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Surface and bulk passivation of multicrystalline silicon solar cells by ...

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47<br />

Figure 3.5 The calculated dependence <strong>of</strong> effective SRV (Serf) on the fixed positive charge<br />

density (QoX) for different interface-state densities. The results are shown for<br />

two injection levels: (a) 10 14cm 3 <strong>and</strong> (b) 1016cm-3 [84] .<br />

3.2 Modeling <strong>of</strong> <strong>Surface</strong> Recombination Velocity at SiN X Si Interface<br />

It was discovered that the surface <strong>passivation</strong> <strong>of</strong> PECVD-deposited SiN X films showed a<br />

pronounced injection-level dependence <strong>of</strong> the effective surface recombination velocity<br />

(Serf (Δn)), which is similar to that for thermal oxides [83, 85, 86]. This property implies a<br />

similar recombination mechanism for the SiN X-Si interface, although it is known that Dίt

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