90. B.L. Sopori, Y. Zhang, <strong>and</strong> N.M. Ravindra, J. Electron. Mater. 30, 1616 (2001). 91. B.L. Sopori, J. Electron. Mater. 34 (2005). 92. C. Li, B.L. Sopori, P. Rupnowski, A.T. Fiory, N.M. Ravindra, Materials Science <strong>and</strong> Technology Conference <strong>and</strong> Exhibition, Cincinnati, ΟΗ (2006). 93. J. Schmidt, J.D. Moschner, J. Henze, S. Dauwe <strong>and</strong> R. Hezel, 19th European Photovoltaic Solar Energy Conference, Paris, France (2004). 94. A. Many, Υ. Goldstein, <strong>and</strong> N.B. Grover, Semiconductor <strong>Surface</strong>s, North-Holl<strong>and</strong> Publishing Company, Amsterdam (1965). 95. W. Winch. Semiconductor <strong>Surface</strong>s <strong>and</strong> Interfaces. Springer Series in <strong>Surface</strong> Sciences. Springer-Verlag Berlin Heidelberg, 3rd edition (2001). 96. S. Dauwe, Ph.D. thesis, University <strong>of</strong> Hannover, Germany (2004). 97. B.L. Sopori, R. Reedy, K. Jones, L. Gedvilas, B. Keyes, Y. Van, M. Al-Jassim, V. Velundur, <strong>and</strong> A. Rohatgi, Proc. 4th World Conference on Photovoltaic Energy Conversion, Hawaii, May (2006). 98. J.A. Bragagnolo, B.L. Sopori, E. Ester, T. Hashimoto, <strong>and</strong> I. Sugiyama, 12th Workshop on Crystalline Silicon Solar Cell Materials <strong>and</strong> Processes (2002). 99. B.L. Sopori, X. Deng, J.P. Benner, A. Rohatgi, P. Sana, S.K. Estreicher, Y.K. Park, <strong>and</strong> M.A. Roberson, Solar Energy Mater. & Sol. Cells 41/42, 159 (1996). 100.R. A. Sinton <strong>and</strong> A. Cusvas, Appl. Phys. Lett. 69, 2510 (1996). 101.T.S. Horanyi et. al., Applied <strong>Surface</strong> Science 63 306-311 (1993). 102.M'saad, Hichem et. al., J. Electrochem. Soc., 142, (1995). 103. 0. Palais et. al., The European Physical Journal: Appl. Phys. 10, 157-162 (2000). 104.Royea, J. William et. al., Appl. Phys. Lett., 77 (2000). 105.D.H. Macdonald et. al., J. Appl. Phys, 95 (2004). 106.Μ. Bail <strong>and</strong> R. Brendel, 16th European Photovoltaic Solar Energy Conference, Glasgow, UK, May (2000). 107.A. Buczkowski et. al., J. Electrochem. Soc., 140 (1993). 108.B.L. Sopori, P. Rupnowski, J. Appel, V. Mehta, C. Li, <strong>and</strong> S. Johnston, 33rd IEEE Photovoltaic Specialists Conference, San Diego, California, May 11-16 (2008). 109. B.L. Sopori, Proc. ICDS-19, Trans Tech Pub., Edited <strong>by</strong> G. Davies <strong>and</strong> M.H. Nazare, 527 (1997). 113
110.PVSCAN uses optical scattering from a defect-etched wafer to statistically count defects. It is also fitted with capabilities to make LBIC <strong>and</strong> reflectance measurements at 0.63 μm <strong>and</strong> 0.98 μm. It is available from GT Solar Technologies, Nashua, NH 03054. Also, see B.L. Sopori, US Patent 5,581,346. 111.B.L. Sopori, J. Electrochem. Soc. 131, 667 (1984). 112.B.L. Sopori, C. Li, S. Narayanan, <strong>and</strong> D. Carlson, Proc. MRS 864, 233 (2005). 113.T. Buonassisi, O. F. Vyvenko, A. A. Istratov, E. R. Weber, G. Hahn, D. Sontag, J. P. Rakotoniaina, O. Breitenstein, J. Isenberg, <strong>and</strong> R. Schindler, J. Appl. Phys. 95, 1556 (2004). 114.B.L. Sopori <strong>and</strong> R. A. Murphy, Proc. 12th European Photovoltaic Solar Energy Conference, Amsterdam, the Netherl<strong>and</strong>s, 1797 (1994). 115.J.G. Fossum <strong>and</strong> F.A. Lindholm., IEEE Trans. ED-27, 692(1980). 116. B.L. Sopori, R.A. Murphy, <strong>and</strong> C. Marshall, Proc. the 23rd IEEE Photovoltaic Specialists Conference, Louisville, Kentucky, May 10-14, 190 (1993). 117.B.L. Sopori, App!. Phys. Lett. 52, 1718 (1988). 114
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Copyright Warning & Restrictions Th
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ABSTRACT SURFACE AND BULK PASSIVATI
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SURFACE AND BULK PASSIVATION OF MUL
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APPROVAL PAGE SURFACE AND BULK PASS
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Chuan Li, B.L. Sopori, P. Rupnowski
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ACKNOWLEDGEMENT The work presented
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TABLE OF CONTENTS (Continued) Chapt
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LIST OF TABLES Table Page 2.1 Posit
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LIST OF FIGURES (Continued) Figure
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LIST OF FIGURES (Continued) Figure
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2 percent; however, soon, more adva
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4 Figure 1.1 World solar module pro
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6 bond is called a hole. It too can
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8 Figure 1.4 The I-V characteristic
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10 First generation cells consist o
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12 Basically, materials for manufac
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14 Defects are generally categorize
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16 copper, or nickel in concentrati
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18 the SiNx:H layer during the ther
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CHAPTER 2 SILICON NITRIDE LAYER FOR
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22 reflectance of polished Si can b
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24 information is application-orien
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26 film fed growth (EFG) ribbon sil
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28 Figure 2.5 Deposition of SiΝ :
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30 Figure 2.6 shows the dependence
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32 atoms, the interface states are
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34 2.5 Bulk Passivation of Si by Si
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36 It was found that the bulk lifet
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CHAPTER 3 MODELING OF SURFACE RECOM
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40 Figure 3.2 Schematic diagram of
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42 σ and σp are the capture cross
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44 Qsi — charge density induced i
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47 Figure 3.5 The calculated depend
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49 * 10 Λ m; m is in a range from
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51 Na, sigma_n, sigma_p: enter x.xx
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53 Figure 3.7 Measured Seff(Δn) de
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55 curves converge to a single valu
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57 seen that, initially Ss decrease
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59 carrier recombination within the
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61 recombination in the SCR influen
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