />
Schreiber Chillers<br />
Model Capacity BTU/hr Water Pump GPM<br />
50<br />
1/2<br />
ton 6,000<br />
1/2<br />
hp 20<br />
100 1 ton 12,000<br />
1/2<br />
hp 20<br />
150 1 1/2 ton 18,000<br />
1/2<br />
hp 20<br />
200 2 ton 24,000 1 hp 20<br />
300 3 ton 36,000 1 hp 20<br />
400 4 ton 48,000 2 hp 20<br />
500 5 ton 60,000 2 hp 20<br />
750 7 1/2 ton 90,000 2 hp 20<br />
1000 10 ton 120,000 3 hp 20<br />
1001 10 ton 120,000 3 hp 20<br />
1250 12 1/2 ton 150,000 3 hp 20<br />
1500 15 ton 180,000 5 hp 20<br />
2000 20 ton 240,000 5 hp 20<br />
2500 25 ton 300,000 5 hp 20<br />
Schreiber Engineering touts its chillers to be the best of US manufacture, and perhaps the world. Schreiber chillers cool water to the ARI national rating<br />
standard of 44°F at an ambient temperature of 95°F, unlike some chiller manufacturers whose specifications call for 50°F or higher.<br />
Chiller Options<br />
Option Description Applicable Models<br />
Automatic water level control Automatically maintains water level of reservoir All models<br />
Back flow control kit Prevents backflow when chiller is off All models<br />
Casters Swivel 3 1/2 casters with brake lock All models<br />
Digital electronic controls Digital controls for compressor, water pump and high temp alarm Option in model 50-400<br />
Electronic remote control unit Return water filter, includes two cartridges All models<br />
Low water level warning light Activates by means of a float switch All models<br />
Discharge pressure gauge Indicates water pressure and mounts on water discharge line Summit series<br />
Manual bypass Typically used for low flow requirements All models<br />
Pumps A variety available All models
Inland Vacuum Oils & Greases<br />
<strong>PTB</strong> <strong>Sales</strong> sells Inland Vacuum virgin fluids. Please call for current pricing, specification sheets and<br />
MSDs for all of the items listed. Call <strong>PTB</strong> <strong>Sales</strong> to see what fluid or grease will be best for your application.<br />
Mechanical Pump Fluids<br />
By offering Inland Vacuum products, <strong>PTB</strong> <strong>Sales</strong> offers a complete line of mechanical pump fluids<br />
for all pump types and applications. Inland’s mechanical pump fluids are vacuum distilled paraffinic<br />
hydrocarbons containing no aromatics or viscosity improvers that are lost during filtration. Compared to<br />
undistilled vacuum pump fluids, Inland’s pure vacuum distilled mechanical pump fluids provide excellent<br />
lubrication, oxidation resistance, lower vapor pressure, and four to 10 times longer fluid life. Inland’s<br />
stringent quality control procedures guarantee a product that is recommended by major vacuum pump<br />
manufacturers. Inland also has a line of Fomblin PFPE fluids and Halovac inert vacuum pump fluids.<br />
There is great value in using the proper mechanical pump oil.<br />
We have found that when users changed to an oil more suited to their application, they accrued the<br />
following benefits:<br />
• Reduced pumping times.<br />
• Longer oil service life.<br />
• Less total maintenance cost.<br />
• Higher yields on reclamation of diffusion pump fluids.<br />
Diffusion Pump Fluids<br />
The ideal diffusion pump fluid should be thermally stable, non-volatile, chemically inert and non-toxic.<br />
Real diffusion pump fluids, on the other hand, represent compromises between these properties; no one<br />
fluid does it all. <strong>PTB</strong> <strong>Sales</strong> offers a broad range of Inland vacuum pump fluids, including hydrocarbon,<br />
inert PFPE, polyphenyl ether and silicone fluids for a wide range of applications. The benefits of selecting<br />
the proper fluid include:<br />
• Use of the most cost-effective fluid for a given application.<br />
• Better pumping speed.<br />
• Reduced maintenance.<br />
• Increased reliability.
INLAND VACUUM OILS & GREASES<br />
90<br />
MECHANICAL PUMP FLUIDS<br />
Mechanical Pump Fluids<br />
Mechanical Pump Fluids Description Application<br />
Inland TW & HVTW • Longest lasting hydrocarbon • Low vapor pressure • Nitride deposition ion • Plasma etch<br />
• Ideal for corrosive • USP grade • LPCVD • Ion implant<br />
• Replaces Fomblin and Krytox in many applications<br />
• Recommended for mechanical and piston pumps<br />
Inland 19 • Ideal for non-corrosive • Reduced backstreaming • Mass spectrometers • UHV systems<br />
• Hydrocarbon fluid • Much longer fluid life • Electron microscopes • Freeze dry systems<br />
• Molecularly distilled<br />
• Excellent vapor pressure<br />
Invoil 20 • Double distilled hydrocarbon • Extended fluid life • Plasma systems • LPCVD<br />
• High resistance to corrosives • Reduced backstreaming • Plasma etch • Metallization<br />
• Recommended for mechanical, diffusion and turbo pumps<br />
Inland 21 • Hydrocarbon fluid with additives • For corrosive applications • Thin film sputtering • Leak detection<br />
• Increased fluid life • Low vapor pressure • Freeze dry • EB welders<br />
• Resist oxidation and decomposition<br />
Inland 33 & 35 • Hydrocarbon fluid • High thermal stability • Metallization • UHV systems<br />
• Corrosive service • Reduced backstreaming • Chemical pumping • Mass spectrometer<br />
• Additive package<br />
• Oxidation resistance<br />
Inland 43 • Our least expensive hydrocarbon, • Custom blended from • TV tubes • Chemical pumping<br />
for use where large volumes of advanced feedstocks • Distillation • Packaging<br />
fluids are required • Ideal for rotary vane pumps • EB welders<br />
Inland 45 & 45Z • Synthetic hydrocarbon fluids • Low vapor pressure • Mass spectrometer • UHV systems<br />
• High thermal stability • Ease at cold start • Thin film sputtering • Leak detection<br />
• Works with Buna-N, Neoprene and Viton seals<br />
• Electron microscopes<br />
Inland 77, 87 & 97 • General use hydrocarbon fluids • Ideal for piston pumps • Furnaces • Boosters<br />
• High viscosity • Non-corrosive applications • EB welders • Metallization<br />
• Excellent sealing and lubrication properties<br />
Inland 98 & 99 • Inland 98 synthetic hydrocarbon • Low vapor pressure • Applications involving liquid ring pumps<br />
for chemical resistance<br />
• Increased fluid life<br />
• Inland 99 hydrocarbon base fluid • Less required maintenance
91<br />
INLAND VACUUM OILS & GREASES<br />
MECHANICAL PUMP FLUIDS<br />
DIFFUSION PUMP FLUIDS<br />
Mechanical Pump Fluids<br />
Mechanical Pump Fluids Description Application<br />
Inland 220, 300 & 550 • Phosphate fluids • Fire resistant • Oxidation resistance • High thermal stability<br />
• Good thermal stability<br />
• Inexpensive alternative to • Lower cost option than inert • High flash point<br />
• Oxidation resistance inert fluids fluids for many applications<br />
Halovac Inert • Inert fluids • Extended fluid life • Plasma etch • Chemical pumping<br />
• Safe for oxygen service • Resists corrosive acids • Oxygen pumping (Lewis acids)<br />
• Suitable for vane and piston mechanical pumps<br />
Fomblin YL-Vac Inert • Non-flammable • Resists corrosive gasses • Semiconductors • LPCVD<br />
• Safe for oxygen service • Low vapor pressure • Chemical pumping • Reactive ion etch<br />
• Good radiation stability • Extended service life (Lewis acids) • Plasma etch<br />
• Chemical inertness<br />
• High dielectric strength<br />
Fomblin YL-Vac RP Inert • Inert fluid with antitrust additive • Less maintenance • Semiconductors • LPCVD<br />
• Less or no corrosion • Increased lubricant • Chemical pumping • Reactive ion etch<br />
• Cleaner vacuum operation properties (Lewis acids) • Plasma etch<br />
Fomblin SV Inert • Inert fluids • Excellent viscosity index • Semiconductors • LPCVD<br />
• Virtual zero backstreaming • Extreme inertness • Chemical pumping • Reactive ion etch<br />
• Good lubricant properties (Lewis acids) • Plasma etch<br />
Diffusion Pump Fluids<br />
Diffusion Pump Fluids Description Application<br />
Invoil & Invoil S • Designed for leak detectors • Low pressure maintained • Mass spectrometer • Distillation systems<br />
• Ultimate pressure below 3x10 -6 Torr for long operating periods • Leak detectors<br />
• Electron microscopes<br />
Invoil 20 • Double distilled hydrocarbon fluid • Reduced backstream • Thin film sputtering • Metallization<br />
• High resistance to corrosive attack • Recommended for • Furnaces • Mass spectrometer<br />
• Low vapor pressure<br />
mechanical, diffusion and turbo pumps
INLAND VACUUM OILS & GREASES 92<br />
DIFFUSION PUMP FLUIDS<br />
Diffusion Pump Fluids<br />
Diffusion Pump Fluids Description Application<br />
Invoil 30 • High decomposition resistance • High viscosity • Metallizaing • Sputtering<br />
• Double distilled hydrocarbon fluid • Highly stable against • Optical coatings • Metallurgy<br />
oxidation<br />
• Microelectric coatings<br />
Invoil 37 • Ester based fluid • Specifically designed for • Thin film sputtering • EB welders<br />
• High oxidation resistance vacuum booster diffusion • TV tubes • Metallization<br />
• Quick pumpdown<br />
pumps and large ring jet<br />
• High auto ignition temperature booster pumps<br />
Invoil 40 • Double distilled hydrocarbon fluid • Designed to handle high • Metallurgy • Furnaces<br />
• Designed specifically for<br />
temperature and gas loads<br />
metallurgical applications<br />
Invoil 44 • Hydrocarbon fluid • Excellent vapor pressure • Vapor booster • Metallization<br />
• Quick pumpdown<br />
• Designed for use in<br />
• High resistance to oxidation booster diffusion pumps<br />
Invoil 46 • Combines properties of polyphenyl • Non-toxic, non-corrosive • CRT evacuation • Vacuum metallurgy<br />
ether and silicone fluids • Good with elastomer seals • Optical coatings • Leak detection<br />
• Low ultimate pressure, 10 -8 Torr • Synthetic fluid • Evaporation • Mass spectrometry<br />
• Sputtering<br />
Santovac 5 & 5P Ultra • Polyphenyl ethers • Excellent thermal stability • Laboratory • Optical coatings<br />
• Ultimate pressure, 10 -10 Torr • High tolerance to pressure • Analytical • Space simulation chamber<br />
• Lowest backstreaming bursts • Research operation • Vacuum production<br />
Invoil 940 • Silicone based fluid • Oxidation and explosion • Vacuum coatings • Thin film sputtering<br />
• Thermal stability • Quick pumpdown • Metallurgy • EB welders<br />
• Superior vapor pressure • Replacement for Dow<br />
Corning 704<br />
Invoil 702 • Silicone based fluid • Quick pumpdown • TV tubes • Metallization<br />
• Resistance to oxidation • Thermal stability • EB welders
93<br />
INLAND VACUUM OILS & GREASES<br />
DIFFUSION PUMP FLUIDS<br />
TURBO PUMP FLUIDS<br />
GALDEN HEAT TRANSFER FLUIDS<br />
VACUUM GREASES & WAXES<br />
Diffusion Pump Fluids<br />
Diffusion Pump Fluids Description Application<br />
Invoil 704 • Silicone based fluid • Thermal stability • Vacuum coatings • Thin film sputtering<br />
• Superior vapor pressure • Quick pumpdown • Metallurgy • EB welders<br />
• Resistant to oxidation<br />
Invoil 705 • Silicone based fluid • Little or no backstreaming • UHV systems • Surface analysis<br />
• Extremely low vapor pressure • Ultra high, ultra clean • TV tubes • Mass spectrometer<br />
vacuum<br />
Fomblin YH-Vac Inert • Inert fluid • O2, F2, UF4 compatible • Scanning electron and • Particle acceleration<br />
• Non-flammable • Chemical inertness transmission microscopes • Ion implantation<br />
• Mass spectrometer • Plasma and vapor<br />
deposition<br />
Turbo Pump Fluids<br />
Galden Heat Transfer Fluids<br />
Vacuum Greases & Waxes<br />
Invoil 20<br />
20 Ultra<br />
Invoil S<br />
Inlube<br />
TP500<br />
TP501<br />
Galden Heat Transfer Fluids<br />
HT-70<br />
HT-90<br />
HT-110<br />
HT-135<br />
HT-170<br />
HT-200<br />
HT-230<br />
HT-250<br />
HT-270<br />
Vacuum Greases & Waxes<br />
Excellin 1<br />
Excellin 2<br />
Excellin 3<br />
Yvac 3<br />
RT-15<br />
UT-18<br />
OT-20<br />
Apiezon H<br />
Apiezon L<br />
Apiezon M<br />
Apiezon N<br />
Apiezon T<br />
AP-100<br />
AP-101<br />
DC-976<br />
Inseal<br />
Wax W40<br />
Wax W100<br />
Wax W<br />
Apiezon Sealing Compound Q
INLAND VACUUM OILS & GREASES 94<br />
VACUUM PUMP FLUID CAPACITY CHART<br />
Vacuum Pump Fluid Capacity Chart<br />
Model PFPE Quarts<br />
Model PFPE Quarts<br />
Adixen/Alcatel<br />
2002A/B/BB 1 0.37<br />
2004A 2 0.75<br />
2005/C 2 0.78<br />
2008A/AC 2 1.0<br />
2010/C 2 0.90<br />
2012A/AC 2 0.85<br />
2015/C 2 0.90<br />
2020A/CP 2 0.85<br />
2030/2030C 4 2.0<br />
2030C w/ filter 7 2.8<br />
2033/C/CP 6 3.8<br />
2060/C 11 5.5<br />
2063/C/CP 14 7.1<br />
2100A/AC 19 9.0<br />
RSV150 1 0.42<br />
RSV300 2 0.75<br />
RSV500 2 0.75<br />
RSV600 2 0.75<br />
RSV1000 3 1.5<br />
Edwards<br />
E2M1 1 0.35<br />
E2M2 2 0.60<br />
E2M5 2 0.60<br />
E2M8 2 1.0<br />
E2M12 2 1.0<br />
E2M18 3 1.25<br />
Edwards<br />
E2M40 7 4.25<br />
E2M80 12 6.6<br />
EH250/F 4 2.0<br />
EH500/F 4 1.9<br />
EH500A/AF 5 2.1<br />
EH1200/F 9 4.4<br />
DP80 2 0.75<br />
DP180 3 1.2<br />
Oerlikon Leybold<br />
D2A/AC 1 0.50<br />
D4A/AC 2 0.75<br />
D4B 2 0.85<br />
D8A/AC 2 1.0<br />
D8B 2 0.95<br />
D16A/AC 3 1.25<br />
D16B/BCS 2 1.1<br />
D25B/BCS 3 1.5<br />
D16BCS w/CFS 5 2.2<br />
D25BCS w/CFS 5 2.6<br />
D30A/AC 7 3.5<br />
D60/D90A/AC 8 4.0<br />
S60A/AC 6 3.0<br />
D40B/BCS 6 2.6<br />
D40BCS w/CFS 12 5.4<br />
D65/BCS 7 3.4<br />
D65BCS w/CFS 12 6.1
95<br />
INLAND VACUUM OILS & GREASES<br />
OIL CROSS REFERENCE CHART<br />
Oil Cross Reference Chart<br />
Inland Adixen Stokes Edwards Oerlikon Varian Kinney<br />
Inland 15 101<br />
Inland 19 100/119 V Lube J Supergrade A HE-175 GP Type A<br />
Invoil 20 200 V Lube L 20 HE-200 CS<br />
19 Ultra Supergrade 19<br />
20 Ultra Supergrade 20<br />
70 Ultra Supergrade 70<br />
Inland 21 104<br />
Inland 23<br />
OCR<br />
Inland 25 HE-100 LT<br />
Inland 33 121 HE-125FG<br />
Inland 43 15 HE-125 Type L/AX<br />
Invoil 44<br />
AP-201<br />
Inland 45 & 45Z 45 HE-275<br />
Invoil 46<br />
Invoil 48<br />
Neovac SY<br />
Neovac SX<br />
Inland 51<br />
POE<br />
Inland 55<br />
Inland 70<br />
HE-600<br />
HE-700<br />
Inland 77 102 V Lube B 16 HE-150 KV-100<br />
Inland 87<br />
V Lube G<br />
Invoil 90<br />
Diffen Light & Med<br />
Inland 97<br />
V Lube H<br />
Inland 99 & 99S<br />
LR<br />
Inland 220 Kinlube 220<br />
Inland 300 Fyrquel 300<br />
Inland TW 300 V Lube T TW HE-400<br />
Inland TP500<br />
HE-500
INLAND VACUUM OILS & GREASES 96<br />
OIL CROSS REFERENCE CHART<br />
INLAND VACUUM OIL SALES<br />
Oil Cross Reference Chart<br />
Inland Adixen Stokes Edwards Oerlikon Varian Kinney<br />
Inland 500<br />
S500 Oil<br />
Inland 270<br />
HE-270<br />
Invoil<br />
Octoil<br />
Invoil 702<br />
DC-702<br />
Invoil 704/940 DC-704 Mcghan Nusil D7040<br />
Invoil 705x DC-705 Mcghan Nusil D7050<br />
Santovac 5 Santovac 5 HE-300 Santovac 5<br />
Fomblin 06/6 Fomblin 06/6 HE-1400<br />
Fomblin 14/6 Kryotox 1514 HE-1600<br />
Fomblin 25/6 Kryotox 1525 HE-2500<br />
Inseal<br />
Kinseal<br />
Inland Vacuum Oil <strong>Sales</strong><br />
Southern California Distributor<br />
By offering Inland Vacuum oil, <strong>PTB</strong> <strong>Sales</strong> offers a complete line of fluids for all pump types and applications. Prices are subject to change. Please call for<br />
current pricing and to see what fluid or grease will be best for your application.<br />
Some of our oils allow you to incorporate the same fluid in both high vacuum and mechanical pumping units. This advantage allows one to establish a<br />
homogeneous system which eliminates those problems generally associated with the cross contamination of dissimilar fluids. Some of these oils have the<br />
added benefit of reclaimability, reducing total costs and eliminating the disposal problem.<br />
We buy your excess vacuum related equipment.<br />
Visit www.ptbsales.com, or call toll free 866-332-0500 option 3.
97<br />
INDEX<br />
INDEX BY MANUFACTURER<br />
Index by Manufacturer<br />
Adixen/Alcatel ................................... 25, 26, 30, 32, 36, 44, 48, 50, 64<br />
Advanced Energy ............................................................ 12, 54, 56, 57<br />
Ametek-Sorensen ........................................................................ 55, 56<br />
ANEST IWATA ............................................................................. 25, 28<br />
Applied Materials .............................................................................. 84<br />
ASYST .............................................................................................. 85<br />
Brooks Automation ............................................................................ 85<br />
Centrotherm ...................................................................................... 84<br />
CHA ............................................................................................ 78, 84<br />
Comdel ....................................................................................... 12, 58<br />
Commonwealth ................................................................................. 56<br />
CPA .................................................................................................. 78<br />
CTI ................................................................. 3, 4, 5, 6, 19, 20, 22, 66<br />
CVC ...................................................................................... 66, 78, 84<br />
Denton .............................................................................................. 84<br />
Douglas ............................................................................................ 66<br />
EBARA ........................................................................... 25, 26, 45, 50<br />
Edwards ........ 10, 11, 25, 26, 28, 30, 35, 36, 38, 45, 50, 68, 73, 76, 84<br />
Electroglas ........................................................................................ 86<br />
Genmark Automation ........................................................................ 85<br />
Granville-Phillips ......................................................................... 40, 80<br />
Grieve ............................................................................................... 84<br />
HiTek Power ................................................................................ 12, 56<br />
Huntington ........................................................................................ 73<br />
HVA ................................................................................ 11, 68, 72, 73<br />
Inland Vacuum .......................................................... 89, 90, 91, 92, 93<br />
Innotec ............................................................................................. 84<br />
Ion Tech ............................................................................................ 84<br />
Kensington ........................................................................................ 85<br />
Kinney/Tuthill .............................................................................. 34, 36<br />
KLA Tencor ....................................................................................... 86<br />
March Instruments ............................................................................ 84<br />
Maxtek .............................................................................................. 82<br />
MDC ........................................................................................... 69, 74<br />
Micromanipulator .............................................................................. 86<br />
MKS ENI ..................................... 11, 12, 54, 58, 59, 60, 72, 76, 78, 80<br />
MRC ................................................................................................. 84<br />
MRL ..................................................................................................... 84<br />
Nor-Cal/V-Tex ........................................................................................ 74<br />
Novellus ............................................................................................... 84<br />
Oerlilkon Leybold .................................. 25, 28, 31, 34, 36, 45, 50, 64, 82<br />
Osaka ............................................................................................. 46, 50<br />
Oxford .................................................................................................. 84<br />
Packard ................................................................................................ 84<br />
Perkin-Elmer ............................................................................... 9, 41, 84<br />
Pfeiffer .......................................................................... 44, 45, 48, 52, 84<br />
Plasma-Therm ...................................................................................... 84<br />
Polycold .......................................................................................... 23, 24<br />
RFPP .............................................................................................. 12, 60<br />
RORZE ................................................................................................. 85<br />
Rucker & Kolls ...................................................................................... 86<br />
Schreiber Chillers ............................................................................ 87, 88<br />
Seiko Seiki ...................................................................................... 46, 51<br />
Shimadzu ....................................................................................... 46, 50<br />
SMC ..................................................................................................... 74<br />
Sonic Mill .............................................................................................. 84<br />
Stokes ...................................................................................... 34, 36, 84<br />
Sycon ................................................................................................... 82<br />
Technics ............................................................................................... 84<br />
Telemark ............................................................................................... 62<br />
Temescal ................................................................ 62, 69, 78, 80, 82, 84<br />
Thermovac ........................................................................................... 66<br />
Varian ........... 9, 25, 28, 38, 40, 42, 46, 48, 51, 63, 64, 69, 73, 78, 80, 84<br />
VAT ............................................................................... 11, 70, 72, 76, 78<br />
Veeco ....................................................................................... 64, 84, 86<br />
VRC ...................................................................................................... 69<br />
Watlow .................................................................................................. 66<br />
Welch ................................................................................................... 32<br />
Xiron ..................................................................................................... 84<br />
YASKAWA ............................................................................................. 85<br />
YES ...................................................................................................... 84
NOTES 98<br />
NOTES
99<br />
MAP OF OUR LOCATIONS<br />
MAP OF OUR LOCATIONS<br />
Map of our Locations<br />
N<br />
<br />
Los Angeles<br />
Pasadena<br />
210<br />
605<br />
Azusa<br />
Huntington Dr<br />
Mountain View Circle<br />
Azusa<br />
Irwindale Ave<br />
Main Facility<br />
Todd Ave<br />
10 th St<br />
Cryogenic Pump Facility<br />
Foothill Blvd<br />
210<br />
Irwindale<br />
Sierra Madre Ave<br />
San Gabriel Ave<br />
Vernon Ave<br />
Azusa Ave/Hwy 39<br />
Gladstone St<br />
Power Generator Facility<br />
Arrow Hwy<br />
Contact us for further directions. We are located in Azusa and Irwindale, in southern California near Los Angeles, 10 miles east of Pasadena, where 210 and<br />
605 freeways meet.<br />
Main Facility<br />
Cryogenic Pump Facility<br />
Power Generator Facility<br />
1331 Mountain View Circle<br />
Azusa, CA 91702<br />
916 10 th St.<br />
Azusa, CA 91702<br />
5352 Irwindale Ave. Suite C<br />
Irwindale, CA 91706
CONTACT 100<br />
CONTACT<br />
ASSET MANAGEMENT WITH GLOBAL REACH<br />
TERMS & CONDITIONS<br />
WARRANTY INFORMATION<br />
Contact<br />
Phone: 626-334-0500<br />
Fax: 626-334-2151<br />
Toll Free: 866-332-0500<br />
Press 1 for sales, 3 for purchasing your equipment.<br />
Customer Service: customerservice@ptbsales.com<br />
Inside <strong>Sales</strong>: sales@ptbsales.com<br />
Shipping: shipping@ptbsales.com<br />
Purchasing: purchasing@ptbsales.com<br />
Asset Management with Global Reach<br />
• We have sales people in several states to be able to meet at your facility to see in person what solutions are a match.<br />
• We have partnerships with overseas companies to meet your international needs.<br />
• We purchase used equipment and offer credit for trade in cores.<br />
• We can evaluate your excess and obsolete equipment over the phone or in person.<br />
Terms & Conditions<br />
• <strong>PTB</strong> <strong>Sales</strong> offers standard payment terms upon credit approval; we offer outside financing/leasing.<br />
• <strong>PTB</strong> <strong>Sales</strong> accepts Visa, Mastercard, American Express credit cards as well as PayPal.<br />
• As with all used equipment all used items listed are subject to prior sale.<br />
• Consult the website for specific terms and conditions.<br />
Warranty Information<br />
• Warranty covers all parts and labor only.<br />
• Additional charges may apply for missing parts or hard part damage.<br />
• All shipping charges to be borne by customer.<br />
• Consult the website for specific warranty levels.