ASM 182 TD+ Detector operating principle - PTB Sales
ASM 182 TD+ Detector operating principle - PTB Sales
ASM 182 TD+ Detector operating principle - PTB Sales
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<strong>ASM</strong> <strong>182</strong> <strong>TD+</strong><br />
<strong>Detector</strong> <strong>operating</strong> <strong>principle</strong><br />
A 20<br />
Vacuum circuit<br />
13<br />
1<br />
2<br />
3<br />
18 14<br />
a<br />
b<br />
5<br />
c<br />
9<br />
4<br />
7<br />
17<br />
8<br />
16<br />
15<br />
12<br />
20<br />
Edition 03 - December 01<br />
GB 00977 -<br />
Pumping capacities<br />
1. <strong>Detector</strong> inlet port<br />
2. Inlet vent valve<br />
3. Vent filter connector<br />
4. Roughing valve<br />
5. Inlet pressure gauge (PI3C)<br />
7. By-pass valve<br />
8. Inlet pressure gauge (PI1)<br />
9. Exhaust valve<br />
12. Roughing molecular drag pump<br />
(MDP 5011)<br />
13. Detection valve<br />
14. Calibrated leak module<br />
15. Connector for long distance<br />
sniffer<br />
16. Sniffer valve<br />
17. Hybrid turbomolecular pump<br />
(TMP 5154)<br />
18. Analyzer cell<br />
20. Dry primary roughing pump<br />
(ACP 20/28)<br />
25 m 3 /h (15 cfm) roughing (dry primary pump ACP 20/28)<br />
+ 10 l/s (molecular drag pump MDP 5011).<br />
Helium pumping speed at inlet port: 4.4 l/s.<br />
Test capacities<br />
Short test cycle.<br />
Quick response time.<br />
Auto-calibration with integrated calibrated leak.<br />
Alcatel Vacuum Technology France - <strong>ASM</strong> <strong>182</strong> <strong>TD+</strong> - <strong>ASM</strong> 192 T2D+ User’s Manual<br />
1/4
A 20<br />
<strong>ASM</strong> <strong>182</strong> <strong>TD+</strong><br />
<strong>Detector</strong> <strong>operating</strong> <strong>principle</strong><br />
Operation in<br />
vacuum test mode:<br />
3 stages 1 Primary roughing<br />
Note: Only operational parts are represented.<br />
1<br />
5<br />
4<br />
7<br />
12<br />
20<br />
2 Gross leak test mode<br />
1 mbar < Inlet Pressure < 6 mbar<br />
2.10 -2 mbar < Inlet Pressure < 1 mbar<br />
18<br />
1<br />
18<br />
1<br />
5<br />
5<br />
17<br />
9<br />
4<br />
7<br />
17<br />
9<br />
4<br />
Edition 03 - December 01<br />
GB 00977 -<br />
12<br />
20<br />
12<br />
20<br />
2/4<br />
Alcatel Vacuum Technology France - <strong>ASM</strong> <strong>182</strong> <strong>TD+</strong> - <strong>ASM</strong> 192 T2D+ User’s Manual
<strong>ASM</strong> <strong>182</strong> <strong>TD+</strong><br />
<strong>Detector</strong> <strong>operating</strong> <strong>principle</strong><br />
A 20<br />
Operation in<br />
vacuum test mode:<br />
3 stages<br />
(continued)<br />
3<br />
High sensitivity test mode (HS)<br />
18 1<br />
13<br />
17<br />
9<br />
12<br />
20<br />
Operation in<br />
sniffing mode (LDS)<br />
18<br />
Edition 03 - December 01<br />
Sniffer probe<br />
15<br />
16<br />
17<br />
GB 00977 -<br />
9<br />
12<br />
20<br />
Alcatel Vacuum Technology France - <strong>ASM</strong> <strong>182</strong> <strong>TD+</strong> - <strong>ASM</strong> 192 T2D+ User’s Manual<br />
3/4
<strong>ASM</strong> <strong>182</strong> <strong>TD+</strong><br />
<strong>Detector</strong> <strong>operating</strong> <strong>principle</strong><br />
A 20<br />
Operation<br />
in internal<br />
calibration mode 1 Roughing of calibrated<br />
leak<br />
2 Calibration<br />
14<br />
18 14 a<br />
c<br />
17<br />
9<br />
12<br />
20<br />
12<br />
20<br />
3 Venting of calibrated leak<br />
The leak is returned to atmospheric pressure.<br />
14<br />
b<br />
Edition 03 - December 01<br />
GB 00977 -<br />
4/4<br />
Alcatel Vacuum Technology France - <strong>ASM</strong> <strong>182</strong> <strong>TD+</strong> - <strong>ASM</strong> 192 T2D+ User’s Manual
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