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Nonlinear effects in Silicon Waveguides - The Institute of Optics ...

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<strong>Silicon</strong>-on-Insulator Technology<br />

4/56<br />

• Core waveguide layer is made <strong>of</strong> silicon (n 1 = 3.45).<br />

• A silica layer under the core layer is used for lower cladd<strong>in</strong>g.<br />

• Silica layer formed by implant<strong>in</strong>g oxygen, followed with anneal<strong>in</strong>g.<br />

• A rib or ridge structure used for two-dimensional conf<strong>in</strong>ement.<br />

• Air on top conf<strong>in</strong>es mode tightly (large <strong>in</strong>dex difference).<br />

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